Electrostatic lenses

Industry

CPC
H01J3/18

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps

Current Industry

H01J3/18Electrostatic lenses

Industries

Patents Grantslast 30 patents

Information Patent Grant
Electron gun and radiation generating apparatus
- Patent number 10,074,503
- Issue date Sep 11, 2018
- Siemens Aktiengesellschaft
- Oliver Heid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robust electrode with septum rod for biased X-ray tube cathode
- Patent number 10,032,595
- Issue date Jul 24, 2018
- General Electric Company
- Sergio Lamaitre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray tube
- Patent number 9,653,248
- Issue date May 16, 2017
- Toshiba Electron Tubes & Devices Co., Ltd.
- Tomonari Ishihara
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Charged particle lithography system with a long shape illumination...
- Patent number 9,202,662
- Issue date Dec 1, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jimmy Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic lens and charged particle beam apparatus using the same
- Patent number 9,117,625
- Issue date Aug 25, 2015
- Kyocera Corporation
- Yukio Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gun configured to generate charged particles
- Patent number 9,093,243
- Issue date Jul 28, 2015
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced integrity projection lens assembly
- Patent number 8,987,679
- Issue date Mar 24, 2015
- Mapper Lithography IP B.V.
- Johan Joost Koning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode of electrostatic lens and method of manufacturing the same
- Patent number 8,963,099
- Issue date Feb 24, 2015
- Canon Kabushiki Kaisha
- Shuji Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source, nanofabrication apparatus comprising such source, and a...
- Patent number 8,927,942
- Issue date Jan 6, 2015
- Centre National de la Recherche Scientifique-CNRS
- Jacques Gierak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic lens array
- Patent number 8,748,842
- Issue date Jun 10, 2014
- Canon Kabushiki Kaisha
- Yasuo Ohashi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle beam lens
- Patent number 8,710,455
- Issue date Apr 29, 2014
- Canon Kabushiki Kaisha
- Takashi Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid electrostatic lens for improved beam transmission
- Patent number 8,664,619
- Issue date Mar 4, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam lens and charged particle beam exposure appar...
- Patent number 8,558,191
- Issue date Oct 15, 2013
- Canon Kabushiki Kaisha
- Akira Shimazu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electrostatic lens
- Patent number 8,466,430
- Issue date Jun 18, 2013
- Canon Kabushiki Kaisha
- Kazuhiro Sando
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for generating femtosecond electron beam
- Patent number 8,278,813
- Issue date Oct 2, 2012
- POSTECH Academy-Industry Foundation
- Yong Woon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Crossover point regulation method for electro-static focusing systems
- Patent number 8,253,315
- Issue date Aug 28, 2012
- ATTI International Services Company, Inc.
- Artush A. Abgaryan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multiple device shaping uniform distribution of current density in...
- Patent number 8,084,929
- Issue date Dec 27, 2011
- ATTI International Services Company, Inc.
- Artush A. Abgaryan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multiple device shaping uniform distribution of current density in...
- Patent number 8,084,930
- Issue date Dec 27, 2011
- ATTI International Services Company, Inc.
- Artush A. Abgaryan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Micro-column with simple structure
- Patent number 8,044,351
- Issue date Oct 25, 2011
- Cebt Co. Ltd
- Ho Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam lens for micro-column electron beam apparatus and met...
- Patent number 7,307,260
- Issue date Dec 11, 2007
- Electronics and Telecommunications Research Institute
- Sang Kuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam lens for micro-column electron beam apparatus and met...
- Patent number 7,230,251
- Issue date Jun 12, 2007
- Electronics and Telecommunications Research Institute
- Sang Kuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam lens for micro-column electron beam apparatus and met...
- Patent number 6,996,896
- Issue date Feb 14, 2006
- Electronics and Telecommunications Research Institute
- Sang Kuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter device with focusing columns
- Patent number 6,822,241
- Issue date Nov 23, 2004
- Hewlett-Packard Development Company, L.P.
- David Schut
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion-shielded focusing method for high-density electron beams genera...
- Patent number 6,683,414
- Issue date Jan 27, 2004
- Northrop Grumman Corporation
- David Riley Whaley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Illumination system for electron beam lithography tool
- Patent number 6,333,508
- Issue date Dec 25, 2001
- Lucent Technologies, Inc.
- Victor Katsap
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam optical element charged particle beam exposur...
- Patent number 6,028,317
- Issue date Feb 22, 2000
- Kabushiki Kaisha Toshiba
- Ken-ichi Murooka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for the manufacture of a multipolar elongate-electrode lens...
- Patent number 5,384,461
- Issue date Jan 24, 1995
- Fisons plc
- Joseph P. R. Jullien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and structures to produce electrostatic quadrupole fields u...
- Patent number 4,704,532
- Issue date Nov 3, 1987
- Fudan University
- Zhong-yi Hua
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged particle beam focussing device
- Patent number 4,464,573
- Issue date Aug 7, 1984
- Unisearch Limited
- Robert L. Dalglish
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Unipotential lens assembly for charged particle beam tubes and meth...
- Patent number 4,338,548
- Issue date Jul 6, 1982
- Control Data Corporation
- David C. Bono
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Robust Electrode With Septum Rod For Biased X-Ray Tube Cathode
- Publication number 20170250051
- Publication date Aug 31, 2017
- GENERAL ELECTRIC COMPANY
- Sergio Lamaitre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND RADIATION GENERATING APPARATUS
- Publication number 20160293375
- Publication date Oct 6, 2016
- Oliver Heid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GUN CONFIGURED TO GENERATE CHARGED PARTICLES
- Publication number 20140346368
- Publication date Nov 27, 2014
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA-MINIATURIZED ELECTRON OPTICAL MICROCOLUMN
- Publication number 20140224997
- Publication date Aug 14, 2014
- Industry-University Cooperation Foundation Sunmoon University
- Tae Sik OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC LENS AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME
- Publication number 20140224999
- Publication date Aug 14, 2014
- KYOCERA CORPORATION
- Yukio Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged Particle Lithography System With a Long Shape Illumination...
- Publication number 20140212815
- Publication date Jul 31, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jimmy Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM LENS AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20140197325
- Publication date Jul 17, 2014
- Canon Kabushiki Kaisha
- Takahisa Kato
- B82 - NANO-TECHNOLOGY
Information Patent Application
Ion Source, Nanofabrication Apparatus Comprising Such Source, and a...
- Publication number 20140175301
- Publication date Jun 26, 2014
- UNIVERSITE LYON 1 CLAUDE BERNARD
- Jacques Gierak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED INTEGRITY PROJECTION LENS ASSEMBLY
- Publication number 20140175300
- Publication date Jun 26, 2014
- JOHAN JOOST KONING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC LENS UNIT
- Publication number 20140077096
- Publication date Mar 20, 2014
- Takashi Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Optics with Azimuthally-Varying Third-Order Aberra...
- Publication number 20140034845
- Publication date Feb 6, 2014
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC LENS ARRAY
- Publication number 20130341526
- Publication date Dec 26, 2013
- Yasuo Ohashi
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRODE OF ELECTROSTATIC LENS AND METHOD OF MANUFACTURING THE SAME
- Publication number 20130306878
- Publication date Nov 21, 2013
- Canon Kabushiki Kaisha
- Shuji Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM LENS
- Publication number 20130299714
- Publication date Nov 14, 2013
- Canon Kabushiki Kaisha
- Takashi Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION
- Publication number 20130256526
- Publication date Oct 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION
- Publication number 20130256527
- Publication date Oct 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM LENS AND CHARGED PARTICLE BEAM EXPOSURE APPAR...
- Publication number 20130206999
- Publication date Aug 15, 2013
- Canon Kabushiki Kaisha
- Akira Shimazu
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTROSTATIC LENS
- Publication number 20130087717
- Publication date Apr 11, 2013
- Canon Kabushiki Kaisha
- Kazuhiro Sando
- B82 - NANO-TECHNOLOGY
Information Patent Application
CROSSOVER POINT REGULATION METHOD FOR ELECTRO-STATIC FOCUSING SYSTEMS
- Publication number 20120126697
- Publication date May 24, 2012
- ATTI INTERNATIONAL SERVICES COMPANY, INC
- Artush A. Abgaryan
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multiple Device Shaping Uniform Distribution of Current Density in...
- Publication number 20110068675
- Publication date Mar 24, 2011
- ATTI INTERNATIONAL SERVICES COMPANY, INC
- Artush A. Abgaryan
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multiple Device Shaping Uniform Distribution of Current Density in...
- Publication number 20100277053
- Publication date Nov 4, 2010
- ATTI INTERNATIONAL SERVICES COMPANY, INC
- Artush A. Abgaryan
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR GENERATING FEMTOSECOND ELECTRON BEAM
- Publication number 20100117510
- Publication date May 13, 2010
- POSTECH Acadamy-Industry Foundation
- Yong Woon PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micro-Column With Simple Structure
- Publication number 20080203881
- Publication date Aug 28, 2008
- Ho Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam lens for micro-column electron beam apparatus and met...
- Publication number 20050263712
- Publication date Dec 1, 2005
- Sang Kuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam lens for micro-column electron beam apparatus and met...
- Publication number 20050266322
- Publication date Dec 1, 2005
- Sang Kuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam lens for micro-column electron beam apparatus and met...
- Publication number 20050087696
- Publication date Apr 28, 2005
- Sang Kuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Emitter device with focusing columns
- Publication number 20040065843
- Publication date Apr 8, 2004
- David Schut
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for focusing high-density electron beam emitte...
- Publication number 20030080689
- Publication date May 1, 2003
- David Riley Whaley
- H01 - BASIC ELECTRIC ELEMENTS

Electrostatic lenses

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron gun and radiation generating apparatus

Robust electrode with septum rod for biased X-ray tube cathode

X-ray tube

Charged particle lithography system with a long shape illumination...

Electrostatic lens and charged particle beam apparatus using the same

Gun configured to generate charged particles

Enhanced integrity projection lens assembly

Electrode of electrostatic lens and method of manufacturing the same

Ion source, nanofabrication apparatus comprising such source, and a...

Electrostatic lens array

Charged-particle beam lens

Hybrid electrostatic lens for improved beam transmission

Charged particle beam lens and charged particle beam exposure appar...

Electrostatic lens

Apparatus and method for generating femtosecond electron beam

Crossover point regulation method for electro-static focusing systems

Multiple device shaping uniform distribution of current density in...

Multiple device shaping uniform distribution of current density in...

Micro-column with simple structure

Electron beam lens for micro-column electron beam apparatus and met...

Electron beam lens for micro-column electron beam apparatus and met...

Electron beam lens for micro-column electron beam apparatus and met...

Emitter device with focusing columns

Ion-shielded focusing method for high-density electron beams genera...

Illumination system for electron beam lithography tool

Charged particle beam optical element charged particle beam exposur...

Process for the manufacture of a multipolar elongate-electrode lens...

Methods and structures to produce electrostatic quadrupole fields u...

Charged particle beam focussing device

Unipotential lens assembly for charged particle beam tubes and meth...

Patents Applicationslast 30 patents

Robust Electrode With Septum Rod For Biased X-Ray Tube Cathode

ELECTRON GUN AND RADIATION GENERATING APPARATUS

GUN CONFIGURED TO GENERATE CHARGED PARTICLES

ULTRA-MINIATURIZED ELECTRON OPTICAL MICROCOLUMN

ELECTROSTATIC LENS AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME

Charged Particle Lithography System With a Long Shape Illumination...

CHARGED PARTICLE BEAM LENS AND EXPOSURE APPARATUS USING THE SAME

Ion Source, Nanofabrication Apparatus Comprising Such Source, and a...

ENHANCED INTEGRITY PROJECTION LENS ASSEMBLY

ELECTROSTATIC LENS UNIT

Charged Particle Optics with Azimuthally-Varying Third-Order Aberra...

ELECTROSTATIC LENS ARRAY

ELECTRODE OF ELECTROSTATIC LENS AND METHOD OF MANUFACTURING THE SAME

CHARGED-PARTICLE BEAM LENS

HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION

HYBRID ELECTROSTATIC LENS FOR IMPROVED BEAM TRANSMISSION

CHARGED PARTICLE BEAM LENS AND CHARGED PARTICLE BEAM EXPOSURE APPAR...

ELECTROSTATIC LENS

CROSSOVER POINT REGULATION METHOD FOR ELECTRO-STATIC FOCUSING SYSTEMS

Multiple Device Shaping Uniform Distribution of Current Density in...

Multiple Device Shaping Uniform Distribution of Current Density in...

APPARATUS AND METHOD FOR GENERATING FEMTOSECOND ELECTRON BEAM

Micro-Column With Simple Structure

Electron beam lens for micro-column electron beam apparatus and met...

Electron beam lens for micro-column electron beam apparatus and met...

Electron beam lens for micro-column electron beam apparatus and met...

Emitter device with focusing columns

Apparatus and method for focusing high-density electron beam emitte...