Etching the layer

Industry

CPC
H01L21/47573

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/47573Etching the layer

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device
- Patent number 12,166,131
- Issue date Dec 10, 2024
- Japan Display Inc.
- Hajime Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching composition
- Patent number 12,134,723
- Issue date Nov 5, 2024
- ENF Technology CO., LTD.
- Tae Ho Kim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Composition for etching, method for etching insulator and method fo...
- Patent number 12,116,520
- Issue date Oct 15, 2024
- SK Innovation Co., Ltd.
- Cheol Woo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selective film deposition and semiconductor feature made...
- Patent number 12,094,935
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Song-Fu Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 12,074,224
- Issue date Aug 27, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Yoshinobu Asami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of display substrate, display substrate and di...
- Patent number 12,062,711
- Issue date Aug 13, 2024
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Jun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming source/drain contacts
- Patent number 12,009,363
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shao-Ming Koh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reversed tone patterning method for dipole incorporation for multip...
- Patent number 11,996,298
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Lung-Kun Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display substrate and manufacturing method therefor, and display de...
- Patent number 11,961,848
- Issue date Apr 16, 2024
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Jun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of CMP integration for improved optical uniformity in advanc...
- Patent number 11,908,678
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Lan Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 11,721,765
- Issue date Aug 8, 2023
- Japan Display Inc.
- Hajime Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and display device including semiconductor device
- Patent number 11,695,078
- Issue date Jul 4, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi Koezuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selective film deposition and semiconductor feature made...
- Patent number 11,652,148
- Issue date May 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Song-Fu Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selectively removing nickel platinum material
- Patent number 11,441,229
- Issue date Sep 13, 2022
- Entegris, Inc.
- SeongJin Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Crystalline semiconductor and oxide semiconductor thin-film transis...
- Patent number 11,430,847
- Issue date Aug 30, 2022
- Samsung Display Co., Ltd.
- Kyoungseok Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device and method for fabricating the same
- Patent number 11,251,247
- Issue date Feb 15, 2022
- Samsung Display Co., Ltd.
- Hyung Jun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preparing isolation area of gallium oxide device
- Patent number 11,244,821
- Issue date Feb 8, 2022
- THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
- Yuanjie Lv
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 11,245,039
- Issue date Feb 8, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Yoshinobu Asami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor arrangement and formation thereof
- Patent number 11,239,340
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Tai-I Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 11,183,516
- Issue date Nov 23, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Hideomi Suzawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 11,177,388
- Issue date Nov 16, 2021
- Japan Display Inc.
- Hajime Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor and manufacturing method thereof and display d...
- Patent number 11,164,951
- Issue date Nov 2, 2021
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Mengyu Luan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device with doped phosphorene and method for doping phosphorene
- Patent number 11,152,473
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ming Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for etching metals and metal derivatives
- Patent number 11,121,002
- Issue date Sep 14, 2021
- Applied Materials, Inc.
- Zhenjiang Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of TFT substrate and TFT substrate
- Patent number 11,114,567
- Issue date Sep 7, 2021
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Zhichao Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device
- Patent number 11,107,844
- Issue date Aug 31, 2021
- LG Display Co., Ltd.
- SoYeon Je
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of TFT array substrate
- Patent number 11,087,985
- Issue date Aug 10, 2021
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Xiaodi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active matrix substrate, x-ray imaging panel with the same, and met...
- Patent number 11,081,517
- Issue date Aug 3, 2021
- SHARP KABUSHIKI KAISHA
- Katsunori Misaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin-film transistor and fabrication method thereof, array substrat...
- Patent number 11,075,304
- Issue date Jul 27, 2021
- BOE Technology Group Co., Ltd.
- Jun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition for etching, method for etching insulator and method fo...
- Patent number 11,066,601
- Issue date Jul 20, 2021
- SK Innovation Co., Ltd.
- Cheol Woo Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF SELECTIVE FILM DEPOSITION AND SEMICONDUCTOR FEATURE MADE...
- Publication number 20240371947
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Song-Fu LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF DISPLAY SUBSTRATE, DISPLAY SUBSTRATE AND DI...
- Publication number 20240363737
- Publication date Oct 31, 2024
- HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Jun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SOURCE/DRAIN CONTACTS
- Publication number 20240332298
- Publication date Oct 3, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Shao-Ming Koh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR S...
- Publication number 20240313053
- Publication date Sep 19, 2024
- ENKRIS SEMICONDUCTOR, INC.
- Kai CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REVERSED TONE PATTERNING METHOD FOR DIPOLE INCORPORATION FOR MULTIP...
- Publication number 20240282587
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lung-Kun CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REVERSED TONE PATTERNING METHOD FOR DIPOLE INCORPORATION FOR MULTIP...
- Publication number 20230360926
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lung-Kun CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230317853
- Publication date Oct 5, 2023
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20230108412
- Publication date Apr 6, 2023
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230069864
- Publication date Mar 9, 2023
- RENESAS ELECTRONICS CORPORATION
- Yuki MURAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QFN PACKAGING STRUCTURE AND QFN PACKAGING METHOD
- Publication number 20230050018
- Publication date Feb 16, 2023
- JCET GROUP CO., LTD.
- YUN GAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING COMPOSITION
- Publication number 20220380670
- Publication date Dec 1, 2022
- ENF TECHNOLOGY CO., LTD.
- Tae Ho KIM
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD FOR SELECTIVELY REMOVING NICKEL PLATINUM MATERIAL
- Publication number 20220372631
- Publication date Nov 24, 2022
- Entegris, Inc.
- SeongJin HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SELECTIVE FILM DEPOSITION AND SEMICONDUCTOR FEATURE MADE...
- Publication number 20220367648
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Song-Fu LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220367691
- Publication date Nov 17, 2022
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CMP INTEGRATION FOR IMPROVED OPTICAL UNIFORMITY IN ADVANC...
- Publication number 20220223402
- Publication date Jul 14, 2022
- Applied Materials, Inc.
- Lan Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220208996
- Publication date Jun 30, 2022
- Shubneesh BATRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220029026
- Publication date Jan 27, 2022
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF DISPLAY SUBSTRATE, DISPLAY SUBSTRATE AND DI...
- Publication number 20220020867
- Publication date Jan 20, 2022
- HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Jun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming Source/Drain Contacts
- Publication number 20210313324
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Shao-Ming Koh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR ETCHING, METHOD FOR ETCHING INSULATOR AND METHOD FO...
- Publication number 20210309914
- Publication date Oct 7, 2021
- SK INNOVATION CO., LTD.
- Cheol Woo Kim
- C07 - ORGANIC CHEMISTRY
Information Patent Application
DISPLAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, AND DISPLAY DE...
- Publication number 20210167098
- Publication date Jun 3, 2021
- HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Jun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING SEMICONDUCTOR DEVICE
- Publication number 20210119056
- Publication date Apr 22, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi Koezuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20210020717
- Publication date Jan 21, 2021
- SAMSUNG DISPLAY CO., LTD.
- Hyung Jun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Preparing Isolation Area of Gallium Oxide Device
- Publication number 20210013027
- Publication date Jan 14, 2021
- THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
- Yuanjie LV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING SAME, AND DISPLAY AP...
- Publication number 20200388709
- Publication date Dec 10, 2020
- SAKAI DISPLAY PRODUCTS CORPORATION
- HIROYUKI OHTA
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
COMPOSITION FOR ETCHING, METHOD FOR ETCHING INSULATOR AND METHOD FO...
- Publication number 20200377793
- Publication date Dec 3, 2020
- SK INNOVATION CO., LTD.
- Cheol Woo Kim
- C07 - ORGANIC CHEMISTRY
Information Patent Application
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING SEMICONDUCTOR DEVICE
- Publication number 20200373432
- Publication date Nov 26, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi Koezuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF
- Publication number 20200303516
- Publication date Sep 24, 2020
- Taiwan Semiconductor Manufacturing Company Limited
- Tai-I Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE WITH PHOSPHORENE AND FABRICATION THEREOF
- Publication number 20200279924
- Publication date Sep 3, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Ming LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200259020
- Publication date Aug 13, 2020
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS

Etching the layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor device

Etching composition

Composition for etching, method for etching insulator and method fo...

Method of selective film deposition and semiconductor feature made...

Semiconductor device and manufacturing method thereof

Manufacturing method of display substrate, display substrate and di...

Method for forming source/drain contacts

Reversed tone patterning method for dipole incorporation for multip...

Display substrate and manufacturing method therefor, and display de...

Method of CMP integration for improved optical uniformity in advanc...

Semiconductor device and method of manufacturing semiconductor device

Semiconductor device and display device including semiconductor device

Method of selective film deposition and semiconductor feature made...

Method for selectively removing nickel platinum material

Crystalline semiconductor and oxide semiconductor thin-film transis...

Display device and method for fabricating the same

Method for preparing isolation area of gallium oxide device

Semiconductor device and manufacturing method thereof

Semiconductor arrangement and formation thereof

Semiconductor device and method for manufacturing the same

Semiconductor device and method of manufacturing semiconductor device

Thin film transistor and manufacturing method thereof and display d...

Device with doped phosphorene and method for doping phosphorene

Systems and methods for etching metals and metal derivatives

Manufacturing method of TFT substrate and TFT substrate

Display device

Manufacturing method of TFT array substrate

Active matrix substrate, x-ray imaging panel with the same, and met...

Thin-film transistor and fabrication method thereof, array substrat...

Composition for etching, method for etching insulator and method fo...

Patents Applicationslast 30 patents

METHOD OF SELECTIVE FILM DEPOSITION AND SEMICONDUCTOR FEATURE MADE...

MANUFACTURING METHOD OF DISPLAY SUBSTRATE, DISPLAY SUBSTRATE AND DI...

METHOD FOR FORMING SOURCE/DRAIN CONTACTS

METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR S...

REVERSED TONE PATTERNING METHOD FOR DIPOLE INCORPORATION FOR MULTIP...

REVERSED TONE PATTERNING METHOD FOR DIPOLE INCORPORATION FOR MULTIP...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

QFN PACKAGING STRUCTURE AND QFN PACKAGING METHOD

ETCHING COMPOSITION

METHOD FOR SELECTIVELY REMOVING NICKEL PLATINUM MATERIAL

METHOD OF SELECTIVE FILM DEPOSITION AND SEMICONDUCTOR FEATURE MADE...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF CMP INTEGRATION FOR IMPROVED OPTICAL UNIFORMITY IN ADVANC...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

MANUFACTURING METHOD OF DISPLAY SUBSTRATE, DISPLAY SUBSTRATE AND DI...

Method for Forming Source/Drain Contacts

COMPOSITION FOR ETCHING, METHOD FOR ETCHING INSULATOR AND METHOD FO...

DISPLAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, AND DISPLAY DE...

SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING SEMICONDUCTOR DEVICE

DISPLAY DEVICE AND METHOD FOR FABRICATING THE SAME

Method for Preparing Isolation Area of Gallium Oxide Device

THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING SAME, AND DISPLAY AP...

COMPOSITION FOR ETCHING, METHOD FOR ETCHING INSULATOR AND METHOD FO...

SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING SEMICONDUCTOR DEVICE

SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF

DEVICE WITH PHOSPHORENE AND FABRICATION THEREOF

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE