Electromagnets in particular for cathodic sputtering apparatus

Industry

CPC
H01J37/3458

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3458Electromagnets in particular for cathodic sputtering apparatus

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System and method for particle control in MRAM processing
- Patent number 12,176,192
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition system and method
- Patent number 12,176,253
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 12,077,849
- Issue date Sep 3, 2024
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for physical vapor deposition
- Patent number 12,014,912
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Young Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electromagnet pulsing effect on PVD step coverage
- Patent number 11,952,655
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kevin Kashefi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a material
- Patent number 11,875,980
- Issue date Jan 16, 2024
- Stephen R Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, method and machine of manufacture
- Patent number 11,851,749
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Permeance magnetic assembly
- Patent number 11,854,776
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Jen Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for extended chamber for through silicon via...
- Patent number 11,846,013
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,810,770
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for particle control in MRAM processing
- Patent number 11,776,796
- Issue date Oct 3, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Han Kuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 11,728,226
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for an improved magnetron electromagnetic assembly
- Patent number 11,615,947
- Issue date Mar 28, 2023
- OEM Group, LLC
- Marc-Andre Lariviere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modifiable magnet configuration for arc vaporization sources
- Patent number 11,535,928
- Issue date Dec 27, 2022
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried Krassnitzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permeance magnetic assembly
- Patent number 11,488,814
- Issue date Nov 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Jen Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electromagnetic module for physical vapor deposition
- Patent number 11,396,695
- Issue date Jul 26, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 11,359,274
- Issue date Jun 14, 2022
- IonQuestCorp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, method and machine of manufacture
- Patent number 11,345,991
- Issue date May 31, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modifiable magnet configuration for arc vaporization sources
- Patent number 11,264,216
- Issue date Mar 1, 2022
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle beam treatment apparatus
- Patent number 11,183,370
- Issue date Nov 23, 2021
- Sumitomo Heavy Industries, Ltd.
- Nagaaki Kamiguchi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
System and method for particle control in MRAM processing
- Patent number 11,056,324
- Issue date Jul 6, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Han Kuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,037,768
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a material
- Patent number 10,900,114
- Issue date Jan 26, 2021
- Stephen R Burgess
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electromagnetic module for physical vapor deposition
- Patent number 10,844,477
- Issue date Nov 24, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition chamber particle reduction apparatus and...
- Patent number 10,763,091
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Vibhu Jindal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactors for plasma-assisted processes and associated methods
- Patent number 10,304,665
- Issue date May 28, 2019
- Nano-Product Engineering, LLC
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generation apparatus, deposition apparatus, and plasma gener...
- Patent number 9,824,867
- Issue date Nov 21, 2017
- CHUGAI RO CO., LTD.
- Eiji Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filtered cathodic arc method, apparatus and applications thereof
- Patent number 9,761,424
- Issue date Sep 12, 2017
- Nano-Product Engineering, LLC
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering devices and methods
- Patent number 9,583,319
- Issue date Feb 28, 2017
- BH5773 Ltd
- Gennady Yumshtyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PHYSICAL VAPOR DEPOSITION
- Publication number 20240339310
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Young WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device, Method and Machine of Manufacture
- Publication number 20240093357
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PERMEANCE MAGNETIC ASSEMBLY
- Publication number 20240087861
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Jen YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20230402271
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING
- Publication number 20230386806
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Han KUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20230352350
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE
- Publication number 20230313364
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Kevin KASHEFI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING
- Publication number 20220380888
- Publication date Dec 1, 2022
- Goichi YOSHIDOME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PERMEANCE MAGNETIC ASSEMBLY
- Publication number 20220367160
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Jen YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device, Method and Machine of Manufacture
- Publication number 20220290291
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SPUTTER DEPOSITION
- Publication number 20220277940
- Publication date Sep 1, 2022
- Dyson Technology Limited
- Michael Edward RENDALL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRICALLY AND MAGNETICALLY ENHANCED IONIZED PHYSICAL VAPOR DEPOS...
- Publication number 20220259719
- Publication date Aug 18, 2022
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR AN IMPROVED MAGNETRON ELECTROMAGNETIC ASSEMBLY
- Publication number 20220068620
- Publication date Mar 3, 2022
- OEM Group, LLC
- Marc-Andre Lariviere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20220051952
- Publication date Feb 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20220020577
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING
- Publication number 20210327693
- Publication date Oct 21, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Han KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Depositing a Material
- Publication number 20210123130
- Publication date Apr 29, 2021
- SPTS TECHNOLOGIES LIMITED
- STEPHEN R. BURGESS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electromagnetic Module for Physical Vapor Deposition
- Publication number 20210071295
- Publication date Mar 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsuan-Chih Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20210071294
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGED PARTICLE BEAM TREATMENT APPARATUS
- Publication number 20200303165
- Publication date Sep 24, 2020
- Sumitomo Heavy Industries, Ltd.
- Nagaaki Kamiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODIFIABLE MAGNET CONFIGURATION FOR ARC VAPORIZATION SOURCES
- Publication number 20200176220
- Publication date Jun 4, 2020
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PERMEANCE MAGNETIC ASSEMBLY
- Publication number 20200161108
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Jen YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING
- Publication number 20200051799
- Publication date Feb 13, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Han KUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRICALLY AND MAGNETICALLY ENHANCED IONIZED PHYSICAL VAPOR DEPOS...
- Publication number 20190316249
- Publication date Oct 17, 2019
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Physical Vapor Deposition Chamber Particle Reduction Apparatus And...
- Publication number 20190057849
- Publication date Feb 21, 2019
- Applied Materials, Inc.
- Vibhu Jindal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING COIL PRODUCT AND METHOD OF MAKING
- Publication number 20180218890
- Publication date Aug 2, 2018
- HONEYWELL INTERNATIONAL INC.
- John A. DUNLOP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20170253959
- Publication date Sep 7, 2017
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF THICK MAGNETIZABLE FILMS FOR MAGNETIC DEVICES
- Publication number 20170025258
- Publication date Jan 26, 2017
- VEECO INSTRUMENTS, INC.
- Frank M. Cerio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Magnetron Arrangement
- Publication number 20160237555
- Publication date Aug 18, 2016
- Joachim Mai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATION APPARATUS, DEPOSITION APPARATUS, AND PLASMA GENER...
- Publication number 20150107987
- Publication date Apr 23, 2015
- CHUGAI RO CO., LTD.
- Eiji Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Electromagnets in particular for cathodic sputtering apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method for particle control in MRAM processing

Deposition system and method

Methods and apparatus for controlling ion fraction in physical vapo...

Electrically and magnetically enhanced ionized physical vapor depos...

Apparatus and method for physical vapor deposition

Electromagnet pulsing effect on PVD step coverage

Method and apparatus for depositing a material

Semiconductor device, method and machine of manufacture

Permeance magnetic assembly

Methods and apparatus for extended chamber for through silicon via...

Methods and apparatus for controlling ion fraction in physical vapo...

System and method for particle control in MRAM processing

Deposition system and method

Systems and methods for an improved magnetron electromagnetic assembly

Modifiable magnet configuration for arc vaporization sources

Permeance magnetic assembly

Electromagnetic module for physical vapor deposition

Electrically and magnetically enhanced ionized physical vapor depos...

Semiconductor device, method and machine of manufacture

Modifiable magnet configuration for arc vaporization sources

Charged particle beam treatment apparatus

System and method for particle control in MRAM processing

Methods and apparatus for controlling ion fraction in physical vapo...

Method and apparatus for depositing a material

Electromagnetic module for physical vapor deposition

Physical vapor deposition chamber particle reduction apparatus and...

Reactors for plasma-assisted processes and associated methods

Plasma generation apparatus, deposition apparatus, and plasma gener...

Filtered cathodic arc method, apparatus and applications thereof

Sputtering devices and methods

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR PHYSICAL VAPOR DEPOSITION

Semiconductor Device, Method and Machine of Manufacture

PERMEANCE MAGNETIC ASSEMBLY

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING

DEPOSITION SYSTEM AND METHOD

ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE

METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING

PERMEANCE MAGNETIC ASSEMBLY

Semiconductor Device, Method and Machine of Manufacture

METHOD AND APPARATUS FOR SPUTTER DEPOSITION

ELECTRICALLY AND MAGNETICALLY ENHANCED IONIZED PHYSICAL VAPOR DEPOS...

SYSTEMS AND METHODS FOR AN IMPROVED MAGNETRON ELECTROMAGNETIC ASSEMBLY

DEPOSITION SYSTEM AND METHOD

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING

Method and Apparatus for Depositing a Material

Electromagnetic Module for Physical Vapor Deposition

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

CHARGED PARTICLE BEAM TREATMENT APPARATUS

MODIFIABLE MAGNET CONFIGURATION FOR ARC VAPORIZATION SOURCES

PERMEANCE MAGNETIC ASSEMBLY

SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING

ELECTRICALLY AND MAGNETICALLY ENHANCED IONIZED PHYSICAL VAPOR DEPOS...

Physical Vapor Deposition Chamber Particle Reduction Apparatus And...

SPUTTERING COIL PRODUCT AND METHOD OF MAKING

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

DEPOSITION OF THICK MAGNETIZABLE FILMS FOR MAGNETIC DEVICES

Multi-Magnetron Arrangement

PLASMA GENERATION APPARATUS, DEPOSITION APPARATUS, AND PLASMA GENER...