Flush enclosure of circuit with air, keep clean air over pressure

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CPC
G05B2219/34479

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GPHYSICS G05Controlling systems G05BCONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS G05B2219/00Program-control systems

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G05B2219/34479Flush enclosure of circuit with air, keep clean air over pressure

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Patents Grantslast 30 patents

Information Patent Grant
Remote-plasma clean (RPC) directional-flow device
- Patent number 12,013,682
- Issue date Jun 18, 2024
- Lam Research Corporation
- Michael John Janicki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote-plasma clean (RPC) directional-flow device
- Patent number 11,619,925
- Issue date Apr 4, 2023
- Lam Research Corporation
- Michael J. Janicki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE
- Publication number 20230221697
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Michael John JANICKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE
- Publication number 20220107619
- Publication date Apr 7, 2022
- LAM RESEARCH CORPORATION
- Michael J. Janicki
- G05 - CONTROLLING REGULATING