Elastic scattering

Industry

CPC
H01J2237/2805

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2805Elastic scattering

Industries

Patents Grantslast 30 patents

Information Patent Grant
Detection of buried features by backscattered particles
- Patent number 11,443,915
- Issue date Sep 13, 2022
- ASML Netherlands B.V.
- Joe Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and method for determining crystal ori...
- Patent number 10,935,505
- Issue date Mar 2, 2021
- Jeol Ltd.
- Takeshi Otsuka
- G01 - MEASURING TESTING
Information Patent Grant
Electron microscope and specimen tilt angle adjustment method
- Patent number 10,867,771
- Issue date Dec 15, 2020
- Jeol Ltd.
- Shuji Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image capture assembly and method for electron back scatter diffrac...
- Patent number 10,692,689
- Issue date Jun 23, 2020
- VG Systems Limited
- Zoran Pesic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining the deflection of an electron beam resulting...
- Patent number 10,593,511
- Issue date Mar 17, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Benedikt Haas
- G01 - MEASURING TESTING
Information Patent Grant
Backscattered electrons (BSE) imaging using multi-beam tools
- Patent number 10,460,905
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Mark A. McCord
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen observation method and device using secondary emission ele...
- Patent number 9,966,227
- Issue date May 8, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen observation method and device using secondary emission ele...
- Patent number 8,937,283
- Issue date Jan 20, 2015
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic microscope apparatus
- Patent number 7,872,232
- Issue date Jan 18, 2011
- Hitachi High-Technologies Corporation
- Kazutoshi Kaji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SAMPLE ANALYZING APPARATUS AND SAMPLE ANALYZING METHOD
- Publication number 20130248706
- Publication date Sep 26, 2013
- Haruko AKUTSU
- G01 - MEASURING TESTING
Information Patent Application
PHYSICAL PROPERTIES MEASURING METHOD AND APPARATUS
- Publication number 20110304724
- Publication date Dec 15, 2011
- FUJITSU LIMITED
- Takashi YAMAZAKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SPECIMEN OBSERVATION METHOD AND DEVICE, AND INSPECTION METHOD AND D...
- Publication number 20110155905
- Publication date Jun 30, 2011
- EBARA CORPORATION
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR CRYSTAL ORIENTATION MEASUREMENT BY MEANS OF A...
- Publication number 20100237242
- Publication date Sep 23, 2010
- Robert Schwarzer
- G01 - MEASURING TESTING
Information Patent Application
ELECTRONIC MICROSCOPE APPARATUS
- Publication number 20090194691
- Publication date Aug 6, 2009
- Katzutoshi KAJI
- H01 - BASIC ELECTRIC ELEMENTS

Elastic scattering

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Detection of buried features by backscattered particles

Scanning electron microscope and method for determining crystal ori...

Electron microscope and specimen tilt angle adjustment method

Image capture assembly and method for electron back scatter diffrac...

Method of determining the deflection of an electron beam resulting...

Backscattered electrons (BSE) imaging using multi-beam tools

Specimen observation method and device using secondary emission ele...

Specimen observation method and device using secondary emission ele...

Electronic microscope apparatus

Patents Applicationslast 30 patents

SAMPLE ANALYZING APPARATUS AND SAMPLE ANALYZING METHOD

PHYSICAL PROPERTIES MEASURING METHOD AND APPARATUS

SPECIMEN OBSERVATION METHOD AND DEVICE, AND INSPECTION METHOD AND D...

DEVICE AND METHOD FOR CRYSTAL ORIENTATION MEASUREMENT BY MEANS OF A...

ELECTRONIC MICROSCOPE APPARATUS