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H01J2237/2812
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ELECTRICITY
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Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/2812
Emission microscopes
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Patents Grants
last 30 patents
Information
Patent Grant
Correlation between emission spots utilizing CAD data in combinatio...
Patent number
11,561,256
Issue date
Jan 24, 2023
Synopsys, Inc.
Ankush Bharati Oberai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged-particle beam microscopy
Patent number
9,997,331
Issue date
Jun 12, 2018
Mochii, Inc.
Christopher Su-Yan Own
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cross-section processing and observation method and cross-section p...
Patent number
9,966,226
Issue date
May 8, 2018
Hitachi High-Tech Science Corporation
Atsushi Uemoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor inspection system and methods of inspecting a semicon...
Patent number
9,455,121
Issue date
Sep 27, 2016
Samsung Electronics Co., Ltd.
Hyunwoo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for sample extraction and handling
Patent number
9,349,570
Issue date
May 24, 2016
FEI Company
Enrique Agorio
G01 - MEASURING TESTING
Information
Patent Grant
Ion sources, systems and methods
Patent number
9,236,225
Issue date
Jan 12, 2016
Carl Zeiss Microscopy, LLC
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Ion sources, systems and methods
Patent number
9,012,867
Issue date
Apr 21, 2015
Carl Zeiss Microscopy, LLC
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Ion sources, systems and methods
Patent number
8,748,845
Issue date
Jun 10, 2014
Carl Zeiss Microscopy, LLC
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Sample surface inspection apparatus and method
Patent number
8,674,317
Issue date
Mar 18, 2014
Ebara Corporation
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for sample extraction and handling
Patent number
8,357,913
Issue date
Jan 22, 2013
FEI Company
Enrique Agorio
G01 - MEASURING TESTING
Information
Patent Grant
Ion sources, systems and methods
Patent number
8,110,814
Issue date
Feb 7, 2012
ALIS Corporation
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Sample surface inspection apparatus and method
Patent number
8,076,654
Issue date
Dec 13, 2011
Ebara Corporation
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,786,451
Issue date
Aug 31, 2010
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoelectron microscope
Patent number
7,718,961
Issue date
May 18, 2010
Raymond Browning
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,557,358
Issue date
Jul 7, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,557,361
Issue date
Jul 7, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,557,360
Issue date
Jul 7, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,557,359
Issue date
Jul 7, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,554,096
Issue date
Jun 30, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,554,097
Issue date
Jun 30, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,521,693
Issue date
Apr 21, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,518,122
Issue date
Apr 14, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,511,280
Issue date
Mar 31, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,511,279
Issue date
Mar 31, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,504,639
Issue date
Mar 17, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,495,232
Issue date
Feb 24, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,488,952
Issue date
Feb 10, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion sources, systems and methods
Patent number
7,485,873
Issue date
Feb 3, 2009
ALIS Corporation
Billy W. Ward
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample surface inspection apparatus and method
Patent number
7,391,036
Issue date
Jun 24, 2008
Ebara Corporation
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Grant
3504175
Patent number
3,504,175
Issue date
Mar 31, 1970
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
Publication number
20240249911
Publication date
Jul 25, 2024
HITACHI HIGH-TECH CORPORATION
Teruo KOHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON MICROSCOPE
Publication number
20230298847
Publication date
Sep 21, 2023
KLA Corporation
Yung-Ho Alex Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Correlation between Emission Spots Utilizing CAD Data in Combinatio...
Publication number
20210199714
Publication date
Jul 1, 2021
Synopsys, Inc.
Ankush Bharati OBERAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR INSPECTION SYSTEM AND METHODS OF INSPECTING A SEMICON...
Publication number
20160086769
Publication date
Mar 24, 2016
Hyunwoo KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope And Methods Of Inspecting And Reviewin...
Publication number
20160064184
Publication date
Mar 3, 2016
KLA-Tencor Corporation
David L. Brown
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Sample Extraction and Handling
Publication number
20150311034
Publication date
Oct 29, 2015
FEI Company
Enrique Agorio
G01 - MEASURING TESTING
Information
Patent Application
CROSS-SECTION PROCESSING AND OBSERVATION METHOD AND CROSS-SECTION P...
Publication number
20150262788
Publication date
Sep 17, 2015
HITACHI HIGH-TECH SCIENCE CORPORATION
Atsushi UEMOTO
G01 - MEASURING TESTING
Information
Patent Application
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
Publication number
20150228452
Publication date
Aug 13, 2015
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan LANIO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION SOURCES, SYSTEMS AND METHODS
Publication number
20140306121
Publication date
Oct 16, 2014
Carl Zeiss Microscopy, LLC
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
Publication number
20140175277
Publication date
Jun 26, 2014
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
Stefan Lanio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CROSS-SECTION PROCESSING AND OBSERVATION METHOD AND CROSS-SECTION P...
Publication number
20140131575
Publication date
May 15, 2014
HITACHI HIGH-TECH SCIENCE CORPORATION
Atsushi UEMOTO
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING
Publication number
20130153785
Publication date
Jun 20, 2013
FEI Company
Enrique Agorio
G01 - MEASURING TESTING
Information
Patent Application
ION SOURCES, SYSTEMS AND METHODS
Publication number
20120141693
Publication date
Jun 7, 2012
ALIS Corporation
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
SAMPLE SURFACE INSPECTION APPARATUS AND METHOD
Publication number
20120049063
Publication date
Mar 1, 2012
EBARA CORPORATION
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING
Publication number
20100305747
Publication date
Dec 2, 2010
FEI Company
Enrique Agorio
G01 - MEASURING TESTING
Information
Patent Application
LASER ATOM PROBES
Publication number
20100294928
Publication date
Nov 25, 2010
Imago AScientific Instruments Corporation
Joseph Hale Bunton
B82 - NANO-TECHNOLOGY
Information
Patent Application
ION SOURCES, SYSTEMS AND METHODS
Publication number
20090179161
Publication date
Jul 16, 2009
ALIS Corporation
BILLY W. WARD
B82 - NANO-TECHNOLOGY
Information
Patent Application
Sample surface inspection apparatus and method
Publication number
20080265159
Publication date
Oct 30, 2008
EBARA CORPORATION
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Application
Ion sources, systems and methods
Publication number
20070221843
Publication date
Sep 27, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070210250
Publication date
Sep 13, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070210251
Publication date
Sep 13, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070205375
Publication date
Sep 6, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070194251
Publication date
Aug 23, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070194226
Publication date
Aug 23, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070187621
Publication date
Aug 16, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070158555
Publication date
Jul 12, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070158556
Publication date
Jul 12, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070158558
Publication date
Jul 12, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070158557
Publication date
Jul 12, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion sources, systems and methods
Publication number
20070158580
Publication date
Jul 12, 2007
Billy W. Ward
B82 - NANO-TECHNOLOGY