Flow conditions in reaction chamber

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CPC
C23C16/45502

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/45502Flow conditions in reaction chamber

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for stabilizing vanadium compounds
- Patent number 12,221,357
- Issue date Feb 11, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,215,417
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Satoshi Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 12,173,405
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for cleaning reaction vessel for processing su...
- Patent number 12,139,787
- Issue date Nov 12, 2024
- Kokusai Electric Corporation
- Shinya Ebata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling a processing system
- Patent number 12,134,823
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Andreas Neuber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,123,091
- Issue date Oct 22, 2024
- Kokusai Electric Corporation
- Takayuki Nakada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,125,717
- Issue date Oct 22, 2024
- Semes Co., Ltd.
- Ki Sang Eum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional nano-patterns
- Patent number 12,091,745
- Issue date Sep 17, 2024
- Technion Research & Development Foundation Limited
- Tamar Segal-Peretz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modulation of oxidation profile for substrate processing
- Patent number 12,087,573
- Issue date Sep 10, 2024
- Lam Research Corporation
- Gerald Joseph Brady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 12,018,371
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Reita Igarashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for coating a substrate with a carbon-containing coating
- Patent number 12,012,654
- Issue date Jun 18, 2024
- Aixtron SE
- Alexandre Jouvray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,952,664
- Issue date Apr 9, 2024
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
- Patent number 11,932,939
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a substrate by oscillating a boundary layer o...
- Patent number 11,761,080
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Tsung-Han Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for applying a carbon layer to a substrate comprising introd...
- Patent number 11,746,415
- Issue date Sep 5, 2023
- CARBONCOMPETENCE GMBH
- Doris Steinmuller-Nethl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniform in situ cleaning and deposition
- Patent number 11,742,185
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing silicon carbide epitaxial substrate and me...
- Patent number 11,735,415
- Issue date Aug 22, 2023
- Sumitomo Electric Industries, Ltd.
- Takaya Miyase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular hood for coating glass containers including removable divid...
- Patent number 11,731,154
- Issue date Aug 22, 2023
- Arkema Inc.
- Jeremy J. Nihart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming metal silicon oxide and metal silicon oxynitride...
- Patent number 11,725,280
- Issue date Aug 15, 2023
- ASM IP Holding B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for conducting plasma surface treatment, board treatment...
- Patent number 11,728,142
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Junyoung Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated cluster tool for selective area deposition
- Patent number 11,725,274
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Tobin Kaufman-Osborn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,725,282
- Issue date Aug 15, 2023
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal chalcogenide film and method and device for manufacturing the...
- Patent number 11,708,633
- Issue date Jul 25, 2023
- Samsung Electronics Co., Ltd.
- Kyung-Eun Byun
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
System and method for vapor deposition coating of extrusion dies us...
- Patent number 11,697,873
- Issue date Jul 11, 2023
- Corning Incorporated
- Thomas William Brew
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition device
- Patent number 11,685,996
- Issue date Jun 27, 2023
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of depositing a thin layer
- Patent number 11,639,550
- Issue date May 2, 2023
- Samsung Electronics Co., Ltd.
- Dong-Gu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Half-angle nozzle
- Patent number 11,634,813
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed plasma (DC/RF) deposition of high quality C films for patter...
- Patent number 11,603,591
- Issue date Mar 14, 2023
- Applied Materials Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 11,591,694
- Issue date Feb 28, 2023
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for enhancing a diffusion limited CVI/CVD process
- Patent number 11,584,987
- Issue date Feb 21, 2023
- Goodrich Corporation
- Ying She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20250066916
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hiroki IRIUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS
- Publication number 20250033990
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Charles Dezelah
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250014891
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Hiroyuki KOIDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20240417851
- Publication date Dec 19, 2024
- LPE S.p.A.
- Francesco Corea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20240404822
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...
- Publication number 20240344197
- Publication date Oct 17, 2024
- BENEQ OY
- Markus BOSUND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING IMPURITY FREE METAL ALLOY FILMS
- Publication number 20240287678
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Geetika Bajaj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...
- Publication number 20240254655
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI ISOLATION PLATE WITH GAP AND ANGLE ADJUSTMENT FOR PROCESS TUNING
- Publication number 20240254654
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATE ASSEMBLIES, PROCESS KITS, AND PROCESSING CHAMBERS FOR SEMICON...
- Publication number 20240254624
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-DISC CHEMICAL VAPOR DEPOSITION SYSTEM WITH CROSS FLOW GAS INJ...
- Publication number 20240175133
- Publication date May 30, 2024
- VEECO INSTRUMENTS INC.
- Ajit Paranjpe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...
- Publication number 20240120220
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240018688
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Errol Antonio C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING TUBE, SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20240011154
- Publication date Jan 11, 2024
- Samsung Electronics Co., Ltd.
- HYUNJU LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE INCLUDING TRANSPARENT POLYMER WITH HYDROPHILIC COATING, AND...
- Publication number 20230399744
- Publication date Dec 14, 2023
- Agilent Technologies, Inc.
- Elizabeth CARR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM IN SITU CLEANING AND DEPOSITION
- Publication number 20230402261
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATING APPARATUS OF SIC EPITAXIAL WAFER AND FABRICATION METHOD...
- Publication number 20230374698
- Publication date Nov 23, 2023
- ROHM CO., LTD.
- Makoto TAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR FORMING METAL SILICON OXIDE AND METAL SILICON...
- Publication number 20230349043
- Publication date Nov 2, 2023
- ASM IP HOLDING B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR CONDUCTING PLASMA SURFACE TREATMENT, BOARD TREATMENT...
- Publication number 20230343560
- Publication date Oct 26, 2023
- New Power Plasma Co., Ltd.
- Junyoung Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230340666
- Publication date Oct 26, 2023
- TOKYO ELECTRON LIMITED
- Kuniyasu SAKASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL CHALCOGENIDE FILM AND METHOD AND DEVICE FOR MANUFACTURING THE...
- Publication number 20230313365
- Publication date Oct 5, 2023
- Samsung Electronics Co., Ltd.
- Kyung-Eun BYUN
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METHOD FOR CVD DEPOSITION OF N-TYPE DOPED SILICON CARBIDE AND EPITA...
- Publication number 20230313410
- Publication date Oct 5, 2023
- LPE S.P.A.
- Silvio Preti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TARGETED TEMPORAL ALD
- Publication number 20230313373
- Publication date Oct 5, 2023
- Microsoft Technology Licensing, LLC
- Ville Kalevi SAUNAJOKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING INTERCONNECT STRUCTURE
- Publication number 20230295804
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...
- Publication number 20230220551
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPLIT VALVE AIR CURTAIN
- Publication number 20230142009
- Publication date May 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jia-Wei XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING FILMS ON PARTICLES OF POWDER
- Publication number 20230124553
- Publication date Apr 20, 2023
- Creative Coatings Co., Ltd.
- Eiji SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230115403
- Publication date Apr 13, 2023
- Kokusai Electric Corporation
- Hiroaki HIRAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230109474
- Publication date Apr 6, 2023
- Hitachi Kokusai Electric Inc.
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW GUIDE APPARATUSES FOR FLOW UNIFORMITY CONTROL IN PROCESS CHAMBERS
- Publication number 20230097346
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Flow conditions in reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and apparatus for stabilizing vanadium compounds

Substrate processing method and substrate processing device

Processing apparatus and processing method

Apparatus and method for cleaning reaction vessel for processing su...

Method for controlling a processing system

Substrate processing apparatus and method of manufacturing semicond...

Apparatus for treating substrate

Three-dimensional nano-patterns

Modulation of oxidation profile for substrate processing

Processing apparatus and processing method

Device for coating a substrate with a carbon-containing coating

Substrate processing apparatus and method of manufacturing semicond...

Lids and lid assembly kits for atomic layer deposition chambers

Method for processing a substrate by oscillating a boundary layer o...

Method for applying a carbon layer to a substrate comprising introd...

Uniform in situ cleaning and deposition

Method for manufacturing silicon carbide epitaxial substrate and me...

Modular hood for coating glass containers including removable divid...

Method for forming metal silicon oxide and metal silicon oxynitride...

Apparatus for conducting plasma surface treatment, board treatment...

Integrated cluster tool for selective area deposition

Suppression of parasitic deposition in a substrate processing syste...

Metal chalcogenide film and method and device for manufacturing the...

System and method for vapor deposition coating of extrusion dies us...

Atomic layer deposition device

Apparatus and method of depositing a thin layer

Half-angle nozzle

Pulsed plasma (DC/RF) deposition of high quality C films for patter...

Method of manufacturing semiconductor device, method of processing...

System and method for enhancing a diffusion limited CVI/CVD process

Patents Applicationslast 30 patents

PROCESSING APPARATUS AND PROCESSING METHOD

METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES

MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING

AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...

METHODS FOR FORMING IMPURITY FREE METAL ALLOY FILMS

EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...

EPI ISOLATION PLATE WITH GAP AND ANGLE ADJUSTMENT FOR PROCESS TUNING

PLATE ASSEMBLIES, PROCESS KITS, AND PROCESSING CHAMBERS FOR SEMICON...

MULTI-DISC CHEMICAL VAPOR DEPOSITION SYSTEM WITH CROSS FLOW GAS INJ...

LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

SUBSTRATE PROCESSING TUBE, SUBSTRATE PROCESSING APPARATUS INCLUDING...

DEVICE INCLUDING TRANSPARENT POLYMER WITH HYDROPHILIC COATING, AND...

UNIFORM IN SITU CLEANING AND DEPOSITION

FABRICATING APPARATUS OF SIC EPITAXIAL WAFER AND FABRICATION METHOD...

METHOD AND SYSTEM FOR FORMING METAL SILICON OXIDE AND METAL SILICON...

APPARATUS FOR CONDUCTING PLASMA SURFACE TREATMENT, BOARD TREATMENT...

SUBSTRATE PROCESSING APPARATUS

METAL CHALCOGENIDE FILM AND METHOD AND DEVICE FOR MANUFACTURING THE...

METHOD FOR CVD DEPOSITION OF N-TYPE DOPED SILICON CARBIDE AND EPITA...

TARGETED TEMPORAL ALD

METHOD OF FORMING INTERCONNECT STRUCTURE

PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...

SPLIT VALVE AIR CURTAIN

METHOD AND APPARATUS FOR FORMING FILMS ON PARTICLES OF POWDER

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

FLOW GUIDE APPARATUSES FOR FLOW UNIFORMITY CONTROL IN PROCESS CHAMBERS