for lift-off processes

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H01L21/0272

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/0272for lift-off processes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Photoresist removal method and photoresist removal system
- Patent number 12,210,288
- Issue date Jan 28, 2025
- Tencent Technology (Shenzhen) Company Limited
- Zhongping Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor structure including complemen...
- Patent number 12,183,585
- Issue date Dec 31, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Kui Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective passivation and selective deposition
- Patent number 12,170,197
- Issue date Dec 17, 2024
- ASM IP Holding B.V.
- Eva E. Tois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and structure for thin-film fabrication
- Patent number 12,165,922
- Issue date Dec 10, 2024
- Jani Oksanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preparing semiconductor device structure having features...
- Patent number 12,154,788
- Issue date Nov 26, 2024
- NANYA TECHNOLOGY CORPORATION
- Kuo-Hui Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,125,703
- Issue date Oct 22, 2024
- Renesas Electronics Corporation
- Shibun Tsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated photoresist removal and laser annealing
- Patent number 12,074,026
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist structure, patterned deposition layer, semiconductor ch...
- Patent number 12,040,188
- Issue date Jul 16, 2024
- Tencent Technology (Shenzhen) Company Limited
- Wenlong Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 11,948,797
- Issue date Apr 2, 2024
- Mitsubishi Electric Corporation
- Takahiro Ueno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Depositing a carbon hardmask by high power pulsed low frequency RF
- Patent number 11,837,441
- Issue date Dec 5, 2023
- Lam Research Corporation
- Matthew Scott Weimer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing gallium oxide Schottky barrier diode with nega...
- Patent number 11,757,048
- Issue date Sep 12, 2023
- THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
- Yuangang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field effect transistor and semiconductor device
- Patent number 11,749,622
- Issue date Sep 5, 2023
- SUMITOMO DEVICE INNOVATIONS, INC.
- Chihoko Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process of forming a high electron mobility transistor including a...
- Patent number 11,710,773
- Issue date Jul 25, 2023
- Sumitomo Electric Industries, Ltd.
- Kenta Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Touch panel and method of manufacturing the same
- Patent number 11,644,931
- Issue date May 9, 2023
- Samsung Display Co., Ltd.
- Ki Hyun Cho
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for forming vias and method for forming contacts in vias
- Patent number 11,581,217
- Issue date Feb 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tzu-Yang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method and coating system
- Patent number 11,550,223
- Issue date Jan 10, 2023
- CHONGQING KONKA PHOTOELECTRIC TECHNOLOGY RESEARCH INSTITUTE CO., LTD.
- Chaochao Xiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film for application to three-dimensional sample, method for manufa...
- Patent number 11,520,232
- Issue date Dec 6, 2022
- Toyota School Foundation
- Minoru Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prism-mask for angled patterning applications
- Patent number 11,506,982
- Issue date Nov 22, 2022
- Intel Corporation
- Vahidreza Parichehreh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitride semiconductor device
- Patent number 11,495,671
- Issue date Nov 8, 2022
- Sumitomo Electric Device Innovations, Inc.
- Takuma Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 11,462,486
- Issue date Oct 4, 2022
- Kabushiki Kaisha Toshiba
- Hitoshi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition of spin-on materials containing metal oxide nanoparticl...
- Patent number 11,421,128
- Issue date Aug 23, 2022
- Merck Patent GmbH
- M. Dalil Rahman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High electron mobility transistor including a gate electrode layer...
- Patent number 11,374,098
- Issue date Jun 28, 2022
- Sumitomo Electric Industries, Ltd.
- Kenta Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating transistor with short gate length by two-step...
- Patent number 11,367,615
- Issue date Jun 21, 2022
- National Chiao Tung University
- Yi Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directed growth of electrically self-contacted monolayer transition...
- Patent number 11,335,556
- Issue date May 17, 2022
- Ohio University
- Eric Stinaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Touch panel and method of manufacturing the same
- Patent number 11,307,721
- Issue date Apr 19, 2022
- SAMSUNG DISPLAY CO., LTD.
- Ki Hyun Cho
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Molecular layer etching
- Patent number 11,257,682
- Issue date Feb 22, 2022
- UChicago Argonne, LLC
- Matthias John Young
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor, array substrate, and method for fabricating t...
- Patent number 11,257,955
- Issue date Feb 22, 2022
- BOE Technology Group Co., Ltd.
- Qinghe Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 11,171,005
- Issue date Nov 9, 2021
- Mitsubishi Electric Corporation
- Kohei Nishiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Backplane for display device and method of manufacturing the same
- Patent number 11,164,932
- Issue date Nov 2, 2021
- Samsung Display Co., Ltd.
- Jaewoo Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable hardmask for overlayer metrology contrast
- Patent number 11,121,024
- Issue date Sep 14, 2021
- International Business Machines Corporation
- Ekmini A. De Silva
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE WITH FEATURES A...
- Publication number 20250014900
- Publication date Jan 9, 2025
- NANYA TECHNOLOGY CORPORATION
- CHIH-TSUNG WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNING USING MONOMER BASED SACRIFICIAL MATERIAL LIFTOFF
- Publication number 20240412973
- Publication date Dec 12, 2024
- BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC
- Nathaniel P. Wyckoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING
- Publication number 20240379356
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING
- Publication number 20240379355
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS
- Publication number 20240376342
- Publication date Nov 14, 2024
- Samsung SDI Co., Ltd.
- Seil CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...
- Publication number 20240363346
- Publication date Oct 31, 2024
- NANYA TECHNOLOGY CORPORATION
- KUO-HUI SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...
- Publication number 20240304444
- Publication date Sep 12, 2024
- NANYA TECHNOLOGY CORPORATION
- KUO-HUI SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...
- Publication number 20240288771
- Publication date Aug 29, 2024
- Samsung Electronics Co., Ltd.
- Ji cheol PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
- Publication number 20240234091
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANDREL-PULL-FIRST INTERCONNECT PATTERNING
- Publication number 20240162087
- Publication date May 16, 2024
- International Business Machines Corporation
- Xiaoming Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
- Publication number 20240136153
- Publication date Apr 25, 2024
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF PATTERNIG SUBSTRATE, PATTERNED SUBSTRATE, A...
- Publication number 20240072127
- Publication date Feb 29, 2024
- MITSUBISHI CHEMICAL CORPORATION
- Hiroshi FUKUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A LIFT-OFF MASK STRUCTURE
- Publication number 20240012327
- Publication date Jan 11, 2024
- ams-Osram AG
- Patrik Pertl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST UNDERLAYER FILM-FORMING COMPOSITION HAVING BENZYLIDENECYANOA...
- Publication number 20230393479
- Publication date Dec 7, 2023
- NISSAN CHEMICAL CORPORATION
- Shun KUBODERA
- C07 - ORGANIC CHEMISTRY
Information Patent Application
INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING
- Publication number 20230377884
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tz-Shian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARD MASK STRUCTURE
- Publication number 20230317452
- Publication date Oct 5, 2023
- NANYA TECHNOLOGY CORPORATION
- Sheng-Fu HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230298889
- Publication date Sep 21, 2023
- RENESAS ELECTRONICS CORPORATION
- Shibun TSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCEMENT-MODE HEMT AND MANUFACTURING PROCESS OF THE SAME
- Publication number 20230246100
- Publication date Aug 3, 2023
- STMicroelectronics S.r.l.
- Ferdinando IUCOLANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE WITH FEATURES A...
- Publication number 20230223261
- Publication date Jul 13, 2023
- NANYA TECHNOLOGY CORPORATION
- CHIH-TSUNG WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...
- Publication number 20230223260
- Publication date Jul 13, 2023
- NANYA TECHNOLOGY CORPORATION
- KUO-HUI SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...
- Publication number 20230223259
- Publication date Jul 13, 2023
- NANYA TECHNOLOGY CORPORATION
- KUO-HUI SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPO...
- Publication number 20230161251
- Publication date May 25, 2023
- Shin-Etsu Chemical Co., Ltd.
- Daisuke KORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST UNDERLAYER FILM-FORMING COMPOSITION WITH SUPPRESSED DEGENERA...
- Publication number 20230131253
- Publication date Apr 27, 2023
- NISSAN CHEMICAL CORPORATION
- Shun KUBODERA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
TUNNELING DEVICE HAVING INTERMEDIATE LAYER USING NATURAL OXIDE FILM...
- Publication number 20230112348
- Publication date Apr 13, 2023
- Korea University Research and Business Foundation
- Hyun Yong YU
- G11 - INFORMATION STORAGE
Information Patent Application
METHOD OF SELECTIVELY ETCHING A METAL COMPONENT
- Publication number 20230008150
- Publication date Jan 12, 2023
- Microsoft Technology Licensing, LLC
- Shivendra UPADHYAY
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR FORMING ELECTRODE
- Publication number 20220392769
- Publication date Dec 8, 2022
- Jusung Engineering Co., Ltd.
- Won Tae CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TOUCH PANEL AND METHOD OF MANUFACTURING THE SAME
- Publication number 20220236829
- Publication date Jul 28, 2022
- SAMSUNG DISPLAY CO., LTD.
- Ki Hyun CHO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON...
- Publication number 20220216037
- Publication date Jul 7, 2022
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220093408
- Publication date Mar 24, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Kui ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST STRUCTURE, PATTERNED DEPOSITION LAYER, SEMICONDUCTOR CH...
- Publication number 20220037148
- Publication date Feb 3, 2022
- TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
- Wenlong ZHANG
- H01 - BASIC ELECTRIC ELEMENTS

for lift-off processes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Photoresist removal method and photoresist removal system

Manufacturing method of semiconductor structure including complemen...

Selective passivation and selective deposition

Method and structure for thin-film fabrication

Method for preparing semiconductor device structure having features...

Method of manufacturing semiconductor device

Integrated photoresist removal and laser annealing

Photoresist structure, patterned deposition layer, semiconductor ch...

Method for manufacturing semiconductor device

Depositing a carbon hardmask by high power pulsed low frequency RF

Method for producing gallium oxide Schottky barrier diode with nega...

Field effect transistor and semiconductor device

Process of forming a high electron mobility transistor including a...

Touch panel and method of manufacturing the same

Method for forming vias and method for forming contacts in vias

Coating method and coating system

Film for application to three-dimensional sample, method for manufa...

Prism-mask for angled patterning applications

Nitride semiconductor device

Semiconductor device and method for manufacturing semiconductor device

Composition of spin-on materials containing metal oxide nanoparticl...

High electron mobility transistor including a gate electrode layer...

Method of fabricating transistor with short gate length by two-step...

Directed growth of electrically self-contacted monolayer transition...

Touch panel and method of manufacturing the same

Molecular layer etching

Thin film transistor, array substrate, and method for fabricating t...

Semiconductor device manufacturing method

Backplane for display device and method of manufacturing the same

Tunable hardmask for overlayer metrology contrast

Patents Applicationslast 30 patents

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE WITH FEATURES A...

PATTERNING USING MONOMER BASED SACRIFICIAL MATERIAL LIFTOFF

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...

SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

MANDREL-PULL-FIRST INTERCONNECT PATTERNING

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

MANUFACTURING METHOD OF PATTERNIG SUBSTRATE, PATTERNED SUBSTRATE, A...

METHOD FOR FORMING A LIFT-OFF MASK STRUCTURE

RESIST UNDERLAYER FILM-FORMING COMPOSITION HAVING BENZYLIDENECYANOA...

INTEGRATED PHOTORESIST REMOVAL AND LASER ANNEALING

HARD MASK STRUCTURE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

ENHANCEMENT-MODE HEMT AND MANUFACTURING PROCESS OF THE SAME

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE WITH FEATURES A...

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...

COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPO...

RESIST UNDERLAYER FILM-FORMING COMPOSITION WITH SUPPRESSED DEGENERA...

TUNNELING DEVICE HAVING INTERMEDIATE LAYER USING NATURAL OXIDE FILM...

METHOD OF SELECTIVELY ETCHING A METAL COMPONENT

METHOD FOR FORMING ELECTRODE

TOUCH PANEL AND METHOD OF MANUFACTURING THE SAME

HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON...

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

PHOTORESIST STRUCTURE, PATTERNED DEPOSITION LAYER, SEMICONDUCTOR CH...