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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67063
for etching
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing apparatus
Patent number
11,967,511
Issue date
Apr 23, 2024
Tokyo Electron Limited
Akira Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead device for semiconductor processing system
Patent number
11,948,813
Issue date
Apr 2, 2024
ASM IP Holding B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device having hybrid bonding...
Patent number
11,894,247
Issue date
Feb 6, 2024
NANYA TECHNOLOGY CORPORATION
Hsih-Yang Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor memory device and manufacturing method of the semicon...
Patent number
11,812,615
Issue date
Nov 7, 2023
SK hynix Inc.
Nam Jae Lee
G11 - INFORMATION STORAGE
Information
Patent Grant
Method for processing a workpiece using a multi-cycle thermal treat...
Patent number
11,764,072
Issue date
Sep 19, 2023
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Michael X. Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer processing apparatus
Patent number
11,749,557
Issue date
Sep 5, 2023
ZEUS CO., LTD.
Jiho Park
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of removing phosphorus-doped silicon film and system therefor
Patent number
11,749,530
Issue date
Sep 5, 2023
Tokyo Electron Limited
Yoshihiro Takezawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck
Patent number
11,735,459
Issue date
Aug 22, 2023
MiCo Ceramics Ltd.
Mina Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and wafer etching device including the same
Patent number
11,728,198
Issue date
Aug 15, 2023
Samsung Electronics Co., Ltd.
Myoung-Soo Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Designer atomic layer etching
Patent number
11,721,558
Issue date
Aug 8, 2023
Lam Research Corporation
Keren Jacobs Kanarik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-chamber apparatus
Patent number
11,721,565
Issue date
Aug 8, 2023
Samsung Electronics Co., Ltd.
Yong Jun Choi
B08 - CLEANING
Information
Patent Grant
Integrated substrate measurement system to improve manufacturing pr...
Patent number
11,688,616
Issue date
Jun 27, 2023
Applied Materials, Inc.
Upendra V. Ummethala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Retaining ring for CMP
Patent number
11,673,226
Issue date
Jun 13, 2023
Applied Materials, Inc.
Andrew J. Nagengast
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,664,243
Issue date
May 30, 2023
Samsung Electronics Co., Ltd.
Sang-jine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of selectively forming n-type doped material on a surface,...
Patent number
11,646,205
Issue date
May 9, 2023
ASM IP Holding B.V.
Rami Khazaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated assemblies and methods of forming integrated assemblies
Patent number
11,631,684
Issue date
Apr 18, 2023
Micron Technology, Inc.
Justin B. Dorhout
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for analyzing a semiconductor device
Patent number
11,626,306
Issue date
Apr 11, 2023
SK hynix Inc.
Jin Hee Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device, method, and tool of manufacture
Patent number
11,621,342
Issue date
Apr 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih Hung Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Structures with doped semiconductor layers and methods and systems...
Patent number
11,594,600
Issue date
Feb 28, 2023
ASM IP Holding B.V.
Lucas Petersen Barbosa Lima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus and substrate treating method
Patent number
11,594,421
Issue date
Feb 28, 2023
Semes Co., Ltd.
Youngil Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Platform and method of operating for integrated end-to-end fully se...
Patent number
11,594,451
Issue date
Feb 28, 2023
Tokyo Electron Limited
Robert Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and temperature control method
Patent number
11,546,970
Issue date
Jan 3, 2023
Tokyo Electron Limited
Shinsuke Oka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Template apparatus and methods of using the same
Patent number
11,541,577
Issue date
Jan 3, 2023
Canon Kabushiki Kaisha
Amir Tavakkoli Kermani Ghariehali
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Memory device including multiple decks of memory cells and pillars...
Patent number
11,532,638
Issue date
Dec 20, 2022
Micron Technology, Inc.
Darwin A. Clampitt
G11 - INFORMATION STORAGE
Information
Patent Grant
Ceramic coated quartz lid for processing chamber
Patent number
11,521,830
Issue date
Dec 6, 2022
Applied Materials, Inc.
Bernard L. Hwang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated cleaning process for substrate etching
Patent number
11,521,838
Issue date
Dec 6, 2022
Applied Materials, Inc.
Yi Zhou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching apparatus
Patent number
11,515,193
Issue date
Nov 29, 2022
Samsung Electronics Co., Ltd.
Kuihyun Yoon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus with resistance value varying mechanism
Patent number
11,488,849
Issue date
Nov 1, 2022
Tokyo Electron Limited
Yosuke Hachiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Platform and method of operating for integrated end-to-end fully se...
Patent number
11,456,212
Issue date
Sep 27, 2022
Tokyo Electron Limited
Robert Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead device for semiconductor processing system
Patent number
11,437,249
Issue date
Sep 6, 2022
ASM IP Holding B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SACRIFICIAL LAYER FOR FORMING MERGED HIGH ASPECT RATIO CONTACTS IN...
Publication number
20240090213
Publication date
Mar 14, 2024
Applied Materials, Inc.
Jialiang WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240047258
Publication date
Feb 8, 2024
Hitachi High-Tech Corporation
Tomoyuki Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET CLEAN APPARATUS FOR SINGLE WAFER
Publication number
20240038552
Publication date
Feb 1, 2024
Shanghai Huali Integrated Circuit Corporation
Wenqian XIE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR ETCHING APPARATUS
Publication number
20240021460
Publication date
Jan 18, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Faming ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING SYSTEM FOR FABRICATING SEMICONDUCTOR DEVICE STRUCTURE
Publication number
20230420273
Publication date
Dec 28, 2023
NANYA TECHNOLOGY CORPORATION
TZU-CHING TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
Publication number
20230395399
Publication date
Dec 7, 2023
SEMES CO., LTD.
Ki Yung LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF IN-SITU SELECTIVE METAL REMOVAL VIA GRADIENT OXIDATION FO...
Publication number
20230343644
Publication date
Oct 26, 2023
Applied Materials, Inc.
Chih-Hsun HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHAMBER APPARATUS
Publication number
20230343613
Publication date
Oct 26, 2023
Samsung Electronics Co., Ltd.
Yong Jun CHOI
B08 - CLEANING
Information
Patent Application
INTEGRATED SUBSTRATE MEASUREMENT SYSTEM TO IMPROVE MANUFACTURING PR...
Publication number
20230326773
Publication date
Oct 12, 2023
Applied Materials, Inc.
Upendra V. Ummethala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID PATTERNING-BONDING SEMICONDUCTOR TOOL
Publication number
20230326814
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Anthony R. SCHEPIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR FABRICATION SYSTEM
Publication number
20230306146
Publication date
Sep 28, 2023
Samsung Electronics Co., Ltd.
SEORA PARK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ETCHING METHOD, ETCHING APPARATUS, MANUFACTURING METHOD OF SEMICOND...
Publication number
20230307233
Publication date
Sep 28, 2023
KIOXIA Corporation
Noriko Sakurai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated Assemblies and Methods of Forming Integrated Assemblies
Publication number
20230209822
Publication date
Jun 29, 2023
Micron Technology, Inc.
Justin B. Dorhout
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CONTROLLING MOISTURE IN SEMICONDUCTOR PROCE...
Publication number
20230197472
Publication date
Jun 22, 2023
ASM IP HOLDING, B.V.
Joseph Kraus
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STRUCTURES WITH DOPED SEMICONDUCTOR LAYERS AND METHODS AND SYSTEMS...
Publication number
20230197792
Publication date
Jun 22, 2023
ASM IP HOLDING B.V.
Lucas Petersen Barbosa Lima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
Publication number
20230191449
Publication date
Jun 22, 2023
Kokusai Electric Corporation
Satoshi TAKANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Reducing Surface Roughness
Publication number
20230197441
Publication date
Jun 22, 2023
SPTS TECHNOLOGIES LIMITED
Roland Mumford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Improving Stability of Etching Rate of Etching Chamber
Publication number
20230162995
Publication date
May 25, 2023
SHANGHAI HUALI MICROELECTRONICS CORPORATION
Kaiqu Ang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230134436
Publication date
May 4, 2023
TOKYO ELECTRON LIMITED
Shinya ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20230127467
Publication date
Apr 27, 2023
TOKYO ELECTRON LIMITED
Kae TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEVEL ETCHER USING ATMOSPHERIC PLASMA
Publication number
20230129291
Publication date
Apr 27, 2023
ASM IP HOLDING B.V.
Yoshio Susa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMORY DEVICE INCLUDING MULTIPLE DECKS OF MEMORY CELLS AND PILLARS...
Publication number
20230117100
Publication date
Apr 20, 2023
Micron Technology, Inc.
Darwin A. Clampitt
G11 - INFORMATION STORAGE
Information
Patent Application
PLASMA PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD
Publication number
20230105165
Publication date
Apr 6, 2023
TOKYO ELECTRON LIMITED
Shinsuke OKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20230107264
Publication date
Apr 6, 2023
TOKYO ELECTRON LIMITED
Fumiya TAKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
Publication number
20230102839
Publication date
Mar 30, 2023
ASM IP HOLDING B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20230100292
Publication date
Mar 30, 2023
TOKYO ELECTRON LIMITED
KYURI MOTOKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, AND METHOD OF MANU...
Publication number
20230096542
Publication date
Mar 30, 2023
Kokusai Electric Corporation
Kenichi SUZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230086580
Publication date
Mar 23, 2023
TOKYO ELECTRON LIMITED
Fumiya TAKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CLEANING PROCESS FOR SUBSTRATE ETCHING
Publication number
20230086917
Publication date
Mar 23, 2023
Applied Materials, Inc.
Yi Zhou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230080956
Publication date
Mar 16, 2023
TOKYO ELECTRON LIMITED
Makoto WADA
H01 - BASIC ELECTRIC ELEMENTS