for micro-electro-mechanical devices

Industry

CPC
H03H9/1057

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Parent Industries

HELECTRICITY H03Electronic circuits H03HIMPEDANCE NETWORKS H03H9/00Networks comprising electromechanical or electro-acoustic devices Electromechanical resonators

Current Industry

H03H9/1057for micro-electro-mechanical devices

Industries

Patents Grantslast 30 patents

Information Patent Grant
Electronic package structure
- Patent number 12,184,266
- Issue date Dec 31, 2024
- Advanced Semiconductor Engineering, Inc.
- Chi Sheng Tseng
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonance device including same
- Patent number 12,170,514
- Issue date Dec 17, 2024
- Murata Manufacturing Co., Ltd.
- Yoshihisa Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metal ribs in electromechanical devices
- Patent number 12,160,219
- Issue date Dec 3, 2024
- Texas Instruments Incorporated
- Anindya Poddar
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonance device and manufacturing method
- Patent number 12,143,095
- Issue date Nov 12, 2024
- Murata Manufacturing Co., Ltd.
- Fumiya Endou
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonance device including the same
- Patent number 12,107,564
- Issue date Oct 1, 2024
- Murata Manufacturing Co., Ltd.
- Keisuke Takeyama
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator with colocated temperature sensor
- Patent number 12,095,447
- Issue date Sep 17, 2024
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 12,081,192
- Issue date Sep 3, 2024
- Stathera IP Holdings, Inc.
- Vamsy P. Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 12,071,342
- Issue date Aug 27, 2024
- Stathera IP Holding, Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator and resonance device including same
- Patent number 11,990,890
- Issue date May 21, 2024
- Murata Manufacturing Co., Ltd.
- Yoshihisa Inoue
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator
- Patent number 11,975,965
- Issue date May 7, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical resonator
- Patent number 11,916,534
- Issue date Feb 27, 2024
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS device having a connection portion formed of a eutectic alloy
- Patent number 11,909,379
- Issue date Feb 20, 2024
- Murata Manufacturing Co., Ltd.
- Yoshihisa Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonance device and manufacturing method of resonance device
- Patent number 11,881,838
- Issue date Jan 23, 2024
- Murata Manufacturing Co., Ltd.
- Kentarou Dehara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonance device
- Patent number 11,876,503
- Issue date Jan 16, 2024
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonance device
- Patent number 11,824,517
- Issue date Nov 21, 2023
- Murata Manufacturing Co., Ltd.
- Ville Kaajakari
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonance device
- Patent number 11,804,820
- Issue date Oct 31, 2023
- Murata Manufacturing Co., Ltd.
- Ryota Kawai
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of forming an integrated resonator with a mass bias
- Patent number 11,799,436
- Issue date Oct 24, 2023
- Texas Instruments Incorporated
- Byron Neville Burgess
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS resonator with co-located temperature sensor
- Patent number 11,770,112
- Issue date Sep 26, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonance device and method for producing resonance device
- Patent number 11,757,425
- Issue date Sep 12, 2023
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator and resonance device
- Patent number 11,750,173
- Issue date Sep 5, 2023
- Murata Manufacturing Co., Ltd.
- Ryota Kawai
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Metal ribs in electromechanical devices
- Patent number 11,736,085
- Issue date Aug 22, 2023
- Texas Instruments Incorporated
- Anindya Poddar
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator
- Patent number 11,724,934
- Issue date Aug 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fused quartz dual shell resonator and method of fabrication
- Patent number 11,703,330
- Issue date Jul 18, 2023
- The Regents of the University of California
- Andrei M. Shkel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical resonator
- Patent number 11,677,379
- Issue date Jun 13, 2023
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 11,664,781
- Issue date May 30, 2023
- STATHERA IP HOLDINGS INC.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor package structure and method of manufacturing the same
- Patent number 11,588,470
- Issue date Feb 21, 2023
- Advanced Semiconductor Engineering, Inc.
- Chi Sheng Tseng
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator
- Patent number 11,584,642
- Issue date Feb 21, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator and resonance device
- Patent number 11,489,512
- Issue date Nov 1, 2022
- Murata Manufacturing Co., Ltd.
- Toshio Nishimura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 11,479,460
- Issue date Oct 25, 2022
- STATHERA IP HOLDINGS INC.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator and resonance device
- Patent number 11,405,016
- Issue date Aug 2, 2022
- Murata Manufacturing Co., Ltd.
- Yoshihisa Inoue
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL RESONATOR
- Publication number 20250007492
- Publication date Jan 2, 2025
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD
- Publication number 20240154598
- Publication date May 9, 2024
- HUAWEI TECHNOLOGIES CO., LTD.
- Guoqiang WU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240128948
- Publication date Apr 18, 2024
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
- Publication number 20240125599
- Publication date Apr 18, 2024
- The Regents of the University of California
- Andrei M. SHKEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
- Publication number 20240056054
- Publication date Feb 15, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Mechanical Resonator Having Out-of-Phase and Out-of-Plane Fle...
- Publication number 20240039500
- Publication date Feb 1, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Hakhamanesh MANSOORZARE
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS RESONATOR
- Publication number 20230416081
- Publication date Dec 28, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METAL RIBS IN ELECTROMECHANICAL DEVICES
- Publication number 20230396230
- Publication date Dec 7, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Anindya PODDAR
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROMECHANICAL RESONATOR WAFER ASSEMBLY AND METHOD OF FABRICATION...
- Publication number 20230359019
- Publication date Nov 9, 2023
- Huawei Technologies Co., Ltd
- Thomas Knieling
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND MANUFACTURING METHOD
- Publication number 20230353122
- Publication date Nov 2, 2023
- Murata Manufacturing Co., Ltd.
- Fumiya ENDOU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20230308076
- Publication date Sep 28, 2023
- Stathera IP Holdings Inc.
- Vamsy P. Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20230283257
- Publication date Sep 7, 2023
- Murata Manufacturing Co., Ltd.
- Ryota KAWAI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
ELECTRONIC PACKAGE STRUCTURE
- Publication number 20230208394
- Publication date Jun 29, 2023
- Advanced Semiconductor Engineering, Inc.
- Chi Sheng TSENG
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS RESONATOR
- Publication number 20230183060
- Publication date Jun 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANCE DEVICE, COLLECTIVE SUBSTRATE, AND RESONANCE DEVICE MANUFA...
- Publication number 20230119602
- Publication date Apr 20, 2023
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20230051438
- Publication date Feb 16, 2023
- Stathera IP Holdings Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20230014350
- Publication date Jan 19, 2023
- Murata Manufacturing Co., Ltd.
- Ville KAAJAKARI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20230015447
- Publication date Jan 19, 2023
- Murata Manufacturing Co., Ltd.
- Ryota KAWAI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD OF MANUFACTURING COLLECTIVE SUBSTRATE AND COLLECTIVE SUBSTRATE
- Publication number 20220368301
- Publication date Nov 17, 2022
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROELECTROMECHANICAL RESONATOR
- Publication number 20220337218
- Publication date Oct 20, 2022
- SiTime Coporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE INCLUDING THE SAME
- Publication number 20220278671
- Publication date Sep 1, 2022
- Murata Manufacturing Co., Ltd.
- Keisuke TAKEYAMA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20220231663
- Publication date Jul 21, 2022
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROELECTROMECHANICAL RESONATOR
- Publication number 20220166403
- Publication date May 26, 2022
- SiTime Coporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20220094332
- Publication date Mar 24, 2022
- Murata Manufacturing Co., Ltd.
- Toshio Nishimura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METAL RIBS IN ELECTROMECHANICAL DEVICES
- Publication number 20220069795
- Publication date Mar 3, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Anindya PODDAR
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE
- Publication number 20220029598
- Publication date Jan 27, 2022
- Murata Manufacturing Co., Ltd.
- Yoshihisa Inoue
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SEMICONDUCTOR PACKAGE STRUCTURE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20210257988
- Publication date Aug 19, 2021
- Advanced Semiconductor Engineering, Inc.
- Chi Sheng TSENG
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE INCLUDING SAME
- Publication number 20210203304
- Publication date Jul 1, 2021
- Murata Manufacturing Co., Ltd.
- Yoshihisa Inoue
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE INCLUDING SAME
- Publication number 20210167754
- Publication date Jun 3, 2021
- Murata Manufacturing Co., Ltd.
- Yoshihisa Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANCE DEVICE
- Publication number 20210159884
- Publication date May 27, 2021
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- H03 - BASIC ELECTRONIC CIRCUITRY

for micro-electro-mechanical devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electronic package structure

Resonator and resonance device including same

Metal ribs in electromechanical devices

Resonance device and manufacturing method

Resonator and resonance device including the same

MEMS resonator with colocated temperature sensor

Methods and devices for microelectromechanical resonators

Methods and devices for microelectromechanical resonators

Resonator and resonance device including same

MEMS resonator

Microelectromechanical resonator

MEMS device having a connection portion formed of a eutectic alloy

Resonance device and manufacturing method of resonance device

Resonance device

Resonator and resonance device

Resonator and resonance device

Method of forming an integrated resonator with a mass bias

MEMS resonator with co-located temperature sensor

Resonance device and method for producing resonance device

Resonator and resonance device

Metal ribs in electromechanical devices

MEMS resonator

Fused quartz dual shell resonator and method of fabrication

Microelectromechanical resonator

Methods and devices for microelectromechanical resonators

Semiconductor package structure and method of manufacturing the same

MEMS resonator

Resonator and resonance device

Methods and devices for microelectromechanical resonators

Resonator and resonance device

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL RESONATOR

MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD

RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME

FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION

Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant

Micro-Mechanical Resonator Having Out-of-Phase and Out-of-Plane Fle...

MEMS RESONATOR

METAL RIBS IN ELECTROMECHANICAL DEVICES

MICROMECHANICAL RESONATOR WAFER ASSEMBLY AND METHOD OF FABRICATION...

RESONANCE DEVICE AND MANUFACTURING METHOD

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

RESONATOR AND RESONANCE DEVICE

ELECTRONIC PACKAGE STRUCTURE

MEMS RESONATOR

RESONANCE DEVICE, COLLECTIVE SUBSTRATE, AND RESONANCE DEVICE MANUFA...

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

RESONATOR AND RESONANCE DEVICE

RESONATOR AND RESONANCE DEVICE

METHOD OF MANUFACTURING COLLECTIVE SUBSTRATE AND COLLECTIVE SUBSTRATE

MICROELECTROMECHANICAL RESONATOR

RESONATOR AND RESONANCE DEVICE INCLUDING THE SAME

RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME

MICROELECTROMECHANICAL RESONATOR

RESONATOR AND RESONANCE DEVICE

METAL RIBS IN ELECTROMECHANICAL DEVICES

RESONANCE DEVICE

SEMICONDUCTOR PACKAGE STRUCTURE AND METHOD OF MANUFACTURING THE SAME

RESONATOR AND RESONANCE DEVICE INCLUDING SAME

RESONATOR AND RESONANCE DEVICE INCLUDING SAME

RESONANCE DEVICE