Claims
- 1. A stage apparatus including a stage mounted on a vibration isolation table, comprising:
a drive unit which accelerates or decelerates said stage; an input unit which accepts a start signal of acceleration/deceleration as input data without defining a target movement amount for said stage; and a control unit which outputs an acceleration signal to said drive unit based on the data for the start of the acceleration input to said input unit and outputs, n×T seconds after said acceleration signal is output after the data for the start of deceleration is input to said input unit, and (where n represents a natural number and T represents a rolling oscillation period unique to the vibration isolation table [in seconds]), a deceleration signal having a same waveform as that of said acceleration signal and an opposite direction thereto.
- 2. A stage apparatus according to claim 1, wherein said input unit is a joystick or a button switch.
- 3. A stage apparatus including a stage mounted on a vibration isolation table, comprising:
a drive unit which accelerates or decelerates said stage; an input unit which accepts a target movement speed for said stage as input data; and a control unit which outputs a first acceleration signal to said drive unit based on the input contents to said input unit and outputs, (n−0.5)×T seconds after the first acceleration signal is output (where n represents a natural number and T represents a rolling oscillation period unique to the vibration isolation table [in seconds]), a second acceleration signal having a same waveform as that of the first acceleration signal and a same direction thereto.
- 4. A stage apparatus according to any of claims 1 to 3, wherein said control unit varies a variable Tc equivalent to the rolling oscillation period T unique to said vibration isolation table from outside, and controls said drive unit based on the variable Tc taken as the rolling oscillation period T unique to said vibration isolation table.
- 5. A stage apparatus according to claim 4, further comprising: a detection unit which detects the rolling oscillation of said vibration isolation table,
wherein said control unit adjusts the variable Tc in accordance with the oscillation amplitude detected by said detection unit.
Priority Claims (1)
Number |
Date |
Country |
Kind |
11- 268758 |
Sep 1999 |
JP |
|
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This is a Continuation Application of PCT Application No. PCT/JP00/06474, filed Sep. 21, 2000, which was not published under PCT Article 21(2) in English.
[0002] This application is based upon and claims the benefit of priority from the prior Japanese Patent Application No. 11-268758, filed Sep. 22, 1999, the entire contents of which are incorporated herein by reference.
Continuations (1)
|
Number |
Date |
Country |
Parent |
PCT/JP00/06474 |
Sep 2000 |
US |
Child |
10103215 |
Mar 2002 |
US |