for evacuating by thermal means

Patents Grantslast 30 patents

  • Information Patent Grant

    Vaporizer apparatus

    • Patent number 11,517,044
    • Issue date Dec 6, 2022
    • Mabee Engineered Solutions Inc.
    • Brian D. Mabee
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Microfabricated gas flow structure

    • Patent number 10,794,374
    • Issue date Oct 6, 2020
    • The Regents of the University of Michigan
    • Yogesh Gianchandani
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Method and apparatus for control of fluid temperature and flow

    • Patent number 10,697,671
    • Issue date Jun 30, 2020
    • Forced Physics, LLC
    • Scott Davis
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Pump power consumption enhancement

    • Patent number 10,428,807
    • Issue date Oct 1, 2019
    • Applied Materials, Inc.
    • Mariusch Gregor
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Vacuum pump with abatement function

    • Patent number 10,143,964
    • Issue date Dec 4, 2018
    • Ebara Corporation
    • Kohtaro Kawamura
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Method and apparatus for control of fluid temperature and flow

    • Patent number 10,113,774
    • Issue date Oct 30, 2018
    • Forced Physics, LLC
    • Scott Davis
    • F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
  • Information Patent Grant

    Gas micropump

    • Patent number 9,695,807
    • Issue date Jul 4, 2017
    • Moscow Institute of Physics and Technology State University (Moscow Institute...
    • Yury Yrevich Kloss
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Cryogenic pumps

    • Patent number 9,599,101
    • Issue date Mar 21, 2017
    • Westport Power Inc.
    • Alexis Lefevre
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Distributed thrusters driven gas compressor

    • Patent number 9,528,507
    • Issue date Dec 27, 2016
    • GAME CHANGERS LLC
    • Andrew D. Zonenberg
    • F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
  • Information Patent Grant

    Cryopump and method for regenerating the cryopump

    • Patent number 9,440,165
    • Issue date Sep 13, 2016
    • Sumitomo Heavy Industries, Ltd.
    • Kakeru Takahashi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Apparatus and methods for evacuating air from a closed area

    • Patent number 9,404,487
    • Issue date Aug 2, 2016
    • Game Changers, LLC
    • Andrew D. Zonenberg
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Exhaust gas abatement apparatus

    • Patent number 9,364,786
    • Issue date Jun 14, 2016
    • Ebara Corporation
    • Kohtaro Kawamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Domestic appliance comprising a thermoelectric heat pump

    • Patent number 9,322,126
    • Issue date Apr 26, 2016
    • BSH Hausgeraete GmbH
    • Hasan Gökcer Albayrak
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Thermally driven Knudsen pump

    • Patent number 9,243,624
    • Issue date Jan 26, 2016
    • University of Louisville Research Foundation, Inc.
    • Shamus McNamara
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Vacuum pumping system

    • Patent number 9,140,250
    • Issue date Sep 22, 2015
    • Edwards Limited
    • Ian David Stones
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Sublimation pump and method

    • Patent number 9,057,362
    • Issue date Jun 16, 2015
    • The Boeing Company
    • Carl R. McIver
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Cryopump

    • Patent number 9,046,091
    • Issue date Jun 2, 2015
    • Sumitomo Heavy Industries, Ltd.
    • Hidekazu Tanaka
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Method and apparatus for control of fluid temperature and flow

    • Patent number 8,986,627
    • Issue date Mar 24, 2015
    • Forced Physics, LLC
    • Scott Davis
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Method and apparatus for control of fluid temperature and flow

    • Patent number 8,414,847
    • Issue date Apr 9, 2013
    • Forced Physics, LLC
    • Scott Davis
    • F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
  • Information Patent Grant

    Pump apparatus and pump unit thereof

    • Patent number 7,909,583
    • Issue date Mar 22, 2011
    • Osaka Vacuum, Ltd.
    • Hiroshi Sugimoto
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Apparatus for trapping residual products in semiconductor device fa...

    • Patent number 7,491,291
    • Issue date Feb 17, 2009
    • Samsung Electronics Co., Ltd.
    • Jin-Jun Park
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Packaged micromachined device such as a vacuum micropump, device ha...

    • Patent number 7,367,781
    • Issue date May 6, 2008
    • The Regents of the University of Michigan
    • Yogesh B. Gianchandani
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Pump for supplying a gas to a sensor and methods therefor

    • Patent number 7,056,098
    • Issue date Jun 6, 2006
    • General Electric Company
    • Yuzef Gokhfeld
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Thermal transpiration pump

    • Patent number 6,533,554
    • Issue date Mar 18, 2003
    • University of Southern California
    • Stephen E. Vargo
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Vacuum processing apparatus

    • Patent number 6,253,029
    • Issue date Jun 26, 2001
    • Tokyo Electron Limited
    • Kazuichi Hayashi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Vacuum pump with gas heating

    • Patent number 5,879,139
    • Issue date Mar 9, 1999
    • Tokyo Electron Limited
    • Kazuichi Hayashi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Thermal transpiration driven vacuum pump

    • Patent number 5,871,336
    • Issue date Feb 16, 1999
    • Northrop Grumman Corporation
    • Robert M. Young
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Secondary pump unit

    • Patent number 5,720,174
    • Issue date Feb 24, 1998
    • Alcatel Cit
    • Guy Gorinas
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Modified cryogenic diffusion pump

    • Patent number 5,611,208
    • Issue date Mar 18, 1997
    • European Atomic Energy Community
    • Johann L. Hemmerich
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Evacuation apparatus and evacuation method

    • Patent number 5,062,271
    • Issue date Nov 5, 1991
    • Kabushiki Kaisha Toshiba
    • Katsuya Okumura
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents

  • Information Patent Application

    TURBOMOLECULAR PUMP

    • Publication number 20240254980
    • Publication date Aug 1, 2024
    • EDWARDS JAPAN LIMITED
    • Masayuki Takeda
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VAPORIZER APPARATUS

    • Publication number 20210052013
    • Publication date Feb 25, 2021
    • MABEE ENGINEERED SOLUTIONS, INC.
    • Brian D. MABEE
    • A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
  • Information Patent Application

    METHOD AND APPARATUS FOR CONTROL OF FLUID TEMPERATURE AND FLOW

    • Publication number 20190056153
    • Publication date Feb 21, 2019
    • Forced Physics, LLC
    • Scott Davis
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    MICROFABRICATED GAS FLOW STRUCTURE

    • Publication number 20160230751
    • Publication date Aug 11, 2016
    • The Regents of the University of Michigan
    • Yogesh Gianchandani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM PUMP WITH ABATEMENT FUNCTION

    • Publication number 20140348717
    • Publication date Nov 27, 2014
    • EBARA CORPORATION
    • Kohtaro KAWAMURA
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM PUMP WITH ABATEMENT FUNCTION

    • Publication number 20140290919
    • Publication date Oct 2, 2014
    • Kohtaro KAWAMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DISTRIBUTED THRUSTERS DRIVEN GAS COMPRESSOR

    • Publication number 20140161633
    • Publication date Jun 12, 2014
    • Game Changers LLC
    • Andrew D. Zonenberg
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Cryogenic Pumps

    • Publication number 20140109599
    • Publication date Apr 24, 2014
    • Alexis Lefevre
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    APPARATUS AND METHODS FOR EVACUATING AIR FROM A CLOSED AREA

    • Publication number 20140076411
    • Publication date Mar 20, 2014
    • Game Changers, LLC
    • Andrew D. Zonenberg
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    GAS MICROPUMP

    • Publication number 20140037468
    • Publication date Feb 6, 2014
    • Moscow Institute of Physics and Tech. State Univ. (Moscow Institute of Physic...
    • Yury Yrevich Kloss
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    CRYOPUMP AND METHOD FOR REGENERATING THE CRYOPUMP

    • Publication number 20130227968
    • Publication date Sep 5, 2013
    • Sumitomo Heavy Industries, Ltd.
    • Kakeru Takahashi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    METHOD AND APPARATUS FOR CONTROL OF FLUID TEMPERATURE AND FLOW

    • Publication number 20130225059
    • Publication date Aug 29, 2013
    • Forced Physics, LLC
    • Scott Davis
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    PUMP POWER CONSUMPTION ENHANCEMENT

    • Publication number 20130156610
    • Publication date Jun 20, 2013
    • Applied Materials, Inc.
    • MARIUSCH GREGOR
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    SUBLIMATION PUMP AND METHOD

    • Publication number 20130078112
    • Publication date Mar 28, 2013
    • THE BOEING COMPANY
    • Carl R. McIver
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM PUMPING SYSTEM

    • Publication number 20130028757
    • Publication date Jan 31, 2013
    • EDWARDS LIMITED
    • Ian David Stones
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    THERMALLY DRIVEN KNUDSEN PUMP

    • Publication number 20120207625
    • Publication date Aug 16, 2012
    • UNIVERSITY OF LOUISVILLE RESEARCH FOUNDATION, INC.
    • Shamus McNamara
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Increased volumetric capacity of axial flow compressors used in tur...

    • Publication number 20100266426
    • Publication date Oct 21, 2010
    • Marsbed Hablanian
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Method and apparatus for control of fluid temperature and flow

    • Publication number 20100096016
    • Publication date Apr 22, 2010
    • Forced Physics LLC.
    • Scott Davis
    • F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
  • Information Patent Application

    Cryopump

    • Publication number 20100077771
    • Publication date Apr 1, 2010
    • Sumitomo Heavy Industries, Ltd.
    • Hidekazu Tanaka
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Domestic Appliance Comprising a Thermoelectric Heat Pump

    • Publication number 20090049843
    • Publication date Feb 26, 2009
    • BSH Bosch und Siemens Hausgerate GmbH
    • Hasan Gökcer Albayrak
    • F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
  • Information Patent Application

    Pump Apparatus and Pump Unit Thereof

    • Publication number 20080159877
    • Publication date Jul 3, 2008
    • Kyoto University
    • Hiroshi Sugimoto
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Apparatus for trapping residual products in semiconductor device fa...

    • Publication number 20060162862
    • Publication date Jul 27, 2006
    • Jin-Jun Park
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Pump for supplying a gas to a sensor and methods therefor

    • Publication number 20050199037
    • Publication date Sep 15, 2005
    • GENERAL ELECTRIC COMPANY
    • Yuzef Gokhfeld
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Packaged micromachined device such as a vacuum micropump, device ha...

    • Publication number 20040179946
    • Publication date Sep 16, 2004
    • Yogesh B. Gianchandani
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...