for microlithography

Industry

CPC
G03F2009/005

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES

Current Industry

G03F2009/005for microlithography

Industries

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 10,859,912
- Issue date Dec 8, 2020
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography apparatus, control method therefor, and method of manuf...
- Patent number 10,583,608
- Issue date Mar 10, 2020
- Canon Kabushiki Kaisha
- Shinichi Hirano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Detection apparatus, pattern forming apparatus, obtaining method, d...
- Patent number 10,545,415
- Issue date Jan 28, 2020
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transfer method and apparatus and computer program product
- Patent number 10,538,017
- Issue date Jan 21, 2020
- Koninklijke Philips N.V.
- Marcus Antonius Verschuuren
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Pattern forming apparatus, mark detecting apparatus, exposure appar...
- Patent number 10,409,173
- Issue date Sep 10, 2019
- Nikon Corporation
- Yuichi Shibazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pattern forming apparatus, mark detecting apparatus, exposure appar...
- Patent number 10,234,773
- Issue date Mar 19, 2019
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,114,300
- Issue date Oct 30, 2018
- ASML Netherlands B.V.
- Henrikus Herman Marie Cox
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Environmental control of systems for photolithography process
- Patent number 10,036,966
- Issue date Jul 31, 2018
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming apparatus, mark detecting apparatus, exposure appar...
- Patent number 9,857,697
- Issue date Jan 2, 2018
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Edge-dominant alignment method in exposure scanner system
- Patent number 9,766,559
- Issue date Sep 19, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Yao Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, and article manufacturing method
- Patent number 9,639,008
- Issue date May 2, 2017
- Canon Kabushiki Kaisha
- Yuichiro Morikuni
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 9,557,657
- Issue date Jan 31, 2017
- Canon Kabushiki Kaisha
- Satoru Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming apparatus, mark detecting apparatus, exposure appar...
- Patent number 9,423,705
- Issue date Aug 23, 2016
- Nikon Corporation
- Yuichi Shibazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pattern forming apparatus, mark detecting apparatus, exposure appar...
- Patent number 8,054,472
- Issue date Nov 8, 2011
- Nikon Corporation
- Yuichi Shibazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
PATTERN FORMING APPARATUS, MARK DETECTING APPARATUS, EXPOSURE APPAR...
- Publication number 20190155175
- Publication date May 23, 2019
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, PATTERN FORMING APPARATUS, OBTAINING METHOD, D...
- Publication number 20180275535
- Publication date Sep 27, 2018
- Canon Kabushiki Kaisha
- Hironobu Fujishima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING APPARATUS, MARK DETECTING APPARATUS, EXPOSURE APPAR...
- Publication number 20170343905
- Publication date Nov 30, 2017
- Nikon Corporation
- Yuichi Shibazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150212435
- Publication date Jul 30, 2015
- ASML NETHERLANDS B.V,
- Henrikus Herman Marie Cox
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20150042969
- Publication date Feb 12, 2015
- Canon Kabushiki Kaisha
- Yuichiro MORIKUNI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140362357
- Publication date Dec 11, 2014
- Satoru Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING APPARATUS, MARK DETECTING APPARATUS, EXPOSURE APPAR...
- Publication number 20140268089
- Publication date Sep 18, 2014
- Nikon Corporation
- Yuichi Shibazaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Pattern forming apparatus, mark detecting apparatus, exposure appar...
- Publication number 20120127479
- Publication date May 24, 2012
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern forming apparatus, mark detecting apparatus, exposure appar...
- Publication number 20080088843
- Publication date Apr 17, 2008
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

for microlithography

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Imprint apparatus, imprint method, and article manufacturing method

Lithography apparatus, control method therefor, and method of manuf...

Detection apparatus, pattern forming apparatus, obtaining method, d...

Transfer method and apparatus and computer program product

Pattern forming apparatus, mark detecting apparatus, exposure appar...

Pattern forming apparatus, mark detecting apparatus, exposure appar...

Lithographic apparatus and device manufacturing method

Environmental control of systems for photolithography process

Pattern forming apparatus, mark detecting apparatus, exposure appar...

Edge-dominant alignment method in exposure scanner system

Lithography apparatus, and article manufacturing method

Exposure apparatus and method of manufacturing article

Pattern forming apparatus, mark detecting apparatus, exposure appar...

Pattern forming apparatus, mark detecting apparatus, exposure appar...

Patents Applicationslast 30 patents

PATTERN FORMING APPARATUS, MARK DETECTING APPARATUS, EXPOSURE APPAR...

DETECTION APPARATUS, PATTERN FORMING APPARATUS, OBTAINING METHOD, D...

PATTERN FORMING APPARATUS, MARK DETECTING APPARATUS, EXPOSURE APPAR...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

PATTERN FORMING APPARATUS, MARK DETECTING APPARATUS, EXPOSURE APPAR...

Pattern forming apparatus, mark detecting apparatus, exposure appar...

Pattern forming apparatus, mark detecting apparatus, exposure appar...