Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Industry

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H01J37/05

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/05Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus, semiconductor device and man...
- Patent number 12,183,538
- Issue date Dec 31, 2024
- Kioxia Corporation
- Takayuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated ion-beam alignment for dual-beam instrument
- Patent number 12,154,757
- Issue date Nov 26, 2024
- FEI Company
- Jeremy Graham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for implanting particles into a substrate
- Patent number 12,125,670
- Issue date Oct 22, 2024
- MI2-FACTORY GMBH
- Constantin Csato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy filter element for ion implantation systems for the use in t...
- Patent number 12,080,510
- Issue date Sep 3, 2024
- MI2-FACTORY GMBH
- Florian Krippendorf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer
- Patent number 11,929,229
- Issue date Mar 12, 2024
- MI2-FACTORY GMBH
- Florian Krippendorf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer supporting device
- Patent number 11,929,266
- Issue date Mar 12, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Takashi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite ion source based upon heterogeneous metal-metal fluoride...
- Patent number 11,887,806
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Graham Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number RE49784
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Weiming Ren
Information Patent Grant
Energy filter element for ion implantation systems for the use in t...
- Patent number 11,837,430
- Issue date Dec 5, 2023
- MI2-FACTORY GMBH
- Florian Krippendorf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of imaging a specimen using a transmission charged particle...
- Patent number 11,810,751
- Issue date Nov 7, 2023
- FEI Company
- Peter Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam source for optical device fabrication using a segmented io...
- Patent number 11,810,755
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Ludovic Godet
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 11,804,355
- Issue date Oct 31, 2023
- ASML Netherlands B.V.
- Yan Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bandpass charged particle energy filtering detector for charged par...
- Patent number 11,749,495
- Issue date Sep 5, 2023
- KLA Corp.
- Youfei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for implanting ions in wafers
- Patent number 11,705,300
- Issue date Jul 18, 2023
- MI2-FACTORY GMBH
- Florian Krippendorf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for modifying the wettability and/or other biocompatibility...
- Patent number 11,698,582
- Issue date Jul 11, 2023
- Exogenesis Corporation
- Joseph B. Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensing data related to charged particles to predict an anomaly in...
- Patent number 11,688,599
- Issue date Jun 27, 2023
- Government of the United States of America as represented by the Secretary of...
- Chadwick Lindstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,657,999
- Issue date May 23, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mismatched optics for angular control of extracted ion beam
- Patent number 11,651,932
- Issue date May 16, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of mixing upstream and downstream current measurements for i...
- Patent number 11,646,175
- Issue date May 9, 2023
- Axcelis Technologies, Inc.
- James DeLuca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of optical device fabrication using an ion beam source
- Patent number 11,640,898
- Issue date May 2, 2023
- Applied Materials, Inc.
- Ludovic Godet
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron optical system and multi-beam image acquiring apparatus
- Patent number 11,621,144
- Issue date Apr 4, 2023
- NuFlare Technology, Inc.
- John Hartley
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Ion focusing device
- Patent number 11,605,531
- Issue date Mar 14, 2023
- Battelle Memorial Institute
- Yehia M. Ibrahim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system and method for energy spread ion beam
- Patent number 11,569,063
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Paul J. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle yield via beam-line pressure control
- Patent number 11,562,885
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Thomas Stacy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 11,562,881
- Issue date Jan 24, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and technique for profile modulation using high tilt angles
- Patent number 11,551,904
- Issue date Jan 10, 2023
- Applied Materials, Inc.
- Venkataramana R. Chavva
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 11,515,121
- Issue date Nov 29, 2022
- HITACHI HIGH-TECH CORPORATION
- Tomohiko Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant apparatus and method of controlling the ion implant app...
- Patent number 11,462,382
- Issue date Oct 4, 2022
- NANYA TECHNOLOGY CORPORATION
- Hsun-Po Wen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus for optical device fabrication
- Patent number 11,462,386
- Issue date Oct 4, 2022
- Applied Materials, Inc.
- Kartik Ramaswamy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged-particle beam device and cross-sectional shape estimation p...
- Patent number 11,443,914
- Issue date Sep 13, 2022
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...
- Publication number 20250014854
- Publication date Jan 9, 2025
- mi2-factory GmbH
- Florian KRIPPENDORF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...
- Publication number 20240379324
- Publication date Nov 14, 2024
- FEI Company
- Wouter Rene J. VAN DEN BROEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240371636
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Min Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM
- Publication number 20240339287
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM
- Publication number 20240339288
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A COMPUTER-IMPLEMENTED METHOD FOR THE SIMULATION OF AN ENERGY-FILTE...
- Publication number 20240303390
- Publication date Sep 12, 2024
- mi2-factory GmbH
- Florian KRIPPENDORF
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE DEVICE AND METHOD
- Publication number 20240087835
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Albertus Victor Gerardus MANGNUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...
- Publication number 20240055217
- Publication date Feb 15, 2024
- mi2-factory GmbH
- Florian KRIPPENDORF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON OPTICAL COLUMN AND METHOD FOR DIRECTING A BEAM OF PRIMARY...
- Publication number 20240055219
- Publication date Feb 15, 2024
- ASML NETHERLANDS B.V.
- Mans Johan Bertil OSTERBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Energy Filter Assembly for Ion Implantation System with at least on...
- Publication number 20240047168
- Publication date Feb 8, 2024
- mi2-factory GmbH
- Constantin Csato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID CELL FOR ELECTRON MICROSCOPE AND MANUFACTURING METHOD THEREOF
- Publication number 20240038487
- Publication date Feb 1, 2024
- DAEGU GYEONGBUK INSTITUTE OF SCIENCE & TECHNOLOGY
- Jiwoong YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Spectrometer and Analytical Method
- Publication number 20230411113
- Publication date Dec 21, 2023
- JEOL Ltd.
- Tatsuya Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE ION SOURCE BASED UPON HETEROGENEOUS METAL-METAL FLUORIDE...
- Publication number 20230326703
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Graham Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Energy Filter, and Energy Analyzer and Charged Particle Beam Device...
- Publication number 20230298845
- Publication date Sep 21, 2023
- Hitachi High-Tech Corporation
- Kazuhiro HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER
- Publication number 20230282439
- Publication date Sep 7, 2023
- mi2-factory GmbH
- Florian KRIPPENDORF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION DEVICE COMPRISING ENERGY FILTER AND ADDITIONAL HEA...
- Publication number 20230197398
- Publication date Jun 22, 2023
- mi2-factory GmbH
- Florian KRIPPENDORF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE STRUCTURE FOR GUIDING A CHARGED PARTICLE BEAM
- Publication number 20230170177
- Publication date Jun 1, 2023
- Friedrich-Alexander-Universitat Erlangen-Nurnberg
- Robert ZIMMERMANN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIEN FILTER AND MULTIPLE ELECTRON BEAM INSPECTION APPARATUS
- Publication number 20230136198
- Publication date May 4, 2023
- NuFlare Technology, Inc.
- Toshikatsu AKIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mismatched Optics for Angular Control of Extracted Ion Beam
- Publication number 20230131410
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCA...
- Publication number 20230109695
- Publication date Apr 13, 2023
- ASML NETHERLANDS B.V.
- Xuechen ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BANDPASS CHARGED PARTICLE ENERGY FILTERING DETECTOR FOR CHARGED PAR...
- Publication number 20230104558
- Publication date Apr 6, 2023
- KLA Corporation
- Youfei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND MULTI-ELECTRON...
- Publication number 20230077403
- Publication date Mar 16, 2023
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...
- Publication number 20230069666
- Publication date Mar 2, 2023
- KIOXIA Corporation
- Takayuki ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20220392735
- Publication date Dec 8, 2022
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION PRODUCTION SYSTEM WITH EFFICIENT ION COLLECTION
- Publication number 20220363558
- Publication date Nov 17, 2022
- SHINE Technologies, LLC
- Joseph Sherman
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Semiconductor Device and Method of Manufacture
- Publication number 20220344151
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Min Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUPPORTING DEVICE
- Publication number 20220336237
- Publication date Oct 20, 2022
- NISSIN ION EQUIPMENT CO., LTD.
- Takashi SAKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM
- Publication number 20220319806
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Paul J. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANT APPARATUS AND METHOD OF CONTROLLING THE ION IMPLANT APP...
- Publication number 20220270846
- Publication date Aug 25, 2022
- NANYA TECHNOLOGY CORPORATION
- Hsun-Po WEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR...
- Publication number 20220262594
- Publication date Aug 18, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS

Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor manufacturing apparatus, semiconductor device and man...

Automated ion-beam alignment for dual-beam instrument

Device and method for implanting particles into a substrate

Energy filter element for ion implantation systems for the use in t...

Semiconductor wafer

Wafer supporting device

Composite ion source based upon heterogeneous metal-metal fluoride...

Apparatus of plural charged-particle beams

Energy filter element for ion implantation systems for the use in t...

Method of imaging a specimen using a transmission charged particle...

Ion beam source for optical device fabrication using a segmented io...

Apparatus for multiple charged-particle beams

Bandpass charged particle energy filtering detector for charged par...

Method and device for implanting ions in wafers

Method for modifying the wettability and/or other biocompatibility...

Sensing data related to charged particles to predict an anomaly in...

Particle beam system and method for the particle-optical examinatio...

Mismatched optics for angular control of extracted ion beam

Method of mixing upstream and downstream current measurements for i...

Methods of optical device fabrication using an ion beam source

Electron optical system and multi-beam image acquiring apparatus

Ion focusing device

Apparatus, system and method for energy spread ion beam

Particle yield via beam-line pressure control

Charged particle beam system

System and technique for profile modulation using high tilt angles

Electron beam device

Ion implant apparatus and method of controlling the ion implant app...

Electron beam apparatus for optical device fabrication

Charged-particle beam device and cross-sectional shape estimation p...

Patents Applicationslast 30 patents

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...

METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

A COMPUTER-IMPLEMENTED METHOD FOR THE SIMULATION OF AN ENERGY-FILTE...

CHARGED PARTICLE DEVICE AND METHOD

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...

ELECTRON OPTICAL COLUMN AND METHOD FOR DIRECTING A BEAM OF PRIMARY...

Energy Filter Assembly for Ion Implantation System with at least on...

LIQUID CELL FOR ELECTRON MICROSCOPE AND MANUFACTURING METHOD THEREOF

Electron Spectrometer and Analytical Method

COMPOSITE ION SOURCE BASED UPON HETEROGENEOUS METAL-METAL FLUORIDE...

Energy Filter, and Energy Analyzer and Charged Particle Beam Device...

SEMICONDUCTOR WAFER

ION IMPLANTATION DEVICE COMPRISING ENERGY FILTER AND ADDITIONAL HEA...

ELECTRODE STRUCTURE FOR GUIDING A CHARGED PARTICLE BEAM

WIEN FILTER AND MULTIPLE ELECTRON BEAM INSPECTION APPARATUS

Mismatched Optics for Angular Control of Extracted Ion Beam

ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCA...

BANDPASS CHARGED PARTICLE ENERGY FILTERING DETECTOR FOR CHARGED PAR...

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND MULTI-ELECTRON...

SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...

METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE

ION PRODUCTION SYSTEM WITH EFFICIENT ION COLLECTION

Semiconductor Device and Method of Manufacture

WAFER SUPPORTING DEVICE

APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM

ION IMPLANT APPARATUS AND METHOD OF CONTROLLING THE ION IMPLANT APP...

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR...