for relative movement of the substrate and the gas injectors or half-reaction reactor compartments

Industry

CPC
C23C16/45551

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45551for relative movement of the substrate and the gas injectors or half-reaction reactor compartments

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System for continuous atomic layer deposition
- Patent number 12,163,221
- Issue date Dec 10, 2024
- UChicago Argonne, LLC
- Jeffrey W. Elam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for the production of a molecular layer and electronic comp...
- Patent number 12,163,223
- Issue date Dec 10, 2024
- Merck Patent GmbH
- Peer Kirsch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 12,106,941
- Issue date Oct 1, 2024
- Jusung Engineering Co., Ltd.
- Chul-Joo Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and methods using staggered pumping locations
- Patent number 12,060,638
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compact head and compact system for vapor deposition
- Patent number 12,043,894
- Issue date Jul 23, 2024
- Centre National de la Recherche Scientifique
- David Munoz-Rojas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and moisture removal method thereof
- Patent number 12,043,898
- Issue date Jul 23, 2024
- Shibaura Mechatronics Corporation
- Shohei Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing a thin film and a method therefor
- Patent number 12,014,922
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsai-Fu Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition for continuous, high-speed thin films
- Patent number 12,006,570
- Issue date Jun 11, 2024
- UChicago Argonne, LLC
- Jeffrey W. Elam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,993,843
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Seung Wook Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for atomic layer deposition (ALD)
- Patent number 11,970,773
- Issue date Apr 30, 2024
- Beneq Oy
- Matti Malila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,967,500
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma source, microwave plasma processing apparatus and...
- Patent number 11,942,308
- Issue date Mar 26, 2024
- Tokyo Electron Limited
- Yasuaki Taniike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems to modulate film stress
- Patent number 11,887,818
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Tsutomu Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
- Patent number 11,887,856
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 11,887,855
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing of material by spraying precursor using supercritical fluid
- Patent number 11,865,572
- Issue date Jan 9, 2024
- Nova Engineering Films, Inc.
- Sang In Lee
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Deposition apparatus
- Patent number 11,869,798
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 11,837,445
- Issue date Dec 5, 2023
- JUSUNG ENGINEERING CO., LTD.
- Chul-Joo Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuous spatial atomic layer deposition process and apparatus fo...
- Patent number 11,773,487
- Issue date Oct 3, 2023
- ALD NANOSOLUTIONS, INC.
- Joseph Allen Spencer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for depositing of a first and second layer on a s...
- Patent number 11,761,088
- Issue date Sep 19, 2023
- INNOFLEX TECHNOLOGIES B.V.
- Kevin Johannes Hendrikus Lagarde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for a plasma enhanced deposition of material on...
- Patent number 11,725,278
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kun-Mo Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming nucleation layers with halogenated silanes
- Patent number 11,702,742
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nozzle and nozzle head
- Patent number 11,702,745
- Issue date Jul 18, 2023
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,674,225
- Issue date Jun 13, 2023
- Tokyo Electron Limted
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 11,656,126
- Issue date May 23, 2023
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing organic-inorganic laminates
- Patent number 11,639,549
- Issue date May 2, 2023
- BASF Coatings GmbH
- Maraike Ahlf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doped and undoped vanadium oxides for low-k spacer applications
- Patent number 11,621,160
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for atomic layer deposition
- Patent number 11,549,180
- Issue date Jan 10, 2023
- Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
- Diederik Jan Maas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with vacuum pre-loaded deposition head
- Patent number 11,535,935
- Issue date Dec 27, 2022
- Eastman Kodak Company
- Todd Mathew Spath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,530,481
- Issue date Dec 20, 2022
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240401198
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240401199
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND METHODS USING STAGGERED PUMPING LOCATIONS
- Publication number 20240360553
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION HEAD FOR TUBULAR/NON-PLANAR COATINGS
- Publication number 20240360556
- Publication date Oct 31, 2024
- Centre National de la Recherche Scientifique
- David MUNOZ ROJAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITING APPARATUS AND ATOMIC LAYER DEPOSITING METHO...
- Publication number 20240352581
- Publication date Oct 24, 2024
- NEXUSBE CO., LTD
- Hag Young CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...
- Publication number 20240344197
- Publication date Oct 17, 2024
- BENEQ OY
- Markus BOSUND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240263304
- Publication date Aug 8, 2024
- ASM IP HOLDING B.V.
- Seung Wook Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20240055233
- Publication date Feb 15, 2024
- JUSUNG ENGINEERING CO., LTD.
- Chul-Joo HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROLL-TO-ROLL PROCESSING
- Publication number 20240018653
- Publication date Jan 18, 2024
- KALPANA TECHNOLOGIES B.V.
- Diederick Adrianus Spee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS SPATIAL ATOMIC LAYER DEPOSITION PROCESS AND APPARATUS FO...
- Publication number 20230416914
- Publication date Dec 28, 2023
- ALD Nanosolutions, Inc.
- Joseph Allen Spencer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
- Publication number 20230407474
- Publication date Dec 21, 2023
- BENEQ OY
- Mika Jauhiainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING IMPROVED EXHAUST STRUCTURE
- Publication number 20230407477
- Publication date Dec 21, 2023
- ASM IP Holding B.V.
- Wei Chen Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20230402295
- Publication date Dec 14, 2023
- SEMES CO., LTD.
- Ki-Moon KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
- Publication number 20230392256
- Publication date Dec 7, 2023
- BENEQ OY
- Mika Jauhiainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20230374658
- Publication date Nov 23, 2023
- BENEQ OY
- Pekka SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND PROCESS FOR ATOMIC OR MOLECULAR LAYER DEPOSITION ONTO...
- Publication number 20230340665
- Publication date Oct 26, 2023
- DELFT UNIVERSITY OF TECHNOLOGY
- Jan Rudolf VAN OMMEN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ROLL TO ROLL ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20230304153
- Publication date Sep 28, 2023
- BEILab corp.
- Jihyun SEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20230304152
- Publication date Sep 28, 2023
- ADVANCED MATERIALS TECHNOLOGY & ENGINEERING, INC.
- Jun WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20230227974
- Publication date Jul 20, 2023
- Picosun Oy
- Marko PUDAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROLL-TO-ROLL VAPOR DEPOSITION APPARATUS AND METHOD
- Publication number 20230212746
- Publication date Jul 6, 2023
- 3M Innovative Properties Company
- Cedric Bedoya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230134767
- Publication date May 4, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHATRONIC SPATIAL ATOMIC LAYER DEPOSITION SYSTEM WITH CLOSED-LOOP...
- Publication number 20230097272
- Publication date Mar 30, 2023
- The Regents of the University of Michigan
- TAE H. CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230077330
- Publication date Mar 16, 2023
- JUSUNG ENGINEERING CO., LTD.
- ChulJoo HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20230073084
- Publication date Mar 9, 2023
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PERFORMING FILM FORMING PROCESS ON SUBSTRATE, AND MET...
- Publication number 20230069624
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20230068938
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWDER COATING DEVICE
- Publication number 20230037732
- Publication date Feb 9, 2023
- XIAMEN YUNMAO TECHNOLOGY CO., LTD
- YUNYU WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20230005784
- Publication date Jan 5, 2023
- SEMES CO., LTD.
- Gwang Min BU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THE PRODUCTION OF A MOLECULAR LAYER AND ELECTRONIC COMP...
- Publication number 20230002898
- Publication date Jan 5, 2023
- Merck Patent GmbH
- Peer KIRSCH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PERFORMING FILM FORMING PROCESS ON SUBSTRATE AND METH...
- Publication number 20220389582
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

for relative movement of the substrate and the gas injectors or half-reaction reactor compartments

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System for continuous atomic layer deposition

Process for the production of a molecular layer and electronic comp...

Substrate processing device and substrate processing method

Deposition apparatus and methods using staggered pumping locations

Compact head and compact system for vapor deposition

Film formation apparatus and moisture removal method thereof

Apparatus for manufacturing a thin film and a method therefor

Atomic layer deposition for continuous, high-speed thin films

Substrate processing apparatus

Apparatus and method for atomic layer deposition (ALD)

Method of manufacturing semiconductor device, substrate processing...

Microwave plasma source, microwave plasma processing apparatus and...

Methods and systems to modulate film stress

Enhanced spatial ALD of metals through controlled precursor mixing

Methods for depositing fluorine/carbon-free conformal tungsten

Depositing of material by spraying precursor using supercritical fluid

Deposition apparatus

Substrate processing device and substrate processing method

Continuous spatial atomic layer deposition process and apparatus fo...

System and method for depositing of a first and second layer on a s...

Systems and methods for a plasma enhanced deposition of material on...

Methods of forming nucleation layers with halogenated silanes

Nozzle and nozzle head

Substrate processing apparatus

Heat treatment apparatus and temperature control method

Process for producing organic-inorganic laminates

Doped and undoped vanadium oxides for low-k spacer applications

Apparatus and method for atomic layer deposition

Deposition system with vacuum pre-loaded deposition head

Substrate processing apparatus, method of manufacturing semiconduct...

Patents Applicationslast 30 patents

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEPOSITION APPARATUS AND METHODS USING STAGGERED PUMPING LOCATIONS

DEPOSITION HEAD FOR TUBULAR/NON-PLANAR COATINGS

ATOMIC LAYER DEPOSITING APPARATUS AND ATOMIC LAYER DEPOSITING METHO...

AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

ROLL-TO-ROLL PROCESSING

CONTINUOUS SPATIAL ATOMIC LAYER DEPOSITION PROCESS AND APPARATUS FO...

AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD

SUBSTRATE PROCESSING APPARATUS INCLUDING IMPROVED EXHAUST STRUCTURE

METHOD AND APPARATUS FOR TREATING SUBSTRATE

AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD

AN ATOMIC LAYER DEPOSITION APPARATUS

APPARATUS AND PROCESS FOR ATOMIC OR MOLECULAR LAYER DEPOSITION ONTO...

ROLL TO ROLL ATOMIC LAYER DEPOSITION APPARATUS

ALD PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD

ROLL-TO-ROLL VAPOR DEPOSITION APPARATUS AND METHOD

SUBSTRATE PROCESSING APPARATUS

MECHATRONIC SPATIAL ATOMIC LAYER DEPOSITION SYSTEM WITH CLOSED-LOOP...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

APPARATUS FOR PERFORMING FILM FORMING PROCESS ON SUBSTRATE, AND MET...

FILM FORMING APPARATUS AND FILM FORMING METHOD

POWDER COATING DEVICE

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

PROCESS FOR THE PRODUCTION OF A MOLECULAR LAYER AND ELECTRONIC COMP...

APPARATUS FOR PERFORMING FILM FORMING PROCESS ON SUBSTRATE AND METH...