Faraday cages

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CPC
H01J2237/24405

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/24405Faraday cages

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for optimizing full horizontal scanned beam dis...
- Patent number 12,191,113
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion collector for use in plasma systems
- Patent number 11,996,276
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for measuring electron beam
- Patent number 11,874,414
- Issue date Jan 16, 2024
- Tsinghua University
- Ke Zhang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ion collector for use in plasma systems
- Patent number 11,581,169
- Issue date Feb 14, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and measurement device
- Patent number 10,825,654
- Issue date Nov 3, 2020
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Noriyasu Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques for beam mapping in ion beam system
- Patent number 10,431,421
- Issue date Oct 1, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and measurement device
- Patent number 10,403,472
- Issue date Sep 3, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assessment and calibration of a high energy beam
- Patent number 10,388,486
- Issue date Aug 20, 2019
- Howmedica Osteonics Corp.
- Lewis Mullen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement of the electric current profile of particle clusters in...
- Patent number 10,192,715
- Issue date Jan 29, 2019
- Uwe Renner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assessment and calibration of a high energy beam
- Patent number 10,049,852
- Issue date Aug 14, 2018
- Howmedica Osteonics Corp.
- Lewis Mullen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for controlling a high power ion beam
- Patent number 9,887,066
- Issue date Feb 6, 2018
- NEUTRON THERAPEUTICS INC.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and semiconductor manufacturing method
- Patent number 9,773,712
- Issue date Sep 26, 2017
- TOSHIBA MEMORY CORPORATION
- Takayuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method to improve productivity of hybrid scan ion beam i...
- Patent number 9,711,329
- Issue date Jul 18, 2017
- Axelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of measuring vertical beam profile in an ion implantation sy...
- Patent number 9,711,328
- Issue date Jul 18, 2017
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam measuring device and method of measuring ion beam
- Patent number 9,564,292
- Issue date Feb 7, 2017
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Noriyasu Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro machined two dimensional faraday collector grid
- Patent number 9,564,290
- Issue date Feb 7, 2017
- Hamilton Sundstrand Corporation
- David E. Burchfield
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam imaging sensor and method for using same
- Patent number 9,535,100
- Issue date Jan 3, 2017
- BWXT Nuclear Operations Group, Inc.
- Michael D. McAninch
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ion implanter, ion implantation method, and beam measurement apparatus
- Patent number 9,502,210
- Issue date Nov 22, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Makoto Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam imaging sensor
- Patent number 9,383,460
- Issue date Jul 5, 2016
- BWXT Nuclear Operations Group, Inc.
- Michael D. McAninch
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Mechanisms for monitoring ion beam in ion implanter system
- Patent number 9,293,331
- Issue date Mar 22, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuan-Fu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography apparatus, lithography method, and method of manufactur...
- Patent number 9,257,262
- Issue date Feb 9, 2016
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam monitoring device, method, and system
- Patent number 9,218,938
- Issue date Dec 22, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Nai-Han Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam diagnostic system using computed tomography and an an...
- Patent number 9,105,448
- Issue date Aug 11, 2015
- Lawrence Livermore National Security, LLC
- John W. Elmer
- G01 - MEASURING TESTING
Information Patent Grant
Dose measurement device for plasma-immersion ion implantation
- Patent number 8,895,945
- Issue date Nov 25, 2014
- Ion Beam Services
- Frank Torregrosa
- G01 - MEASURING TESTING
Information Patent Grant
Faraday cup array integrated with a readout IC and method for manuf...
- Patent number 8,866,080
- Issue date Oct 21, 2014
- Research Triangle Institute
- Christopher A. Bower
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam diagnostic system using computed tomography and an an...
- Patent number 8,791,426
- Issue date Jul 29, 2014
- Lawrence Livermore National Security, LLC
- John W. Elmer
- G01 - MEASURING TESTING
Information Patent Grant
Beam monitoring device, method, and system
- Patent number 8,766,207
- Issue date Jul 1, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation system and ion beam irradiation method
- Patent number 8,735,855
- Issue date May 27, 2014
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam measurement system and method
- Patent number 8,698,108
- Issue date Apr 15, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Joseph P. Dzengeleski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for ion implantation with improved productivity a...
- Patent number 8,637,838
- Issue date Jan 28, 2014
- Axcelis Technologies, Inc.
- Edward C. Eisner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION COLLECTOR FOR USE IN PLASMA SYSTEMS
- Publication number 20240290588
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM
- Publication number 20240194444
- Publication date Jun 13, 2024
- INFINEON TECHNOLOGIES AG
- Moriz Jelinek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED LOOP FARADAY CORRECTION OF A HORIZONTAL BEAM CURRENT PROFILE...
- Publication number 20240071719
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...
- Publication number 20230386785
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION COLLECTOR FOR USE IN PLASMA SYSTEMS
- Publication number 20230197424
- Publication date Jun 22, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR MEASURING ELECTRON BEAM
- Publication number 20220196482
- Publication date Jun 23, 2022
- TSINGHUA UNIVERSITY
- KE ZHANG
- C01 - INORGANIC CHEMISTRY
Information Patent Application
APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM
- Publication number 20200027698
- Publication date Jan 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND MEASUREMENT DEVICE
- Publication number 20190244785
- Publication date Aug 8, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Noriyasu Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM
- Publication number 20190139740
- Publication date May 9, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASSESSMENT AND CALIBRATION OF A HIGH ENERGY BEAM
- Publication number 20180308657
- Publication date Oct 25, 2018
- Howmedica Osteonics Corp.
- Lewis Mullen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR CONTROLLING A HIGH POWER ION BEAM
- Publication number 20170178859
- Publication date Jun 22, 2017
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT OF THE ELECTRIC CURRENT PROFILE OF PARTICLE CLUSTERS IN...
- Publication number 20160314932
- Publication date Oct 27, 2016
- Bruker Daltonik GmbH
- Uwe RENNER
- G01 - MEASURING TESTING
Information Patent Application
Micro Machined Two Dimensional Faraday Collector Grid
- Publication number 20160141145
- Publication date May 19, 2016
- HAMILTON SUNDSTRAND CORPORATION
- David E. Burchfield
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM IMAGING SENSOR AND METHOD FOR USING SAME
- Publication number 20150129774
- Publication date May 14, 2015
- Michael D. McAninch
- G01 - MEASURING TESTING
Information Patent Application
MECHANISMS FOR MONITORING ION BEAM IN ION IMPLANTER SYSTEM
- Publication number 20150064814
- Publication date Mar 5, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Yuan-Fu YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD OF MANUFACTUR...
- Publication number 20140322831
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Koichi Sentoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Monitoring Device, Method, and System
- Publication number 20140306119
- Publication date Oct 16, 2014
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DETECTOR, ELECTRON BEAM PROCESSING APPARATUS, AND MET...
- Publication number 20140061465
- Publication date Mar 6, 2014
- Advantest Corporation
- Kenji Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM IMAGING SENSOR
- Publication number 20130299700
- Publication date Nov 14, 2013
- Michael D. McAninch
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER
- Publication number 20130299722
- Publication date Nov 14, 2013
- CHENG-HUI SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOSE MEASUREMENT DEVICE FOR PLASMA-IMMERSION ION IMPLANTATION
- Publication number 20130153779
- Publication date Jun 20, 2013
- ION BEAM SERVICES
- Frank Torregrosa
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR ION IMPLANTATION WITH IMPROVED PRODUCTIVITY A...
- Publication number 20130146760
- Publication date Jun 13, 2013
- Axcelis Technologies, Inc.
- Edward C. Eisner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTOR FOR ENERGETIC SECONDARY ELECTRONS
- Publication number 20130134321
- Publication date May 30, 2013
- ION BEAM SERVICES
- Frank Torregrosa
- G01 - MEASURING TESTING
Information Patent Application
Beam Monitoring Device, Method, And System
- Publication number 20130075624
- Publication date Mar 28, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR ANALYZING THE DENSITY OF A BEAM OF CHARGED PA...
- Publication number 20120138812
- Publication date Jun 7, 2012
- TECHNIQUES METALLURGIQUES AVANCESS (TECHMETA)
- Peter Johan OVING
- G01 - MEASURING TESTING
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER
- Publication number 20120126137
- Publication date May 24, 2012
- ADVANCED ION BEAM TECHNOLOGY, INC.
- CHENG-HUI SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM TUNING
- Publication number 20120068081
- Publication date Mar 22, 2012
- VARIAN SEMICONDUCTOR EQUIPMENT ASSOCISTES, INC.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM IRRADIATION SYSTEM AND ION BEAM IRRADIATION METHOD
- Publication number 20110297842
- Publication date Dec 8, 2011
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DIAGNOSTIC SYSTEM USING COMPUTED TOMOGRAPHY AND AN AN...
- Publication number 20110121180
- Publication date May 26, 2011
- John W. Elmer
- G01 - MEASURING TESTING
Information Patent Application
FARADAY CUP ARRAY INTEGRATED WITH A READOUT IC AND METHOD FOR MANUF...
- Publication number 20110031388
- Publication date Feb 10, 2011
- Research Triangle Institute
- Christopher A. Bower
- H01 - BASIC ELECTRIC ELEMENTS

Faraday cages

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for optimizing full horizontal scanned beam dis...

Ion collector for use in plasma systems

Device and method for measuring electron beam

Ion collector for use in plasma systems

Ion implantation apparatus and measurement device

Apparatus and techniques for beam mapping in ion beam system

Ion implantation apparatus and measurement device

Assessment and calibration of a high energy beam

Measurement of the electric current profile of particle clusters in...

Assessment and calibration of a high energy beam

Systems for controlling a high power ion beam

Ion implantation apparatus and semiconductor manufacturing method

System and method to improve productivity of hybrid scan ion beam i...

Method of measuring vertical beam profile in an ion implantation sy...

Ion beam measuring device and method of measuring ion beam

Micro machined two dimensional faraday collector grid

Beam imaging sensor and method for using same

Ion implanter, ion implantation method, and beam measurement apparatus

Beam imaging sensor

Mechanisms for monitoring ion beam in ion implanter system

Lithography apparatus, lithography method, and method of manufactur...

Beam monitoring device, method, and system

Electron beam diagnostic system using computed tomography and an an...

Dose measurement device for plasma-immersion ion implantation

Faraday cup array integrated with a readout IC and method for manuf...

Electron beam diagnostic system using computed tomography and an an...

Beam monitoring device, method, and system

Ion beam irradiation system and ion beam irradiation method

Ion beam measurement system and method

System and method for ion implantation with improved productivity a...

Patents Applicationslast 30 patents

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM

CLOSED LOOP FARADAY CORRECTION OF A HORIZONTAL BEAM CURRENT PROFILE...

SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

DEVICE AND METHOD FOR MEASURING ELECTRON BEAM

APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM

ION IMPLANTATION APPARATUS AND MEASUREMENT DEVICE

APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM

ASSESSMENT AND CALIBRATION OF A HIGH ENERGY BEAM

SYSTEMS FOR CONTROLLING A HIGH POWER ION BEAM

MEASUREMENT OF THE ELECTRIC CURRENT PROFILE OF PARTICLE CLUSTERS IN...

Micro Machined Two Dimensional Faraday Collector Grid

BEAM IMAGING SENSOR AND METHOD FOR USING SAME

MECHANISMS FOR MONITORING ION BEAM IN ION IMPLANTER SYSTEM

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD OF MANUFACTUR...

Beam Monitoring Device, Method, and System

ELECTRON BEAM DETECTOR, ELECTRON BEAM PROCESSING APPARATUS, AND MET...

BEAM IMAGING SENSOR

ION IMPLANTATION METHOD AND ION IMPLANTER

DOSE MEASUREMENT DEVICE FOR PLASMA-IMMERSION ION IMPLANTATION

SYSTEM AND METHOD FOR ION IMPLANTATION WITH IMPROVED PRODUCTIVITY A...

DETECTOR FOR ENERGETIC SECONDARY ELECTRONS

Beam Monitoring Device, Method, And System

DEVICE AND METHOD FOR ANALYZING THE DENSITY OF A BEAM OF CHARGED PA...

ION IMPLANTATION METHOD AND ION IMPLANTER

ION BEAM TUNING

ION BEAM IRRADIATION SYSTEM AND ION BEAM IRRADIATION METHOD

ELECTRON BEAM DIAGNOSTIC SYSTEM USING COMPUTED TOMOGRAPHY AND AN AN...

FARADAY CUP ARRAY INTEGRATED WITH A READOUT IC AND METHOD FOR MANUF...