Electrolytic etching

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CPC
H01L21/3063

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3063Electrolytic etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing a semiconductor using slurry
- Patent number 12,176,217
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Hung Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanorod production method and nanorod produced thereby
- Patent number 12,074,247
- Issue date Aug 27, 2024
- Samsung Display Co., Ltd.
- Young Rag Do
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and device for manufacturing structure
- Patent number 12,054,847
- Issue date Aug 6, 2024
- Sumitomo Chemical Company, Limited
- Fumimasa Horikiri
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Three-dimensional semiconductor fabrication
- Patent number 12,031,227
- Issue date Jul 9, 2024
- NIELSON SCIENTIFIC, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High aspect ratio gratings fabricated by electrodeposition
- Patent number 11,798,844
- Issue date Oct 24, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Christian Lew Arrington
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor structure etching solution and method for fabricating...
- Patent number 11,764,067
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chung-Chieh Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slurry
- Patent number 11,688,607
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Hung Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrochemical imprinting of micro- and nano-structures in porous...
- Patent number 11,579,524
- Issue date Feb 14, 2023
- Arizona Board of Regents on behalf of Arizona State University
- Keng Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal-coated porous polymeric stamp materials for electrochemical i...
- Patent number 11,549,193
- Issue date Jan 10, 2023
- Arizona Board of Regents on behalf of Arizona State University
- Jasmina Markovski
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of electrochemically processing a substrate and integrated c...
- Patent number 11,538,689
- Issue date Dec 27, 2022
- Universite Catholique De Louvain
- Gilles Scheen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for etching one side of a semiconductor layer...
- Patent number 11,519,094
- Issue date Dec 6, 2022
- NexWafe GmbH
- Stefan Reber
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,450,530
- Issue date Sep 20, 2022
- Tokyo Electron Limited
- Rintaro Higuchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Nanorod production method and nanorod produced thereby
- Patent number 11,450,737
- Issue date Sep 20, 2022
- Samsung Display Co., Ltd.
- Young Rag Do
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Three-dimensional semiconductor fabrication
- Patent number 11,421,338
- Issue date Aug 23, 2022
- NIELSON SCIENTIFIC, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor surface smoothing and semiconductor arrangement
- Patent number 11,373,857
- Issue date Jun 28, 2022
- Infineon Technologies AG
- Bernhard Goller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor material having tunable permittivity and tunable ther...
- Patent number 11,355,340
- Issue date Jun 7, 2022
- IQE PLC
- Richard Hammond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hole forming method and hole forming apparatus
- Patent number 11,333,623
- Issue date May 17, 2022
- HITACHI HIGH-TECH CORPORATION
- Itaru Yanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic circuit production
- Patent number 11,266,023
- Issue date Mar 1, 2022
- DST Innovations Limited
- Anthony Miles
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method of manufacture using complementary conductivity-selective we...
- Patent number 11,195,722
- Issue date Dec 7, 2021
- Georgia Tech Research Corporation
- Shyh-Chiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distribution system for chemical and/or electrolytic surface treatment
- Patent number 11,105,014
- Issue date Aug 31, 2021
- SEMSYSCO GMBH
- Andreas Gleissner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet etch apparatus and method of using the same
- Patent number 11,107,707
- Issue date Aug 31, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hong-Ting Lu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor fabrication with electrochemical apparatus
- Patent number 11,101,149
- Issue date Aug 24, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Andrew Joseph Kelly
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for producing patterns in a substrate
- Patent number 11,049,724
- Issue date Jun 29, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Lamia Nouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for GaN vertical microcavity surface emitting laser (VCSEL)
- Patent number 11,043,792
- Issue date Jun 22, 2021
- Yale University
- Jung Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure etching solution and method for fabricating...
- Patent number 11,037,792
- Issue date Jun 15, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chung-Chieh Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transferring nanostructures from wafers to transparent substrates
- Patent number 11,001,535
- Issue date May 11, 2021
- Applied Materials, Inc.
- Tapashree Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Group III nitride semiconductor and method for producing same
- Patent number 10,923,346
- Issue date Feb 16, 2021
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Akihiko Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization apparatus and planarization method thereof
- Patent number 10,879,077
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ming-Tung Wu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Vertical power devices with oxygen inserted Si-layers
- Patent number 10,868,172
- Issue date Dec 15, 2020
- Infineon Technologies Austria AG
- Oliver Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio-frequency isolation using porous silicon
- Patent number 10,755,987
- Issue date Aug 25, 2020
- Skyworks Solutions, Inc.
- Jerod F. Mason
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WET ETCH APPARATUS
- Publication number 20240395572
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hong-Ting LU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD FOR PREPARING A GERMANIUM SUBSTRATE AND GERMANIUM SUBSTRATE...
- Publication number 20240186141
- Publication date Jun 6, 2024
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Stefan JANZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROCHEMICAL SYSTEMS AND METHODS FOR FINISHING SiC WAFERS
- Publication number 20240071743
- Publication date Feb 29, 2024
- Pallidus, Inc.
- Mark Land
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE ETCHING SOLUTION AND METHOD FOR FABRICATING...
- Publication number 20230369058
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-CHIEH LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR USING SLURRY
- Publication number 20230290641
- Publication date Sep 14, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-HUNG LIAO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
NANOROD PRODUCTION METHOD AND NANOROD PRODUCED THEREBY
- Publication number 20230056417
- Publication date Feb 23, 2023
- SAMSUNG DISPLAY CO., LTD.
- Young Rag DO
- B82 - NANO-TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING STRUCTURE
- Publication number 20220384614
- Publication date Dec 1, 2022
- SCIOCS COMPANY LIMITED
- Osamu ICHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL SEMICONDUCTOR FABRICATION
- Publication number 20220349084
- Publication date Nov 3, 2022
- Nielson Scientific, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING STRUCTURE
- Publication number 20220270887
- Publication date Aug 25, 2022
- SCIOCS COMPANY LIMITED
- Fumimasa HORIKIRI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POROUS RF SWITCH FOR REDUCED CROSSTALK
- Publication number 20220254631
- Publication date Aug 11, 2022
- IQE plc
- Richard Hammond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROCHEMICAL IMPRINTING OF MICRO- AND NANO-STRUCTURES IN POROUS...
- Publication number 20220128902
- Publication date Apr 28, 2022
- Arizona Board of Regents on behalf of Arizona State University
- Keng HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET ETCH APPARATUS
- Publication number 20210391189
- Publication date Dec 16, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hong-Ting LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE ETCHING SOLUTION AND METHOD FOR FABRICATING...
- Publication number 20210305054
- Publication date Sep 30, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-CHIEH LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLE FORMING METHOD AND HOLE FORMING APPARATUS
- Publication number 20210223194
- Publication date Jul 22, 2021
- HITACHI HIGH-TECH CORPORATION
- Itaru YANAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...
- Publication number 20210187685
- Publication date Jun 24, 2021
- EBARA CORPORATION
- Atsuo Katagiri
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF ELECTROCHEMICALLY PROCESSING A SUBSTRATE AND INTEGRATED C...
- Publication number 20200411324
- Publication date Dec 31, 2020
- UNIVERSITE CATHOLIQUE DE LOUVAIN
- Gilles SCHEEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacture Using Complementary Conductivity-Selective W...
- Publication number 20200381260
- Publication date Dec 3, 2020
- Georgia Tech Research Corporation
- Shyh-Chiang SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SURFACE SMOOTHING AND SEMICONDUCTOR ARRANGEMENT
- Publication number 20200365385
- Publication date Nov 19, 2020
- INFINEON TECHNOLOGIES AG
- Bernhard GOLLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING DEVICE
- Publication number 20200365410
- Publication date Nov 19, 2020
- Toyota Jidosha Kabushiki Kaisha
- Daisuke SUGIZAKI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SLURRY
- Publication number 20200357653
- Publication date Nov 12, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-HUNG LIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR FABRICATION WITH ELECTROCHEMICAL APPARATUS
- Publication number 20200350185
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Andrew Joseph KELLY
- B82 - NANO-TECHNOLOGY
Information Patent Application
NANOROD PRODUCTION METHOD AND NANOROD PRODUCED THEREBY
- Publication number 20200212178
- Publication date Jul 2, 2020
- SAMSUNG DISPLAY CO., LTD.
- Young Rag DO
- B82 - NANO-TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE ETCHING SOLUTION AND METHOD FOR FABRICATING...
- Publication number 20200135479
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-CHIEH LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUP III NITRIDE SEMICONDUCTOR AND METHOD FOR PRODUCING SAME
- Publication number 20200135447
- Publication date Apr 30, 2020
- Panasonic Intellectual Property Management Co., Ltd.
- Akihiko ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vertical Power Devices with Oxygen Inserted Si-Layers
- Publication number 20200127134
- Publication date Apr 23, 2020
- Oliver Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING PATTERNS IN A SUBSTRATE
- Publication number 20200090941
- Publication date Mar 19, 2020
- Commissariat A L' Energie Atomique Et Aux Energies Alternative
- Lamia NOURI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION WITH ELECTROCHEMICAL APPARATUS
- Publication number 20200066554
- Publication date Feb 27, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Andrew Joseph KELLY
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
OXYGEN INSERTED SI-LAYERS FOR REDUCED CONTACT IMPLANT OUTDIFFUSION...
- Publication number 20200052109
- Publication date Feb 13, 2020
- Infineon Technologies Austria AG
- Oliver Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROCHEMICAL IMPRINTING OF MICRO- AND NANO-STRUCTURES IN POROUS...
- Publication number 20190384167
- Publication date Dec 19, 2019
- Arizona Board of Regents on behalf of Arizona State University
- Keng HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electronic Circuit Production
- Publication number 20190246503
- Publication date Aug 8, 2019
- DST Innovations Limited
- Anthony Miles
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Electrolytic etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing a semiconductor using slurry

Nanorod production method and nanorod produced thereby

Method and device for manufacturing structure

Three-dimensional semiconductor fabrication

High aspect ratio gratings fabricated by electrodeposition

Semiconductor structure etching solution and method for fabricating...

Slurry

Electrochemical imprinting of micro- and nano-structures in porous...

Metal-coated porous polymeric stamp materials for electrochemical i...

Method of electrochemically processing a substrate and integrated c...

Apparatus and method for etching one side of a semiconductor layer...

Substrate processing apparatus and substrate processing method

Nanorod production method and nanorod produced thereby

Three-dimensional semiconductor fabrication

Semiconductor surface smoothing and semiconductor arrangement

Semiconductor material having tunable permittivity and tunable ther...

Hole forming method and hole forming apparatus

Electronic circuit production

Method of manufacture using complementary conductivity-selective we...

Distribution system for chemical and/or electrolytic surface treatment

Wet etch apparatus and method of using the same

Semiconductor fabrication with electrochemical apparatus

Method for producing patterns in a substrate

Method for GaN vertical microcavity surface emitting laser (VCSEL)

Semiconductor structure etching solution and method for fabricating...

Transferring nanostructures from wafers to transparent substrates

Group III nitride semiconductor and method for producing same

Planarization apparatus and planarization method thereof

Vertical power devices with oxygen inserted Si-layers

Radio-frequency isolation using porous silicon

Patents Applicationslast 30 patents

WET ETCH APPARATUS

METHOD FOR PREPARING A GERMANIUM SUBSTRATE AND GERMANIUM SUBSTRATE...

ELECTROCHEMICAL SYSTEMS AND METHODS FOR FINISHING SiC WAFERS

SEMICONDUCTOR STRUCTURE ETCHING SOLUTION AND METHOD FOR FABRICATING...

METHOD FOR MANUFACTURING A SEMICONDUCTOR USING SLURRY

NANOROD PRODUCTION METHOD AND NANOROD PRODUCED THEREBY

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING STRUCTURE

THREE-DIMENSIONAL SEMICONDUCTOR FABRICATION

METHOD FOR MANUFACTURING STRUCTURE

POROUS RF SWITCH FOR REDUCED CROSSTALK

ELECTROCHEMICAL IMPRINTING OF MICRO- AND NANO-STRUCTURES IN POROUS...

WET ETCH APPARATUS

SEMICONDUCTOR STRUCTURE ETCHING SOLUTION AND METHOD FOR FABRICATING...

HOLE FORMING METHOD AND HOLE FORMING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...

METHOD OF ELECTROCHEMICALLY PROCESSING A SUBSTRATE AND INTEGRATED C...

Method of Manufacture Using Complementary Conductivity-Selective W...

SEMICONDUCTOR SURFACE SMOOTHING AND SEMICONDUCTOR ARRANGEMENT

ETCHING DEVICE

SLURRY

SEMICONDUCTOR FABRICATION WITH ELECTROCHEMICAL APPARATUS

NANOROD PRODUCTION METHOD AND NANOROD PRODUCED THEREBY

SEMICONDUCTOR STRUCTURE ETCHING SOLUTION AND METHOD FOR FABRICATING...

GROUP III NITRIDE SEMICONDUCTOR AND METHOD FOR PRODUCING SAME

Vertical Power Devices with Oxygen Inserted Si-Layers

METHOD FOR PRODUCING PATTERNS IN A SUBSTRATE

SEMICONDUCTOR FABRICATION WITH ELECTROCHEMICAL APPARATUS

OXYGEN INSERTED SI-LAYERS FOR REDUCED CONTACT IMPLANT OUTDIFFUSION...

ELECTROCHEMICAL IMPRINTING OF MICRO- AND NANO-STRUCTURES IN POROUS...

Electronic Circuit Production