Elongated nozzles, tubes with holes

Industry

CPC
C23C16/45578

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45578Elongated nozzles, tubes with holes

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,967,501
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,952,664
- Issue date Apr 9, 2024
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid handling structure and method for a gas phase deposition appa...
- Patent number 11,920,241
- Issue date Mar 5, 2024
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Ruud Olieslagers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 11,913,114
- Issue date Feb 27, 2024
- Samsung Electronics Co., Ltd.
- Jae Hyun Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,913,115
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Yoshitaka Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Injector configured for arrangement within a reaction chamber of a...
- Patent number 11,891,696
- Issue date Feb 6, 2024
- ASM IP Holding B.V.
- Lucian C. Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,859,285
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Injector and substrate processing apparatus using the same, and sub...
- Patent number 11,846,023
- Issue date Dec 19, 2023
- Tokyo Electron Limited
- Tomoyuki Nagata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for applying a carbon layer to a substrate comprising introd...
- Patent number 11,746,415
- Issue date Sep 5, 2023
- CARBONCOMPETENCE GMBH
- Doris Steinmuller-Nethl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas hub for plasma reactor
- Patent number 11,728,141
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Yan Rozenzon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,725,284
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Eiji Kikama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nozzle and nozzle head
- Patent number 11,702,745
- Issue date Jul 18, 2023
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition system
- Patent number 11,655,542
- Issue date May 23, 2023
- Daniel Beane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Half-angle nozzle
- Patent number 11,634,813
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 11,591,694
- Issue date Feb 28, 2023
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,560,628
- Issue date Jan 24, 2023
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,555,246
- Issue date Jan 17, 2023
- Kokusai Electric Corporation
- Hironori Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,542,601
- Issue date Jan 3, 2023
- Hitachi Kokusai Electric Inc.
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,542,602
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Yoshitaka Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus with cleaning gas flow guiding...
- Patent number 11,532,459
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Hung Yeh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,530,481
- Issue date Dec 20, 2022
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and semiconductor processing system
- Patent number 11,527,427
- Issue date Dec 13, 2022
- Samsung Electronics Co., Ltd.
- Hyun Ho Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for densifying porous annular substrates by chemical vapour...
- Patent number 11,512,024
- Issue date Nov 29, 2022
- SAFRAN CERAMICS
- Franck Lamouroux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus and film-forming method
- Patent number 11,492,702
- Issue date Nov 8, 2022
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,450,524
- Issue date Sep 20, 2022
- Kokusai Electric Corporation
- Kosuke Takagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas tube, gas supply system and manufacturing method of semiconduct...
- Patent number 11,414,757
- Issue date Aug 16, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Shiung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing apparatus and wafer processing method
- Patent number 11,408,070
- Issue date Aug 9, 2022
- Samsung Electronics Co., Ltd.
- Hyunho Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Managing network communication of an unmanned autonomous vehicle
- Patent number 11,398,954
- Issue date Jul 26, 2022
- QUALCOMM Incorporated
- Charles Wheeler Sweet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injection module, substrate processing apparatus, and method of...
- Patent number 11,384,433
- Issue date Jul 12, 2022
- Samsung Electronics Co., Ltd.
- Minkyu Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240141490
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Mika Urushihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACOUSTIC WAVE ASSISTED CHEMICAL VAPOR IINFILTRATION
- Publication number 20240141479
- Publication date May 2, 2024
- RTX Corporation
- JinQuan Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME
- Publication number 20240141489
- Publication date May 2, 2024
- SAMSUNG DISPLAY CO., LTD.
- JAEWAN SEOL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLIER PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMI...
- Publication number 20240102165
- Publication date Mar 28, 2024
- Kojusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240084451
- Publication date Mar 14, 2024
- Samsung Electronics Co., Ltd.
- JEONGHYEONG LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240018657
- Publication date Jan 18, 2024
- Samsung Electronics Co., Ltd.
- Jae Hyun YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230416917
- Publication date Dec 28, 2023
- WONIK IPS CO., LTD.
- Kee Jun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230395378
- Publication date Dec 7, 2023
- Kokusai Electric Corporation
- Takumi ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST O...
- Publication number 20230332289
- Publication date Oct 19, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Hicham MASKROT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SUBSTRATE TREATMENT METHO...
- Publication number 20230272532
- Publication date Aug 31, 2023
- Samsung Electronics Co., LTD
- Jae Hyun YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND METHOD FOR MANU...
- Publication number 20230212749
- Publication date Jul 6, 2023
- Samsung Electronics Co., Ltd.
- Jung Min PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTANT VAPOR DELIVERY SYSTEMS FOR SEMICONDUCTOR PROCESSING TOOLS...
- Publication number 20230175126
- Publication date Jun 8, 2023
- ASM IP HOLDING B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, NOZZLE, METHOD...
- Publication number 20230160066
- Publication date May 25, 2023
- Kokusai Electric Corporation
- Yoshitaka ABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20230119730
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20230118483
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR FOR A VERTICAL FURNACE
- Publication number 20230111229
- Publication date Apr 13, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230115403
- Publication date Apr 13, 2023
- Kokusai Electric Corporation
- Hiroaki HIRAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
- Publication number 20230112057
- Publication date Apr 13, 2023
- Kokusai Electric Corporation
- Hironori SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230109474
- Publication date Apr 6, 2023
- Hitachi Kokusai Electric Inc.
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GACHEMICAL VAPOR DEPOSITION APPARATUS WITH CLEANING GAS FLOW GUIDIN...
- Publication number 20230098570
- Publication date Mar 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung YEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20230073084
- Publication date Mar 9, 2023
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURI...
- Publication number 20230054580
- Publication date Feb 23, 2023
- Samsung Electronics Co., Ltd.
- Sangyub IE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230055506
- Publication date Feb 23, 2023
- Kokusai Electric Corporation
- Toru KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230020001
- Publication date Jan 19, 2023
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING MET...
- Publication number 20230002903
- Publication date Jan 5, 2023
- Samsung Electronics Co., Ltd.
- MINJU LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20220411933
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Yuya TAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING APPARATUS FOR GROUP-III COMPOUND SEMICONDUCTOR CRYSTAL
- Publication number 20220403547
- Publication date Dec 22, 2022
- Panasonic Holdings Corporation
- Masayuki HOTEIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20220349061
- Publication date Nov 3, 2022
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220341041
- Publication date Oct 27, 2022
- Kokusai Electric Corporation
- Yunosuke SAKAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCT...
- Publication number 20220333246
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Shiung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Elongated nozzles, tubes with holes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vaporizer, substrate processing apparatus and method for manufactur...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method of manufacturing semicond...

Fluid handling structure and method for a gas phase deposition appa...

Semiconductor manufacturing apparatus

Substrate processing apparatus and substrate processing method

Injector configured for arrangement within a reaction chamber of a...

Processing apparatus and processing method

Injector and substrate processing apparatus using the same, and sub...

Method for applying a carbon layer to a substrate comprising introd...

Gas hub for plasma reactor

Substrate processing apparatus and substrate processing method

Nozzle and nozzle head

Atomic layer deposition system

Half-angle nozzle

Method of manufacturing semiconductor device, method of processing...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and substrate processing method

Chemical vapor deposition apparatus with cleaning gas flow guiding...

Substrate processing apparatus, method of manufacturing semiconduct...

Semiconductor processing apparatus and semiconductor processing system

Method for densifying porous annular substrates by chemical vapour...

Film-forming apparatus and film-forming method

Substrate processing apparatus, method of manufacturing semiconduct...

Gas tube, gas supply system and manufacturing method of semiconduct...

Wafer processing apparatus and wafer processing method

Managing network communication of an unmanned autonomous vehicle

Gas injection module, substrate processing apparatus, and method of...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

ACOUSTIC WAVE ASSISTED CHEMICAL VAPOR IINFILTRATION

DEPOSITION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME

GAS SUPPLIER PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMI...

FILM FORMING APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS

SUBSTRATE PROCESSING APPARATUS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST O...

SEMICONDUCTOR MANUFACTURING APPARATUS AND SUBSTRATE TREATMENT METHO...

DEVICE FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND METHOD FOR MANU...

REACTANT VAPOR DELIVERY SYSTEMS FOR SEMICONDUCTOR PROCESSING TOOLS...

GAS SUPPLY ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, NOZZLE, METHOD...

Substrate Processing Method and Substrate Processing Apparatus

Substrate Processing Method and Substrate Processing Apparatus

GAS INJECTOR FOR A VERTICAL FURNACE

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

GACHEMICAL VAPOR DEPOSITION APPARATUS WITH CLEANING GAS FLOW GUIDIN...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

BATCH TYPE SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURI...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING MET...

FILM FORMING APPARATUS

MANUFACTURING APPARATUS FOR GROUP-III COMPOUND SEMICONDUCTOR CRYSTAL

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCT...