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H01L21/67775

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67775Docking arrangements

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System with substrate carrier deterioration detection and repair
- Patent number 12,162,134
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Display panel, jig, and method of manufacturing display panel with...
- Patent number 12,167,620
- Issue date Dec 10, 2024
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Shuquan Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shortened load port for factory interface
- Patent number 12,159,802
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Srinivas Poshatrahalli Gopalakrishna
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Factory interface robots usable with integrated load locks
- Patent number 12,142,508
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Increased number of load ports on factory interface with robot that...
- Patent number 12,076,854
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Paul B. Reuter
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Airflow detection device and methods of use
- Patent number 12,080,575
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chiller make-break connector for substrate processing systems
- Patent number 12,074,039
- Issue date Aug 27, 2024
- Lam Research Corporation
- Alexander Charles Marcacci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 12,074,045
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Calibration pod for robotic wafer carrier handling and calibration...
- Patent number 12,068,184
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Company., Ltd.
- Tzu-Chin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system for processing substrates with an elect...
- Patent number 12,051,602
- Issue date Jul 30, 2024
- ASM IP Holding B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 11,990,358
- Issue date May 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EFEM robot auto teaching methodology
- Patent number 11,984,331
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport
- Patent number 11,978,648
- Issue date May 7, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chip transfer device capable of floatingly positioning a chip and m...
- Patent number 11,901,213
- Issue date Feb 13, 2024
- CHROMA ATE INC.
- Chien-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 11,862,505
- Issue date Jan 2, 2024
- Disco Corporation
- Yoshinori Kakinuma
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Seal mechanisms for load ports
- Patent number 11,842,913
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Douglas B. Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indexable side storage pod apparatus, heated side storage pod appar...
- Patent number 11,823,933
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Patrick Pannese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 11,810,805
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing systems, apparatus, and methods with substrate...
- Patent number 11,782,404
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage apparatus for storing cassettes for substrates and processi...
- Patent number 11,769,682
- Issue date Sep 26, 2023
- ASM IP Holding B.V.
- Adriaan Garssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer handling apparatus and method of operating the same
- Patent number 11,728,194
- Issue date Aug 15, 2023
- NANYA TECHNOLOGY CORPORATION
- Jih-Cheng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and substrate transfer method
- Patent number 11,688,619
- Issue date Jun 27, 2023
- Tokyo Electron Limited
- Shinji Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placement system for door of wafer pod
- Patent number 11,664,256
- Issue date May 30, 2023
- Dongfeng Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conversion plate for reticle pod storage and a reticle pod storage...
- Patent number 11,658,053
- Issue date May 23, 2023
- GLOBALFOUNDRIES U.S. INC.
- Michael Raga-Barone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport
- Patent number 11,658,051
- Issue date May 23, 2023
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple transport carrier docking device
- Patent number 11,651,984
- Issue date May 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port apparatus and method of driving the same
- Patent number 11,646,215
- Issue date May 9, 2023
- TDK Corporation
- Tomoshi Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for ope...
- Patent number 11,640,915
- Issue date May 2, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate Cassette Handling Apparatus, Substrate Processing Apparat...
- Publication number 20250006526
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Akinari HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20240412983
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Alexander Charles MARCACCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW DETECTION DEVICE AND METHODS OF USE
- Publication number 20240379391
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INCREASED NUMBER OF LOAD PORTS ON FACTORY INTERFACE WITH ROBOT THAT...
- Publication number 20240375300
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Paul B. Reuter
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CALIBRATION POD FOR ROBOTIC WAFER CARRIER HANDLING AND CALIBRATION...
- Publication number 20240363379
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzu-Chin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACEMENT BASE
- Publication number 20240355661
- Publication date Oct 24, 2024
- DAIFUKU CO., LTD.
- Zheguang DONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20240321615
- Publication date Sep 26, 2024
- SEMES CO., LTD.
- Sung Jae JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE APPARATUS FOR SEMICONDUCTOR DEVICES AND STORAGE SYSTEM INCL...
- Publication number 20240297060
- Publication date Sep 5, 2024
- Samsung Electronics Co., Ltd.
- Youngon OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...
- Publication number 20240266193
- Publication date Aug 8, 2024
- Siliconware Precision Industries Co., Ltd.
- Tang-Hsin KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM ROBOT AUTO TEACHING METHODOLOGY
- Publication number 20240249961
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT UNIT, LINE STORAGE UNIT, AND TRANSPORT SYSTEM INCLUDING THE...
- Publication number 20240194511
- Publication date Jun 13, 2024
- SEMES CO., LTD.
- Do Hyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADING AND UNLOADING SYSTEM FOR SILICON WAFER
- Publication number 20240178030
- Publication date May 30, 2024
- LAPLACE (WUXI) SEMICONDUCTOR TECHNOLOGY CO., LTD.
- Jiaji Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Handling device for transporting interface units for a test device...
- Publication number 20240153804
- Publication date May 9, 2024
- Turbodynamics GmbH
- Stefan Thurmaier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PURGE UNIT AND THE LOAD PORT DEVICE
- Publication number 20230420272
- Publication date Dec 28, 2023
- TDK Corporation
- Tatsuhiro KOTSUGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT
- Publication number 20230395416
- Publication date Dec 7, 2023
- SINFONIA TECHNOLOGY CO., LTD.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT
- Publication number 20230377924
- Publication date Nov 23, 2023
- BOOKS AUTOMATION US, LLC
- Daniel BABBS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE TRANSPORT CARRIER DOCKING DEVICE
- Publication number 20230335424
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT
- Publication number 20230253229
- Publication date Aug 10, 2023
- Rorze Corporation
- Daigo TAMATSUKURI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...
- Publication number 20230253228
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW SUPPLY APPARATUS AND SUPPLY METHOD
- Publication number 20230207361
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Sung Ho LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...
- Publication number 20230207354
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HANDLING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20230178403
- Publication date Jun 8, 2023
- NANYA TECHNOLOGY CORPORATION
- Jih-Cheng HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20230166301
- Publication date Jun 1, 2023
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE STORAGE RACKS FOR SEMICONDUCTOR PROCESSING SYSTEMS
- Publication number 20230143667
- Publication date May 11, 2023
- ASM IP HOLDING B.V.
- Gurupkar Nerwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS
- Publication number 20230113673
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20230116577
- Publication date Apr 13, 2023
- LAM RESEARCH CORPORATION
- Alexander Charles MARCACCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAL MECHANISMS FOR LOAD PORTS
- Publication number 20230094114
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Douglas B. Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Placement system for door of wafer pod
- Publication number 20230029491
- Publication date Feb 2, 2023
- Shanghai GoNa Semiconductor Technology Co., Ltd.
- Dongfeng Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION POD FOR ROBOTIC WAFER CARRIER HANDLING AND CALIBRATION...
- Publication number 20220344185
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzu-Chin Huang
- G05 - CONTROLLING REGULATING
Information Patent Application
SHORTENED LOAD PORT FOR FACTORY INTERFACE
- Publication number 20220285193
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Srinivas Poshatrahalli Gopalakrishna
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Docking arrangements

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System with substrate carrier deterioration detection and repair

Display panel, jig, and method of manufacturing display panel with...

Shortened load port for factory interface

Side storage pods, equipment front end modules, and methods for pro...

Factory interface robots usable with integrated load locks

Substrate processing apparatus and method of manufacturing semicond...

Increased number of load ports on factory interface with robot that...

Airflow detection device and methods of use

Chiller make-break connector for substrate processing systems

Prevention of contamination of substrates during gas purging

Calibration pod for robotic wafer carrier handling and calibration...

Substrate processing system for processing substrates with an elect...

Sealed substrate carriers and systems and methods for transporting...

EFEM robot auto teaching methodology

Substrate transport

Chip transfer device capable of floatingly positioning a chip and m...

Processing apparatus

Seal mechanisms for load ports

Indexable side storage pod apparatus, heated side storage pod appar...

Prevention of contamination of substrates during gas purging

Substrate processing systems, apparatus, and methods with substrate...

Storage apparatus for storing cassettes for substrates and processi...

Wafer handling apparatus and method of operating the same

Vacuum processing apparatus and substrate transfer method

Placement system for door of wafer pod

Conversion plate for reticle pod storage and a reticle pod storage...

Substrate transport

Multiple transport carrier docking device

Load port apparatus and method of driving the same

Side storage pods, equipment front end modules, and methods for ope...

Patents Applicationslast 30 patents

Substrate Cassette Handling Apparatus, Substrate Processing Apparat...

CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS

AIRFLOW DETECTION DEVICE AND METHODS OF USE

INCREASED NUMBER OF LOAD PORTS ON FACTORY INTERFACE WITH ROBOT THAT...

CALIBRATION POD FOR ROBOTIC WAFER CARRIER HANDLING AND CALIBRATION...

PLACEMENT BASE

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD

STORAGE APPARATUS FOR SEMICONDUCTOR DEVICES AND STORAGE SYSTEM INCL...

WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...

EFEM ROBOT AUTO TEACHING METHODOLOGY

SUPPORT UNIT, LINE STORAGE UNIT, AND TRANSPORT SYSTEM INCLUDING THE...

LOADING AND UNLOADING SYSTEM FOR SILICON WAFER

Handling device for transporting interface units for a test device...

GAS PURGE UNIT AND THE LOAD PORT DEVICE

LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT

SUBSTRATE TRANSPORT

MULTIPLE TRANSPORT CARRIER DOCKING DEVICE

LOAD PORT

SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...

FLOW SUPPLY APPARATUS AND SUPPLY METHOD

MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...

WAFER HANDLING APPARATUS AND METHOD OF OPERATING THE SAME

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE STORAGE RACKS FOR SEMICONDUCTOR PROCESSING SYSTEMS

FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS

CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS

SEAL MECHANISMS FOR LOAD PORTS

Placement system for door of wafer pod

CALIBRATION POD FOR ROBOTIC WAFER CARRIER HANDLING AND CALIBRATION...

SHORTENED LOAD PORT FOR FACTORY INTERFACE