Diaphragms

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CPC
H01J2237/045

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/045Diaphragms

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for inspecting a specimen and charged particle beam device
- Patent number 12,362,131
- Issue date Jul 15, 2025
- Applied Materials Israel Ltd.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor chamber components with advanced coating techniques
- Patent number 12,362,150
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle beam column
- Patent number 12,362,129
- Issue date Jul 15, 2025
- Carl Zeiss Microscopy GmbH
- Erik Essers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple landing energy scanning electron microscopy systems and me...
- Patent number 12,354,833
- Issue date Jul 8, 2025
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam pattern forming device and charged particle b...
- Patent number 12,347,641
- Issue date Jul 1, 2025
- Kabushiki Kaisha Toshiba
- Hiroko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-leaf collimator and driving system
- Patent number 12,334,230
- Issue date Jun 17, 2025
- Shanghai United Imaging Healthcare Co., Ltd.
- Jian Zhang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Particle beam system
- Patent number 12,293,896
- Issue date May 6, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam device having a deflection unit
- Patent number 12,288,664
- Issue date Apr 29, 2025
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam particle beam system and method for operating same
- Patent number 12,255,040
- Issue date Mar 18, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system for azimuthal deflection of individual particl...
- Patent number 12,249,478
- Issue date Mar 11, 2025
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slit diaphragm
- Patent number 12,243,730
- Issue date Mar 4, 2025
- Singulus Technologies AG
- Peter Weipert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for determining the virtual source location of a liquid met...
- Patent number 12,237,142
- Issue date Feb 25, 2025
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,237,143
- Issue date Feb 25, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of local control of a charged particle beam
- Patent number 12,230,469
- Issue date Feb 18, 2025
- ASML Netherlands B.V.
- Albertus Victor Gerardus Mangnus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for the removal and/or avoidance of contamination...
- Patent number 12,202,019
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Marc Smits
- B08 - CLEANING
Information Patent Grant
Transmission electron microscopy with square beams
- Patent number 12,205,789
- Issue date Jan 21, 2025
- New York Structural Biology Center
- Eugene Yue Dao Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 12,196,692
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING
Information Patent Grant
Multi-modal operations for multi-beam inspection system
- Patent number 12,183,543
- Issue date Dec 31, 2024
- ASML Netherlands B.V.
- Martinus Gerardus Johannes Maria Maassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope and inspection method using transm...
- Patent number 12,170,184
- Issue date Dec 17, 2024
- HITACHI HIGH-TECH CORPORATION
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,165,830
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Shichen Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam pattern device having beam absorber structure
- Patent number 12,154,756
- Issue date Nov 26, 2024
- IMS Nanofabrication GmbH
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-source charged particle illumination apparatus
- Patent number 12,125,671
- Issue date Oct 22, 2024
- ASML Netherlands B.V.
- Stijn Wilem Herman Karel Steenbrink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
- Patent number 12,119,204
- Issue date Oct 15, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to correct first order astigmatism and first order distortio...
- Patent number 12,106,933
- Issue date Oct 1, 2024
- FEI Company
- Jan Stopka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multiple particle beam system while altering...
- Patent number 12,057,290
- Issue date Aug 6, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,033,830
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering apparatus
- Patent number 12,014,911
- Issue date Jun 18, 2024
- Tokyo Electron Limited
- Shota Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle assessment tool, inspection method
- Patent number 11,984,295
- Issue date May 14, 2024
- ASML Netherlands B.V.
- Marco Jan-Jaco Wieland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam grid layout
- Patent number RE49952
- Issue date Apr 30, 2024
- ASML Netherlands B.V.
- Vincent Sylvester Kuiper

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE PARTICLE BEAM SYSTEM WITH PROLONGED MAINTENANCE INTERVAL
- Publication number 20250232943
- Publication date Jul 17, 2025
- Carl Zeiss MultiSEM GmbH
- Ticia Buhr
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20250232945
- Publication date Jul 17, 2025
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION EXTRACTION OPTICS FOR ION PROCESSING SYSTEM
- Publication number 20250232942
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Costel BILOIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM
- Publication number 20250232951
- Publication date Jul 17, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM TUBE
- Publication number 20250218719
- Publication date Jul 3, 2025
- Carl Zeiss MultiSEM GmbH
- Michael Kelp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STATIC ELECTRCITY CONTROL DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20250218745
- Publication date Jul 3, 2025
- NEXTIN, INC.
- Heung-Gyoon PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION
- Publication number 20250208074
- Publication date Jun 26, 2025
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission electron microscopy with square beams
- Publication number 20250166956
- Publication date May 22, 2025
- New York Structural Biology Center
- Eugene Yue Dao Chau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-BEAM EXPOSURE METHOD AND MASK MANUFACTURING METHOD COMPRISING THE...
- Publication number 20250157789
- Publication date May 15, 2025
- Samsung Electronics Co., Ltd.
- Jungwook SHON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...
- Publication number 20250157780
- Publication date May 15, 2025
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-RAY IMAGING SYSTEM FOR RADIATION THERAPY
- Publication number 20250140515
- Publication date May 1, 2025
- Shanghai United Imaging Healthcare Co., Ltd.
- Buliang SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM SYSTEM AND MULTI-BEAM FORMING UNIT WITH REDUCED SENSITIV...
- Publication number 20250125115
- Publication date Apr 17, 2025
- Carl Zeiss MultiSEM GmbH
- Christian Veit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON-OPTICAL DEVICE
- Publication number 20250095950
- Publication date Mar 20, 2025
- ASML NETHERLANDS B.V.
- Paul IJmert SCHEFFERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICAL DEVICE AND METHOD
- Publication number 20250046570
- Publication date Feb 6, 2025
- ASML NETHERLANDS B.V.
- Petrus Wilhelmus SMORENBURG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission electron microscopy with square beams
- Publication number 20250029806
- Publication date Jan 23, 2025
- New York Structural Biology Center
- Eugene Yue Dao Chua
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20250014855
- Publication date Jan 9, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING DEVICE AND CONTROL OF THE SAME
- Publication number 20240412407
- Publication date Dec 12, 2024
- Samsung Electronics Co., Ltd.
- Junghee Cho
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD
- Publication number 20240387151
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- BENJAMIN ALEXANDROVICH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ELECTRON BEAM OPTICS
- Publication number 20240387140
- Publication date Nov 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Alon Litman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20240379325
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM SYSTEM AND MULTI-BEAM GENERATING UNIT WITH REDUCED SENSI...
- Publication number 20240379322
- Publication date Nov 14, 2024
- Carl Zeiss MultiSEM GmbH
- Alexander Wertz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRI...
- Publication number 20240371608
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Ryan Prager
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM DEVICE FOR DIFFRACTION ANALYSIS
- Publication number 20240355577
- Publication date Oct 24, 2024
- Eldico Scientific AG
- Gunther STEINFELD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...
- Publication number 20240347316
- Publication date Oct 17, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE STAGE FOR ELECTRON ENHANCED MATERIAL PROCESSING
- Publication number 20240347323
- Publication date Oct 17, 2024
- VELVETCH LLC
- David Irwin Margolese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE APPARATUS, MULTI-DEVICE APPARATUS, METHOD OF USING...
- Publication number 20240331968
- Publication date Oct 3, 2024
- ASML NETHERLANDS B.V.
- Yan REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE OPTICAL DEVICE
- Publication number 20240321547
- Publication date Sep 26, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHAMBER COMPONENTS WITH ADVANCED COATING TECHNIQUES
- Publication number 20240304423
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and Method for Reducing Particle Formation in a Process Cham...
- Publication number 20240274404
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...
- Publication number 20240258065
- Publication date Aug 1, 2024
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- G06 - COMPUTING CALCULATING COUNTING

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for inspecting a specimen and charged particle beam device

Semiconductor chamber components with advanced coating techniques

Particle beam column

Multiple landing energy scanning electron microscopy systems and me...

Charged particle beam pattern forming device and charged particle b...

Multi-leaf collimator and driving system

Particle beam system

Particle beam device having a deflection unit

Multi-beam particle beam system and method for operating same

Particle beam system for azimuthal deflection of individual particl...

Slit diaphragm

Methods for determining the virtual source location of a liquid met...

Apparatus of plural charged-particle beams

Apparatus for and method of local control of a charged particle beam

Method and system for the removal and/or avoidance of contamination...

Transmission electron microscopy with square beams

Systems and methods for voltage contrast defect detection

Multi-modal operations for multi-beam inspection system

Transmission electron microscope and inspection method using transm...

Multiple charged-particle beam apparatus with low crosstalk

Method and system of image-forming multi-electron beams

Beam pattern device having beam absorber structure

Multi-source charged particle illumination apparatus

Particle beam system and the use thereof for flexibly setting the c...

Method to correct first order astigmatism and first order distortio...

Method for operating a multiple particle beam system while altering...

Multiple charged-particle beam apparatus with low crosstalk

Sputtering apparatus

Charged particle assessment tool, inspection method

Beam grid layout

Patents Applicationslast 30 patents

MULTIPLE PARTICLE BEAM SYSTEM WITH PROLONGED MAINTENANCE INTERVAL

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

ION EXTRACTION OPTICS FOR ION PROCESSING SYSTEM

PARTICLE BEAM SYSTEM

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED BEAM TUBE

STATIC ELECTRCITY CONTROL DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM

SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION

Transmission electron microscopy with square beams

E-BEAM EXPOSURE METHOD AND MASK MANUFACTURING METHOD COMPRISING THE...

METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...

X-RAY IMAGING SYSTEM FOR RADIATION THERAPY

MULTI-BEAM SYSTEM AND MULTI-BEAM FORMING UNIT WITH REDUCED SENSITIV...

ELECTRON-OPTICAL DEVICE

CHARGED PARTICLE OPTICAL DEVICE AND METHOD

Transmission electron microscopy with square beams

CHARGED PARTICLE APPARATUS AND METHOD

SEMICONDUCTOR MANUFACTURING DEVICE AND CONTROL OF THE SAME

INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD

MULTIPLE ELECTRON BEAM OPTICS

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

MULTI-BEAM SYSTEM AND MULTI-BEAM GENERATING UNIT WITH REDUCED SENSI...

SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRI...

CHARGED-PARTICLE BEAM DEVICE FOR DIFFRACTION ANALYSIS

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...

COMPOSITE STAGE FOR ELECTRON ENHANCED MATERIAL PROCESSING

CHARGED-PARTICLE APPARATUS, MULTI-DEVICE APPARATUS, METHOD OF USING...

CHARGED-PARTICLE OPTICAL DEVICE

SEMICONDUCTOR CHAMBER COMPONENTS WITH ADVANCED COATING TECHNIQUES

System and Method for Reducing Particle Formation in a Process Cham...

METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...