Dry etching

Industry

CPC
C04B41/5346

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Parent Industries

CCHEMISTRY METALLURGY C04Concrete, cement, ceramics C04BLIME, MAGNESIA SLAG CEMENTS COMPOSITIONS THEREOF C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics Treatment of natural stone

Current Industry

C04B41/5346Dry etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 12,183,589
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of surface functionalization of zirconia-toughened alumina...
- Patent number 12,162,807
- Issue date Dec 10, 2024
- SINTX Technologies, Inc.
- Bryan J. McEntire
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Waterproofing system
- Patent number 12,054,425
- Issue date Aug 6, 2024
- Sika Technology AG
- Dario Caviezel
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method for applying a coating to a surface of a mullite material, m...
- Patent number 11,964,921
- Issue date Apr 23, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Werner Stamm
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Mildewproof and antirot high-strength cement particle board and pre...
- Patent number 11,702,362
- Issue date Jul 18, 2023
- Central South University Of Forestry and Technology
- Yiqiang Wu
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Waterproofing system
- Patent number 11,597,684
- Issue date Mar 7, 2023
- Sika Technology AG
- Dario Caviezel
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Inert gas-assisted laser machining of ceramic-containing articles
- Patent number 11,524,365
- Issue date Dec 13, 2022
- II-VI DELAWARE, INC.
- Austin Scott McDannald
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Process for providing a fiber cement product
- Patent number 11,498,242
- Issue date Nov 15, 2022
- Eternit, NV
- Philippe Hellemans
- B24 - GRINDING POLISHING
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 11,355,353
- Issue date Jun 7, 2022
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermally guided chemical etching of a substrate and real-time moni...
- Patent number 11,313,813
- Issue date Apr 26, 2022
- Momentum Optics LLC
- Jeremy Goeckeritz
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Median barrier finishing machine
- Patent number 11,161,793
- Issue date Nov 2, 2021
- Sanford-Meyer, LLC
- Elmore Starr Sanford
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Method of processing a ceramic matrix composite (CMC) component
- Patent number 10,752,556
- Issue date Aug 25, 2020
- Rolls-Royce High Temperature Composites Inc.
- Sungbo Shim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of determining output flow rate of gas output by flow rate c...
- Patent number 10,316,835
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Jun Yamashima
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of surface marking a mechanical part with a predefined graph...
- Patent number 10,138,170
- Issue date Nov 27, 2018
- SAFRAN AIRCRAFT ENGINES
- Pascal Bilhe
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method for producing ceramic composite for light conversion
- Patent number 9,334,197
- Issue date May 10, 2016
- UBE Industries, Ltd.
- Dai Inamori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method to increase yield and reduce down time in semiconductor fabr...
- Patent number 8,721,906
- Issue date May 13, 2014
- Poco Graphite, Inc.
- Wayne Hambek
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method for dry chemical treatment of substrates and also use thereof
- Patent number 8,569,175
- Issue date Oct 29, 2013
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Stefan Reber
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Dry etching method, fine structure formation method, mold and mold...
- Patent number 7,919,005
- Issue date Apr 5, 2011
- Panasonic Corporation
- Hideo Nakagawa
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Dry etching method, fine structure formation method, mold and mold...
- Patent number 7,906,030
- Issue date Mar 15, 2011
- Panasonic Corporation
- Hideo Nakagawa
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method and apparatus which reduce the erosion rate of surfaces expo...
- Patent number 7,696,117
- Issue date Apr 13, 2010
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching a workpiece
- Patent number 7,479,235
- Issue date Jan 20, 2009
- Ahead Magnetics, Inc.
- Simone Guerriero
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Aluminum oxide sintered body, and members using same for semiconduc...
- Patent number 7,304,010
- Issue date Dec 4, 2007
- Kyocera Corporation
- Masaki Hayashi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Systems and methods for laser-assisted plasma processing
- Patent number 7,297,892
- Issue date Nov 20, 2007
- RAPT Industries, Inc.
- Jude Kelley
- B08 - CLEANING
Information Patent Grant
Method of marking sintered body and method for manufacturing magnet...
- Patent number 7,187,523
- Issue date Mar 6, 2007
- Neomax Co., Ltd.
- Taisuke Hirooka
- G11 - INFORMATION STORAGE
Information Patent Grant
Method for topographical patterning of a device
- Patent number 7,129,179
- Issue date Oct 31, 2006
- Seagate Technology LLC
- Zine Eddine Boutaghou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of marking sintered body and method for manufacturing magnet...
- Patent number 6,906,895
- Issue date Jun 14, 2005
- Neomax Co., Ltd.
- Taisuke Hirooka
- G11 - INFORMATION STORAGE
Information Patent Grant
Method for improved plasma etching control
- Patent number 6,828,251
- Issue date Dec 7, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Nien Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-mechanical fabrication of carbon-containing work pieces
- Patent number 6,736,984
- Issue date May 18, 2004
- Honeywell International Inc.
- Ilan Golecki
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Process for converting a metal carbide to carbon by etching in halo...
- Patent number 6,579,833
- Issue date Jun 17, 2003
- The Board of Trustees of the University of Illinois
- Michael J. McNallan
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method for plasma etching of Ir-Ta-O electrode and for post-etch cl...
- Patent number 6,541,385
- Issue date Apr 1, 2003
- Sharp Laboratories of America, Inc.
- Hong Ying
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR FABRICATING TWO-DIMENSIONAL MATERIAL BY USING...
- Publication number 20240092702
- Publication date Mar 21, 2024
- BEIHANG UNIVERSITY
- Shubin Yang
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
CERAMIC WAFER WITH SURFACE SHAPE AND MANUFACTURING THEREOF
- Publication number 20240063050
- Publication date Feb 22, 2024
- Hong Chuang Applied Technology Co., Ltd
- YAN-KAI ZENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240007023
- Publication date Jan 4, 2024
- NGK Insulators, Ltd.
- Yusuke OGISO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
A METHOD FOR PRODUCING CERAMIC TILES
- Publication number 20240002303
- Publication date Jan 4, 2024
- Marazzi Group SRL
- Lorenzo VALERIANI
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
METHOD OF SHAPING A CARRIER SHEET OF HIGH HARDNESS
- Publication number 20230322635
- Publication date Oct 12, 2023
- SENSONIC DESIGN ZRT.
- Dávid Vilmos JÁVORI
- B24 - GRINDING POLISHING
Information Patent Application
SANDBLASTING SURFACE TREATMENT METHOD TO PREVENT SUBSURFACE DAMAGE...
- Publication number 20230167034
- Publication date Jun 1, 2023
- AJOU UNIVERSITY INDUSTRY- ACADEMIC COOPERATION FOUNDATION
- Hee-Kyung KIM
- B24 - GRINDING POLISHING
Information Patent Application
WATERPROOFING SYSTEM
- Publication number 20230150875
- Publication date May 18, 2023
- Sika Technology AG
- Dario CAVIEZEL
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
CERAMIC ARTICLE WITH ENHANCED STRUCTURAL AND THERMAL STABILITY AND...
- Publication number 20230150858
- Publication date May 18, 2023
- Blasch Precision Ceramics, Inc.
- William Patrick Russell
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INERT GAS-ASSISTED LASER MACHINING OF CERAMIC-CONTAINING ARTICLES
- Publication number 20230115031
- Publication date Apr 13, 2023
- II-VI Delaware, Inc.
- Austin Scott Mcdannald
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS OF SURFACE FUNCTIONALIZATION OF ZIRCONIA-TOUGHENED ALUMINA...
- Publication number 20220289637
- Publication date Sep 15, 2022
- SINTX Technologies, Inc.
- Bryan J. MCENTIRE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
THERMALLY GUIDED CHEMICAL ETCHING OF A SUBSTRATE AND REAL-TIME MONI...
- Publication number 20220252529
- Publication date Aug 11, 2022
- Momentum Optics LLC
- Jeremy Goeckeritz
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
METHOD FOR APPLYING A COATING TO A SURFACE OF A MULLITE MATERIAL, M...
- Publication number 20220213000
- Publication date Jul 7, 2022
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Werner STAMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN OXIDE MANDRELS IN PATTERNING
- Publication number 20210265173
- Publication date Aug 26, 2021
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rubber flooring and method for producing rubber flooring for heavy...
- Publication number 20210102387
- Publication date Apr 8, 2021
- Joseph Grubic
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
MILDEWPROOF AND ANTIROT HIGH-STRENGTH CEMENT PARTICLE BOARD AND PRE...
- Publication number 20210017078
- Publication date Jan 21, 2021
- Central South University of Forestry and Technology
- Yiqiang Wu
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
THERMALLY GUIDED CHEMICAL ETCHING OF A SUBSTRATE AND REAL-TIME MONI...
- Publication number 20200300787
- Publication date Sep 24, 2020
- Momentum Optics
- Jeremy Goeckeritz
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Inert gas-assisted laser machining of ceramic-containing articles
- Publication number 20200230747
- Publication date Jul 23, 2020
- M Cubed Technologies, Inc.
- Austin Scott McDannald
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
A WATERPROOFING SYSTEM
- Publication number 20200181018
- Publication date Jun 11, 2020
- Sika Technology AG
- Dario CAVIEZEL
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
METHOD OF PROCESSING A CERAMIC MATRIX COMPOSITE (CMC) COMPONENT
- Publication number 20200123069
- Publication date Apr 23, 2020
- Rolls-Royce Corporation
- Sungbo Shim
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
MEDIAN BARRIER FINISHING MACHINE
- Publication number 20200115292
- Publication date Apr 16, 2020
- Sanford-Meyer, LLC
- Elmore Starr Sanford
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SURFACE ROUGHENING OF CMC AND COATED CMC
- Publication number 20190359532
- Publication date Nov 28, 2019
- SIEMENS AKTIENGESELLSCHAFT
- Niels Van der Laag
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TIN OXIDE MANDRELS IN PATTERNING
- Publication number 20190237341
- Publication date Aug 1, 2019
- LAM RESEARCH CORPORATION
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY HAVING SURFACE FEATURES TO IMPROVE THERM...
- Publication number 20180204747
- Publication date Jul 19, 2018
- Applied Materials, Inc.
- Vladimir Knyazik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A Process for Providing a Fiber Cement Product
- Publication number 20170080598
- Publication date Mar 23, 2017
- Eternit NV
- Philippe Hellemans
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
A METHOD OF SURFACE MARKING A MECHANICAL PART WITH A PREDEFINED GRA...
- Publication number 20150290744
- Publication date Oct 15, 2015
- SNECMA
- Pascal Bilhe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS-ASSISTED LASER MACHINING
- Publication number 20150034596
- Publication date Feb 5, 2015
- Selim Elhadj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Producing Ceramic Composite for Light Conversion
- Publication number 20140138348
- Publication date May 22, 2014
- Ube Industries, Ltd.
- Dai Inamori
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD TO INCREASE YIELD AND REDUCE DOWN TIME IN SEMICONDUCTOR FABR...
- Publication number 20110239429
- Publication date Oct 6, 2011
- Poco Graphite, Inc.
- Wayne Hambek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR STRUCTURING SILICON CARBIDE WITH THE AID OF FLUORINE-CON...
- Publication number 20100086463
- Publication date Apr 8, 2010
- Joachim Rudhard
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
METHOD FOR DRY CHEMICAL TREATMENT OF SUBSTRATES AND ALSO USE THEREOF
- Publication number 20090197049
- Publication date Aug 6, 2009
- Stefan Reber
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

Dry etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Tin oxide mandrels in patterning

Methods of surface functionalization of zirconia-toughened alumina...

Waterproofing system

Method for applying a coating to a surface of a mullite material, m...

Mildewproof and antirot high-strength cement particle board and pre...

Waterproofing system

Inert gas-assisted laser machining of ceramic-containing articles

Process for providing a fiber cement product

Tin oxide mandrels in patterning

Thermally guided chemical etching of a substrate and real-time moni...

Median barrier finishing machine

Method of processing a ceramic matrix composite (CMC) component

Method of determining output flow rate of gas output by flow rate c...

Method of surface marking a mechanical part with a predefined graph...

Method for producing ceramic composite for light conversion

Method to increase yield and reduce down time in semiconductor fabr...

Method for dry chemical treatment of substrates and also use thereof

Dry etching method, fine structure formation method, mold and mold...

Dry etching method, fine structure formation method, mold and mold...

Method and apparatus which reduce the erosion rate of surfaces expo...

Method for etching a workpiece

Aluminum oxide sintered body, and members using same for semiconduc...

Systems and methods for laser-assisted plasma processing

Method of marking sintered body and method for manufacturing magnet...

Method for topographical patterning of a device

Method of marking sintered body and method for manufacturing magnet...

Method for improved plasma etching control

Non-mechanical fabrication of carbon-containing work pieces

Process for converting a metal carbide to carbon by etching in halo...

Method for plasma etching of Ir-Ta-O electrode and for post-etch cl...

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR FABRICATING TWO-DIMENSIONAL MATERIAL BY USING...

CERAMIC WAFER WITH SURFACE SHAPE AND MANUFACTURING THEREOF

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

A METHOD FOR PRODUCING CERAMIC TILES

METHOD OF SHAPING A CARRIER SHEET OF HIGH HARDNESS

SANDBLASTING SURFACE TREATMENT METHOD TO PREVENT SUBSURFACE DAMAGE...

WATERPROOFING SYSTEM

CERAMIC ARTICLE WITH ENHANCED STRUCTURAL AND THERMAL STABILITY AND...

INERT GAS-ASSISTED LASER MACHINING OF CERAMIC-CONTAINING ARTICLES

METHODS OF SURFACE FUNCTIONALIZATION OF ZIRCONIA-TOUGHENED ALUMINA...

THERMALLY GUIDED CHEMICAL ETCHING OF A SUBSTRATE AND REAL-TIME MONI...

METHOD FOR APPLYING A COATING TO A SURFACE OF A MULLITE MATERIAL, M...

TIN OXIDE MANDRELS IN PATTERNING

Rubber flooring and method for producing rubber flooring for heavy...

MILDEWPROOF AND ANTIROT HIGH-STRENGTH CEMENT PARTICLE BOARD AND PRE...

THERMALLY GUIDED CHEMICAL ETCHING OF A SUBSTRATE AND REAL-TIME MONI...

Inert gas-assisted laser machining of ceramic-containing articles

A WATERPROOFING SYSTEM

METHOD OF PROCESSING A CERAMIC MATRIX COMPOSITE (CMC) COMPONENT

MEDIAN BARRIER FINISHING MACHINE

SURFACE ROUGHENING OF CMC AND COATED CMC

TIN OXIDE MANDRELS IN PATTERNING

SUBSTRATE SUPPORT ASSEMBLY HAVING SURFACE FEATURES TO IMPROVE THERM...

A Process for Providing a Fiber Cement Product

A METHOD OF SURFACE MARKING A MECHANICAL PART WITH A PREDEFINED GRA...

GAS-ASSISTED LASER MACHINING

Method for Producing Ceramic Composite for Light Conversion

METHOD TO INCREASE YIELD AND REDUCE DOWN TIME IN SEMICONDUCTOR FABR...

METHOD FOR STRUCTURING SILICON CARBIDE WITH THE AID OF FLUORINE-CON...

METHOD FOR DRY CHEMICAL TREATMENT OF SUBSTRATES AND ALSO USE THEREOF