Epitaxial regrowth of non-monocrystalline semiconductor materials

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/2022Epitaxial regrowth of non-monocrystalline semiconductor materials

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor epitaxy bordering isolation structure
- Patent number 11,658,032
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Chin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical modulator with region epitaxially re-grown over polycrystal...
- Patent number 11,650,439
- Issue date May 16, 2023
- Cisco Technology, Inc.
- Alexey V. Vert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 11,515,323
- Issue date Nov 29, 2022
- Kioxia Corporation
- Naomi Fukumaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxial silicon wafer, and method for manufacturing epitaxial sil...
- Patent number 11,462,409
- Issue date Oct 4, 2022
- Sumco Corporation
- Naoya Nonaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrical isolation structure and process
- Patent number 11,348,824
- Issue date May 31, 2022
- UNIVERSITY OF TECHNOLOGY SYDNEY
- Francesca Iacopi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Producing method for thin film transistor with different crystallin...
- Patent number 11,133,333
- Issue date Sep 28, 2021
- SAKAI DISPLAY PRODUCTS CORPORATION
- Yuta Sugawara
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Composite spacer enabling uniform doping in recessed fin devices
- Patent number 11,038,041
- Issue date Jun 15, 2021
- International Business Machines Corporation
- Veeraraghavan S. Basker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbide stacked substrate and manufacturing method thereof
- Patent number 11,031,238
- Issue date Jun 8, 2021
- Hitachi Metals, Ltd.
- Kumiko Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a semiconductor chip and semiconductor chip
- Patent number 11,004,876
- Issue date May 11, 2021
- OSRAM OLED GmbH
- Christoph Eichler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor chip, semiconductor wafer and method for manufacturin...
- Patent number 10,985,050
- Issue date Apr 20, 2021
- DYNAX SEMICONDUCTOR, INC.
- Naiqian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxy bordering isolation structure
- Patent number 10,957,540
- Issue date Mar 23, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Chin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical modulator with region epitaxially re-grown over polycrystal...
- Patent number 10,921,619
- Issue date Feb 16, 2021
- Cisco Technology, Inc.
- Alexey V. Vert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming crystalline semiconductor material, and methods...
- Patent number 10,886,130
- Issue date Jan 5, 2021
- Micron Technology, Inc.
- Manuj Nahar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite spacer enabling uniform doping in recessed fin devices
- Patent number 10,854,733
- Issue date Dec 1, 2020
- International Business Machines Corporation
- Veeraraghavan S. Basker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxy bordering isolation structure
- Patent number 10,522,353
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Chin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing SiC composite substrate
- Patent number 10,431,460
- Issue date Oct 1, 2019
- Shin-Etsu Chemical Co., Ltd.
- Shoji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a semiconductor chip and semiconductor chip
- Patent number 10,396,106
- Issue date Aug 27, 2019
- Osram Opto Semiconductors GmbH
- Christoph Eichler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor epitaxy bordering isolation structure
- Patent number 10,147,609
- Issue date Dec 4, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Chin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET device and method of forming the same
- Patent number 10,115,639
- Issue date Oct 30, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping Hung Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming zig-zag trench structure to prevent aspect ratio trapping d...
- Patent number 9,947,532
- Issue date Apr 17, 2018
- GLOBALFOUNDRIES Inc.
- Judson R. Holt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrates with buried isolation layers and methods of formation th...
- Patent number 9,875,926
- Issue date Jan 23, 2018
- Infineon Technologies AG
- Iris Moder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and method for manufacturing the same
- Patent number 9,842,849
- Issue date Dec 12, 2017
- TOSHIBA MEMORY CORPORATION
- Hiroyuki Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field effect transistor structure with abrupt source/drain junctions
- Patent number 9,640,634
- Issue date May 2, 2017
- Intel Corporation
- Anand S. Murthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-throughput deposition of a voltage-tunable dielectric material
- Patent number 9,490,314
- Issue date Nov 8, 2016
- BlackBerry Limited
- Marina Zelner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fin-FET
- Patent number 9,406,805
- Issue date Aug 2, 2016
- United Microelectronics Corp.
- Chen-Hua Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor arrangement and formation thereof
- Patent number 9,252,217
- Issue date Feb 2, 2016
- Taiwan Semiconductor Manufacturing Company Limited
- Georgios Vellianitis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of ultra-shallow junctions
- Patent number 9,202,693
- Issue date Dec 1, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Li-Ting Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fin-FET and method of forming the same
- Patent number 9,105,660
- Issue date Aug 11, 2015
- United Microelectronics Corp.
- Chen-Hua Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer warpage reduction
- Patent number 8,945,971
- Issue date Feb 3, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,497,509
- Issue date Jul 30, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR FORMING BACKSIDE POWER RAILS
- Publication number 20230260825
- Publication date Aug 17, 2023
- He REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE AND CONTROL METHOD FOR SINGLE-WAFER PROCESSING EPITA...
- Publication number 20220406599
- Publication date Dec 22, 2022
- SUMCO CORPORATION
- Naoyuki WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH PERFORMANCE 3D VERTICAL TRANSISTOR DEVICE ENHANCEMENT DESIGN
- Publication number 20220238652
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Epitaxy Bordering Isolation Structure
- Publication number 20210210350
- Publication date Jul 8, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Chin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL MODULATOR WITH REGION EPITAXIALLY RE-GROWN OVER POLYCRYSTAL...
- Publication number 20210132420
- Publication date May 6, 2021
- Cisco Technology, Inc.
- Alexey V. VERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL MODULATOR WITH REGION EPITAXIALLY RE-GROWN OVER POLYCRYSTAL...
- Publication number 20200292853
- Publication date Sep 17, 2020
- Cisco Technology, Inc.
- Alexey V. VERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL ISOLATION STRUCTURE AND PROCESS
- Publication number 20200266094
- Publication date Aug 20, 2020
- University of Technology Sydney
- Francesca IACOPI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Epitaxy Bordering Isolation Structure
- Publication number 20200126793
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Chin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE STACKED SUBSTRATE AND MANUFACTURING METHOD THEREOF
- Publication number 20200006066
- Publication date Jan 2, 2020
- Hitachi Metals, Ltd.
- Kumiko KONISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A SEMICONDUCTOR CHIP AND SEMICONDUCTOR CHIP
- Publication number 20190355768
- Publication date Nov 21, 2019
- Osram Opto Semiconductors GmbH
- Christoph EICHLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPITAXIAL SILICON WAFER, AND METHOD FOR MANUFACTURING EPITAXIAL SIL...
- Publication number 20190181007
- Publication date Jun 13, 2019
- SUMCO CORPORATION
- Naoya NONAKA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR PRODUCING SiC COMPOSITE SUBSTRATE
- Publication number 20190157087
- Publication date May 23, 2019
- Shin-Etsu Chemical Co., Ltd.
- Shoji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Epitaxy Bordering Isolation Structure
- Publication number 20180350601
- Publication date Dec 6, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Chin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHIP, SEMICONDUCTOR WAFER AND METHOD FOR MANUFACTURIN...
- Publication number 20180182663
- Publication date Jun 28, 2018
- Dynax Semiconductor, Inc.
- Naiqian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER WARPAGE REDUCTION
- Publication number 20140264345
- Publication date Sep 18, 2014
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION OF ULTRA-SHALLOW JUNCTIONS
- Publication number 20140213047
- Publication date Jul 31, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Li-Ting WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATING METHOD OF SEMICONDUCTOR CHIP
- Publication number 20140094023
- Publication date Apr 3, 2014
- NATIONAL APPLIED RESEARCH LABORATORIES
- Yao-Jen Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANOCRYSTALLINE SILICON IN SIO2 COMPOSITE AND FREESTANDING SILICON...
- Publication number 20130059121
- Publication date Mar 7, 2013
- The Governors of the University of Alberta
- Jonathan Gordon Conn Veinot
- B82 - NANO-TECHNOLOGY
Information Patent Application
Fin-FET and Method of Forming the Same
- Publication number 20130043506
- Publication date Feb 21, 2013
- Chen-Hua Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CIRCUIT FOR ELECTRO-OPTICAL DEVICE AND METHOD OF MANU...
- Publication number 20120268681
- Publication date Oct 25, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G02 - OPTICS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20120171795
- Publication date Jul 5, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20120068266
- Publication date Mar 22, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Hongyong ZHANG
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- Publication number 20120062809
- Publication date Mar 15, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20120034766
- Publication date Feb 9, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Hisashi OHTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20110272699
- Publication date Nov 10, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Kengo Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PATTERNING TRANSPARENT CONDUCTIVE FILM, THIN FILM TRANSIS...
- Publication number 20110096270
- Publication date Apr 28, 2011
- Byung Chul Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20110053353
- Publication date Mar 3, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shinji Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20100291740
- Publication date Nov 18, 2010
- Sharp Kabushiki Kaisha
- Naoki MAKITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AMORPHIZATION/TEMPLATED RECRYSTALLIZATION METHOD FOR HYBRID ORIENTA...
- Publication number 20100203708
- Publication date Aug 12, 2010
- International Business Machines Corporation
- Keith Edward Fogel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- Publication number 20100195012
- Publication date Aug 5, 2010
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Chiho Kokubo
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS

Epitaxial regrowth of non-monocrystalline semiconductor materials

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor epitaxy bordering isolation structure

Optical modulator with region epitaxially re-grown over polycrystal...

Semiconductor device and method of manufacturing the same

Epitaxial silicon wafer, and method for manufacturing epitaxial sil...

Electrical isolation structure and process

Producing method for thin film transistor with different crystallin...

Composite spacer enabling uniform doping in recessed fin devices

Silicon carbide stacked substrate and manufacturing method thereof

Method for producing a semiconductor chip and semiconductor chip

Semiconductor chip, semiconductor wafer and method for manufacturin...

Semiconductor epitaxy bordering isolation structure

Optical modulator with region epitaxially re-grown over polycrystal...

Methods of forming crystalline semiconductor material, and methods...

Composite spacer enabling uniform doping in recessed fin devices

Semiconductor epitaxy bordering isolation structure

Method for producing SiC composite substrate

Method for producing a semiconductor chip and semiconductor chip

Semiconductor epitaxy bordering isolation structure

FinFET device and method of forming the same

Forming zig-zag trench structure to prevent aspect ratio trapping d...

Substrates with buried isolation layers and methods of formation th...

Semiconductor memory device and method for manufacturing the same

Field effect transistor structure with abrupt source/drain junctions

High-throughput deposition of a voltage-tunable dielectric material

Fin-FET

Semiconductor arrangement and formation thereof

Fabrication of ultra-shallow junctions

Fin-FET and method of forming the same

Wafer warpage reduction

Method of manufacturing a semiconductor device

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR FORMING BACKSIDE POWER RAILS

CONTROL DEVICE AND CONTROL METHOD FOR SINGLE-WAFER PROCESSING EPITA...

HIGH PERFORMANCE 3D VERTICAL TRANSISTOR DEVICE ENHANCEMENT DESIGN

Semiconductor Epitaxy Bordering Isolation Structure

OPTICAL MODULATOR WITH REGION EPITAXIALLY RE-GROWN OVER POLYCRYSTAL...

OPTICAL MODULATOR WITH REGION EPITAXIALLY RE-GROWN OVER POLYCRYSTAL...

ELECTRICAL ISOLATION STRUCTURE AND PROCESS

Semiconductor Epitaxy Bordering Isolation Structure

SILICON CARBIDE STACKED SUBSTRATE AND MANUFACTURING METHOD THEREOF

METHOD FOR PRODUCING A SEMICONDUCTOR CHIP AND SEMICONDUCTOR CHIP

EPITAXIAL SILICON WAFER, AND METHOD FOR MANUFACTURING EPITAXIAL SIL...

METHOD FOR PRODUCING SiC COMPOSITE SUBSTRATE

Semiconductor Epitaxy Bordering Isolation Structure

SEMICONDUCTOR CHIP, SEMICONDUCTOR WAFER AND METHOD FOR MANUFACTURIN...

WAFER WARPAGE REDUCTION

FABRICATION OF ULTRA-SHALLOW JUNCTIONS

FABRICATING METHOD OF SEMICONDUCTOR CHIP

NANOCRYSTALLINE SILICON IN SIO2 COMPOSITE AND FREESTANDING SILICON...

Fin-FET and Method of Forming the Same

SEMICONDUCTOR CIRCUIT FOR ELECTRO-OPTICAL DEVICE AND METHOD OF MANU...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD OF PATTERNING TRANSPARENT CONDUCTIVE FILM, THIN FILM TRANSIS...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

AMORPHIZATION/TEMPLATED RECRYSTALLIZATION METHOD FOR HYBRID ORIENTA...

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME