Membership
Tour
Register
Log in
Flush enclosure of circuit with air, keep clean air over pressure
Follow
Industry
CPC
G05B2219/34479
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
Current Industry
G05B2219/34479
Flush enclosure of circuit with air, keep clean air over pressure
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Remote-plasma clean (RPC) directional-flow device
Patent number
11,619,925
Issue date
Apr 4, 2023
Lam Research Corporation
Michael J. Janicki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE
Publication number
20230221697
Publication date
Jul 13, 2023
LAM RESEARCH CORPORATION
Michael John JANICKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE
Publication number
20220107619
Publication date
Apr 7, 2022
LAM RESEARCH CORPORATION
Michael J. Janicki
G05 - CONTROLLING REGULATING