for heating

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CPC
H01L21/2636

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/2636for heating

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing electronic device
- Patent number 12,142,522
- Issue date Nov 12, 2024
- Mitsui Chemicals Tohcello, Inc.
- Toru Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective carbon deposition on top and bottom surfaces of semicondu...
- Patent number 12,125,699
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Abhijeet S. Bagal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 11,901,419
- Issue date Feb 13, 2024
- Fuji Electric Co., Ltd.
- Yasunori Agata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
- Patent number 11,876,006
- Issue date Jan 16, 2024
- SCREEN Holdings Co., Ltd.
- Tomohiro Ueno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF substrate structure and method of production
- Patent number 11,848,191
- Issue date Dec 19, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Emmanuel Augendre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including transistor with doped oxide semicond...
- Patent number 11,810,858
- Issue date Nov 7, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi Koezuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device for heating object material using laser beam and ind...
- Patent number 11,798,824
- Issue date Oct 24, 2023
- RNR LAB INC.
- Jeong Do Ryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process apparatus including a non-contact thermo-sensor
- Patent number 11,764,087
- Issue date Sep 19, 2023
- Samsung Electronics Co., Ltd.
- Chaemook Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and liquid supplying method
- Patent number 11,664,212
- Issue date May 30, 2023
- Semes Co., Ltd.
- Yong Hoon Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate crack mitigation systems and related methods
- Patent number 11,652,010
- Issue date May 16, 2023
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. Seddon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 11,631,588
- Issue date Apr 18, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 11,626,704
- Issue date Apr 11, 2023
- ASML Netherlands B.V.
- Sietse Thijmen Van Der Post
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method including low temperature degassing before fl...
- Patent number 11,574,824
- Issue date Feb 7, 2023
- SCREEN Holdings Co., Ltd.
- Takayuki Aoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating device for heating object material using laser beam and ind...
- Patent number 11,462,424
- Issue date Oct 4, 2022
- RNR LAB INC.
- Jeong Do Ryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including transistor with oxide semiconductor...
- Patent number 11,322,442
- Issue date May 3, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi Koezuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate and method for treating apparatus
- Patent number 11,295,952
- Issue date Apr 5, 2022
- Semes Co., Ltd.
- Tae Sub Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Artificial neural networks (ANN) including a resistive element base...
- Patent number 11,227,996
- Issue date Jan 18, 2022
- International Business Machines Corporation
- Ali Afzali-Ardakani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor device with field stop layer and semiconductor device...
- Patent number 11,152,224
- Issue date Oct 19, 2021
- Fuji Electric Co., Ltd.
- Tomonori Mizushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Short-wave infrared detector array and fabrication methods thereof
- Patent number 11,133,349
- Issue date Sep 28, 2021
- IRIS INDUSTRIES SA
- Claude Meylan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 11,114,319
- Issue date Sep 7, 2021
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus with doped surfaces, and related methods with in situ doping
- Patent number 11,088,147
- Issue date Aug 10, 2021
- Micron Technology, Inc.
- Jaydip Guha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate crack mitigation systems and related methods
- Patent number 11,069,585
- Issue date Jul 20, 2021
- Semiconductor Components Industries, LLC
- Michael J. Seddon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for fabricating artificial neural networks (ANN) based on d...
- Patent number 11,024,803
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Ali Afzali-Ardakani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Light-irradiation heat treatment method and heat treatment apparatus
- Patent number 10,978,319
- Issue date Apr 13, 2021
- SCREEN Holdings Co., Ltd.
- Takayuki Aoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor layer separation from single crystal silicon substrat...
- Patent number 10,847,421
- Issue date Nov 24, 2020
- Svagos Technik, Inc.
- Tirunelveli S. Ravi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Light-irradiation heat treatment method and heat treatment apparatus
- Patent number 10,790,171
- Issue date Sep 29, 2020
- SCREEN Holdings Co., Ltd.
- Takayuki Aoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Synthesis and fabrication of transition metal dichalcogenide struct...
- Patent number 10,777,410
- Issue date Sep 15, 2020
- University of South Carolina
- Ifat Jahangir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilayer graphene using chemical vapor deposition and method of m...
- Patent number 10,755,939
- Issue date Aug 25, 2020
- Center for Advanced Soft Electronics
- Kilwon Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method for p-type semiconductor
- Patent number 10,699,906
- Issue date Jun 30, 2020
- SCREEN Holdings Co., Ltd.
- Hideaki Tanimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing device
- Patent number 10,651,049
- Issue date May 12, 2020
- Kyushu University, National University Corporation
- Hiroshi Ikenoue
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDU...
- Publication number 20240420948
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Abhijeet S. Bagal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SI...
- Publication number 20240290842
- Publication date Aug 29, 2024
- Fuji Electric Co., Ltd.
- Naoyuki OHSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20240186383
- Publication date Jun 6, 2024
- Fuji Electric Co., Ltd.
- Yasunori AGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR
- Publication number 20240153765
- Publication date May 9, 2024
- SCREEN Holdings Co., Ltd.
- Masaki INABA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Carbon Assisted Semiconductor Dicing And Method
- Publication number 20240120284
- Publication date Apr 11, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20230411184
- Publication date Dec 21, 2023
- SEMES CO., LTD.
- Kwang Ryul KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SEMICONDUCTOR WAFER PROCESSING USING A RADIANT HEAT CAP...
- Publication number 20230354478
- Publication date Nov 2, 2023
- GLOBALWAFERS CO., LTD.
- Chieh Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING AN ELECTRONIC DEVICE, SUCH AS A JBS OR MPS DIODE, BASED ON...
- Publication number 20230299173
- Publication date Sep 21, 2023
- STMicroelectronics S.r.l.
- Simone RASCUNA'
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING
- Publication number 20230131233
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Nathan Lavdovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDU...
- Publication number 20220415648
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Abhijeet S. Bagal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE FOR HEATING OBJECT MATERIAL USING LASER BEAM AND IND...
- Publication number 20220392788
- Publication date Dec 8, 2022
- RNR LAB INC.
- Jeong Do RYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING ELECTRONIC DEVICE
- Publication number 20220319918
- Publication date Oct 6, 2022
- MITSUI CHEMICALS TOHCELLO, INC.
- Toru MIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR...
- Publication number 20220310517
- Publication date Sep 29, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi KOEZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
- Publication number 20220278207
- Publication date Sep 1, 2022
- Rohm Co., Ltd.
- Yuu ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser-Assisted Epitaxy and Etching for Manufacturing Integrated Cir...
- Publication number 20220238337
- Publication date Jul 28, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yee-Chia Yeo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR A RADIANT HEAT CAP IN A SEMICONDUCTOR WAFER...
- Publication number 20220210872
- Publication date Jun 30, 2022
- GLOBALWAFERS CO., LTD.
- Chieh Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Producing or Modifying Silicon Carbide-Containing Articles
- Publication number 20220097256
- Publication date Mar 31, 2022
- PSC Technologies GmbH
- Siegmund GREULICH-WEBER
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MA...
- Publication number 20220093435
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Kenji SHINOZAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20220013643
- Publication date Jan 13, 2022
- Fuji Electric Co., Ltd.
- Yasunori AGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE CRACK MITIGATION SYSTEMS AND RELATED METHODS
- Publication number 20210343604
- Publication date Nov 4, 2021
- Semiconductor Components Industries, LLC
- Michael J. SEDDON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND LIQUID SUPPLYING METHOD
- Publication number 20210335596
- Publication date Oct 28, 2021
- Semes Co., LTD.
- Yong Hoon HONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS APPARATUS INCLUDING A NON-CONTACT THERMO-SENSOR
- Publication number 20210183672
- Publication date Jun 17, 2021
- Samsung Electronics Co., Ltd.
- Chaemook LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD OF MAKING A GRAPHENE TRANSISTOR AND DEVICES
- Publication number 20200403068
- Publication date Dec 24, 2020
- Paragraf Limited
- Simon Thomas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING APPARATUS
- Publication number 20200388496
- Publication date Dec 10, 2020
- SEMES CO., LTD.
- Tae Sub LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHORT-WAVE INFRARED DETECTOR ARRAY AND FABRICATION METHODS THEREOF
- Publication number 20200357833
- Publication date Nov 12, 2020
- IRIS Industries SA
- M. Claude MEYLAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE FOR HEATING OBJECT MATERIAL USING LASER BEAM AND IND...
- Publication number 20200357665
- Publication date Nov 12, 2020
- Jeong Do RYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR...
- Publication number 20200321280
- Publication date Oct 8, 2020
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Junichi KOEZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE CRACK MITIGATION SYSTEMS AND RELATED METHODS
- Publication number 20200176336
- Publication date Jun 4, 2020
- Semiconductor Components Industries, LLC
- Michael J. SEDDON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20200168486
- Publication date May 28, 2020
- TOKYO ELECTRON LIMITED
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING
- Publication number 20200152466
- Publication date May 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS

for heating

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing electronic device

Selective carbon deposition on top and bottom surfaces of semicondu...

Semiconductor device and manufacturing method of semiconductor device

Heat treatment method and heat treatment apparatus of light irradia...

RF substrate structure and method of production

Semiconductor device including transistor with doped oxide semicond...

Heating device for heating object material using laser beam and ind...

Process apparatus including a non-contact thermo-sensor

Substrate treating apparatus and liquid supplying method

Semiconductor substrate crack mitigation systems and related methods

Method and apparatus for non line-of-sight doping

Methods and apparatus for predicting performance of a measurement m...

Heat treatment method including low temperature degassing before fl...

Heating device for heating object material using laser beam and ind...

Semiconductor device including transistor with oxide semiconductor...

Apparatus for treating substrate and method for treating apparatus

Artificial neural networks (ANN) including a resistive element base...

Semiconductor device with field stop layer and semiconductor device...

Short-wave infrared detector array and fabrication methods thereof

Heat treatment apparatus and heat treatment method

Apparatus with doped surfaces, and related methods with in situ doping

Semiconductor substrate crack mitigation systems and related methods

Methods for fabricating artificial neural networks (ANN) based on d...

Light-irradiation heat treatment method and heat treatment apparatus

Semiconductor layer separation from single crystal silicon substrat...

Light-irradiation heat treatment method and heat treatment apparatus

Synthesis and fabrication of transition metal dichalcogenide struct...

Multilayer graphene using chemical vapor deposition and method of m...

Heat treatment method for p-type semiconductor

Laser annealing device

Patents Applicationslast 30 patents

SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDU...

SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SI...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

METHOD AND APPARATUS FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR

Carbon Assisted Semiconductor Dicing And Method

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

METHODS FOR SEMICONDUCTOR WAFER PROCESSING USING A RADIANT HEAT CAP...

FORMING AN ELECTRONIC DEVICE, SUCH AS A JBS OR MPS DIODE, BASED ON...

RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING

SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDU...

HEATING DEVICE FOR HEATING OBJECT MATERIAL USING LASER BEAM AND IND...

METHOD FOR MANUFACTURING ELECTRONIC DEVICE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR...

SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME

Laser-Assisted Epitaxy and Etching for Manufacturing Integrated Cir...

SYSTEM AND METHODS FOR A RADIANT HEAT CAP IN A SEMICONDUCTOR WAFER...

Method for Producing or Modifying Silicon Carbide-Containing Articles

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MA...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR SUBSTRATE CRACK MITIGATION SYSTEMS AND RELATED METHODS

SUBSTRATE TREATING APPARATUS AND LIQUID SUPPLYING METHOD

PROCESS APPARATUS INCLUDING A NON-CONTACT THERMO-SENSOR

A METHOD OF MAKING A GRAPHENE TRANSISTOR AND DEVICES

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING APPARATUS

SHORT-WAVE INFRARED DETECTOR ARRAY AND FABRICATION METHODS THEREOF

HEATING DEVICE FOR HEATING OBJECT MATERIAL USING LASER BEAM AND IND...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR...

SEMICONDUCTOR SUBSTRATE CRACK MITIGATION SYSTEMS AND RELATED METHODS

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING