Electron beam

Industry

CPC
H01J2237/082

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/082Electron beam

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Ion generator and ion implanter
- Patent number 12,243,708
- Issue date Mar 4, 2025
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and methods for automated processing of multiple samples in...
- Patent number 12,165,833
- Issue date Dec 10, 2024
- FEI Company
- Michal Hrouzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated ion-beam alignment for dual-beam instrument
- Patent number 12,154,757
- Issue date Nov 26, 2024
- FEI Company
- Jeremy Graham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 12,106,936
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion gun and ion milling machine
- Patent number 12,051,560
- Issue date Jul 30, 2024
- HITACHI HIGH-TECH CORPORATION
- Kengo Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion milling device
- Patent number 12,020,893
- Issue date Jun 25, 2024
- HITACHI HIGH-TECH CORPORATION
- Kengo Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generator and ion implanter
- Patent number 11,848,170
- Issue date Dec 19, 2023
- SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, LTD.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 11,715,621
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time-dependent defect inspection apparatus
- Patent number 11,651,935
- Issue date May 16, 2023
- ASML Netherlands B.V.
- Chih-Yu Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for aligning electron beams in multi-beam inspect...
- Patent number 11,614,416
- Issue date Mar 28, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ionization for tandem ion mobility spectrometry
- Patent number 11,525,803
- Issue date Dec 13, 2022
- Hamilton Sundstrand Corporation
- Benjamin D. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generator and ion implanter
- Patent number 11,380,512
- Issue date Jul 5, 2022
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic electron impact ion source
- Patent number 11,276,544
- Issue date Mar 15, 2022
- PerkinElmer Health Sciences, Inc.
- David G. Welkie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion milling device, ion source, and ion milling method
- Patent number 11,158,481
- Issue date Oct 26, 2021
- HITACHI HIGH-TECH CORPORATION
- Kengo Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus to eliminate contaminant particles from an acc...
- Patent number 11,101,134
- Issue date Aug 24, 2021
- Exogenesis Corporation
- Allen R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time-dependent defect inspection apparatus
- Patent number 11,056,311
- Issue date Jul 6, 2021
- ASML Netherlands B.V.
- Chih-Yu Jen
- G01 - MEASURING TESTING
Information Patent Grant
Ionization chamber chip for a nano-aperture ion source, method of f...
- Patent number 11,056,315
- Issue date Jul 6, 2021
- National University of Singapore
- Jeroen Anton Van Kan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source
- Patent number 11,017,974
- Issue date May 25, 2021
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source device
- Patent number 11,004,649
- Issue date May 11, 2021
- Luxembourg Institute of Science and Technology (LIST)
- Olivier De Castro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode for ion source comprising a tapered sidewall
- Patent number 10,923,311
- Issue date Feb 16, 2021
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Keewoung Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic electron impact ion source
- Patent number 10,879,030
- Issue date Dec 29, 2020
- PerkinElmer Health Sciences, Inc.
- David G. Welkie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam sample preparation and coating apparatus and methods
- Patent number 10,731,246
- Issue date Aug 4, 2020
- Gatan, Inc.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam image acquisition apparatus, and electron beam image...
- Patent number 10,665,422
- Issue date May 26, 2020
- NUFLARE TECHNOLOGY, INC.
- Hidekazu Takekoshi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Ion beam apparatus
- Patent number 10,651,006
- Issue date May 12, 2020
- Hitachi High-Tech Science Corporation
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Innovative source assembly for ion beam production
- Patent number 10,651,005
- Issue date May 12, 2020
- FEI Company
- Leon van Kouwen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a plurality of FIB-SEM systems
- Patent number 10,615,002
- Issue date Apr 7, 2020
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- G01 - MEASURING TESTING
Information Patent Grant
Ion beam treatment apparatus
- Patent number 10,603,517
- Issue date Mar 31, 2020
- Electronics and Telecommunications Research Institute
- Dong Hoon Song
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Ion implantation processes and apparatus
- Patent number 10,497,532
- Issue date Dec 3, 2019
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Boron implanting using a co-gas
- Patent number 10,446,371
- Issue date Oct 15, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact ion beam sources formed as modular ionizer
- Patent number 10,431,412
- Issue date Oct 1, 2019
- Massachusetts Institute of Technology
- Akintunde I. Akinwande
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
ADJUSTABLE MULTIPLE FILAMENT ION BEAM DEPOSITION SYSTEM
- Publication number 20250087441
- Publication date Mar 13, 2025
- INTEVAC, INC.
- Thomas P. Nolan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER
- Publication number 20250014860
- Publication date Jan 9, 2025
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATOR AND ION IMPLANTER
- Publication number 20240079199
- Publication date Mar 7, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MICROSCOPE
- Publication number 20240006146
- Publication date Jan 4, 2024
- National University of Singapore
- Jeroen Anton VAN KAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...
- Publication number 20230377833
- Publication date Nov 23, 2023
- FEI Company
- Michal HROUZEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MILLING DEVICE
- Publication number 20230352263
- Publication date Nov 2, 2023
- Hitachi High-Tech Corporation
- Kengo ASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
- Publication number 20230335375
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...
- Publication number 20230280293
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Xuerang HU
- G01 - MEASURING TESTING
Information Patent Application
ION GENERATOR AND ION IMPLANTER
- Publication number 20220301808
- Publication date Sep 22, 2022
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GUN AND ION MILLING MACHINE
- Publication number 20220285123
- Publication date Sep 8, 2022
- Hitachi High-Tech Corporation
- Kengo Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS TO ELIMINATE CONTAMINANT PARTICLES FROM AN ACC...
- Publication number 20220115236
- Publication date Apr 14, 2022
- Exogenesis Corporation
- Allen R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dynamic Electron Impact Ion Source
- Publication number 20210257180
- Publication date Aug 19, 2021
- PerkinElmer Health Sciences, Inc.
- David G. Welkie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATOR AND ION IMPLANTER
- Publication number 20200303153
- Publication date Sep 24, 2020
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD O...
- Publication number 20200211822
- Publication date Jul 2, 2020
- National University of Singapore
- Jeroen Anton VAN KAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
- Publication number 20200194226
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...
- Publication number 20200124546
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus to Eliminate Contaminant Particles from an Acc...
- Publication number 20200083048
- Publication date Mar 12, 2020
- Exogenesis Corporation
- Allen R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE DEVICE
- Publication number 20200066476
- Publication date Feb 27, 2020
- Luxembourg Institute of Science and Technology (LIST)
- Olivier De Castro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A PLURALITY OF FIB-SEM SYSTEMS
- Publication number 20200027696
- Publication date Jan 23, 2020
- CARL ZEISS MICROSCOPY GMBH
- Josef Biberger
- G01 - MEASURING TESTING
Information Patent Application
Dynamic Electron Impact Ion Source
- Publication number 20200020502
- Publication date Jan 16, 2020
- PerkinElmer Health Sciences, Inc.
- David G. Welkie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MILLING DEVICE, lON SOURCE, AND ION MILLING METHOD
- Publication number 20190237291
- Publication date Aug 1, 2019
- Hitachi High-Technologies Corporation
- Kengo ASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dynamic Temperature Control Of An Ion Source
- Publication number 20190189387
- Publication date Jun 20, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Alexander S. Perel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Image Acquisition Apparatus, and Electron Beam Image...
- Publication number 20190096631
- Publication date Mar 28, 2019
- NUFLARE TECHNOLOGY, INC.
- Hidekazu Takekoshi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POSITIVE AND NEGATIVE ION SOURCE BASED ON RADIO-FREQUENCY INDUCTIVE...
- Publication number 20190051486
- Publication date Feb 14, 2019
- Dalian University of Technology
- Fei GAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILAMENT, IONIZATION CHAMBER, AND ION-IMPLANTATION APPARATUS
- Publication number 20180374683
- Publication date Dec 27, 2018
- WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Rui XIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM TREATMENT APPARATUS
- Publication number 20180361173
- Publication date Dec 20, 2018
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Dong Hoon SONG
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Ion Beam Apparatus
- Publication number 20180308658
- Publication date Oct 25, 2018
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Shinichi MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods, Apparatuses, Systems and Software for Treatment of a Speci...
- Publication number 20180174798
- Publication date Jun 21, 2018
- IB LABS, INC.
- Dimitry BOGUSLAVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source
- Publication number 20180138008
- Publication date May 17, 2018
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Boron Implanting Using A Co-Gas
- Publication number 20180122618
- Publication date May 3, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Electron beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion generator and ion implanter

System and methods for automated processing of multiple samples in...

Automated ion-beam alignment for dual-beam instrument

Scanned angled etching apparatus and techniques providing separate...

Ion gun and ion milling machine

Ion milling device

Ion generator and ion implanter

Scanned angled etching apparatus and techniques providing separate...

Time-dependent defect inspection apparatus

System and method for aligning electron beams in multi-beam inspect...

Ionization for tandem ion mobility spectrometry

Ion generator and ion implanter

Dynamic electron impact ion source

Ion milling device, ion source, and ion milling method

Method and apparatus to eliminate contaminant particles from an acc...

Time-dependent defect inspection apparatus

Ionization chamber chip for a nano-aperture ion source, method of f...

Ion source

Ion source device

Cathode for ion source comprising a tapered sidewall

Dynamic electron impact ion source

Ion beam sample preparation and coating apparatus and methods

Electron beam image acquisition apparatus, and electron beam image...

Ion beam apparatus

Innovative source assembly for ion beam production

Method for operating a plurality of FIB-SEM systems

Ion beam treatment apparatus

Ion implantation processes and apparatus

Boron implanting using a co-gas

Compact ion beam sources formed as modular ionizer

Patents Applicationslast 30 patents

ADJUSTABLE MULTIPLE FILAMENT ION BEAM DEPOSITION SYSTEM

ION IMPLANTATION METHOD AND ION IMPLANTER

ION GENERATOR AND ION IMPLANTER

ION MICROSCOPE

SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...

ION MILLING DEVICE

SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...

SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...

ION GENERATOR AND ION IMPLANTER

ION GUN AND ION MILLING MACHINE

METHOD AND APPARATUS TO ELIMINATE CONTAMINANT PARTICLES FROM AN ACC...

Dynamic Electron Impact Ion Source

ION GENERATOR AND ION IMPLANTER

AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD O...

SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...

SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...

Method and Apparatus to Eliminate Contaminant Particles from an Acc...

ION SOURCE DEVICE

METHOD FOR OPERATING A PLURALITY OF FIB-SEM SYSTEMS

Dynamic Electron Impact Ion Source

ION MILLING DEVICE, lON SOURCE, AND ION MILLING METHOD

Dynamic Temperature Control Of An Ion Source

Electron Beam Image Acquisition Apparatus, and Electron Beam Image...

POSITIVE AND NEGATIVE ION SOURCE BASED ON RADIO-FREQUENCY INDUCTIVE...

FILAMENT, IONIZATION CHAMBER, AND ION-IMPLANTATION APPARATUS

ION BEAM TREATMENT APPARATUS

Ion Beam Apparatus

Methods, Apparatuses, Systems and Software for Treatment of a Speci...

Ion Source

Boron Implanting Using A Co-Gas