Epitaxial deposition of AIIIBV compounds

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H01L21/2056

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/2056Epitaxial deposition of AIIIBV compounds

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Patents Grantslast 30 patents

Information Patent Grant
Fabrication of semiconductor structures
- Patent number 11,616,344
- Issue date Mar 28, 2023
- International Business Machines Corporation
- Noelia Vico Trivino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-deposition process for high quality gallium nitride device ma...
- Patent number 11,335,557
- Issue date May 17, 2022
- QROMIS, Inc.
- Vladimir Odnoblyudov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing nitride semiconductor light-emitting element
- Patent number 11,075,320
- Issue date Jul 27, 2021
- Nichia Corporation
- Tomoya Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing thin films comprising indium nitride by atom...
- Patent number 10,707,082
- Issue date Jul 7, 2020
- ASM International N.V.
- Suvi Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-deposition process for high quality gallium nitride device ma...
- Patent number 10,679,852
- Issue date Jun 9, 2020
- QROMIS, Inc.
- Vladimir Odnoblyudov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Regrowth method for fabricating wide-bandgap transistors, and devic...
- Patent number 10,553,697
- Issue date Feb 4, 2020
- National Technology & Engineering Solutions of Sandia, LLC
- Andrew Armstrong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing electronic component for heterojunction pr...
- Patent number 10,522,648
- Issue date Dec 31, 2019
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Matthew Charles
- C30 - CRYSTAL GROWTH
Information Patent Grant
Stress assisted wet and dry epitaxial lift off
- Patent number 10,460,948
- Issue date Oct 29, 2019
- International Business Machines Corporation
- Cheng-Wei Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing switching element having gallium nitride su...
- Patent number 10,242,869
- Issue date Mar 26, 2019
- Toyota Jidosha Kabushiki Kaisha
- Tetsuya Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanowire device having graphene top and bottom electrodes and metho...
- Patent number 10,243,104
- Issue date Mar 26, 2019
- NORWEGIAN UNIVERESITY OF SCIENCE AND TECHNOLOGY (NTNU)
- Helge Weman
- C30 - CRYSTAL GROWTH
Information Patent Grant
III-Nitride transistor with enhanced doping in base layer
- Patent number 10,181,400
- Issue date Jan 15, 2019
- HRL Laboratories, LLC
- Rongming Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for growing a non-phase separated group-III nit...
- Patent number 10,000,381
- Issue date Jun 19, 2018
- Georgia Tech Research Corporation
- Michael William Moseley
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of fabricating double sided Si(Ge)/Sapphire/III-nitride hybr...
- Patent number 9,824,885
- Issue date Nov 21, 2017
- The Unites States of America as represented by the Administrator of NASA
- Yeonjoon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
III-nitride transistor with enhanced doping in base layer
- Patent number 9,761,709
- Issue date Sep 12, 2017
- HRL Laboratories, LLC
- Rongming Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing group III nitride semiconductor light-emitting...
- Patent number 9,601,654
- Issue date Mar 21, 2017
- Toyoda Gosei Co., Ltd.
- Kengo Nagata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device that includes forming...
- Patent number 9,543,146
- Issue date Jan 10, 2017
- Kabushiki Kaisha Toshiba
- Naoharu Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Group III nitride semiconductor light-emitting device and productio...
- Patent number 9,406,514
- Issue date Aug 2, 2016
- Toyoda Gosei Co., Ltd.
- Koji Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for growing a non-phase separated group-III nitride semicon...
- Patent number 9,142,413
- Issue date Sep 22, 2015
- Georgia Tech Research Corporation
- Michael William Moseley
- C30 - CRYSTAL GROWTH
Information Patent Grant
Composite layer stacking for enhancement mode transistor
- Patent number 8,884,334
- Issue date Nov 11, 2014
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Wen Hsiung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing thin films comprising gallium nitride by ato...
- Patent number 8,846,502
- Issue date Sep 30, 2014
- ASM IP Holding B.V.
- Suvi Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitride semiconductor device using selective growth and manufacturi...
- Patent number 8,841,179
- Issue date Sep 23, 2014
- LG Electronics Inc.
- Seongmoo Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for forming thin films
- Patent number 8,377,803
- Issue date Feb 19, 2013
- Intermolecular, Inc.
- Philip A. Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for forming thin films
- Patent number 8,318,590
- Issue date Nov 27, 2012
- Intermolecular, Inc.
- Philip A. Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for forming thin films
- Patent number 8,143,147
- Issue date Mar 27, 2012
- Intermolecular, Inc.
- Philip A. Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT
- Publication number 20210328099
- Publication date Oct 21, 2021
- Nichia Corporation.
- Tomoya YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING THIN FILMS COMPRISING INDIUM NITRIDE BY ATOM...
- Publication number 20200335342
- Publication date Oct 22, 2020
- ASM INTERNATIONAL N.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-DEPOSITION PROCESS FOR HIGH QUALITY GALLIUM NITRIDE DEVICE MA...
- Publication number 20200258741
- Publication date Aug 13, 2020
- QROMIS, Inc.
- Vladimir Odnoblyudov
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for Producing Group III Nitride Laminate
- Publication number 20190103273
- Publication date Apr 4, 2019
- Stanley Electric Co., Ltd
- Hiroshi Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE LAYER STACKING FOR ENHANCEMENT MODE TRANSISTOR
- Publication number 20140131720
- Publication date May 15, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Wen HSIUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Growing A Non-Phase Separated Group-III Nit...
- Publication number 20130244408
- Publication date Sep 19, 2013
- Georgia Tech Research Corporation
- Michael William Moseley
- C30 - CRYSTAL GROWTH
Information Patent Application
NITRIDE SEMICONDUCTOR DEVICE USING SELECTIVE GROWTH AND MANUFACTURI...
- Publication number 20130153921
- Publication date Jun 20, 2013
- Seongmoo Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Forming Thin Films
- Publication number 20130118404
- Publication date May 16, 2013
- Intermolecular, Inc.
- Philip A. Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING THIN FILMS COMPRISING INDIUM NITRIDE BY ATOM...
- Publication number 20130109160
- Publication date May 2, 2013
- Suvi Haukka
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR DEPOSITING THIN FILMS COMPRISING GALLIUM NITRIDE BY ATO...
- Publication number 20130012003
- Publication date Jan 10, 2013
- Suvi Haukka
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS AND SYSTEMS FOR FORMING THIN FILMS
- Publication number 20120208352
- Publication date Aug 16, 2012
- Intermolecular, Inc.
- Philip A. Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FORMING THIN FILMS
- Publication number 20120208357
- Publication date Aug 16, 2012
- Intermolecular, Inc.
- Philip A. Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Epitaxial deposition of AIIIBV compounds

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Fabrication of semiconductor structures

Multi-deposition process for high quality gallium nitride device ma...

Method of manufacturing nitride semiconductor light-emitting element

Methods for depositing thin films comprising indium nitride by atom...

Multi-deposition process for high quality gallium nitride device ma...

Regrowth method for fabricating wide-bandgap transistors, and devic...

Method for manufacturing electronic component for heterojunction pr...

Stress assisted wet and dry epitaxial lift off

Method of manufacturing switching element having gallium nitride su...

Nanowire device having graphene top and bottom electrodes and metho...

III-Nitride transistor with enhanced doping in base layer

Systems and methods for growing a non-phase separated group-III nit...

Method of fabricating double sided Si(Ge)/Sapphire/III-nitride hybr...

III-nitride transistor with enhanced doping in base layer

Method of producing group III nitride semiconductor light-emitting...

Manufacturing method of semiconductor device that includes forming...

Group III nitride semiconductor light-emitting device and productio...

Methods for growing a non-phase separated group-III nitride semicon...

Composite layer stacking for enhancement mode transistor

Methods for depositing thin films comprising gallium nitride by ato...

Nitride semiconductor device using selective growth and manufacturi...

Methods and systems for forming thin films

Methods and systems for forming thin films

Methods and systems for forming thin films

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT

METHODS FOR DEPOSITING THIN FILMS COMPRISING INDIUM NITRIDE BY ATOM...

MULTI-DEPOSITION PROCESS FOR HIGH QUALITY GALLIUM NITRIDE DEVICE MA...

Method for Producing Group III Nitride Laminate

COMPOSITE LAYER STACKING FOR ENHANCEMENT MODE TRANSISTOR

Systems And Methods For Growing A Non-Phase Separated Group-III Nit...

NITRIDE SEMICONDUCTOR DEVICE USING SELECTIVE GROWTH AND MANUFACTURI...

Methods and Systems for Forming Thin Films

METHODS FOR DEPOSITING THIN FILMS COMPRISING INDIUM NITRIDE BY ATOM...

METHODS FOR DEPOSITING THIN FILMS COMPRISING GALLIUM NITRIDE BY ATO...

METHODS AND SYSTEMS FOR FORMING THIN FILMS

METHODS AND SYSTEMS FOR FORMING THIN FILMS