for defining out-of-plane movement of the mass

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GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT

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G01P2015/0822for defining out-of-plane movement of the mass

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Patents Grantslast 30 patents

Information Patent Grant
Vibration rectification error correction circuit, physical quantity...
- Patent number 11,808,572
- Issue date Nov 7, 2023
- Seiko Epson Corporation
- Masayoshi Todorokihara
- G01 - MEASURING TESTING
Information Patent Grant
Single proof mass based three-axis accelerometer
- Patent number 11,493,533
- Issue date Nov 8, 2022
- MEMSIC Semiconductor (TIANJIN) Co., Ltd.
- Leyue Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Microelectromechanical or/and nanoelectromechanical device with out...
- Patent number 11,156,459
- Issue date Oct 26, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Federico Maspero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single proof mass based three-axis accelerometer
- Patent number 11,150,265
- Issue date Oct 19, 2021
- MEMSIC Semiconductor (TIANJIN) Co., Ltd.
- Leyue Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Microelectromechanical device with at least one translationally gui...
- Patent number 10,315,916
- Issue date Jun 11, 2019
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Federico Maspero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrode for a microelectromechanical device
- Patent number 10,284,142
- Issue date May 7, 2019
- Murata Manufacturing Co., Ltd.
- Marcus Rinkiö
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and methods for highly integrated optical readout MEMS sensors
- Patent number 10,024,656
- Issue date Jul 17, 2018
- Honeywell International Inc.
- Grant H. Lodden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Angular velocity sensor
- Patent number 9,846,036
- Issue date Dec 19, 2017
- SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Jong Woon Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for a time-based optical pickoff for MEMS sensors
- Patent number 9,803,979
- Issue date Oct 31, 2017
- Honeywell International Inc.
- Robert D. Horning
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) device
- Patent number 9,702,889
- Issue date Jul 11, 2017
- Richtek Technology Corporation
- Shih-Chieh Lin
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor physical quantity detecting sensor
- Patent number 9,511,993
- Issue date Dec 6, 2016
- Hitachi Automotive Systems, Ltd.
- Kiyoko Yamanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive acceleration sensor with an H-shaped beam and preparatio...
- Patent number 9,476,906
- Issue date Oct 25, 2016
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy...
- Lufeng Che
- G01 - MEASURING TESTING
Information Patent Grant
MEMS tilt sensor
- Patent number 9,329,199
- Issue date May 3, 2016
- Knowles Electronics, LLC
- Sung Bok Lee
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
MEMS multi-axis accelerometer electrode structure
- Patent number 9,062,972
- Issue date Jun 23, 2015
- Fairchild Semiconductor Corporation
- Cenk Acar
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SINGLE PROOF MASS BASED THREE-AXIS ACCELEROMETER
- Publication number 20210405084
- Publication date Dec 30, 2021
- MEMSIC Semiconductor (TIANJIN) Co., Ltd.
- Leyue Jiang
- G01 - MEASURING TESTING
Information Patent Application
VIBRATION RECTIFICATION ERROR CORRECTION CIRCUIT, PHYSICAL QUANTITY...
- Publication number 20190331491
- Publication date Oct 31, 2019
- SEIKO EPSON CORPORATION
- Masayoshi TODOROKIHARA
- G01 - MEASURING TESTING
Information Patent Application
DYNAMIC QUANTITY SENSOR
- Publication number 20180246141
- Publication date Aug 30, 2018
- Denso Corporation
- Eiichi TAKETANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROELECTROMECHANICAL OR/AND NANOELECTROMECHANICAL DEVICE WITH OUT...
- Publication number 20170363424
- Publication date Dec 21, 2017
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Federico MASPERO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Physical Quantity Detecting Sensor
- Publication number 20130346015
- Publication date Dec 26, 2013
- Hitachi Automotive Systems, Ltd.
- Kiyoko Yamanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MULTI-AXIS ACCELEROMETER ELECTRODE STRUCTURE
- Publication number 20130192369
- Publication date Aug 1, 2013
- Cenk Acar
- G01 - MEASURING TESTING
Information Patent Application
MEMS Tilt Sensor
- Publication number 20130160547
- Publication date Jun 27, 2013
- KNOWLES ELECTRONICS, LLC
- Sung Bok Lee
- G01 - MEASURING TESTING

for defining out-of-plane movement of the mass

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vibration rectification error correction circuit, physical quantity...

Single proof mass based three-axis accelerometer

Microelectromechanical or/and nanoelectromechanical device with out...

Single proof mass based three-axis accelerometer

Microelectromechanical device with at least one translationally gui...

Electrode for a microelectromechanical device

System and methods for highly integrated optical readout MEMS sensors

Angular velocity sensor

Systems and methods for a time-based optical pickoff for MEMS sensors

Micro-electro-mechanical system (MEMS) device

Semiconductor physical quantity detecting sensor

Capacitive acceleration sensor with an H-shaped beam and preparatio...

MEMS tilt sensor

MEMS multi-axis accelerometer electrode structure

Patents Applicationslast 30 patents

SINGLE PROOF MASS BASED THREE-AXIS ACCELEROMETER

VIBRATION RECTIFICATION ERROR CORRECTION CIRCUIT, PHYSICAL QUANTITY...

DYNAMIC QUANTITY SENSOR

MICROELECTROMECHANICAL OR/AND NANOELECTROMECHANICAL DEVICE WITH OUT...

Semiconductor Physical Quantity Detecting Sensor

MEMS MULTI-AXIS ACCELEROMETER ELECTRODE STRUCTURE

MEMS Tilt Sensor