Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation

Industry

CPC
H01J37/075

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/075Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
X-ray cathode focusing element
- Patent number 12,183,536
- Issue date Dec 31, 2024
- GE Precision Healthcare LLC
- Kevin Kruse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam gun control systems and methods
- Patent number 12,145,006
- Issue date Nov 19, 2024
- Varian Medical Systems, Inc.
- Mark Everett Trail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode mechanism of electron emission source, and method for manuf...
- Patent number 12,106,928
- Issue date Oct 1, 2024
- NuFlare Technology, Inc.
- Ryoei Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and charged particle beam device equipped with electro...
- Patent number 11,978,609
- Issue date May 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Minoru Kaneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light emitting sealed body, light emitting unit, and light source d...
- Patent number 11,972,931
- Issue date Apr 30, 2024
- Hamamatsu Photonics K.K.
- Akio Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conical heat shield for electron emitting cathode
- Patent number 11,901,154
- Issue date Feb 13, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and method for controlling electron beam ap...
- Patent number 11,894,211
- Issue date Feb 6, 2024
- HITACHI HIGH-TECH CORPORATION
- Erina Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filament-less electron source
- Patent number 11,887,805
- Issue date Jan 30, 2024
- FEI Company
- John Stiller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extended lifetime dual indirectly-heated cathode ion source
- Patent number 11,798,775
- Issue date Oct 24, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic immersion electron gun
- Patent number 11,636,996
- Issue date Apr 25, 2023
- KLA Corporation
- Nikolai N. Chubun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam gun control systems and methods
- Patent number 11,478,664
- Issue date Oct 25, 2022
- Varian Medical Systems, Inc.
- Mark Everett Trail
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Control method for electron microscope and electron microscope
- Patent number 11,404,238
- Issue date Aug 2, 2022
- Jeol Ltd.
- Mitsuru Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, electron microscope, three-dimensional additive manuf...
- Patent number 11,398,364
- Issue date Jul 26, 2022
- Jeol Ltd.
- Shinichi Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam source
- Patent number 11,380,511
- Issue date Jul 5, 2022
- FEI Company
- Kun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal ion source emitting device
- Patent number 11,373,837
- Issue date Jun 28, 2022
- Beijing Normal University
- Bin Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniaxial counter-propagating monolaser atom trap
- Patent number 11,291,103
- Issue date Mar 29, 2022
- GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY O...
- Stephen Paul Eckel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injector for reaction regions
- Patent number 10,971,340
- Issue date Apr 6, 2021
- Stephan Wege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle beam device
- Patent number 10,903,037
- Issue date Jan 26, 2021
- HITACHI HIGH-TECH CORPORATION
- Keigo Kasuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam gun control systems and methods
- Patent number 10,843,011
- Issue date Nov 24, 2020
- Varian Medical Systems, Inc.
- Mark Everett Trail
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Optically addressed, thermionic electron beam device
- Patent number 10,741,352
- Issue date Aug 11, 2020
- The Board of Trustees of the Leland Stanford Junior University
- Alireza Nojeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing electrode for cathode arrangement, electron gun, and litho...
- Patent number 10,622,188
- Issue date Apr 14, 2020
- ASML Netherlands B.V.
- Laura Dinu-Gürtler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic lens, and parallel beam generation device and paralle...
- Patent number 10,614,992
- Issue date Apr 7, 2020
- National University Corporation Nara Institute of Science and Technology
- Fumihiko Matsui
- G01 - MEASURING TESTING
Information Patent Grant
Electron spectroscopy system
- Patent number 10,607,807
- Issue date Mar 31, 2020
- Board of Trustees of Michigan State University
- Chong-Yu Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam treatment apparatus
- Patent number 10,603,517
- Issue date Mar 31, 2020
- Electronics and Telecommunications Research Institute
- Dong Hoon Song
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
High-brightness lanthanum hexaboride cathode and method for manufac...
- Patent number 10,553,388
- Issue date Feb 4, 2020
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Varied component density for thermal isolation
- Patent number 10,535,499
- Issue date Jan 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Adam M. McLaughlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun capable of suppressing the influence of electron emiss...
- Patent number 10,475,618
- Issue date Nov 12, 2019
- NEC Network and Sensor Systems, Ltd.
- Akira Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus with high resolutions
- Patent number 10,096,447
- Issue date Oct 9, 2018
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode arrangement, electron gun, and lithography system comprisin...
- Patent number 9,466,453
- Issue date Oct 11, 2016
- Mapper Lithography IP B.V.
- Laura Dinu-Gürtler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cathode arrangement, electron gun, and lithography system comprisin...
- Patent number 9,455,112
- Issue date Sep 27, 2016
- Mapper Lithography IP B.V.
- Laura Dinu-Gürtler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LAMINATE, ELECTRON SOURCE AND ELECTRONIC DEVICE CONTAINING LAMINATE...
- Publication number 20240395494
- Publication date Nov 28, 2024
- NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Katsumi NAGAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE D...
- Publication number 20240242941
- Publication date Jul 18, 2024
- HAMAMATSU PHOTONICS K. K.
- Akio Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SETTING GAP BETWEEN CATHODE AND FILAMENT
- Publication number 20240038490
- Publication date Feb 1, 2024
- Axcelis Technologies, Inc.
- Steven T. Drummond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN CATHODE TECHNOLOGY
- Publication number 20230330751
- Publication date Oct 19, 2023
- Freemelt AB
- Ulric LJUNGBLAD
- B22 - CASTING POWDER METALLURGY
Information Patent Application
Electron Source, Method of Manufacturing the Same, And Electron Bea...
- Publication number 20230317401
- Publication date Oct 5, 2023
- Hitachi High-Tech Corporation
- Toshiaki KUSUNOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-RAY CATHODE FOCUSING ELEMENT
- Publication number 20230197396
- Publication date Jun 22, 2023
- GE Precision Healthcare LLC
- Kevin Kruse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE MECHANISM OF ELECTRON EMISSION SOURCE, AND METHOD FOR MANUF...
- Publication number 20230132046
- Publication date Apr 27, 2023
- NuFlare Technology, Inc.
- Ryoei KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILAMENT-LESS ELECTRON SOURCE
- Publication number 20230101787
- Publication date Mar 30, 2023
- FEI Company
- John Stiller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE
- Publication number 20230100805
- Publication date Mar 30, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM GUN CONTROL SYSTEMS AND METHODS
- Publication number 20230040534
- Publication date Feb 9, 2023
- Varian Medical Systems, Inc.
- Mark Everett Trail
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
BEAM CURRENT ADJUSTMENT FOR CHARGED-PARTICLE INSPECTION SYSTEM
- Publication number 20230028799
- Publication date Jan 26, 2023
- ASML NETHERLANDS B.V.
- Wei FANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SOURCE
- Publication number 20230011267
- Publication date Jan 12, 2023
- FEI Company
- Kun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Source, Electron Beam Device, and Method for Manufacturing...
- Publication number 20220415603
- Publication date Dec 29, 2022
- Hitachi High-Tech Corporation
- Toshiaki KUSUNOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPARATUS AND METHOD FOR CONTROLLING ELECTRON BEAM AP...
- Publication number 20220351934
- Publication date Nov 3, 2022
- HITACHI HIGH-TECH CORPORATION
- Erina KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Injecting a Medication
- Publication number 20220301806
- Publication date Sep 22, 2022
- Mohammed Nasser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Gun and Charged Particle Beam Device Equipped With Electro...
- Publication number 20220230835
- Publication date Jul 21, 2022
- Hitachi High-Tech Corporation
- Minoru KANEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE D...
- Publication number 20220199372
- Publication date Jun 23, 2022
- HAMAMATSU PHOTONICS K. K.
- Akio Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON BEAM APPLICATION DEVICE, AND ELECTRON BEAM EMISSION METHOD...
- Publication number 20220199350
- Publication date Jun 23, 2022
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC IMMERSION ELECTRON GUN
- Publication number 20220076914
- Publication date Mar 10, 2022
- KLA Corporation
- Nikolai N. Chubun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL ION SOURCE EMITTING DEVICE
- Publication number 20210343495
- Publication date Nov 4, 2021
- BEIJING NORMAL UNIVERSITY
- Bin LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SOURCE
- Publication number 20210305006
- Publication date Sep 30, 2021
- FEI Company
- Kun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, ELECTRON MICROSCOPE, THREE-DIMENSIONAL ADDITIVE MANUF...
- Publication number 20210151278
- Publication date May 20, 2021
- JEOL Ltd.
- Shinichi Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR PROVIDING ELECTRONS AND METHOD FOR MAKING THE SAME
- Publication number 20210104376
- Publication date Apr 8, 2021
- City University of Hong Kong
- Fu-Rong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Control Method for Electron Microscope and Electron Microscope
- Publication number 20210074506
- Publication date Mar 11, 2021
- Mitsuru Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM GUN CONTROL SYSTEMS AND METHODS
- Publication number 20200330798
- Publication date Oct 22, 2020
- Varian Medical Systems, Inc.
- Mark Everett Trail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas injector for reaction regions
- Publication number 20200185198
- Publication date Jun 11, 2020
- Stephan Wege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIAXIAL COUNTER-PROPAGATING MONOLASER ATOM TRAP
- Publication number 20200120785
- Publication date Apr 16, 2020
- Government of the United States of America, as Represented by the Secretary o...
- Stephen Paul Eckel
- G02 - OPTICS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20200090897
- Publication date Mar 19, 2020
- Hitachi High-Technologies Corporation
- Keigo KASUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICALLY ADDRESSED, THERMIONIC ELECTRON BEAM DEVICE
- Publication number 20190341217
- Publication date Nov 7, 2019
- The University of British Columbia
- Alireza NOJEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Varied Component Density For Thermal Isolation
- Publication number 20190139742
- Publication date May 9, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Adam M. McLaughlin
- G05 - CONTROLLING REGULATING

Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

X-ray cathode focusing element

Particle beam gun control systems and methods

Cathode mechanism of electron emission source, and method for manuf...

Electron gun and charged particle beam device equipped with electro...

Light emitting sealed body, light emitting unit, and light source d...

Conical heat shield for electron emitting cathode

Electron beam apparatus and method for controlling electron beam ap...

Filament-less electron source

Extended lifetime dual indirectly-heated cathode ion source

Magnetic immersion electron gun

Particle beam gun control systems and methods

Control method for electron microscope and electron microscope

Electron gun, electron microscope, three-dimensional additive manuf...

Charged particle beam source

Metal ion source emitting device

Uniaxial counter-propagating monolaser atom trap

Gas injector for reaction regions

Charged particle beam device

Particle beam gun control systems and methods

Optically addressed, thermionic electron beam device

Focusing electrode for cathode arrangement, electron gun, and litho...

Electrostatic lens, and parallel beam generation device and paralle...

Electron spectroscopy system

Ion beam treatment apparatus

High-brightness lanthanum hexaboride cathode and method for manufac...

Varied component density for thermal isolation

Electron gun capable of suppressing the influence of electron emiss...

Electron beam apparatus with high resolutions

Cathode arrangement, electron gun, and lithography system comprisin...

Cathode arrangement, electron gun, and lithography system comprisin...

Patents Applicationslast 30 patents

LAMINATE, ELECTRON SOURCE AND ELECTRONIC DEVICE CONTAINING LAMINATE...

LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE D...

METHOD FOR SETTING GAP BETWEEN CATHODE AND FILAMENT

ELECTRON GUN CATHODE TECHNOLOGY

Electron Source, Method of Manufacturing the Same, And Electron Bea...

X-RAY CATHODE FOCUSING ELEMENT

CATHODE MECHANISM OF ELECTRON EMISSION SOURCE, AND METHOD FOR MANUF...

FILAMENT-LESS ELECTRON SOURCE

EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE

PARTICLE BEAM GUN CONTROL SYSTEMS AND METHODS

BEAM CURRENT ADJUSTMENT FOR CHARGED-PARTICLE INSPECTION SYSTEM

CHARGED PARTICLE BEAM SOURCE

Electron Source, Electron Beam Device, and Method for Manufacturing...

ELECTRON BEAM APPARATUS AND METHOD FOR CONTROLLING ELECTRON BEAM AP...

System and Method for Injecting a Medication

Electron Gun and Charged Particle Beam Device Equipped With Electro...

LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE D...

ELECTRON BEAM APPLICATION DEVICE, AND ELECTRON BEAM EMISSION METHOD...

MAGNETIC IMMERSION ELECTRON GUN

METAL ION SOURCE EMITTING DEVICE

CHARGED PARTICLE BEAM SOURCE

ELECTRON GUN, ELECTRON MICROSCOPE, THREE-DIMENSIONAL ADDITIVE MANUF...

DEVICE FOR PROVIDING ELECTRONS AND METHOD FOR MAKING THE SAME

Control Method for Electron Microscope and Electron Microscope

PARTICLE BEAM GUN CONTROL SYSTEMS AND METHODS

Gas injector for reaction regions

UNIAXIAL COUNTER-PROPAGATING MONOLASER ATOM TRAP

CHARGED PARTICLE BEAM DEVICE

OPTICALLY ADDRESSED, THERMIONIC ELECTRON BEAM DEVICE

Varied Component Density For Thermal Isolation