electromagnetic

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CPC
H01J2237/04922

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/04922electromagnetic

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 11,527,379
- Issue date Dec 13, 2022
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of charged-particle beam such as electron microscope comp...
- Patent number 11,295,927
- Issue date Apr 5, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling transmission electron microscope and transmis...
- Patent number 11,251,016
- Issue date Feb 15, 2022
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system, opto-electro simultaneous detection s...
- Patent number 10,879,036
- Issue date Dec 29, 2020
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Wei He
- G02 - OPTICS
Information Patent Grant
Interference optical system unit, charged particle beam interferenc...
- Patent number 10,770,264
- Issue date Sep 8, 2020
- Riken
- Yoh Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens arrangement usable in particle-optical systems
- Patent number 10,622,184
- Issue date Apr 14, 2020
- Carl Zeiss Microscopy GmbH
- Rainer Knippelmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method and charged particle beam writ...
- Patent number 10,504,686
- Issue date Dec 10, 2019
- NuFlare Technology, Inc.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle inspection method and charged particle system
- Patent number 10,354,831
- Issue date Jul 16, 2019
- Carl Zeiss Microscopy GmbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens and transmission electron microscope
- Patent number 10,224,173
- Issue date Mar 5, 2019
- Jeol Ltd.
- Tatsuo Naruse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam irradiation apparatus
- Patent number 10,090,132
- Issue date Oct 2, 2018
- NATIONAL INSTITUTES FOR QUANTUM AND RADIOLOGICAL SCIENCE AND TECHNOLOGY
- Takuji Furukawa
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Charged particle beam device
- Patent number 9,997,326
- Issue date Jun 12, 2018
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combined multipole magnet and dipole scanning magnet
- Patent number 9,620,327
- Issue date Apr 11, 2017
- Axcelis Technologies, Inc.
- Edward C. Eisner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,287,082
- Issue date Mar 15, 2016
- Hitachi High-Technologies Corporation
- Kenichi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-axis lens, beam system making use of the compound lens, and m...
- Patent number 8,481,958
- Issue date Jul 9, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle-optical systems, methods and components
- Patent number 8,039,813
- Issue date Oct 18, 2011
- Carl Zeiss SMT GmbH
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation with a collimator magnet and a neutral filter magnet
- Patent number 7,579,602
- Issue date Aug 25, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resolution charged particle projection lens array using magnet...
- Patent number 7,569,834
- Issue date Aug 4, 2009
- KLA-Tencor Technologies Corporation
- Neil Richardson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning transmission electron microscope and electron energy loss...
- Patent number 7,285,776
- Issue date Oct 23, 2007
- Hitachi High-Technologies Corporation
- Kuniyasu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and method for implanting ions by using...
- Patent number 7,279,691
- Issue date Oct 9, 2007
- Hynix Semiconductor Inc.
- Kyoung-Bong Rouh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 6,894,277
- Issue date May 17, 2005
- Kabushiki Kaisha Topcon
- Hirotami Koike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron radiography
- Patent number 6,894,278
- Issue date May 17, 2005
- The Regents of the University of California
- Frank E. Merrill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimized curvilinear variable axis lens doublet for charged partic...
- Patent number 6,617,585
- Issue date Sep 9, 2003
- Nikon Corporation
- Werner Stickel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compensation of space charge in a particle beam system
- Patent number 6,201,251
- Issue date Mar 13, 2001
- Nikon Corporation
- Steven Douglas Golladay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Demagnifying projection-optical system for electron beam lithograph...
- Patent number 6,011,268
- Issue date Jan 4, 2000
- Nikon Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Curvilinear variable axis lens correction with crossed coils
- Patent number 5,708,274
- Issue date Jan 13, 1998
- International Business Machines Corporation
- Guenther O. Langner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical apparatus comprising a detector for secondary elec...
- Patent number 5,578,822
- Issue date Nov 26, 1996
- U.S. Philips Corporation
- Karel D. Van Der Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circular, confined distribution for charged particle beams
- Patent number 5,468,965
- Issue date Nov 21, 1995
- The Regents of the University of California, Office of Technology Transfer
- Robert W. Garnett
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Electron beam type pattern transfer apparatus
- Patent number 4,366,383
- Issue date Dec 28, 1982
- Vlsi Technology Research Association
- Shunichi Sano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam microfabrication apparatus and method
- Patent number 4,227,090
- Issue date Oct 7, 1980
- Hughes Aircraft Company
- Kurt Amboss
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron projection microfabrication system
- Patent number 4,039,810
- Issue date Aug 2, 1977
- International Business Machines Corporation
- Marcus Barry Heritage
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MINIATURE HYBRID ELECTRON BEAM COLUMN
- Publication number 20230326704
- Publication date Oct 12, 2023
- KLA Corporation
- Lawrence Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMP...
- Publication number 20220108865
- Publication date Apr 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL BEAM BIFOCAL CHARGED PARTICLE MICROSCOPE
- Publication number 20210305007
- Publication date Sep 30, 2021
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS OF OPERATING T...
- Publication number 20200381212
- Publication date Dec 3, 2020
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Controlling Transmission Electron Microscope and Transmis...
- Publication number 20200312612
- Publication date Oct 1, 2020
- JEOL Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
- Publication number 20200243296
- Publication date Jul 30, 2020
- CARL ZEISS MICROSCOPY GMBH
- Rainer KNIPPELMEYER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFERENCE OPTICAL SYSTEM UNIT, CHARGED PARTICLE BEAM INTERFERENC...
- Publication number 20190295816
- Publication date Sep 26, 2019
- Riken
- Yoh IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, OPTO-ELECTRO SIMULTANEOUS DETECTION S...
- Publication number 20190287760
- Publication date Sep 19, 2019
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Wei He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND METHOD FOR REDUCING...
- Publication number 20190096632
- Publication date Mar 28, 2019
- NuFlare Technology, Inc.
- Munehiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM IRRADIATION APPARATUS
- Publication number 20170229281
- Publication date Aug 10, 2017
- National Institutes for Quantum and Radiological Science and Technology
- Takuji FURUKAWA
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND M...
- Publication number 20160268098
- Publication date Sep 15, 2016
- AUROS TECHNOLOGY CO., LTD.
- JONG LIP CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micro-Electron Column Having An Electron Emitter Improving The Dens...
- Publication number 20160247658
- Publication date Aug 25, 2016
- Industry-University Cooperation Foundation Sunmoon
- Ho Seob KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20160217967
- Publication date Jul 28, 2016
- Hitachi High-Technologies Corporation
- Hideto DOHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150228443
- Publication date Aug 13, 2015
- Hitachi High-Technologies Corporation
- Kenichi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC...
- Publication number 20150060662
- Publication date Mar 5, 2015
- HERMES MICROVISION, INC.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20140175302
- Publication date Jun 26, 2014
- NuFlare Technology, Inc.
- Takanao TOUYA
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTI-AXIS LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND M...
- Publication number 20120037813
- Publication date Feb 16, 2012
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Inspection Method and Charged Particle System
- Publication number 20090256075
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Component
- Publication number 20090114818
- Publication date May 7, 2009
- Carl Zeiss SMT AG
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION WITH A COLLIMATOR MAGNET AND A NEUTRAL FILTER MAGNET
- Publication number 20080149845
- Publication date Jun 26, 2008
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation apparatus and method for implanting ions by using...
- Publication number 20060022149
- Publication date Feb 2, 2006
- Hynix Semiconductor Inc.
- Kyoung-Bong Rouh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning transmission electron microscope and electron energy loss...
- Publication number 20050285037
- Publication date Dec 29, 2005
- Kuniyasu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20040011959
- Publication date Jan 22, 2004
- KABUSHIKI KAISHA TOPCON
- Hirotami Koike
- H01 - BASIC ELECTRIC ELEMENTS

electromagnetic

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Objective lens arrangement usable in particle-optical systems

Apparatus of charged-particle beam such as electron microscope comp...

Method of controlling transmission electron microscope and transmis...

Charged particle beam system, opto-electro simultaneous detection s...

Interference optical system unit, charged particle beam interferenc...

Objective lens arrangement usable in particle-optical systems

Charged particle beam writing method and charged particle beam writ...

Charged particle inspection method and charged particle system

Objective lens and transmission electron microscope

Charged particle beam irradiation apparatus

Charged particle beam device

Combined multipole magnet and dipole scanning magnet

Charged particle beam apparatus

Multi-axis lens, beam system making use of the compound lens, and m...

Charged particle-optical systems, methods and components

Ion implantation with a collimator magnet and a neutral filter magnet

High resolution charged particle projection lens array using magnet...

Scanning transmission electron microscope and electron energy loss...

Ion implantation apparatus and method for implanting ions by using...

Scanning electron microscope

Electron radiography

Optimized curvilinear variable axis lens doublet for charged partic...

Compensation of space charge in a particle beam system

Demagnifying projection-optical system for electron beam lithograph...

Curvilinear variable axis lens correction with crossed coils

Particle-optical apparatus comprising a detector for secondary elec...

Circular, confined distribution for charged particle beams

Electron beam type pattern transfer apparatus

Electron beam microfabrication apparatus and method

Electron projection microfabrication system

Patents Applicationslast 30 patents

MINIATURE HYBRID ELECTRON BEAM COLUMN

APPARATUS OF CHARGED-PARTICLE BEAM SUCH AS ELECTRON MICROSCOPE COMP...

DUAL BEAM BIFOCAL CHARGED PARTICLE MICROSCOPE

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS OF OPERATING T...

Method of Controlling Transmission Electron Microscope and Transmis...

OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS

INTERFERENCE OPTICAL SYSTEM UNIT, CHARGED PARTICLE BEAM INTERFERENC...

CHARGED PARTICLE BEAM SYSTEM, OPTO-ELECTRO SIMULTANEOUS DETECTION S...

CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND METHOD FOR REDUCING...

CHARGED PARTICLE BEAM IRRADIATION APPARATUS

SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND M...

Micro-Electron Column Having An Electron Emitter Improving The Dens...

Charged Particle Beam Device

CHARGED PARTICLE BEAM APPARATUS

APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

MULTI-AXIS LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND M...

Charged Particle Inspection Method and Charged Particle System

Particle-Optical Component

ION IMPLANTATION WITH A COLLIMATOR MAGNET AND A NEUTRAL FILTER MAGNET

Ion implantation apparatus and method for implanting ions by using...

Scanning transmission electron microscope and electron energy loss...

Scanning electron microscope