TREA

Electromagnets in particular for cathodic sputtering apparatus

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Industry

  • CPC
  • H01J37/3458
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3458Electromagnets in particular for cathodic sputtering apparatus
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PERMEANCE MAGNETIC ASSEMBLY
    • Publication number 20250112032
    • Publication date Apr 3, 2025
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tsung-Jen YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING
    • Publication number 20250095975
    • Publication date Mar 20, 2025
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tsung-Han KUO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEPOSITION SYSTEM AND METHOD
    • Publication number 20250087536
    • Publication date Mar 13, 2025
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wen-Hao CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHOD FOR PHYSICAL VAPOR DEPOSITION
    • Publication number 20240339310
    • Publication date Oct 10, 2024
    • Taiwan Semiconductor Manufacturing Company Limited
    • Yu-Young WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor Device, Method and Machine of Manufacture
    • Publication number 20240093357
    • Publication date Mar 21, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Jen-Chun Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PERMEANCE MAGNETIC ASSEMBLY
    • Publication number 20240087861
    • Publication date Mar 14, 2024
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tsung-Jen YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
    • Publication number 20230402271
    • Publication date Dec 14, 2023
    • Applied Materials, Inc.
    • Xiaodong WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING
    • Publication number 20230386806
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tsung-Han KUO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION SYSTEM AND METHOD
    • Publication number 20230352350
    • Publication date Nov 2, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wen-Hao CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE
    • Publication number 20230313364
    • Publication date Oct 5, 2023
    • Applied Materials, Inc.
    • Kevin KASHEFI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING
    • Publication number 20220380888
    • Publication date Dec 1, 2022
    • Goichi YOSHIDOME
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PERMEANCE MAGNETIC ASSEMBLY
    • Publication number 20220367160
    • Publication date Nov 17, 2022
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tsung-Jen YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor Device, Method and Machine of Manufacture
    • Publication number 20220290291
    • Publication date Sep 15, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Jen-Chun Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR SPUTTER DEPOSITION
    • Publication number 20220277940
    • Publication date Sep 1, 2022
    • Dyson Technology Limited
    • Michael Edward RENDALL
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTRICALLY AND MAGNETICALLY ENHANCED IONIZED PHYSICAL VAPOR DEPOS...
    • Publication number 20220259719
    • Publication date Aug 18, 2022
    • IonQuest Corp.
    • Bassam Hanna ABRAHAM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEMS AND METHODS FOR AN IMPROVED MAGNETRON ELECTROMAGNETIC ASSEMBLY
    • Publication number 20220068620
    • Publication date Mar 3, 2022
    • OEM Group, LLC
    • Marc-Andre Lariviere
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION SYSTEM AND METHOD
    • Publication number 20220051952
    • Publication date Feb 17, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wen-Hao CHENG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
    • Publication number 20220020577
    • Publication date Jan 20, 2022
    • Applied Materials, Inc.
    • Xiaodong WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING
    • Publication number 20210327693
    • Publication date Oct 21, 2021
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tsung-Han KUO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method and Apparatus for Depositing a Material
    • Publication number 20210123130
    • Publication date Apr 29, 2021
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Electromagnetic Module for Physical Vapor Deposition
    • Publication number 20210071295
    • Publication date Mar 11, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Hsuan-Chih Chu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
    • Publication number 20210071294
    • Publication date Mar 11, 2021
    • Applied Materials, Inc.
    • Xiaodong WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHARGED PARTICLE BEAM TREATMENT APPARATUS
    • Publication number 20200303165
    • Publication date Sep 24, 2020
    • Sumitomo Heavy Industries, Ltd.
    • Nagaaki Kamiguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MODIFIABLE MAGNET CONFIGURATION FOR ARC VAPORIZATION SOURCES
    • Publication number 20200176220
    • Publication date Jun 4, 2020
    • OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
    • Siegfried Krassnitzer
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PERMEANCE MAGNETIC ASSEMBLY
    • Publication number 20200161108
    • Publication date May 21, 2020
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tsung-Jen YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING
    • Publication number 20200051799
    • Publication date Feb 13, 2020
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Tsung-Han KUO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTRICALLY AND MAGNETICALLY ENHANCED IONIZED PHYSICAL VAPOR DEPOS...
    • Publication number 20190316249
    • Publication date Oct 17, 2019
    • IonQuest Corp.
    • Bassam Hanna ABRAHAM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Physical Vapor Deposition Chamber Particle Reduction Apparatus And...
    • Publication number 20190057849
    • Publication date Feb 21, 2019
    • Applied Materials, Inc.
    • Vibhu Jindal
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING COIL PRODUCT AND METHOD OF MAKING
    • Publication number 20180218890
    • Publication date Aug 2, 2018
    • HONEYWELL INTERNATIONAL INC.
    • John A. DUNLOP
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
    • Publication number 20170253959
    • Publication date Sep 7, 2017
    • Applied Materials, Inc.
    • Xiaodong WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...