Diverse treatments performed in unitary chamber

Industry

CPC
Y10S438/913

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

Current Industry

Y10S438/913Diverse treatments performed in unitary chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 9,076,716
- Issue date Jul 7, 2015
- Intermolecular, Inc.
- Thomas R. Boussie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,697,606
- Issue date Apr 15, 2014
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,610,121
- Issue date Dec 17, 2013
- Intermolecular, Inc.
- Thomas R. Boussie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for processing a substrate, method of processing a substrate...
- Patent number 8,448,599
- Issue date May 28, 2013
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Advanced mixing system for integrated tool having site-isolated rea...
- Patent number 8,414,703
- Issue date Apr 9, 2013
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,389,445
- Issue date Mar 5, 2013
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,367,587
- Issue date Feb 5, 2013
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insitu post atomic layer deposition destruction of active species
- Patent number 8,257,497
- Issue date Sep 4, 2012
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced mixing method for integrated tool having site-isolated rea...
- Patent number 8,207,069
- Issue date Jun 26, 2012
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,163,631
- Issue date Apr 24, 2012
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,084,400
- Issue date Dec 27, 2011
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,067,340
- Issue date Nov 29, 2011
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,058,154
- Issue date Nov 15, 2011
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced mixing system for integrated tool having site-isolated rea...
- Patent number 8,011,317
- Issue date Sep 6, 2011
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Large scale method and furnace system for selenization of thin film...
- Patent number 8,008,198
- Issue date Aug 30, 2011
- Stion Corporation
- Robert D. Wieting
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for processing a substrate, method of processing a substrate...
- Patent number 8,003,411
- Issue date Aug 23, 2011
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pattern manufacturing equipments, organic thin-film transistors and...
- Patent number 7,993,820
- Issue date Aug 9, 2011
- Hitachi, Ltd.
- Tomohiro Inoue
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Oxide-like seasoning for dielectric low k films
- Patent number 7,700,486
- Issue date Apr 20, 2010
- Applied Materials, Inc.
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for processing substrate and method of manufacturing semicon...
- Patent number 7,682,987
- Issue date Mar 23, 2010
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxial wafer and method for producing same
- Patent number 7,648,576
- Issue date Jan 19, 2010
- Sumco Corporation
- Yasuo Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving nitrogen profile in plasma nitrided gate diele...
- Patent number 7,122,454
- Issue date Oct 17, 2006
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide-like seasoning for dielectric low k films
- Patent number 7,115,508
- Issue date Oct 3, 2006
- Applied Materials, Inc.
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase growth method by controlling the heat output in the gas...
- Patent number 7,049,154
- Issue date May 23, 2006
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Kashino
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for heat treatment of silicon wafers and silicon wafer
- Patent number 7,011,717
- Issue date Mar 14, 2006
- Shin-Etsu Handotai Co., Ltd.
- Norihiro Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single workpiece processing system
- Patent number 6,969,682
- Issue date Nov 29, 2005
- Semitool, Inc.
- Kyle M. Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ photoresist removal by an attachable chamber with light source
- Patent number 6,929,713
- Issue date Aug 16, 2005
- Taiwan Semiconductor Manufacturing Company
- Chiang Jen Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single workpiece processing system
- Patent number 6,930,046
- Issue date Aug 16, 2005
- Semitool, Inc.
- Kyle M. Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single workpiece processing system
- Patent number 6,900,132
- Issue date May 31, 2005
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and apparatus for epitaxially coating a semiconductor wafer...
- Patent number 6,887,775
- Issue date May 3, 2005
- Siltronic AG
- Wilfried Von Ammon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for fabricating semiconductor device
- Patent number 6,884,701
- Issue date Apr 26, 2005
- Hidemi Takasu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods for Discretized Processing and Process Sequence Integration...
- Publication number 20140070213
- Publication date Mar 13, 2014
- Intermolecular, Inc.
- Thomas R. Boussie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Advanced Mixing System for Integrated Tool Having Site-Isolated Rea...
- Publication number 20130065796
- Publication date Mar 14, 2013
- Intermolecular, Inc.
- Aaron T. Francis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...
- Publication number 20130056101
- Publication date Mar 7, 2013
- Intermolecular, Inc.
- Thomas R. Boussie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REA...
- Publication number 20120231975
- Publication date Sep 13, 2012
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...
- Publication number 20120074096
- Publication date Mar 29, 2012
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...
- Publication number 20120048829
- Publication date Mar 1, 2012
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...
- Publication number 20120043298
- Publication date Feb 23, 2012
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...
- Publication number 20120021553
- Publication date Jan 26, 2012
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REA...
- Publication number 20110281773
- Publication date Nov 17, 2011
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for processing a substrate, method of processing a substrate...
- Publication number 20110271907
- Publication date Nov 10, 2011
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LARGE SCALE METHOD AND FURNACE SYSTEM FOR SELENIZATION OF THIN FILM...
- Publication number 20110229989
- Publication date Sep 22, 2011
- Stion Corporation
- Robert D. Wieting
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for processing substrate and method of manufacturing semicon...
- Publication number 20100136714
- Publication date Jun 3, 2010
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for Processing Substrate and Method of Manufacturing Semicon...
- Publication number 20090170337
- Publication date Jul 2, 2009
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Advanced mixing system for integrated tool having site-isolated rea...
- Publication number 20080156769
- Publication date Jul 3, 2008
- Intermolecular, Inc.
- Kurt H. Weiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...
- Publication number 20080132089
- Publication date Jun 5, 2008
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...
- Publication number 20080133161
- Publication date Jun 5, 2008
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERN MANUFACTURING EQUIPMENTS, ORGANIC THIN-FILM TRANSISTORS AND...
- Publication number 20080012013
- Publication date Jan 17, 2008
- Tomohiro Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Epitaxial wafer and method for producing same
- Publication number 20070093072
- Publication date Apr 26, 2007
- SUMCO CORPORATION
- Yasuo Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for discretized processing and process sequence integration...
- Publication number 20070082508
- Publication date Apr 12, 2007
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE-LIKE SEASONING FOR DIELECTRIC LOW K FILMS
- Publication number 20060219175
- Publication date Oct 5, 2006
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor phase growth method by controlling the heat output in the gas...
- Publication number 20060185596
- Publication date Aug 24, 2006
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Kashino
- C30 - CRYSTAL GROWTH
Information Patent Application
Oxide-like seasoning for dielectric low k films
- Publication number 20050227499
- Publication date Oct 13, 2005
- APPLIED MATERIALS, INC.
- Sohyun Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insitu post atomic layer deposition destruction of active species
- Publication number 20050150460
- Publication date Jul 14, 2005
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Epitaxially coated semiconductor wafer
- Publication number 20050103261
- Publication date May 19, 2005
- Wacker Siltronic AG
- Wilfried Von Ammon
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for processing a semiconductor wafer
- Publication number 20050032391
- Publication date Feb 10, 2005
- Semitool, Inc.
- Steven L. Peace
- B08 - CLEANING
Information Patent Application
Method for heat treatment of silicon wafers and silicon wafer
- Publication number 20050025691
- Publication date Feb 3, 2005
- Shin-Etsu Handotai Co., Ltd.
- Norihiro Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vapor growth method and vapor growth device
- Publication number 20040157446
- Publication date Aug 12, 2004
- Hisashi Kashino
- C30 - CRYSTAL GROWTH
Information Patent Application
Insitu post atomic layer deposition destruction of active species
- Publication number 20040152304
- Publication date Aug 5, 2004
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR REDUCING CONTAMINATION OF SEMICONDUCTOR SUBSTRATES
- Publication number 20040137741
- Publication date Jul 15, 2004
- Robert Chebi
- B08 - CLEANING
Information Patent Application
Single workpiece processing system
- Publication number 20040129302
- Publication date Jul 8, 2004
- Kyle M. Hanson
- H01 - BASIC ELECTRIC ELEMENTS

Diverse treatments performed in unitary chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods for discretized processing and process sequence integration...

Methods for discretized processing and process sequence integration...

Methods for discretized processing and process sequence integration...

Device for processing a substrate, method of processing a substrate...

Advanced mixing system for integrated tool having site-isolated rea...

Methods for discretized processing and process sequence integration...

Methods for discretized processing and process sequence integration...

Insitu post atomic layer deposition destruction of active species

Advanced mixing method for integrated tool having site-isolated rea...

Methods for discretized processing and process sequence integration...

Methods for discretized processing and process sequence integration...

Methods for discretized processing and process sequence integration...

Methods for discretized processing and process sequence integration...

Advanced mixing system for integrated tool having site-isolated rea...

Large scale method and furnace system for selenization of thin film...

Device for processing a substrate, method of processing a substrate...

Pattern manufacturing equipments, organic thin-film transistors and...

Oxide-like seasoning for dielectric low k films

Device for processing substrate and method of manufacturing semicon...

Epitaxial wafer and method for producing same

Method for improving nitrogen profile in plasma nitrided gate diele...

Oxide-like seasoning for dielectric low k films

Vapor phase growth method by controlling the heat output in the gas...

Method for heat treatment of silicon wafers and silicon wafer

Single workpiece processing system

In-situ photoresist removal by an attachable chamber with light source

Single workpiece processing system

Single workpiece processing system

Process and apparatus for epitaxially coating a semiconductor wafer...

Process for fabricating semiconductor device

Patents Applicationslast 30 patents

Methods for Discretized Processing and Process Sequence Integration...

Advanced Mixing System for Integrated Tool Having Site-Isolated Rea...

METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...

ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REA...

METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...

METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...

METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...

METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...

ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REA...

Device for processing a substrate, method of processing a substrate...

LARGE SCALE METHOD AND FURNACE SYSTEM FOR SELENIZATION OF THIN FILM...

Device for processing substrate and method of manufacturing semicon...

Device for Processing Substrate and Method of Manufacturing Semicon...

Advanced mixing system for integrated tool having site-isolated rea...

METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...

METHODS FOR DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION...

PATTERN MANUFACTURING EQUIPMENTS, ORGANIC THIN-FILM TRANSISTORS AND...

Epitaxial wafer and method for producing same

Methods for discretized processing and process sequence integration...

OXIDE-LIKE SEASONING FOR DIELECTRIC LOW K FILMS

Vapor phase growth method by controlling the heat output in the gas...

Oxide-like seasoning for dielectric low k films

Insitu post atomic layer deposition destruction of active species

Epitaxially coated semiconductor wafer

Method for processing a semiconductor wafer

Method for heat treatment of silicon wafers and silicon wafer

Vapor growth method and vapor growth device

Insitu post atomic layer deposition destruction of active species

METHODS FOR REDUCING CONTAMINATION OF SEMICONDUCTOR SUBSTRATES

Single workpiece processing system