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H01J37/3007
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/3007
Electron or ion-optical systems
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and system
Patent number
12,087,591
Issue date
Sep 10, 2024
Tokyo Electron Limited
Gen Tamamushi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for spatial charged particle bunching
Patent number
12,068,130
Issue date
Aug 20, 2024
NexGen Semi Holding, Inc.
Mark Joseph Bennahmias
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern data processing for programmable direct-write apparatus
Patent number
12,040,157
Issue date
Jul 16, 2024
IMS Nanofabrication GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam grid layout
Patent number
RE49952
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Vincent Sylvester Kuiper
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Angle control for neutral reactive species generated in a plasma
Patent number
11,881,378
Issue date
Jan 23, 2024
Applied Materials, Inc.
Glen F. R. Gilchrist
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Height measuring device, charged particle beam apparatus, and heigh...
Patent number
11,754,388
Issue date
Sep 12, 2023
Jeol Ltd.
Yukinori Aida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam inspection apparatus with improved detection performance...
Patent number
11,721,521
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Weiming Ren
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Resonator coil having an asymmetrical profile
Patent number
11,710,617
Issue date
Jul 25, 2023
Applied Materials, Inc.
Costel Biloiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and device for spatial charged particle bunching
Patent number
11,699,568
Issue date
Jul 11, 2023
NextGen Semi Holding, Inc.
Mark Joseph Bennahmias
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam irradiation apparatus and electron beam irradiation m...
Patent number
11,664,191
Issue date
May 30, 2023
NuFlare Technology, Inc.
Taku Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam lithography system
Patent number
11,610,758
Issue date
Mar 21, 2023
KKT HOLDINGS SYNDICATE
Tzu-Yi Kuo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metal plating of grids for ion beam sputtering
Patent number
11,581,164
Issue date
Feb 14, 2023
Excelitas Technologies Corp.
Eric Baltz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fill pattern to enhance ebeam process margin
Patent number
11,581,162
Issue date
Feb 14, 2023
Intel Corporation
Shakul Tandon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual XY variable aperture in an ion implantation system
Patent number
11,574,796
Issue date
Feb 7, 2023
Applied Materials, Inc.
Jun Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin pellicle material for protection of solid-state electron detec...
Patent number
11,443,916
Issue date
Sep 13, 2022
KLA Corporation
William G. Schultz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic filter providing reduced particle generation
Patent number
11,437,215
Issue date
Sep 6, 2022
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for spatial charged particle bunching
Patent number
11,335,537
Issue date
May 17, 2022
NexGen Semi Holding, Inc.
Mark Joseph Bennahmias
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle multi-beam device
Patent number
11,322,335
Issue date
May 3, 2022
Ebara Corporation
Shinichi Okada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and plasma processing apparatus
Patent number
11,315,793
Issue date
Apr 26, 2022
Tokyo Electron Limited
Gen Tamamushi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for generating bunched ion beam
Patent number
11,295,931
Issue date
Apr 5, 2022
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam inspection apparatus with improved detection performance...
Patent number
11,282,675
Issue date
Mar 22, 2022
ASML Netherlands B.V.
Weiming Ren
B82 - NANO-TECHNOLOGY
Information
Patent Grant
System, apparatus and method for bunched ribbon ion beam
Patent number
11,217,427
Issue date
Jan 4, 2022
Applied Materials, Inc.
Anthony Renau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device
Patent number
11,133,153
Issue date
Sep 28, 2021
HITACHI HIGH-TECH CORPORATION
Toru Iwaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission electron microscope and method of controlling same
Patent number
11,133,151
Issue date
Sep 28, 2021
Jeol Ltd.
Hirofumi Iijima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fill pattern to enhance e-beam process margin
Patent number
11,107,658
Issue date
Aug 31, 2021
Intel Corporation
Shakul Tandon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,094,426
Issue date
Aug 17, 2021
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Resonator coil having an asymmetrical profile
Patent number
11,094,504
Issue date
Aug 17, 2021
Applied Materials, Inc.
Costel Biloiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source device
Patent number
11,004,649
Issue date
May 11, 2021
Luxembourg Institute of Science and Technology (LIST)
Olivier De Castro
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF ASSEMBLING DRIFT TUBE ASSEMBLIES IN ION IMPLANTORS
Publication number
20240420919
Publication date
Dec 19, 2024
Applied Materials, Inc.
Aaron P. WEBB
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLANKING APERTURE ARRAY SYSTEM AND CHARGED PARTICLE BEAM WRITING AP...
Publication number
20240282550
Publication date
Aug 22, 2024
NuFlare Technology, Inc.
Kei HASEGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Adjustable Magnetic Lens Having Permanent-Magnetic and Electromagne...
Publication number
20240212970
Publication date
Jun 27, 2024
IMS Nanofabrication GmbH
Christoph Spengler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER
Publication number
20240170252
Publication date
May 23, 2024
Carl Zeiss MultiSEM GmbH
Yanko Sarov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR SPATIAL CHARGED PARTICLE BUNCHING
Publication number
20240112882
Publication date
Apr 4, 2024
NEXGEN SEMI HOLDING, INC.
Mark Joseph Bennahmias
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Focused Ion Beam Apparatus
Publication number
20240071718
Publication date
Feb 29, 2024
JEOL Ltd.
Yusuke Kagaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20240055218
Publication date
Feb 15, 2024
NuFlare Technology, Inc.
Yasuo SENGOKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion implantation device with an energy filter and a support element...
Publication number
20240038491
Publication date
Feb 1, 2024
mi2-factory GmbH
Constantin Csato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM
Publication number
20240029997
Publication date
Jan 25, 2024
Applied Materials, Inc.
Paul J. Murphy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20230386696
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
ANGLE CONTROL FOR NEUTRAL REACTIVE SPECIES GENERATED IN A PLASMA
Publication number
20230369013
Publication date
Nov 16, 2023
Applied Materials, Inc.
Glen F. R. Gilchrist
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUSED ION BEAM SYSTEM
Publication number
20230307205
Publication date
Sep 28, 2023
V Technology Co., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANTI-BREAKDOWN ION SOURCE DISCHARGE APPARATUS
Publication number
20230207260
Publication date
Jun 29, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Yaoyao ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIFFERENTIAL PUMPING APPARATUS AND FOCUSED ENERGY BEAM SYSTEM
Publication number
20230178335
Publication date
Jun 8, 2023
V Technology Co., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING STAGE...
Publication number
20230143197
Publication date
May 11, 2023
HITACHI HIGH-TECH CORPORATION
Akira NISHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dual XY Variable Aperture In An Ion Implantation System
Publication number
20230021619
Publication date
Jan 26, 2023
Applied Materials, Inc.
Jun Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pattern Data Processing For Programmable Direct-Write Apparatus
Publication number
20220384143
Publication date
Dec 1, 2022
IMS Nanofabrication GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
Publication number
20220319808
Publication date
Oct 6, 2022
ASML NETHERLANDS B.V.
Weiming REN
B82 - NANO-TECHNOLOGY
Information
Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
Publication number
20220285126
Publication date
Sep 8, 2022
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Mitsukuni Tsukihara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR SPATIAL CHARGED PARTICLE BUNCHING
Publication number
20220254603
Publication date
Aug 11, 2022
NEXGEN SEMI HOLDING, INC.
Mark Joseph Bennahmias
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND SYSTEM
Publication number
20220223427
Publication date
Jul 14, 2022
TOKYO ELECTRON LIMITED
Gen TAMAMUSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM IRRADIATION APPARATUS AND ELECTRON BEAM IRRADIATION M...
Publication number
20220189734
Publication date
Jun 16, 2022
NuFlare Technology, Inc.
Taku YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR SPATIAL CHARGED PARTICLE BUNCHING
Publication number
20220059319
Publication date
Feb 24, 2022
NEXGEN SEMI HOLDING, INC.
Mark Joseph Bennahmias
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20210383941
Publication date
Dec 9, 2021
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
FILL PATTERN TO ENHANCE EBEAM PROCESS MARGIN
Publication number
20210358713
Publication date
Nov 18, 2021
Intel Corporation
Shakul TANDON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR SELECTIVE MOLECULAR ION DEPOSITION
Publication number
20210351003
Publication date
Nov 11, 2021
Battelle Memorial Institute
Sandilya V.B. Garimella
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE
Publication number
20210343500
Publication date
Nov 4, 2021
Applied Materials, Inc.
Costel Biloiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULAR PARALLEL ELECTRON LITHOGRAPHY
Publication number
20210335572
Publication date
Oct 28, 2021
John Bennett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thin Pellicle Material for Protection of Solid-State Electron Detec...
Publication number
20210327676
Publication date
Oct 21, 2021
KLA Corporation
William G. Schultz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE
Publication number
20210210307
Publication date
Jul 8, 2021
Applied Materials, Inc.
Costel Biloiu
H01 - BASIC ELECTRIC ELEMENTS