Eucentric movement

Industry

CPC
H01J2237/20242

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/20242Eucentric movement

Industries

Patents Grantslast 30 patents

Information Patent Grant
Specimen preparation and inspection in a dual-beam charged particle...
- Patent number 10,629,409
- Issue date Apr 21, 2020
- FEI Company
- Frantisek Vaske
- G01 - MEASURING TESTING
Information Patent Grant
Workpiece support structure with four degree of freedom air bearing...
- Patent number 9,337,076
- Issue date May 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and control method for stage device
- Patent number 8,907,303
- Issue date Dec 9, 2014
- Hitachi High-Technologies Corporation
- Yasuyuki Momoi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing objects by focused ion beam system and carrier...
- Patent number 8,481,967
- Issue date Jul 9, 2013
- Industrial Technology Research Institute
- Shen-Chuan Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electric charged particle beam microscope and microscopy
- Patent number 7,863,564
- Issue date Jan 4, 2011
- Hitachi High-Technologies Corporation
- Ruriko Tsuneta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite charged-particle beam system
- Patent number 7,718,981
- Issue date May 18, 2010
- SII NanoTechnology Inc.
- Haruo Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage assembly, particle-optical apparatus comprising such a stage...
- Patent number 7,474,419
- Issue date Jan 6, 2009
- FEI Company
- Hendrik Gezinus Tappel
- G01 - MEASURING TESTING
Information Patent Grant
Ion beam measurement systems and methods for ion implant dose and u...
- Patent number 6,992,309
- Issue date Jan 31, 2006
- Axcelis Technologies, Inc.
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning charged-particle beam instrument
- Patent number 6,444,991
- Issue date Sep 3, 2002
- Jeol Ltd.
- Atsushi Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bi-axial-tilting specimen fine motion device and method of correcti...
- Patent number 5,591,980
- Issue date Jan 7, 1997
- Hitachi, Ltd.
- Mitsuo Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SPECIMEN PREPARATION AND INSPECTION IN A DUAL-BEAM CHARGED PARTICLE...
- Publication number 20190108971
- Publication date Apr 11, 2019
- FEI Company
- Frantisek Vaske
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM MICROSCOPE, SAMPLE HOLDER FOR CHARGED PARTICL...
- Publication number 20140353500
- Publication date Dec 4, 2014
- Ruriko Tsuneta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE SUPPORT STRUCTURE WITH FOUR DEGREE OF FREEDOM AIR BEARING...
- Publication number 20140265093
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE SUPPORT STRUCTURE WITH FOUR DEGREE OF FREEDOM AIR BEARING...
- Publication number 20140264069
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE AND CONTROL METHOD FOR STAGE DEVICE
- Publication number 20140117251
- Publication date May 1, 2014
- Hitachi High-Technologies Corporation
- Yasuyuki Momoi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Milling Device, Sample Processing Method, Processing Device, an...
- Publication number 20120298884
- Publication date Nov 29, 2012
- Hitachi High-Technologies Corporation
- Rie Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN HOLDER ASSEMBLY
- Publication number 20110253905
- Publication date Oct 20, 2011
- University of Sheffield
- Guenter Moebus
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD OF PROCESSING OBJECTS BY FOCUSED ION BEAM SYSTEM AND CARRIER...
- Publication number 20100163752
- Publication date Jul 1, 2010
- Industrial Technology Research Institute
- Shen-Chuan LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRIC CHARGED PARTICLE BEAM MICROSCOPE AND MICROSCOPY
- Publication number 20090127474
- Publication date May 21, 2009
- Ruriko TSUNETA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE CHARGED-PARTICLE BEAM SYSTEM
- Publication number 20080315088
- Publication date Dec 25, 2008
- Haruo Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage assembly, particle-optical apparatus comprising such a stage...
- Publication number 20070125958
- Publication date Jun 7, 2007
- FEI Company
- Hendrik Gezinus Tappel
- G01 - MEASURING TESTING
Information Patent Application
ION BEAM MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANT DOSE AND U...
- Publication number 20060033045
- Publication date Feb 16, 2006
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS

Eucentric movement

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Specimen preparation and inspection in a dual-beam charged particle...

Workpiece support structure with four degree of freedom air bearing...

Stage device and control method for stage device

Method of processing objects by focused ion beam system and carrier...

Electric charged particle beam microscope and microscopy

Composite charged-particle beam system

Stage assembly, particle-optical apparatus comprising such a stage...

Ion beam measurement systems and methods for ion implant dose and u...

Scanning charged-particle beam instrument

Bi-axial-tilting specimen fine motion device and method of correcti...

Patents Applicationslast 30 patents

SPECIMEN PREPARATION AND INSPECTION IN A DUAL-BEAM CHARGED PARTICLE...

CHARGED PARTICLE BEAM MICROSCOPE, SAMPLE HOLDER FOR CHARGED PARTICL...

WORKPIECE SUPPORT STRUCTURE WITH FOUR DEGREE OF FREEDOM AIR BEARING...

WORKPIECE SUPPORT STRUCTURE WITH FOUR DEGREE OF FREEDOM AIR BEARING...

STAGE DEVICE AND CONTROL METHOD FOR STAGE DEVICE

Ion Milling Device, Sample Processing Method, Processing Device, an...

SPECIMEN HOLDER ASSEMBLY

METHOD OF PROCESSING OBJECTS BY FOCUSED ION BEAM SYSTEM AND CARRIER...

ELECTRIC CHARGED PARTICLE BEAM MICROSCOPE AND MICROSCOPY

COMPOSITE CHARGED-PARTICLE BEAM SYSTEM

Stage assembly, particle-optical apparatus comprising such a stage...

ION BEAM MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANT DOSE AND U...