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H01J2237/188
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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/188
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Patents Grants
last 30 patents
Information
Patent Grant
Aperture device and analyzer arrangement
Patent number
11,942,316
Issue date
Mar 26, 2024
SCIENTA OMICRON AB
Peter Amann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced electron beam generation
Patent number
11,517,975
Issue date
Dec 6, 2022
Arcam AB
Mattias Fager
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Stage device, charged particle beam apparatus, and vacuum apparatus
Patent number
11,417,496
Issue date
Aug 16, 2022
Hitachi, Ltd.
Motohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration correction in charged particle system
Patent number
11,348,756
Issue date
May 31, 2022
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle optical apparatus for through-the-lens detection o...
Patent number
11,276,547
Issue date
Mar 15, 2022
Carl Zeiss Microscopy GmbH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-stage vacuum equipment with stages separation controlled by S...
Patent number
11,239,041
Issue date
Feb 1, 2022
S.A.E.S. Getters S.p.A.
Marco Urbano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle optical apparatus for through-the-lens detection o...
Patent number
10,861,670
Issue date
Dec 8, 2020
Carl Zeiss Microscopy GmbH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum condition controlling apparatus, system and method for speci...
Patent number
10,699,874
Issue date
Jun 30, 2020
Focus-eBeam Technology (Beijing) Co., Ltd.
Wei He
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atom probe with vacuum differential
Patent number
10,614,995
Issue date
Apr 7, 2020
Cameca Instruments, Inc.
Thomas F. Kelly
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle optical apparatus for through-the-lens detection o...
Patent number
10,522,321
Issue date
Dec 31, 2019
Carl Zeiss Microscopy GmbH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray analysis in air
Patent number
10,354,834
Issue date
Jul 16, 2019
Oxford Instruments Nanotechnology Tools Limited
Peter J. Statham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wide field atmospheric scanning electron microscope
Patent number
10,262,832
Issue date
Apr 16, 2019
Gerasimos Daniel Danilatos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High voltage shielding and cooling in a charged particle beam gener...
Patent number
10,037,864
Issue date
Jul 31, 2018
Mapper Lithography IP B.V.
Alexander Hendrik Vincent Van Veen
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Microscopy support structures
Patent number
9,984,850
Issue date
May 29, 2018
Protochips, Inc.
John Damiano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
User interface for an electron microscope
Patent number
9,865,427
Issue date
Jan 9, 2018
FEI Company
Martinus Petrus Maria Bierhoff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle optical apparatus having a selectively positionabl...
Patent number
9,741,528
Issue date
Aug 22, 2017
Carl Zeiss Microscopy GmbH
Michael Albiez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample holder and charged particle device
Patent number
9,721,752
Issue date
Aug 1, 2017
Hitachi High-Technologies Corporation
Yasuhira Nagakubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray analysis in air
Patent number
9,704,688
Issue date
Jul 11, 2017
Oxford Instruments Nanotechnology Tools Limited
Peter Statham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imaging and processing for plasma ion source
Patent number
9,691,583
Issue date
Jun 27, 2017
FEI Company
Thomas G. Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle lithography system and beam generator
Patent number
9,653,261
Issue date
May 16, 2017
Mapper Lithography IP B.V.
Alexander Hendrik Vincent Van Veen
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam system and method of operating a charged part...
Patent number
9,640,364
Issue date
May 2, 2017
Carl Zeiss Microscopy, LLC
John A. Notte
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diaphragm mounting member and charged particle beam device
Patent number
9,633,817
Issue date
Apr 25, 2017
Hitachi High-Technologies Corporation
Shinsuke Kawanishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system and method of operating a charged part...
Patent number
9,627,172
Issue date
Apr 18, 2017
Carl Zeiss Microscopy, LLC
John A. Notte
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample storage container, charged particle beam apparatus, and imag...
Patent number
9,564,288
Issue date
Feb 7, 2017
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system and method of operating a charged part...
Patent number
9,530,612
Issue date
Dec 27, 2016
Carl Zeiss Microscopy, LLC
John A. Notte
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system and method of operating a charged part...
Patent number
9,530,611
Issue date
Dec 27, 2016
Carl Zeiss Microscopy, LLC
John A. Notte
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
9,466,458
Issue date
Oct 11, 2016
B-NANO LTD.
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope, an interface and a method for observi...
Patent number
9,431,213
Issue date
Aug 30, 2016
B-Nano Ltd.
Dov Shachal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microscopy support structures
Patent number
9,275,826
Issue date
Mar 1, 2016
PROTOCHIPS, INC.
John Damiano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation at high temperature surface equilibrium conditions
Patent number
9,218,991
Issue date
Dec 22, 2015
Infineon Technologies Americas Corp.
Michael A. Briere
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
ELECTRON GUN CHAMBER FOR SCANNING ELECTRON MICROSCOPE, ELECTRON GUN...
Publication number
20240212971
Publication date
Jun 27, 2024
National Institute for Materials Science
Han ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUSED ION BEAM SYSTEM
Publication number
20230307205
Publication date
Sep 28, 2023
V Technology Co., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230230818
Publication date
Jul 20, 2023
Kokusai Electric Corporation
Tetsuaki Inada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM WELDING SYSTEMS EMPLOYING A PLASMA CATHODE
Publication number
20220384138
Publication date
Dec 1, 2022
US Electron, Inc.
John Noonan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APERTURE DEVICE AND ANALYSER ARRANGEMENT
Publication number
20220020580
Publication date
Jan 20, 2022
SCIENTA OMICRON AB
Peter AMANN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STAGE VACUUM EQUIPMENT WITH STAGES SEPARATION CONTROLLED BY S...
Publication number
20210249217
Publication date
Aug 12, 2021
Saes Getters S.p.A.
Marco URBANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE OPTICAL APPARATUS FOR THROUGH-THE-LENS DETECTION O...
Publication number
20210050178
Publication date
Feb 18, 2021
CARL ZEISS MICROSCOPY GMBH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Stage Device, Charged Particle Beam Apparatus, and Vacuum Apparatus
Publication number
20210027978
Publication date
Jan 28, 2021
Hitachi, Ltd
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE OPTICAL APPARATUS FOR THROUGH-THE-LENS DETECTION O...
Publication number
20200135425
Publication date
Apr 30, 2020
CARL ZEISS MICROSCOPY GMBH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CONDITION CONTROLLING APPARATUS, SYSTEM AND METHOD FOR SPECI...
Publication number
20200035448
Publication date
Jan 30, 2020
Focus-eBeam Technology (Beijing) Co., Ltd.
Wei He
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE OPTICAL APPARATUS FOR THROUGH-THE-LENS DETECTION O...
Publication number
20180342368
Publication date
Nov 29, 2018
CARL ZEISS MICROSCOPY GMBH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
X-RAY ANALYSIS IN AIR
Publication number
20170271125
Publication date
Sep 21, 2017
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
Peter J. STATHAM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE
Publication number
20150380207
Publication date
Dec 31, 2015
B-NANO LTD.
Dov SHACHAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USER INTERFACE FOR AN ELECTRON MICROSCOPE
Publication number
20150332891
Publication date
Nov 19, 2015
FEI Company
MART PETRUS MARIA BIERHOFF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE, AN INTERFACE AND A METHOD FOR OBSERVI...
Publication number
20150243475
Publication date
Aug 27, 2015
B-NANO LTD.
Dov SHACHAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Instrument
Publication number
20140209193
Publication date
Jul 31, 2014
Mitsuhide Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fabrication of III-Nitride Layers
Publication number
20140213046
Publication date
Jul 31, 2014
INTERNATIONAL RECTIFIER CORPORATION
Michael A. Briere
C30 - CRYSTAL GROWTH
Information
Patent Application
Ion Implantation at High Temperature Surface Equilibrium Conditions
Publication number
20140147998
Publication date
May 29, 2014
INTERNATIONAL RECTIFIER CORPORATION
Michael A. Briere
C30 - CRYSTAL GROWTH
Information
Patent Application
SCANNING ELECTRON MICROSCOPE, AN INTERFACE AND A METHOD FOR OBSERVI...
Publication number
20140117232
Publication date
May 1, 2014
B-NANO LTD.
Dov SHACHAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH INTERMEDIATE CHAMBER
Publication number
20140061497
Publication date
Mar 6, 2014
MAPPER LITHOGRAPHY IP BV
Laura DINU-GÜRTLER
B82 - NANO-TECHNOLOGY
Information
Patent Application
IMAGING AND PROCESSING FOR PLASMA ION SOURCE
Publication number
20130320229
Publication date
Dec 5, 2013
FEI Company
Tom Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Growing a III-Nitride Layer
Publication number
20130196490
Publication date
Aug 1, 2013
INTERNATIONAL RECTIFIER CORPORATION
Michael A. Briere
C30 - CRYSTAL GROWTH
Information
Patent Application
Processing System
Publication number
20130098292
Publication date
Apr 25, 2013
CARL ZEISS NTS GMBH
Emmerich Bertagnolli
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS FIELD IONIZATION ION SOURCE, SCANNING CHARGED PARTICLE MICROSCO...
Publication number
20130087704
Publication date
Apr 11, 2013
Hitachi High-Technologies Corporation
Tohru Ishitani
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS, AND METHOD OF MANUFACTURIN...
Publication number
20130040240
Publication date
Feb 14, 2013
Canon Kabushiki Kaisha
Shigeru Terashima
B82 - NANO-TECHNOLOGY
Information
Patent Application
DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND PROCESSING...
Publication number
20120328988
Publication date
Dec 27, 2012
Canon Kabushiki Kaisha
Yoshihiro Hirata
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH INTERMEDIATE CHAMBER
Publication number
20120293780
Publication date
Nov 22, 2012
MAPPER LITHOGRAPHY IP BV
Laura DINU-GÜRTLER
B82 - NANO-TECHNOLOGY
Information
Patent Application
Particle Beam System
Publication number
20120199740
Publication date
Aug 9, 2012
CARL ZEISS NTS GMBH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM DEVICE WITH DEFLECTION SYSTEM
Publication number
20120138814
Publication date
Jun 7, 2012
CARL ZEISS NTS LTD.
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICES
Publication number
20120091337
Publication date
Apr 19, 2012
Carl Zeiss NTS Limited
Stewart John Bean
H01 - BASIC ELECTRIC ELEMENTS