for lift-off processes

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H01L21/0331

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/0331for lift-off processes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and structure for thin-film fabrication
- Patent number 12,165,922
- Issue date Dec 10, 2024
- Jani Oksanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrical devices with electrodes on softening polymers and method...
- Patent number 11,991,836
- Issue date May 21, 2024
- Board of Regents, The University of Texas System
- Romil Modi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate metal formation on gallium nitride or aluminum gallium nitride
- Patent number 11,990,343
- Issue date May 21, 2024
- MACOM Technology Solutions Holdings, Inc.
- Wayne Mack Struble
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 11,948,798
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ching-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plated metallization structures
- Patent number 11,862,518
- Issue date Jan 2, 2024
- Analog Devices International Unlimited Company
- Jan Kubik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrical devices with electrodes on softening polymers and method...
- Patent number 11,596,072
- Issue date Feb 28, 2023
- Board of Regents, The University of Texas System
- Romil Modi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming semiconductor structure having layer with re-entr...
- Patent number 11,551,966
- Issue date Jan 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Shan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molecular layer etching
- Patent number 11,257,682
- Issue date Feb 22, 2022
- UChicago Argonne, LLC
- Matthias John Young
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process of forming nitride semiconductor device
- Patent number 11,145,742
- Issue date Oct 12, 2021
- Sumitomo Electric Industries, Ltd.
- Tomohiro Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor, manufacturing method therefor, array substrat...
- Patent number 11,075,288
- Issue date Jul 27, 2021
- BOE Technology Group Co., Ltd.
- Guoying Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 11,069,528
- Issue date Jul 20, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ching-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reusable support substrate for formation and transfer of semiconduc...
- Patent number 10,910,272
- Issue date Feb 2, 2021
- SanDisk Technologies LLC
- Fei Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming semiconductor structure having layer with re-entr...
- Patent number 10,755,968
- Issue date Aug 25, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Shan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactive ion etching assisted lift-off processes for fabricating th...
- Patent number 10,714,341
- Issue date Jul 14, 2020
- ELPIS TECHNOLOGIES INC.
- Guy M. Cohen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plated metallization structures
- Patent number 10,699,948
- Issue date Jun 30, 2020
- Analog Devices Global Unlimited Company
- Jan Kubik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor element and method of manufacturing the same
- Patent number 10,686,294
- Issue date Jun 16, 2020
- Nichia Corporation
- Yoshihiko Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid diamond-polymer thin film sensors and fabrication method
- Patent number 10,667,709
- Issue date Jun 2, 2020
- Board of Trustees of Michigan State University
- Wen Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid mask for deep etching
- Patent number 10,672,620
- Issue date Jun 2, 2020
- King Abdullah University of Science and Technology
- Mohamed Tarek Ghoneim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and cleaning device using micro/nano-bubbles
- Patent number 10,632,506
- Issue date Apr 28, 2020
- SIGMA-TECHNOLOGY INC.
- Yoshiaki Tachibana
- B08 - CLEANING
Information Patent Grant
Resist multilayer film-attached substrate and patterning process
- Patent number 10,514,605
- Issue date Dec 24, 2019
- International Business Machines Corporation
- Seiichiro Tachibana
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Electrical devices with electrodes on softening polymers and method...
- Patent number 10,485,109
- Issue date Nov 19, 2019
- Board of Regents, The University of Texas System
- Romil Modi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterned sidewall smoothing using a pre-smoothed inverted tone pat...
- Patent number 10,381,463
- Issue date Aug 13, 2019
- International Business Machines Corporation
- Kafai Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Array substrate and manufacturing method for the same
- Patent number 10,204,833
- Issue date Feb 12, 2019
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Longqiang Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for processing a semiconductor workpiece
- Patent number 10,157,765
- Issue date Dec 18, 2018
- Infineon Technologies AG
- Gudrun Stranzl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure having layer with re-entrant profile and me...
- Patent number 10,157,773
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Shan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning device for aligning semiconductor tool and overhead hoi...
- Patent number 10,156,794
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sheng-Kang Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Selective SiARC removal
- Patent number 10,115,591
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Shyam Sridhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface modification process for laser application
- Patent number 9,966,260
- Issue date May 8, 2018
- Apple Inc.
- Clayton Ka Tsun Chan
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
System and method for producing a nano metal mesh using a brittle f...
- Patent number 9,915,002
- Issue date Mar 13, 2018
- Ethan Pfeiffer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Array substrate and manufacturing method for the same
- Patent number 9,905,470
- Issue date Feb 27, 2018
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Longqiang Shi
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
GATE METAL FORMATION ON GALLIUM NITRIDE OR ALUMINUM GALLIUM NITRIDE
- Publication number 20240258110
- Publication date Aug 1, 2024
- MACOM Technology Solutions Holdings, Inc.
- Wayne Mack Struble
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD
- Publication number 20240249942
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL DEVICES WITH ELECTRODES ON SOFTENING POLYMERS AND METHOD...
- Publication number 20240188224
- Publication date Jun 6, 2024
- Board of Regents, The University of Texas System
- Romil Modi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SELECTIVELY ETCHING A METAL COMPONENT
- Publication number 20230420268
- Publication date Dec 28, 2023
- Microsoft Technology Licensing, LLC
- Di XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENTS BY METAL LIFT-OFF P...
- Publication number 20220328312
- Publication date Oct 13, 2022
- KINGRAY TECHNOLOGY CO., LTD.
- Cheng-Hsing Tsou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GATE METAL FORMATION ON GALLIUM NITRIDE OR ALUMINUM GALLIUM NITRIDE
- Publication number 20210407810
- Publication date Dec 30, 2021
- MACOM Technology Solutions Holdings, Inc.
- Wayne Mack Struble
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD
- Publication number 20210343529
- Publication date Nov 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLECULAR LAYER ETCHING
- Publication number 20210098262
- Publication date Apr 1, 2021
- UChicago Argonne, LLC
- Matthias John Young
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SEMICONDUCTOR STRUCTURE HAVING LAYER WITH RE-ENTR...
- Publication number 20200388529
- Publication date Dec 10, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Shan CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATED METALLIZATION STRUCTURES
- Publication number 20200328114
- Publication date Oct 15, 2020
- Analog Devices Global Unlimited Company
- Jan Kubik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD
- Publication number 20200135462
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID MASK FOR DEEP ETCHING
- Publication number 20190385861
- Publication date Dec 19, 2019
- King Abdullah University of Science and Technology
- Mohamed Tarek GHONEIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hybrid Diamond-Polymer Thin Film Sensors And Fabrication Method
- Publication number 20190282110
- Publication date Sep 19, 2019
- Board of Trustees of Michigan State University
- Wen LI
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METHOD OF FORMING SEMICONDUCTOR STRUCTURE HAVING LAYER WITH RE-ENTR...
- Publication number 20190164812
- Publication date May 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Shan CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATED METALLIZATION STRUCTURES
- Publication number 20190148229
- Publication date May 16, 2019
- Analog Devices Global Unlimited Company
- Jan Kubik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective SiARC Removal
- Publication number 20180197730
- Publication date Jul 12, 2018
- TOKYO ELECTRON LIMITED
- Shyam Sridhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Producing a Nano Metal Mesh using a Brittle F...
- Publication number 20180173345
- Publication date Jun 21, 2018
- Ethan Pfeiffer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CLEANING METHOD AND CLEANING DEVICE USING MICRO/NANO-BUBBLES
- Publication number 20180161737
- Publication date Jun 14, 2018
- SIGMA-TECHNOLOGY INC.
- Yoshiaki TACHIBANA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRAY SUBSTRATE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20180151444
- Publication date May 31, 2018
- SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Longqiang SHI
- G02 - OPTICS
Information Patent Application
REACTIVE ION ETCHING ASSISTED LIFT-OFF PROCESSES FOR FABRICATING TH...
- Publication number 20170243743
- Publication date Aug 24, 2017
- International Business Machines Corporation
- Guy M. Cohen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRAY SUBSTRATE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20170186651
- Publication date Jun 29, 2017
- Shenzhen China Star Optoelectronics Technology Co. Ltd.
- Longqiang SHI
- G02 - OPTICS
Information Patent Application
Lift Off Process for Chip Scale Package Solid State Devices on Engi...
- Publication number 20170110314
- Publication date Apr 20, 2017
- Quora Technology, Inc.
- Vladimir Odnoblyudov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PROCESSING A SEMICONDUCTOR WORKPIECE
- Publication number 20170076970
- Publication date Mar 16, 2017
- INFINEON TECHNOLOGIES AG
- Gudrun Stranzl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Masking methods for ALD processes for electrode-based devices
- Publication number 20170025272
- Publication date Jan 26, 2017
- Ultratech, Inc.
- Ritwik Bhatia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY PROCESS FOR THE ENCAPSULATION OF PATTERNED THIN FILM CO...
- Publication number 20170018428
- Publication date Jan 19, 2017
- PIXELTEQ, INC.
- HEATHER LOVELADY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECT AND PRE-PATTERNED SYNTHESIS OF TWO-DIMENSIONAL HETEROSTRUCTURES
- Publication number 20160379822
- Publication date Dec 29, 2016
- THE TRUSTEES OF THE STEVENS INSTITUTE OF TECHNOLOGY
- Eui-Hyeok Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INCREASING PATTERN DENSITY IN SELF-ALIGNED PATTERNING SC...
- Publication number 20160300718
- Publication date Oct 13, 2016
- TOKYO ELECTRON LIMITED
- Angelique D. Raley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING FILM PATTERNS
- Publication number 20160260614
- Publication date Sep 8, 2016
- BOE TECHNOLOGY GROUP CO., LTD.
- Yuqing YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20160079176
- Publication date Mar 17, 2016
- Kabushiki Kaisha Toshiba
- Atsunobu ISOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20150228665
- Publication date Aug 13, 2015
- SAMSUNG DISPLAY CO., LTD.
- Bong- Yeon KIM
- H01 - BASIC ELECTRIC ELEMENTS

for lift-off processes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and structure for thin-film fabrication

Electrical devices with electrodes on softening polymers and method...

Gate metal formation on gallium nitride or aluminum gallium nitride

Semiconductor device and method

Plated metallization structures

Electrical devices with electrodes on softening polymers and method...

Method of forming semiconductor structure having layer with re-entr...

Molecular layer etching

Process of forming nitride semiconductor device

Thin film transistor, manufacturing method therefor, array substrat...

Semiconductor device and method

Reusable support substrate for formation and transfer of semiconduc...

Method of forming semiconductor structure having layer with re-entr...

Reactive ion etching assisted lift-off processes for fabricating th...

Plated metallization structures

Semiconductor element and method of manufacturing the same

Hybrid diamond-polymer thin film sensors and fabrication method

Hybrid mask for deep etching

Cleaning method and cleaning device using micro/nano-bubbles

Resist multilayer film-attached substrate and patterning process

Electrical devices with electrodes on softening polymers and method...

Patterned sidewall smoothing using a pre-smoothed inverted tone pat...

Array substrate and manufacturing method for the same

Methods for processing a semiconductor workpiece

Semiconductor structure having layer with re-entrant profile and me...

Positioning device for aligning semiconductor tool and overhead hoi...

Selective SiARC removal

Surface modification process for laser application

System and method for producing a nano metal mesh using a brittle f...

Array substrate and manufacturing method for the same

Patents Applicationslast 30 patents

GATE METAL FORMATION ON GALLIUM NITRIDE OR ALUMINUM GALLIUM NITRIDE

SEMICONDUCTOR DEVICE AND METHOD

ELECTRICAL DEVICES WITH ELECTRODES ON SOFTENING POLYMERS AND METHOD...

METHOD FOR SELECTIVELY ETCHING A METAL COMPONENT

METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENTS BY METAL LIFT-OFF P...

GATE METAL FORMATION ON GALLIUM NITRIDE OR ALUMINUM GALLIUM NITRIDE

SEMICONDUCTOR DEVICE AND METHOD

MOLECULAR LAYER ETCHING

METHOD OF FORMING SEMICONDUCTOR STRUCTURE HAVING LAYER WITH RE-ENTR...

PLATED METALLIZATION STRUCTURES

SEMICONDUCTOR DEVICE AND METHOD

HYBRID MASK FOR DEEP ETCHING

Hybrid Diamond-Polymer Thin Film Sensors And Fabrication Method

METHOD OF FORMING SEMICONDUCTOR STRUCTURE HAVING LAYER WITH RE-ENTR...

PLATED METALLIZATION STRUCTURES

Selective SiARC Removal

System and Method for Producing a Nano Metal Mesh using a Brittle F...

CLEANING METHOD AND CLEANING DEVICE USING MICRO/NANO-BUBBLES

ARRAY SUBSTRATE AND MANUFACTURING METHOD FOR THE SAME

REACTIVE ION ETCHING ASSISTED LIFT-OFF PROCESSES FOR FABRICATING TH...

ARRAY SUBSTRATE AND MANUFACTURING METHOD FOR THE SAME

Lift Off Process for Chip Scale Package Solid State Devices on Engi...

METHODS FOR PROCESSING A SEMICONDUCTOR WORKPIECE

Masking methods for ALD processes for electrode-based devices

LITHOGRAPHY PROCESS FOR THE ENCAPSULATION OF PATTERNED THIN FILM CO...

DIRECT AND PRE-PATTERNED SYNTHESIS OF TWO-DIMENSIONAL HETEROSTRUCTURES

METHOD FOR INCREASING PATTERN DENSITY IN SELF-ALIGNED PATTERNING SC...

METHOD FOR PREPARING FILM PATTERNS

SEMICONDUCTOR DEVICE

DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME