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C23C16/45591

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45591Fixed means

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Patents Grantslast 30 patents

Information Patent Grant
Processing system and method of delivering a reactant gas
- Patent number 12,139,790
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber and exhaust liner system therefor
- Patent number 12,110,585
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Naman Apurva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetrical sealing and gas flow control device
- Patent number 12,094,730
- Issue date Sep 17, 2024
- Samsung Electronics Co., Ltd.
- June Hee Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,091,751
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-stage pumping liner
- Patent number 12,068,144
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Mingle Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber and process gas flow deflector for use...
- Patent number 12,018,369
- Issue date Jun 25, 2024
- Infineon Technologies AG
- Matthias Kuenle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic coated quartz lid for processing chamber
- Patent number 12,009,178
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Bernard L. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetric injection for better wafer uniformity
- Patent number 11,959,169
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
- Patent number 11,932,939
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply member with baffle
- Patent number 11,885,021
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 11,804,366
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Yuki Hosaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas confiner assembly for eliminating shadow frame
- Patent number 11,773,489
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Lai Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniform in situ cleaning and deposition
- Patent number 11,742,185
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for conducting plasma surface treatment, board treatment...
- Patent number 11,728,142
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Junyoung Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,725,282
- Issue date Aug 15, 2023
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow guide apparatus and vapor deposition device
- Patent number 11,713,509
- Issue date Aug 1, 2023
- Chengdu BOE Optoelectronics Technology Co., Ltd.
- Qiang Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature face plate for deposition application
- Patent number 11,697,877
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Amit Kumar Bansal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus
- Patent number 11,680,316
- Issue date Jun 20, 2023
- Industrial Technology Research Institute
- Kuan-Chou Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing display apparatus
- Patent number 11,534,790
- Issue date Dec 27, 2022
- Samsung Display Co., Ltd.
- Sangjin Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic coated quartz lid for processing chamber
- Patent number 11,521,830
- Issue date Dec 6, 2022
- Applied Materials, Inc.
- Bernard L. Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetric injection for better wafer uniformity
- Patent number 11,486,038
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,488,845
- Issue date Nov 1, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber components for epitaxial growth apparatus
- Patent number 11,441,236
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition chamber with funnel-shaped gas dispersion c...
- Patent number 11,384,432
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust device for processing apparatus provided with multiple blades
- Patent number 11,315,770
- Issue date Apr 26, 2022
- Tokyo Electron Limited
- Kazuya Nagaseki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxide film forming device
- Patent number 11,306,396
- Issue date Apr 19, 2022
- Meidensha Corporation
- Naoto Kameda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 11,282,721
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus for containers
- Patent number 11,274,061
- Issue date Mar 15, 2022
- Arkema B.V.
- Bram Van Dis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetrical sealing and gas flow control device
- Patent number 11,276,585
- Issue date Mar 15, 2022
- Samsung Electronics Co., Ltd.
- June Hee Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20240417851
- Publication date Dec 19, 2024
- LPE S.p.A.
- Francesco Corea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION
- Publication number 20240384414
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS BAFFLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240318313
- Publication date Sep 26, 2024
- TES CO., LTD.
- Dae-Geun YOON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION TUBE, SEMICONDUCTOR MANUFACTURING APPARATUS THEREWITH, AND...
- Publication number 20240271283
- Publication date Aug 15, 2024
- Samsung Electronics Co., Ltd.
- Jeonghyeon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR AN ACCUMULATOR
- Publication number 20240218512
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Madhan Kumar Arulanandam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL ORGANIC CHEMICAL VAPOR DEPOSITION DEVICE
- Publication number 20240167159
- Publication date May 23, 2024
- TES CO., LTD
- Sung-Chul CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND APPARATUS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20240167160
- Publication date May 23, 2024
- ASM IP HOLDING B.V.
- Ankit Kimtee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL GROWTH APPARATUS AND GAS SUPPLY CONTROL MODULE USED THEREFOR
- Publication number 20240167196
- Publication date May 23, 2024
- PJP TECH INC
- Bum Ho CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATU...
- Publication number 20240150894
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Toshiharu Watarai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL DEPOSITION CHAMBER APPARATUS FOR PRODUCING SILICON MATERIAL
- Publication number 20240141480
- Publication date May 2, 2024
- Feng-Yi Precision Technology Co., Ltd.
- Chung-Wen LAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, AND LAMINATE
- Publication number 20240124973
- Publication date Apr 18, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEFECT-REDUCING COATING METHOD
- Publication number 20240093364
- Publication date Mar 21, 2024
- MSSCORPS CO., LTD.
- CHI-LUN LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND APPARATUS FOR A REACTION CHAMBER
- Publication number 20240076778
- Publication date Mar 7, 2024
- ASM IP HOLDING B.V.
- Jessica Akemi Cimada da Silva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW CONTROL ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING...
- Publication number 20240068098
- Publication date Feb 29, 2024
- ASM IP HOLDING, B.V.
- Glenn Holbrook
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PIPING, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUF...
- Publication number 20240068094
- Publication date Feb 29, 2024
- KIOXIA Corporation
- Yuya MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...
- Publication number 20240018658
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS FOR PROCESSING A PLURALITY OF SU...
- Publication number 20240003009
- Publication date Jan 4, 2024
- ASM IP HOLDING, B.V.
- Ivo Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM IN SITU CLEANING AND DEPOSITION
- Publication number 20230402261
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO UNIFORMLY DISTRIBUTE ACTIVE SPECIES FOR SEMICONDUCTOR F...
- Publication number 20230374660
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Harpreet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20230343559
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi Chen HO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR CONDUCTING PLASMA SURFACE TREATMENT, BOARD TREATMENT...
- Publication number 20230343560
- Publication date Oct 26, 2023
- New Power Plasma Co., Ltd.
- Junyoung Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION APPARATUS FOR LAYER DEPOSITION
- Publication number 20230295806
- Publication date Sep 21, 2023
- Hanwha Corporation
- Sang Bo KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PUMPING LINER AND METHODS OF MANUFACTURE AND USE THEREOF
- Publication number 20230265560
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Badri Narayan Ramamurthi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A GALLIUM OXIDE SEMICONDUCTOR FILM AND A FILM...
- Publication number 20230257880
- Publication date Aug 17, 2023
- Shin-Etsu Chemical Co., Ltd.
- Takenori WATABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION
- Publication number 20230257882
- Publication date Aug 17, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Yung-Tsun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPLIT SHOWERHEAD COOLING PLATE
- Publication number 20230203658
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Andrew BORTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20230207292
- Publication date Jun 29, 2023
- WINTEL CORPORATION
- WONSUK YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIVERTLESS GAS-DOSING
- Publication number 20230167550
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- John Folden Stumpf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC PROCESSING CHAMBER BAFFLE
- Publication number 20230113063
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Udit S. Kotagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20230105104
- Publication date Apr 6, 2023
- LG ELECTRONICS INC.
- Jinsan MOON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Fixed means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Processing system and method of delivering a reactant gas

Substrate processing apparatus and method of manufacturing semicond...

Process chamber and exhaust liner system therefor

Asymmetrical sealing and gas flow control device

Substrate processing apparatus, method of manufacturing semiconduct...

Multi-stage pumping liner

Substrate processing chamber and process gas flow deflector for use...

Ceramic coated quartz lid for processing chamber

Asymmetric injection for better wafer uniformity

Lids and lid assembly kits for atomic layer deposition chambers

Gas supply member with baffle

Plasma processing apparatus

Gas confiner assembly for eliminating shadow frame

Uniform in situ cleaning and deposition

Apparatus for conducting plasma surface treatment, board treatment...

Suppression of parasitic deposition in a substrate processing syste...

Flow guide apparatus and vapor deposition device

High temperature face plate for deposition application

Deposition apparatus

Apparatus and method of manufacturing display apparatus

Ceramic coated quartz lid for processing chamber

Asymmetric injection for better wafer uniformity

Substrate processing apparatus

Chamber components for epitaxial growth apparatus

Atomic layer deposition chamber with funnel-shaped gas dispersion c...

Exhaust device for processing apparatus provided with multiple blades

Oxide film forming device

Vertical heat treatment apparatus

Coating apparatus for containers

Asymmetrical sealing and gas flow control device

Patents Applicationslast 30 patents

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES

DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION

GAS BAFFLE AND SUBSTRATE PROCESSING APPARATUS

REACTION TUBE, SEMICONDUCTOR MANUFACTURING APPARATUS THEREWITH, AND...

METHODS AND APPARATUS FOR AN ACCUMULATOR

METAL ORGANIC CHEMICAL VAPOR DEPOSITION DEVICE

SYSTEMS AND APPARATUS FOR SEMICONDUCTOR EQUIPMENT

EPITAXIAL GROWTH APPARATUS AND GAS SUPPLY CONTROL MODULE USED THEREFOR

EXHAUST COMPONENT CLEANING METHOD AND SUBSTRATE PROCESSING APPARATU...

DUAL DEPOSITION CHAMBER APPARATUS FOR PRODUCING SILICON MATERIAL

METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, AND LAMINATE

DEFECT-REDUCING COATING METHOD

SYSTEM AND APPARATUS FOR A REACTION CHAMBER

FLOW CONTROL ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING...

PIPING, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUF...

FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...

SEMICONDUCTOR PROCESSING APPARATUS FOR PROCESSING A PLURALITY OF SU...

UNIFORM IN SITU CLEANING AND DEPOSITION

HARDWARE TO UNIFORMLY DISTRIBUTE ACTIVE SPECIES FOR SEMICONDUCTOR F...

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

APPARATUS FOR CONDUCTING PLASMA SURFACE TREATMENT, BOARD TREATMENT...

GAS INJECTION APPARATUS FOR LAYER DEPOSITION

PUMPING LINER AND METHODS OF MANUFACTURE AND USE THEREOF

METHOD FOR PRODUCING A GALLIUM OXIDE SEMICONDUCTOR FILM AND A FILM...

DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION

SPLIT SHOWERHEAD COOLING PLATE

PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...

DIVERTLESS GAS-DOSING

DYNAMIC PROCESSING CHAMBER BAFFLE

CHEMICAL VAPOR DEPOSITION APPARATUS