Direct-write microstructures

Industry

CPC
H01J2237/31735

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31735Direct-write microstructures

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle device and wiring method
- Patent number 10,808,312
- Issue date Oct 20, 2020
- HITACHI HIGH-TECH CORPORATION
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Control method and control program for focused ion beam device
- Patent number 10,276,341
- Issue date Apr 30, 2019
- Hitachi, Ltd.
- Keiji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle device and wiring method
- Patent number 9,963,776
- Issue date May 8, 2018
- Hitachi High-Technologies Corporation
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,556,521
- Issue date Jan 31, 2017
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precision deposition using miniature-column charged particle beam a...
- Patent number 9,453,281
- Issue date Sep 27, 2016
- Multibeam Corporation
- Theodore A. Prescop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron sensitive glass and optical circuits, microstructures form...
- Patent number 9,440,876
- Issue date Sep 13, 2016
- Lu Han
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 8,658,994
- Issue date Feb 25, 2014
- Nexgen Semi Holding, Inc.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for modifying physical properties of nanostruc...
- Patent number 8,541,480
- Issue date Sep 24, 2013
- Korea University Research and Business Foundation
- Jinsoo Joo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sample relocation method in charged particle beam apparatus and cha...
- Patent number 7,872,231
- Issue date Jan 18, 2011
- Sll NanoTechnology Inc.
- Junichi Tashiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam writing method, fine pattern writing system, and manu...
- Patent number 7,868,308
- Issue date Jan 11, 2011
- FUJIFILM Corporation
- Kazunori Komatsu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate patterning by electron emission-induced displacement
- Patent number 7,818,816
- Issue date Oct 19, 2010
- Clemson University Research Foundation
- Jason B. Reppert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,659,526
- Issue date Feb 9, 2010
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multivalent ion generating source and charged particle beam apparat...
- Patent number 7,544,952
- Issue date Jun 9, 2009
- Japan Science and Technology Agency
- Makoto Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,507,960
- Issue date Mar 24, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and devices for producing corpuscular radiation systems
- Patent number 7,504,644
- Issue date Mar 17, 2009
- Hans Wilfried Peter Koops
- Hans Wilfried Peter Koops
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,501,644
- Issue date Mar 10, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,495,245
- Issue date Feb 24, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,495,242
- Issue date Feb 24, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,495,244
- Issue date Feb 24, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,488,960
- Issue date Feb 10, 2009
- NexGen Semi Holding, Inc.
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micromachining process, system and product
- Patent number 7,385,209
- Issue date Jun 10, 2008
- Haute Ecole Arc Ne-Be-Ju
- Samuel Jaccard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for constant linear velocity electron beam sub...
- Patent number 7,382,711
- Issue date Jun 3, 2008
- Seagate Technology LLC
- Sundeep Chauhan
- G11 - INFORMATION STORAGE
Information Patent Grant
Apparatus and method for controlled particle beam manufacturing
- Patent number 7,259,373
- Issue date Aug 21, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano-lithography using squeezed atomic and molecular states
- Patent number 6,891,152
- Issue date May 10, 2005
- Yeda Research and Development Co. Ltd.
- Eliyahu Averbukh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Information recording apparatus
- Patent number 6,847,603
- Issue date Jan 25, 2005
- Obducat Aktiebolag
- Peter Andersson
- G11 - INFORMATION STORAGE
Information Patent Grant
Beam direct-writing apparatus, imaging apparatus and method of obta...
- Patent number 6,717,160
- Issue date Apr 6, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhiro Nakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate rotating device, and manufacturing method and apparatus o...
- Patent number 6,686,597
- Issue date Feb 3, 2004
- Pioneer Corporation
- Osamu Kumasaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for direct write fabrication of nanostructures
- Patent number 6,462,333
- Issue date Oct 8, 2002
- Michael S. Gersonde
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Circuit forming apparatus of semiconductor device
- Patent number 6,398,872
- Issue date Jun 4, 2002
- Asahi Kogaku Kogyo Kabushiki Kaisha
- Masao Jojiki
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE DEVICE AND WIRING METHOD
- Publication number 20180216223
- Publication date Aug 2, 2018
- Hitachi High-Technologies Corporation
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20120112323
- Publication date May 10, 2012
- NEXGEN SEMI HOLDING, INC.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and Method for Modifying Physical Properties of Nanostruc...
- Publication number 20110282021
- Publication date Nov 17, 2011
- Korea University Research and Business Foundation
- Jinsoo JOO
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20100098922
- Publication date Apr 22, 2010
- NEXGEN SEMI HOLDING, INC.
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON BEAM WRITING METHOD, FINE PATTERN WRITING SYSTEM, AND MANU...
- Publication number 20090189094
- Publication date Jul 30, 2009
- FUJIFILM CORPORATION
- Kazunori Komatsu
- G11 - INFORMATION STORAGE
Information Patent Application
SAMPLE RELOCATION METHOD IN CHARGED PARTICLE BEAM APPARATUS AND CHA...
- Publication number 20080302961
- Publication date Dec 11, 2008
- Junichi Tashiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Source Of Generating Multicharged Ions And Charged Particle Beam Ap...
- Publication number 20080087842
- Publication date Apr 17, 2008
- Japan Science and Technology Agency
- Makoto Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE MODIFICATION OF POLYMER SURFACE USING ION BEAM IRRADIATION
- Publication number 20080026329
- Publication date Jan 31, 2008
- Ashkan Vaziri
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070284695
- Publication date Dec 13, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070284537
- Publication date Dec 13, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070284538
- Publication date Dec 13, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and method for controlled particle beam manufacturing
- Publication number 20070284527
- Publication date Dec 13, 2007
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070278419
- Publication date Dec 6, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070278418
- Publication date Dec 6, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING
- Publication number 20070278428
- Publication date Dec 6, 2007
- NexGenSemi Holdings Corporation
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and method for controlled particle beam manufacturing
- Publication number 20070045534
- Publication date Mar 1, 2007
- Michael John Zani
- B82 - NANO-TECHNOLOGY
Information Patent Application
Micromachining process, system and product
- Publication number 20060214105
- Publication date Sep 28, 2006
- Samuel Jaccard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and devices for producing corpuscular radiation systems
- Publication number 20060192141
- Publication date Aug 31, 2006
- Hans Wilfred Peter Koops
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Minute three dimensional structure producing apparatus and method
- Publication number 20050211922
- Publication date Sep 29, 2005
- Masanao Munekane
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for constant linear velocity electron beam sub...
- Publication number 20050185562
- Publication date Aug 25, 2005
- Sundeep Chauhan
- G11 - INFORMATION STORAGE
Information Patent Application
Beam direct-writing apparatus, imaging apparatus and method of obta...
- Publication number 20030160191
- Publication date Aug 28, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhiro Nakai
- B82 - NANO-TECHNOLOGY
Information Patent Application
Nano-lithography using squeezed atomic and molecular states
- Publication number 20030152841
- Publication date Aug 14, 2003
- Yeda Research and Development Co. Ltd.
- Eliyahu Averbukh
- B82 - NANO-TECHNOLOGY
Information Patent Application
Substrate rotating device, and manufacturing method and apparatus o...
- Publication number 20020034152
- Publication date Mar 21, 2002
- Osamu Kumasaka
- B82 - NANO-TECHNOLOGY
Information Patent Application
Information recording apparatus
- Publication number 20020018110
- Publication date Feb 14, 2002
- Peter Andersson
- H01 - BASIC ELECTRIC ELEMENTS

Direct-write microstructures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle device and wiring method

Patterned atomic layer etching and deposition using miniature-colum...

Control method and control program for focused ion beam device

Charged particle device and wiring method

Precision deposition using miniature-column charged particle beam a...

Precision deposition using miniature-column charged particle beam a...

Electron sensitive glass and optical circuits, microstructures form...

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for modifying physical properties of nanostruc...

Sample relocation method in charged particle beam apparatus and cha...

Electron beam writing method, fine pattern writing system, and manu...

Substrate patterning by electron emission-induced displacement

Apparatus and method for controlled particle beam manufacturing

Multivalent ion generating source and charged particle beam apparat...

Apparatus and method for controlled particle beam manufacturing

Method and devices for producing corpuscular radiation systems

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Apparatus and method for controlled particle beam manufacturing

Micromachining process, system and product

Method and apparatus for constant linear velocity electron beam sub...

Apparatus and method for controlled particle beam manufacturing

Nano-lithography using squeezed atomic and molecular states

Information recording apparatus

Beam direct-writing apparatus, imaging apparatus and method of obta...

Substrate rotating device, and manufacturing method and apparatus o...

Apparatus for direct write fabrication of nanostructures

Circuit forming apparatus of semiconductor device

Patents Applicationslast 30 patents

CHARGED PARTICLE DEVICE AND WIRING METHOD

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

Apparatus and Method for Modifying Physical Properties of Nanostruc...

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

ELECTRON BEAM WRITING METHOD, FINE PATTERN WRITING SYSTEM, AND MANU...

SAMPLE RELOCATION METHOD IN CHARGED PARTICLE BEAM APPARATUS AND CHA...

Source Of Generating Multicharged Ions And Charged Particle Beam Ap...

SURFACE MODIFICATION OF POLYMER SURFACE USING ION BEAM IRRADIATION

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

Apparatus and method for controlled particle beam manufacturing

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

Apparatus and method for controlled particle beam manufacturing

Micromachining process, system and product

Method and devices for producing corpuscular radiation systems

Minute three dimensional structure producing apparatus and method

Method and apparatus for constant linear velocity electron beam sub...

Beam direct-writing apparatus, imaging apparatus and method of obta...

Nano-lithography using squeezed atomic and molecular states

Substrate rotating device, and manufacturing method and apparatus o...

Information recording apparatus