for producing different ions sequentially

Industry

CPC
H01J2237/0827

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0827for producing different ions sequentially

Industries

Patents Grantslast 30 patents

Information Patent Grant
Ion beam apparatus
- Patent number 10,651,006
- Issue date May 12, 2020
- Hitachi High-Tech Science Corporation
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Innovative source assembly for ion beam production
- Patent number 10,651,005
- Issue date May 12, 2020
- FEI Company
- Leon van Kouwen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, apparatuses, systems and software for treatment of a speci...
- Patent number 10,354,836
- Issue date Jul 16, 2019
- IB Labs, Inc.
- Dimitry Boguslavsky
- G01 - MEASURING TESTING
Information Patent Grant
Negative ribbon ion beams from pulsed plasmas
- Patent number 10,290,470
- Issue date May 14, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Daniel Distaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, apparatuses, systems and software for treatment of a speci...
- Patent number 9,911,573
- Issue date Mar 6, 2018
- IB Labs, Inc.
- Dimitry Boguslavsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi species ion source
- Patent number 9,627,174
- Issue date Apr 18, 2017
- FEI Company
- Gregory A. Schwind
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ion source for use with a focused ion beam column with selec...
- Patent number 9,627,169
- Issue date Apr 18, 2017
- FEI Company
- Anthony Graupera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Switchable gas cluster and atomic ion gun, and method of surface pr...
- Patent number 9,478,388
- Issue date Oct 25, 2016
- VG Systems Limited
- Bryan Barnard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-source plasma focused ion beam system
- Patent number 9,401,262
- Issue date Jul 26, 2016
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi species ion source
- Patent number 9,224,569
- Issue date Dec 29, 2015
- FEI Company
- Gregory A. Schwind
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation based emitter profile engineering via process modi...
- Patent number 9,196,489
- Issue date Nov 24, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Vikram Bhosle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and structures for rapid switching between different proces...
- Patent number 9,159,534
- Issue date Oct 13, 2015
- FEI Company
- Anthony Graupera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for improving the bioactivity characteristics of a surface...
- Patent number 9,144,627
- Issue date Sep 29, 2015
- Exogenesis Corporation
- Joseph Khoury
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Multi-source plasma focused ion beam system
- Patent number 9,029,812
- Issue date May 12, 2015
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple nozzle gas cluster ion beam system
- Patent number 8,981,322
- Issue date Mar 17, 2015
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source, nanofabrication apparatus comprising such source, and a...
- Patent number 8,927,942
- Issue date Jan 6, 2015
- Centre National de la Recherche Scientifique-CNRS
- Jacques Gierak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus
- Patent number 8,822,945
- Issue date Sep 2, 2014
- SII NanoTechnology Inc.
- Kenichi Nishinaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively-coupled plasma ion source for use with a focused ion be...
- Patent number 8,822,913
- Issue date Sep 2, 2014
- FEI Company
- Anthony Graupera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source, ion beam processing/observation apparatus, charged part...
- Patent number 8,779,400
- Issue date Jul 15, 2014
- Hitachi High-Technologies Corporation
- Hiroyasu Shichi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-source plasma focused ion beam system
- Patent number 8,692,217
- Issue date Apr 8, 2014
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor structure made using improved multiple ion implantati...
- Patent number 8,652,952
- Issue date Feb 18, 2014
- Corning Incorporated
- Sarko Cherekdjian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and structures for rapid switching between different proces...
- Patent number 8,633,452
- Issue date Jan 21, 2014
- FEI Company
- Anthony Graupera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source, ion beam processing/observation apparatus, charged part...
- Patent number 8,481,980
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Hiroyasu Shichi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-source plasma focused ion beam system
- Patent number 8,405,054
- Issue date Mar 26, 2013
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for modifying the wettability and/or other biocompatibility...
- Patent number 8,377,460
- Issue date Feb 19, 2013
- Exogenesis Corporation
- Joseph Khoury
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Multi mode ion source
- Patent number 8,330,118
- Issue date Dec 11, 2012
- Semequip, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of irradiating substrate with gas cluster ion beam formed fr...
- Patent number 8,304,033
- Issue date Nov 6, 2012
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure made using improved multiple ion implantati...
- Patent number 8,196,546
- Issue date Jun 12, 2012
- Corning Incorporated
- Sarko Cherekdjian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid ion source/multimode ion source
- Patent number 8,193,513
- Issue date Jun 5, 2012
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam system with cleaning apparatus
- Patent number 8,173,980
- Issue date May 8, 2012
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods, Apparatuses, Systems and Software for Treatment of a Speci...
- Publication number 20180174798
- Publication date Jun 21, 2018
- IB LABS, INC.
- Dimitry BOGUSLAVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM
- Publication number 20140312245
- Publication date Oct 23, 2014
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Structures for Rapid Switching Between Different Proces...
- Publication number 20140306607
- Publication date Oct 16, 2014
- FEI Company
- Anthony Graupera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR HIGH RATE HYDROGEN IMPLANTATION AND CO...
- Publication number 20140256121
- Publication date Sep 11, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION BASED EMITTER PROFILE ENGINEERING VIA PROCESS MODI...
- Publication number 20140213014
- Publication date Jul 31, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Vikram Bhosle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source, Nanofabrication Apparatus Comprising Such Source, and a...
- Publication number 20140175301
- Publication date Jun 26, 2014
- UNIVERSITE LYON 1 CLAUDE BERNARD
- Jacques Gierak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi Species Ion Source
- Publication number 20140001372
- Publication date Jan 2, 2014
- FEI Company
- Gregory A. Schwind
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM
- Publication number 20130309421
- Publication date Nov 21, 2013
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION SOURCE, ION BEAM PROCESSING/OBSERVATION APPARATUS, CHARGED PART...
- Publication number 20130284593
- Publication date Oct 31, 2013
- Hiroyasu Shichi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SWITCHABLE GAS CLUSTER AND ATOMIC ION GUN, AND METHOD OF SURFACE PR...
- Publication number 20130180844
- Publication date Jul 18, 2013
- Bryan Barnard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively-Coupled Plasma Ion Source for Use with a Focused Ion Be...
- Publication number 20130140450
- Publication date Jun 6, 2013
- FEI Company
- Anthony Graupera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Structures for Rapid Switching Between Different Proces...
- Publication number 20130015765
- Publication date Jan 17, 2013
- FEI Company
- Anthony Graupera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE MADE USING IMPROVED MULTIPLE ION IMPLANTATI...
- Publication number 20120231616
- Publication date Sep 13, 2012
- Sarko Cherekdjian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF IONIZATION
- Publication number 20120145918
- Publication date Jun 14, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana RADOVANOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURE MADE USING IMPROVED MULTIPLE ION IMPLANTATI...
- Publication number 20120129324
- Publication date May 24, 2012
- Sarko Cherekdjian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Source Plasma Focused Ion Beam System
- Publication number 20120080407
- Publication date Apr 5, 2012
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER TARGET FEED SYSTEM
- Publication number 20120048723
- Publication date Mar 1, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR IMPROVING THE BIOACTIVITY CHARACTERISTICS OF A SURFACE...
- Publication number 20110300599
- Publication date Dec 8, 2011
- Exogenesis Corporation
- Joseph Khoury
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
GAS CLUSTER ION BEAM SYSTEM WITH CLEANING APPARATUS
- Publication number 20110272593
- Publication date Nov 10, 2011
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused ion beam apparatus
- Publication number 20110233401
- Publication date Sep 29, 2011
- Kenichi Nishinaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MODIFYING THE WETTABILITY AND/OR OTHER BIOCOMPATIBILITY...
- Publication number 20100226958
- Publication date Sep 9, 2010
- Exogenesis Corporation
- Joseph Khoury
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
USE OF CHAINED IMPLANTS IN SOLAR CELL
- Publication number 20100197126
- Publication date Aug 5, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas BATEMAN
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD OF FORMING TRENCH ISOLATION USING A MULTIPLE NOZZLE GAS CLUS...
- Publication number 20100193708
- Publication date Aug 5, 2010
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE NOZZLE GAS CLUSTER ION BEAM PROCESSING SYSTEM AND METHOD O...
- Publication number 20100193472
- Publication date Aug 5, 2010
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE NOZZLE GAS CLUSTER ION BEAM SYSTEM
- Publication number 20100193701
- Publication date Aug 5, 2010
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING ULTRA-SHALLOW JUNCTIONS FOR SEMICONDUCTOR DEVICES
- Publication number 20100112795
- Publication date May 6, 2010
- Advanced Technology Materials, Inc.
- Robert KAIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL MODE GAS FIELD ION SOURCE
- Publication number 20100108902
- Publication date May 6, 2010
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- JUERGEN FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM
- Publication number 20090309018
- Publication date Dec 17, 2009
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE
- Publication number 20090309041
- Publication date Dec 17, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Peter Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI MODE ION SOURCE
- Publication number 20090283695
- Publication date Nov 19, 2009
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS

for producing different ions sequentially

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion beam apparatus

Innovative source assembly for ion beam production

Methods, apparatuses, systems and software for treatment of a speci...

Negative ribbon ion beams from pulsed plasmas

Methods, apparatuses, systems and software for treatment of a speci...

Multi species ion source

Plasma ion source for use with a focused ion beam column with selec...

Switchable gas cluster and atomic ion gun, and method of surface pr...

Multi-source plasma focused ion beam system

Multi species ion source

Ion implantation based emitter profile engineering via process modi...

Methods and structures for rapid switching between different proces...

Methods for improving the bioactivity characteristics of a surface...

Multi-source plasma focused ion beam system

Multiple nozzle gas cluster ion beam system

Ion source, nanofabrication apparatus comprising such source, and a...

Focused ion beam apparatus

Inductively-coupled plasma ion source for use with a focused ion be...

Ion source, ion beam processing/observation apparatus, charged part...

Multi-source plasma focused ion beam system

Semiconductor structure made using improved multiple ion implantati...

Methods and structures for rapid switching between different proces...

Ion source, ion beam processing/observation apparatus, charged part...

Multi-source plasma focused ion beam system

Method for modifying the wettability and/or other biocompatibility...

Multi mode ion source

Method of irradiating substrate with gas cluster ion beam formed fr...

Semiconductor structure made using improved multiple ion implantati...

Hybrid ion source/multimode ion source

Gas cluster ion beam system with cleaning apparatus

Patents Applicationslast 30 patents

Methods, Apparatuses, Systems and Software for Treatment of a Speci...

MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM

Methods and Structures for Rapid Switching Between Different Proces...

TECHNIQUES AND APPARATUS FOR HIGH RATE HYDROGEN IMPLANTATION AND CO...

ION IMPLANTATION BASED EMITTER PROFILE ENGINEERING VIA PROCESS MODI...

Ion Source, Nanofabrication Apparatus Comprising Such Source, and a...

Multi Species Ion Source

MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM

ION SOURCE, ION BEAM PROCESSING/OBSERVATION APPARATUS, CHARGED PART...

SWITCHABLE GAS CLUSTER AND ATOMIC ION GUN, AND METHOD OF SURFACE PR...

Inductively-Coupled Plasma Ion Source for Use with a Focused Ion Be...

Methods and Structures for Rapid Switching Between Different Proces...

SEMICONDUCTOR STRUCTURE MADE USING IMPROVED MULTIPLE ION IMPLANTATI...

METHOD OF IONIZATION

SEMICONDUCTOR STRUCTURE MADE USING IMPROVED MULTIPLE ION IMPLANTATI...

Multi-Source Plasma Focused Ion Beam System

SPUTTER TARGET FEED SYSTEM

METHODS FOR IMPROVING THE BIOACTIVITY CHARACTERISTICS OF A SURFACE...

GAS CLUSTER ION BEAM SYSTEM WITH CLEANING APPARATUS

Focused ion beam apparatus

METHOD FOR MODIFYING THE WETTABILITY AND/OR OTHER BIOCOMPATIBILITY...

USE OF CHAINED IMPLANTS IN SOLAR CELL

METHOD OF FORMING TRENCH ISOLATION USING A MULTIPLE NOZZLE GAS CLUS...

MULTIPLE NOZZLE GAS CLUSTER ION BEAM PROCESSING SYSTEM AND METHOD O...

MULTIPLE NOZZLE GAS CLUSTER ION BEAM SYSTEM

METHOD OF FORMING ULTRA-SHALLOW JUNCTIONS FOR SEMICONDUCTOR DEVICES

DUAL MODE GAS FIELD ION SOURCE

MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM

TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE

MULTI MODE ION SOURCE