Dosimetry

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CPC
H01J2237/31703

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31703Dosimetry

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Ion beam implantation method and semiconductor device
- Patent number 11,908,694
- Issue date Feb 20, 2024
- Infineon Technologies AG
- Moriz Jelinek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and model generation method
- Patent number 11,823,863
- Issue date Nov 21, 2023
- SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, LTD.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and model generation method
- Patent number 11,527,381
- Issue date Dec 13, 2022
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for determining and correcting for expected dose variati...
- Patent number 11,264,205
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Eric Donald Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and ion implantation method
- Patent number 11,145,488
- Issue date Oct 12, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation amount adjustment device and method, ion implantat...
- Patent number 10,734,189
- Issue date Aug 4, 2020
- Chengdu Boe Optoelectronics Technology Co., Ltd.
- Hao Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for ion implantation
- Patent number 10,622,268
- Issue date Apr 14, 2020
- Infineon Technologies AG
- Johannes Georg Laven
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam profiling speed enhancement for scanned beam implanters
- Patent number 10,483,086
- Issue date Nov 19, 2019
- Axcelis Technologies, Inc.
- Andy M. Ray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques for beam mapping in ion beam system
- Patent number 10,431,421
- Issue date Oct 1, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ beam current monitoring and control in scanned ion implanta...
- Patent number 10,395,889
- Issue date Aug 27, 2019
- Axcelis Technologies, Inc.
- Alfred Mike Halling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic field fluctuation for beam smoothing
- Patent number 10,361,059
- Issue date Jul 23, 2019
- Advanced Ion Beam Technology, Inc.
- Xiao Bai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implanter, ion beam irradiated target, and ion implantation method
- Patent number 10,354,835
- Issue date Jul 16, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for implantation of semiconductor wafers having high bulk re...
- Patent number 9,824,857
- Issue date Nov 21, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Michael W. Osborne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and semiconductor manufacturing method
- Patent number 9,773,712
- Issue date Sep 26, 2017
- TOSHIBA MEMORY CORPORATION
- Takayuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monitoring device, ion implantation device, and monitoring method
- Patent number 9,741,534
- Issue date Aug 22, 2017
- Lapis Semiconductor Co., Ltd.
- Makoto Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for generating parameter pattern, ion implantation method an...
- Patent number 9,697,989
- Issue date Jul 4, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective area implant of a workpiece
- Patent number 9,583,309
- Issue date Feb 28, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jordan B. Tye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implant-induced damage control in ion implantation
- Patent number 9,490,185
- Issue date Nov 8, 2016
- Axcelis Technologies, Inc.
- Ronald N. Reece
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for monitoring ion implantation
- Patent number 9,449,889
- Issue date Sep 20, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic field fluctuation for beam smoothing
- Patent number 9,340,870
- Issue date May 17, 2016
- Advanced Ion Beam Technology, Inc.
- Xiao Bai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implanter, beam energy measuring device, and method of measurin...
- Patent number 9,343,263
- Issue date May 17, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Haruka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion irradiation apparatus and ion irradiation method
- Patent number 9,230,776
- Issue date Jan 5, 2016
- Nissin Ion Equipment Co., Ltd.
- Takeshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dosage accuracy monitoring systems of implanters
- Patent number 9,048,069
- Issue date Jun 2, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Juan-Lin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for monitoring ion implantation
- Patent number 9,006,676
- Issue date Apr 14, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of dosage profile control
- Patent number 8,925,479
- Issue date Jan 6, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Keung Hui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for checking ion implantation condition and method for manuf...
- Patent number 8,906,708
- Issue date Dec 9, 2014
- Shin-Etsu Handotai Co., Ltd.
- Isao Yokokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dose measurement device for plasma-immersion ion implantation
- Patent number 8,895,945
- Issue date Nov 25, 2014
- Ion Beam Services
- Frank Torregrosa
- G01 - MEASURING TESTING
Information Patent Grant
Ion implanting apparatus
- Patent number 8,791,433
- Issue date Jul 29, 2014
- Ulvac, Inc.
- Tsutomu Nishihashi
- G11 - INFORMATION STORAGE
Information Patent Grant
Manufacturing system for semiconductor device capable of controllin...
- Patent number 8,735,181
- Issue date May 27, 2014
- Kabushiki Kaisha Toshiba
- Osamu Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation system and ion beam irradiation method
- Patent number 8,735,855
- Issue date May 27, 2014
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM
- Publication number 20240194444
- Publication date Jun 13, 2024
- INFINEON TECHNOLOGIES AG
- Moriz Jelinek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IMPLANTATION METHOD AND SEMICONDUCTOR DEVICE
- Publication number 20240145247
- Publication date May 2, 2024
- INFINEON TECHNOLOGIES AG
- Moriz JELINEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GA IMPLANT PROCESS CONTROL FOR ENHANCED PARTICLE PERFORMANCE
- Publication number 20230386786
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND MODEL GENERATION METHOD
- Publication number 20230038439
- Publication date Feb 9, 2023
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND MODEL GENERATION METHOD
- Publication number 20210280388
- Publication date Sep 9, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IMPLANTATION METHOD AND SEMICONDUCTOR DEVICE
- Publication number 20210193435
- Publication date Jun 24, 2021
- INFINEON TECHNOLOGIES AG
- Moriz JELINEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR DETERMINING AND CORRECTING FOR EXPECTED DOSE VARIATI...
- Publication number 20210175048
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Eric Donald Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20210043421
- Publication date Feb 11, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM
- Publication number 20200027698
- Publication date Jan 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM
- Publication number 20190139740
- Publication date May 9, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER, ION BEAM IRRADIATED TARGET, AND ION IMPLANTATION METHOD
- Publication number 20180350557
- Publication date Dec 6, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR IMPLANTATION OF SEMICONDUCTOR WAFERS HAVING HIGH BULK RE...
- Publication number 20170207063
- Publication date Jul 20, 2017
- Michael W. Osborne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONITORING DEVICE, ION IMPLANTATION DEVICE, AND MONITORING METHOD
- Publication number 20160217973
- Publication date Jul 28, 2016
- LAPIS SEMICONDUCTOR CO., LTD.
- Makoto Ishida
- G01 - MEASURING TESTING
Information Patent Application
Beam Profiling Speed Enhancement for Scanned Beam Implanters
- Publication number 20160189926
- Publication date Jun 30, 2016
- Axcelis Technologies, Inc.
- Andy M. Ray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER, BEAM ENERGY MEASURING DEVICE, AND METHOD OF MEASURIN...
- Publication number 20150262787
- Publication date Sep 17, 2015
- SEN Corporation
- Haruka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IRRADIATION APPARATUS AND ION IRRADIATION METHOD
- Publication number 20150262790
- Publication date Sep 17, 2015
- NISSIN ION EQUIPMENT CO., LTD.
- Takeshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR CONTROLLING ION IMPLANTATION UNIFORMITY
- Publication number 20140326179
- Publication date Nov 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Stanislav S. Todorov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC FIELD FLUCTUATION FOR BEAM SMOOTHING
- Publication number 20140212595
- Publication date Jul 31, 2014
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Xiao BAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPLANT-INDUCED DAMAGE CONTROL IN ION IMPLANTATION
- Publication number 20140065730
- Publication date Mar 6, 2014
- Axcelis Technologies, Inc.
- Ronald N. Reece
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Monitoring Ion Implantation
- Publication number 20130280823
- Publication date Oct 24, 2013
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLAR CELL, SOLAR CELL MANUFACTURING DEVICE, AND METHOD FOR MANUFAC...
- Publication number 20130186457
- Publication date Jul 25, 2013
- LG ELECTRONICS INC.
- Gyeayoung KWAG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOSE MEASUREMENT DEVICE FOR PLASMA-IMMERSION ION IMPLANTATION
- Publication number 20130153779
- Publication date Jun 20, 2013
- ION BEAM SERVICES
- Frank Torregrosa
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR ION IMPLANTATION WITH IMPROVED PRODUCTIVITY A...
- Publication number 20130146760
- Publication date Jun 13, 2013
- Axcelis Technologies, Inc.
- Edward C. Eisner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20130092825
- Publication date Apr 18, 2013
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for Monitoring Ion Implantation
- Publication number 20130068960
- Publication date Mar 21, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method of Dosage Profile Control
- Publication number 20130068162
- Publication date Mar 21, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Keung Hui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTER
- Publication number 20130042809
- Publication date Feb 21, 2013
- NISSIN ION EQUIPMENT CO., LTD.
- Masao Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CHECKING ION IMPLANTATION CONDITION AND METHOD FOR MANUF...
- Publication number 20130023069
- Publication date Jan 24, 2013
- Shin-Etsu Handotai Co., Ltd.
- Isao Yokokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM LINE SYSTEM OF ION IMPLANTER
- Publication number 20130009075
- Publication date Jan 10, 2013
- United Microelectronics Corp.
- Boon-Chau TONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETERMINING RELATIVE SCAN VELOCITY TO CONTROL ION IMPLANTATION OF W...
- Publication number 20120196047
- Publication date Aug 2, 2012
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Cheng-Hui Shen
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion beam implantation method and semiconductor device

Ion implanter and model generation method

Ion implanter and model generation method

Techniques for determining and correcting for expected dose variati...

Ion implanter and ion implantation method

Ion implantation amount adjustment device and method, ion implantat...

Apparatus and method for ion implantation

Beam profiling speed enhancement for scanned beam implanters

Apparatus and techniques for beam mapping in ion beam system

In situ beam current monitoring and control in scanned ion implanta...

Magnetic field fluctuation for beam smoothing

Ion implanter, ion beam irradiated target, and ion implantation method

Method for implantation of semiconductor wafers having high bulk re...

Ion implantation apparatus and semiconductor manufacturing method

Monitoring device, ion implantation device, and monitoring method

Method for generating parameter pattern, ion implantation method an...

Selective area implant of a workpiece

Implant-induced damage control in ion implantation

Method for monitoring ion implantation

Magnetic field fluctuation for beam smoothing

Ion implanter, beam energy measuring device, and method of measurin...

Ion irradiation apparatus and ion irradiation method

Dosage accuracy monitoring systems of implanters

Apparatus for monitoring ion implantation

System and method of dosage profile control

Method for checking ion implantation condition and method for manuf...

Dose measurement device for plasma-immersion ion implantation

Ion implanting apparatus

Manufacturing system for semiconductor device capable of controllin...

Ion beam irradiation system and ion beam irradiation method

Patents Applicationslast 30 patents

ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM

ION BEAM IMPLANTATION METHOD AND SEMICONDUCTOR DEVICE

GA IMPLANT PROCESS CONTROL FOR ENHANCED PARTICLE PERFORMANCE

ION IMPLANTER AND MODEL GENERATION METHOD

ION IMPLANTER AND MODEL GENERATION METHOD

ION BEAM IMPLANTATION METHOD AND SEMICONDUCTOR DEVICE

TECHNIQUES FOR DETERMINING AND CORRECTING FOR EXPECTED DOSE VARIATI...

ION IMPLANTER AND ION IMPLANTATION METHOD

APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM

APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM

ION IMPLANTER, ION BEAM IRRADIATED TARGET, AND ION IMPLANTATION METHOD

METHOD FOR IMPLANTATION OF SEMICONDUCTOR WAFERS HAVING HIGH BULK RE...

MONITORING DEVICE, ION IMPLANTATION DEVICE, AND MONITORING METHOD

Beam Profiling Speed Enhancement for Scanned Beam Implanters

ION IMPLANTER, BEAM ENERGY MEASURING DEVICE, AND METHOD OF MEASURIN...

ION IRRADIATION APPARATUS AND ION IRRADIATION METHOD

APPARATUS AND TECHNIQUES FOR CONTROLLING ION IMPLANTATION UNIFORMITY

MAGNETIC FIELD FLUCTUATION FOR BEAM SMOOTHING

IMPLANT-INDUCED DAMAGE CONTROL IN ION IMPLANTATION

Apparatus for Monitoring Ion Implantation

SOLAR CELL, SOLAR CELL MANUFACTURING DEVICE, AND METHOD FOR MANUFAC...

DOSE MEASUREMENT DEVICE FOR PLASMA-IMMERSION ION IMPLANTATION

SYSTEM AND METHOD FOR ION IMPLANTATION WITH IMPROVED PRODUCTIVITY A...

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

Apparatus for Monitoring Ion Implantation

System and Method of Dosage Profile Control

ION IMPLANTER

METHOD FOR CHECKING ION IMPLANTATION CONDITION AND METHOD FOR MANUF...

BEAM LINE SYSTEM OF ION IMPLANTER

DETERMINING RELATIVE SCAN VELOCITY TO CONTROL ION IMPLANTATION OF W...