Floating, air, magnetic suspension xy table, sawyer motor, xenetics

Industry

CPC
G05B2219/49276

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Parent Industries

GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

Current Industry

G05B2219/49276Floating, air, magnetic suspension xy table, sawyer motor, xenetics

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Measurement control system for multi-shaft supported air floatation...
- Patent number 9,989,973
- Issue date Jun 5, 2018
- Xinglin Chen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Planar positioning system and method of using the same
- Patent number 9,898,000
- Issue date Feb 20, 2018
- AKRIBIS SYSTEMS PTE LTD
- Sastra Budiman
- G05 - CONTROLLING REGULATING
Information Patent Grant
Positioning device and method of initializing a positioning device
- Patent number 7,375,346
- Issue date May 20, 2008
- Canon Kabushiki Kaisha
- Yugo Shibata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus for processing an object with high position accurancy
- Patent number 7,375,479
- Issue date May 20, 2008
- Koninklijke Philips Electronics, N.V.
- Jan Van Eijk
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Positioning device and method of initializing a positioning device
- Patent number 7,157,722
- Issue date Jan 2, 2007
- Canon Kabushiki Kaisha
- Yugo Shibata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage apparatus and its driving method, exposure apparatus and devi...
- Patent number 6,903,807
- Issue date Jun 7, 2005
- Canon Kabushiki Kaisha
- Shinji Uchida
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage apparatus capable of suppressing rolling of a vibration isola...
- Patent number 6,618,121
- Issue date Sep 9, 2003
- Olympus Optical Co., Ltd.
- Naobumi Okada
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Two-dimensional positioning apparatus and method for measuring lase...
- Patent number 6,603,562
- Issue date Aug 5, 2003
- Yokogawa Electric Corporation
- Yutaka Ono
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Projection exposure apparatus and method that floats a plate
- Patent number 6,094,255
- Issue date Jul 25, 2000
- Nikon Corporation
- Kazuya Ota
- G05 - CONTROLLING REGULATING
Information Patent Grant
Supporting apparatus using magnetic power
- Patent number 6,040,675
- Issue date Mar 21, 2000
- Nikon Corporation
- Kazuya Ono
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage feeding device
- Patent number 5,939,852
- Issue date Aug 17, 1999
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
XY drive apparatus equipped with a linear electromagnetic actuator
- Patent number 5,789,892
- Issue date Aug 4, 1998
- Nippon Thompson Co., Ltd.
- Seiji Takei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Triple effect absorption refrigeration system
- Patent number 5,727,397
- Issue date Mar 17, 1998
- York International Corporation
- Xiaoyu He
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Contactless guided positioning table
- Patent number 5,216,590
- Issue date Jun 1, 1993
- Seiko Seiki Kabushiki Kaisha
- Masato Ota
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High resolution piggyback linear motor design for placement systems...
- Patent number 5,126,648
- Issue date Jun 30, 1992
- Megamation Incorporated
- Fred Jacobs
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Two-step positioning device using Lorentz forces and a static gas b...
- Patent number 5,120,034
- Issue date Jun 9, 1992
- U.S. Philips Corp.
- Gerard Van Engelen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Robotic system
- Patent number 4,890,241
- Issue date Dec 26, 1989
- Megamation Incorporated
- Brian D. Hoffman
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method and apparatus for precision control of linear motors and the...
- Patent number 4,823,062
- Issue date Apr 18, 1989
- Megamation, Incorporated
- Brian D. Hoffman
- G05 - CONTROLLING REGULATING
Information Patent Grant
Multi-axis gas bearing stage assembly
- Patent number 4,676,649
- Issue date Jun 30, 1987
- Compact Spindle Bearing Corp.
- Edward H. Phillips
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Two-dimensional positioning device
- Patent number 4,626,749
- Issue date Dec 2, 1986
- Tokyo Electron Limited
- Teruo Asakawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Electromagnetic X-Y-Theta precision positioner
- Patent number 4,514,674
- Issue date Apr 30, 1985
- International Business Machines Corporation
- Ralph L. Hollis
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Measurement Control System for Multi-Shaft Supported Air Floatation...
- Publication number 20160124437
- Publication date May 5, 2016
- HARBIN INSTITUTE OF TECHNOLOGY
- Xinglin CHEN
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
XY STAGE
- Publication number 20090014932
- Publication date Jan 15, 2009
- Yokogawa Electric Corporation
- Mitsuhiro Nikaido
- G05 - CONTROLLING REGULATING
Information Patent Application
Apparatus for processing an object with high position accurancy
- Publication number 20070069666
- Publication date Mar 29, 2007
- Koninklijke Philips Electronics N.V.
- Jan Van Eijk
- G05 - CONTROLLING REGULATING
Information Patent Application
POSITIONING DEVICE AND METHOD OF INITIALIZING A POSITIONING DEVICE
- Publication number 20070063149
- Publication date Mar 22, 2007
- Canon Kabushiki Kaisha
- Yugo Shibata
- G05 - CONTROLLING REGULATING
Information Patent Application
Positioning device and method of initializing a positioning device
- Publication number 20050211920
- Publication date Sep 29, 2005
- Canon Kabushiki Kaisha
- Yugo Shibata
- G05 - CONTROLLING REGULATING
Information Patent Application
Stage apparatus and its driving method, exposure apparatus and devi...
- Publication number 20040201834
- Publication date Oct 14, 2004
- Canon Kabushiki Kaisha
- Shinji Uchida
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Stage apparatus
- Publication number 20020100853
- Publication date Aug 1, 2002
- Olympus Optical Co., Ltd.
- Naobumi Okada
- G05 - CONTROLLING REGULATING

Floating, air, magnetic suspension xy table, sawyer motor, xenetics

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Measurement control system for multi-shaft supported air floatation...

Planar positioning system and method of using the same

Positioning device and method of initializing a positioning device

Apparatus for processing an object with high position accurancy

Positioning device and method of initializing a positioning device

Stage apparatus and its driving method, exposure apparatus and devi...

Stage apparatus capable of suppressing rolling of a vibration isola...

Two-dimensional positioning apparatus and method for measuring lase...

Projection exposure apparatus and method that floats a plate

Supporting apparatus using magnetic power

Stage feeding device

XY drive apparatus equipped with a linear electromagnetic actuator

Triple effect absorption refrigeration system

Contactless guided positioning table

High resolution piggyback linear motor design for placement systems...

Two-step positioning device using Lorentz forces and a static gas b...

Robotic system

Method and apparatus for precision control of linear motors and the...

Multi-axis gas bearing stage assembly

Two-dimensional positioning device

Electromagnetic X-Y-Theta precision positioner

Patents Applicationslast 30 patents

Measurement Control System for Multi-Shaft Supported Air Floatation...

XY STAGE

Apparatus for processing an object with high position accurancy

POSITIONING DEVICE AND METHOD OF INITIALIZING A POSITIONING DEVICE

Positioning device and method of initializing a positioning device

Stage apparatus and its driving method, exposure apparatus and devi...

Stage apparatus