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for changing properties of the objects or for applying thin layers thereon
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H01J37/317
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/317
for changing properties of the objects or for applying thin layers thereon
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Patents Grants
last 30 patents
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Patent Grant
Methods of post-curing additive manufacturing parts using electron...
Patent number
12,285,915
Issue date
Apr 29, 2025
Ford Global Technologies, LLC
Christopher Michael Seubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source module
Patent number
12,288,663
Issue date
Apr 29, 2025
ASML Netherlands B.V.
Laura Dinu-Gurtler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Closed loop faraday correction of a horizontal beam current profile...
Patent number
12,283,460
Issue date
Apr 22, 2025
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holder state detection device and substrate holder state...
Patent number
12,278,083
Issue date
Apr 15, 2025
SCREEN Holdings Co., Ltd.
Yuji Okita
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Embedded high-z marker material and process for alignment of multil...
Patent number
12,255,047
Issue date
Mar 18, 2025
HRL Laboratories, LLC
Christopher Bohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation method and ion implanter
Patent number
12,255,046
Issue date
Mar 18, 2025
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Yoji Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing method and charged particle beam writ...
Patent number
12,249,483
Issue date
Mar 11, 2025
NuFlare Technology, Inc.
Haruyuki Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holding device
Patent number
12,249,479
Issue date
Mar 11, 2025
Nissin Ion Equipment Co., Ltd.
Yusuke Otsuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for controlled ion implantation
Patent number
12,247,283
Issue date
Mar 11, 2025
Applied Materials, Inc.
Alexander K. Eidukonis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method and system for determining a charged particle beam exposure...
Patent number
12,243,712
Issue date
Mar 4, 2025
D2S, Inc.
Akira Fujimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lens designs
Patent number
12,243,714
Issue date
Mar 4, 2025
ASML Netherlands B.V.
Laura Del Tin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam sputtering apparatus and method
Patent number
12,243,715
Issue date
Mar 4, 2025
Institute of Geological and Nuclear Sciences Limited
Richard John Futter
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Repellent electrode for electron repelling
Patent number
12,243,707
Issue date
Mar 4, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Ching-Heng Yen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion generator and ion implanter
Patent number
12,243,708
Issue date
Mar 4, 2025
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Syuta Ochi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron beam irradiation apparatus with overlapping beam columns a...
Patent number
12,243,710
Issue date
Mar 4, 2025
Ebara Corporation
Ryo Tajima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Effective temperature calculation method for multi-charged particle...
Patent number
12,230,472
Issue date
Feb 18, 2025
NuFlare Technology, Inc.
Shingo Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature-controlled surface with a cryo-nanomanipulator for impr...
Patent number
12,230,473
Issue date
Feb 18, 2025
Applied Materials Israel Ltd.
Yehuda Zur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electron beam resist composition
Patent number
RE50296
Issue date
Feb 11, 2025
The University of Manchester
Scott Lewis
Information
Patent Grant
Stage apparatus and electron beam lithography system
Patent number
12,222,658
Issue date
Feb 11, 2025
Jeol Ltd.
Hirofumi Miyao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Localized stress modulation by implant to back of wafer
Patent number
12,217,974
Issue date
Feb 4, 2025
Applied Materials, Inc.
Sony Varghese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
Patent number
12,211,669
Issue date
Jan 28, 2025
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Gate structure of semiconductor device and method of manufacture
Patent number
12,211,701
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Tsan-Chun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method and system for the removal and/or avoidance of contamination...
Patent number
12,202,019
Issue date
Jan 21, 2025
ASML Netherlands B.V.
Marc Smits
B08 - CLEANING
Information
Patent Grant
Calibration hardware for ion implanter
Patent number
12,205,840
Issue date
Jan 21, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Lung-Yin Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
Patent number
12,198,891
Issue date
Jan 14, 2025
NuFlare Technology, Inc.
Taku Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing line-end space in integrated circuit patterning
Patent number
12,197,131
Issue date
Jan 14, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Jing-Huei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Repeller assembly for mounting into an arc chamber of an ion implan...
Patent number
12,198,890
Issue date
Jan 14, 2025
Plansee USA LLC
Nam Ngo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced spatial/temporal overlaps to increase temporal overlaps to...
Patent number
12,191,110
Issue date
Jan 7, 2025
The University of Liverpool
Nigel D Browning
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for optimizing full horizontal scanned beam dis...
Patent number
12,191,113
Issue date
Jan 7, 2025
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Controller and control techniques for linear accelerator and ion im...
Patent number
12,193,140
Issue date
Jan 7, 2025
Applied Materials, Inc.
Keith E. Kowal
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTIPLE CHARG...
Publication number
20250140517
Publication date
May 1, 2025
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DYNAMIC ION BEAM SHAPE SELECTION
Publication number
20250140510
Publication date
May 1, 2025
Applied Materials, Inc.
Richard Allen SPRENKLE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20250140513
Publication date
May 1, 2025
HITACHI HIGH-TECH SCIENCE CORPORATION
Satoshi TOMIMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR TWO-DIMENSIONAL ION BEAM PROFILING
Publication number
20250140520
Publication date
May 1, 2025
Axcelis Technologies, Inc.
Michael Cristoforo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING METHOD AND MULTIPLE CHARGED...
Publication number
20250140521
Publication date
May 1, 2025
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS APPARATUS AND METHOD
Publication number
20250140522
Publication date
May 1, 2025
Taiwan Semiconductor Manufacturing company Ltd.
Chun-Wei Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE STRESS MANAGEMENT USING VARIABLE ENERGY AND VARIABLE DOSE...
Publication number
20250140523
Publication date
May 1, 2025
Applied Materials, Inc.
Stanislav S. TODOROV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-PARAMETER IMPLANTATION FOR MANAGING WAFER DISTORTION
Publication number
20250140567
Publication date
May 1, 2025
Applied Materials, Inc.
Stanislav S. TODOROV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOCALIZED STRESS MODULATION BY IMPLANT TO BACK OF WAFER
Publication number
20250140569
Publication date
May 1, 2025
Applied Materials, Inc.
Sony Varghese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DOPING TWO-DIMENSIONAL MATERIAL BASED ON CLUSTER ION IMP...
Publication number
20250132126
Publication date
Apr 24, 2025
Jiangsu Jichuang Atomic Cluster Technology Research Institute Co., Ltd.
Fengqi SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION SOURCE WITH WIRE FORM METAL DOPANT
Publication number
20250125119
Publication date
Apr 17, 2025
Applied Materials, Inc.
Roger B. Fish
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LENS DESIGNS
Publication number
20250125120
Publication date
Apr 17, 2025
ASML NETHERLANDS B.V.
Laura DEL TIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACTIVELY HEATED TARGET TO GENERATE AN ION BEAM
Publication number
20250118524
Publication date
Apr 10, 2025
Axcelis Technologies, Inc.
Neil K. Colvin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALIBRATION HARDWARE FOR ION IMPLANTER
Publication number
20250118585
Publication date
Apr 10, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Lung-Yin Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM WRITING METHOD AND MULTI-BEAM WRITING APPARATUS
Publication number
20250118529
Publication date
Apr 10, 2025
NuFlare Technology, Inc.
Haruyuki NOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM CURING OF CLEAR AND PIGMENTED COATINGS FOR THE COIL I...
Publication number
20250112025
Publication date
Apr 3, 2025
Energy Sciences Inc.
Imtiaz Rangwalla
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INVERTING IMPLANTER PROCESS MODEL FOR PARAMETER GENERATION
Publication number
20250112026
Publication date
Apr 3, 2025
Applied Materials, Inc.
Richard Allen SPRENKLE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT
Publication number
20250104965
Publication date
Mar 27, 2025
Axcelis Technologies, Inc.
Wilhelm Platow
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...
Publication number
20250104966
Publication date
Mar 27, 2025
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CALCULATING EFFECTIVE TEMPERATURE OF MULTI-CHARGED PARTI...
Publication number
20250104964
Publication date
Mar 27, 2025
NuFlare Technology, Inc.
Haruyuki NOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRONIC COMPONENT AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS
Publication number
20250095951
Publication date
Mar 20, 2025
Kabushiki Kaisha Toshiba
Kazuyuki HIGASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...
Publication number
20250095952
Publication date
Mar 20, 2025
Applied Materials, Inc.
Ori Noked
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION PRODUCTION SYSTEM WITH A MASS RESOLVING APERTURE HAVING A SCATT...
Publication number
20250095957
Publication date
Mar 20, 2025
SHINE Technologies, LLC
Ross Radel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION
Publication number
20250095958
Publication date
Mar 20, 2025
Applied Materials, Inc.
Frank SINCLAIR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADJUSTABLE EXIT ANGLE SOURCE FOR IONS AND NEUTRAL PARTICLES
Publication number
20250095949
Publication date
Mar 20, 2025
Applied Materials, Inc.
Christopher A. Rowland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING M...
Publication number
20250095960
Publication date
Mar 20, 2025
Samsung Electronics Co., Ltd.
Sang Woo SEON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADJUSTABLE MULTIPLE FILAMENT ION BEAM DEPOSITION SYSTEM
Publication number
20250087441
Publication date
Mar 13, 2025
INTEVAC, INC.
Thomas P. Nolan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION BEAM PROFILING USING OPTICAL TOMOGRAPHY
Publication number
20250087448
Publication date
Mar 13, 2025
Axcelis Technologies, Inc.
Neil J. Bassom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL CATHODE TEMPERATURE-CONTROLLED MULTI-CATHODE ION SOURCE
Publication number
20250087451
Publication date
Mar 13, 2025
Axcelis Technologies, Inc.
Neil J. Bassom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTIPLE CHARG...
Publication number
20250087452
Publication date
Mar 13, 2025
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS