for semi-conductors manufacture

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H05B3/0047

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HELECTRICITY H05Electric techniques H05BELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR H05B3/00Ohmic-resistance heating

Current Industry

H05B3/0047for semi-conductors manufacture

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Light-irradiation heat treatment apparatus
- Patent number 12,219,670
- Issue date Feb 4, 2025
- SCREEN Holdings Co., Ltd.
- Makoto Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lamp filament having a pitch gradient and method of making
- Patent number 12,198,922
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Vilen K. Nestorov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus of light irradiation type and method for c...
- Patent number 12,160,936
- Issue date Dec 3, 2024
- SCREEN Holdings Co., Ltd.
- Kazuhiko Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating platform, thermal treatment and manufacturing method
- Patent number 12,142,497
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 12,125,723
- Issue date Oct 22, 2024
- SCREEN Holdings Co., Ltd.
- Oma Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen injection for arc lamps
- Patent number 12,120,780
- Issue date Oct 15, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, methods, and apparatus for correcting thermal processing o...
- Patent number 12,085,965
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Heater, temperature control system, and processing apparatus
- Patent number 12,085,338
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with thermal processing systems
- Patent number 12,046,489
- Issue date Jul 23, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,042,813
- Issue date Jul 23, 2024
- SCREEN Holdings Co., Ltd.
- Hiroshi Abe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Conical coil for rapid thermal anneal lamps
- Patent number 12,027,388
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Vilen K. Nestorov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature aluminum nitride heater pedestal with multi-zone c...
- Patent number 12,020,956
- Issue date Jun 25, 2024
- Therm-X of California, Inc.
- Annendra Lal
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fluid heating device
- Patent number 11,985,736
- Issue date May 14, 2024
- Kelk Ltd.
- Daisuke Watanabe
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,978,654
- Issue date May 7, 2024
- Semes Co., Ltd.
- Min Sung Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chip, heating circuit and heating control method for chip
- Patent number 11,967,510
- Issue date Apr 23, 2024
- Nuvoton Technology Corporation
- Wei-Hang Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic susceptor
- Patent number 11,963,270
- Issue date Apr 16, 2024
- MiCo Ceramics Ltd.
- Hankyun Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, systems, and methods of measuring edge ring distance for...
- Patent number 11,915,953
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Ole Luckner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation type heat treatment method
- Patent number 11,908,703
- Issue date Feb 20, 2024
- SCREEN Holdings Co., Ltd.
- Mao Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 11,901,200
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light-irradiation thermal treatment apparatus
- Patent number 11,881,420
- Issue date Jan 23, 2024
- SCREEN Holdings Co., Ltd.
- Takahiro Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Consolidated filter arrangement for devices in an RF environment
- Patent number 11,870,252
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatus and methods for alignment of a susceptor
- Patent number 11,859,307
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Edric Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chamber with filament lamps having nonunif...
- Patent number 11,842,908
- Issue date Dec 12, 2023
- ASM IP Holding B.V.
- Shiva K. T. Rajavelu Muralidhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflector plate for substrate processing
- Patent number 11,828,656
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing system with transmission switch plate
- Patent number 11,812,523
- Issue date Nov 7, 2023
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Michael X. Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light irradiation type thermal process apparatus using a gas ring
- Patent number 11,798,823
- Issue date Oct 24, 2023
- SCREEN Holdings Co., Ltd.
- Hiroshi Miyake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,765,793
- Issue date Sep 19, 2023
- Semes Co., Ltd.
- Muhyeon Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing system with temperature non-uniformity control
- Patent number 11,699,603
- Issue date Jul 11, 2023
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Michael X. Yang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate support device, thermal processing apparatus, substrate s...
- Patent number 11,694,920
- Issue date Jul 4, 2023
- SCREEN Holdings Co., Ltd.
- Scott Prengle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation type heat treatment apparatus including oxygen an...
- Patent number 11,621,178
- Issue date Apr 4, 2023
- SCREEN Holdings Co., Ltd.
- Takayuki Aoyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IMPROVED REFLECTOR FOR PROCESS CHAMBER
- Publication number 20250027716
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Raja Murali DHAMODHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND ACCURATE TEMPERATURE MEASUREMENT METHO...
- Publication number 20240426746
- Publication date Dec 26, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Wenyan WANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20240393050
- Publication date Nov 28, 2024
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
- Publication number 20240387203
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Hua Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS
- Publication number 20240363327
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HIGH TEMPERATURE ALUMINUM NITRIDE HEATER PEDESTAL WITH MULTI-ZONE C...
- Publication number 20240347353
- Publication date Oct 17, 2024
- Therm-X of California, Inc.
- Annendra Lal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20240347356
- Publication date Oct 17, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER CLEAN
- Publication number 20240307930
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Wolfgang R. ADERHOLD
- B08 - CLEANING
Information Patent Application
Lamp Housing Braze Improvement for Semiconductor Rapid Thermal Proc...
- Publication number 20240306262
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Yao-Hung YANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240261814
- Publication date Aug 8, 2024
- SCREEN Holdings Co., Ltd.
- Hiroshi ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS
- Publication number 20240248298
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS
- Publication number 20240248297
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTS AND TRANSFER APPARATUS FOR SUBSTRATE DEFORMATION
- Publication number 20240213078
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEMS, AND METHODS OF MEASURING EDGE RING DISTANCE FOR...
- Publication number 20240203766
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Ole LUCKNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFLECTOR PLATE FOR SUBSTRATE PROCESSING
- Publication number 20240175753
- Publication date May 30, 2024
- Applied Materials, Inc.
- Wolfgang R. ADERHOLD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...
- Publication number 20240128096
- Publication date Apr 18, 2024
- SCREEN Holdings Co., Ltd.
- Akitsugu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS
- Publication number 20240105474
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Takahiro KITAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HEATING APPARATUS
- Publication number 20240068748
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- Joohee KIM
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
FLAT SUBSTRATE HEATING APPARAUS USING LASER LIGHT-EMITTING DEVICE
- Publication number 20240071788
- Publication date Feb 29, 2024
- Viatron Co., Ltd.
- Hyoung June Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20240064869
- Publication date Feb 22, 2024
- MICO CERAMICS LTD.
- Hankyun YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIF...
- Publication number 20240055279
- Publication date Feb 15, 2024
- ASM IP HOLDING B.V.
- Shiva K.T. Rajavelu Muralidhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY
- Publication number 20240040672
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Sathya Shrinivas CHARY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL
- Publication number 20240035161
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20240030050
- Publication date Jan 25, 2024
- LAM RESEARCH AG
- Alois GOLLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LAMP HOUSING CRACK DETECTION
- Publication number 20240027295
- Publication date Jan 25, 2024
- Philip MATHEW
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE AND PROCESSING METHOD THEREFOR, AND METHOD FOR...
- Publication number 20230377920
- Publication date Nov 23, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Meng HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SEMICONDUCTOR WAFER PROCESSING USING A RADIANT HEAT CAP...
- Publication number 20230354478
- Publication date Nov 2, 2023
- GLOBALWAFERS CO., LTD.
- Chieh Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT-EMISSION HEAT TREATMENT APPARATUS
- Publication number 20230290654
- Publication date Sep 14, 2023
- SCREEN Holdings Co., Ltd.
- Ryuta TOBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL HEATING DEVICE AND METHOD OF HEATING TREATMENT
- Publication number 20230238259
- Publication date Jul 27, 2023
- Ushio Denki Kabushiki Kaisha
- Tomonori Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH THERMAL PROCESS CHAMBER
- Publication number 20230230859
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Adel George TANNOUS
- H01 - BASIC ELECTRIC ELEMENTS

for semi-conductors manufacture

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Light-irradiation heat treatment apparatus

Lamp filament having a pitch gradient and method of making

Heat treatment apparatus of light irradiation type and method for c...

Heating platform, thermal treatment and manufacturing method

Heat treatment method and heat treatment apparatus

Nitrogen injection for arc lamps

Systems, methods, and apparatus for correcting thermal processing o...

Heater, temperature control system, and processing apparatus

Workpiece processing apparatus with thermal processing systems

Substrate processing method and substrate processing apparatus

Conical coil for rapid thermal anneal lamps

High temperature aluminum nitride heater pedestal with multi-zone c...

Fluid heating device

Substrate processing apparatus

Chip, heating circuit and heating control method for chip

Ceramic susceptor

Apparatus, systems, and methods of measuring edge ring distance for...

Light irradiation type heat treatment method

Light irradiation type heat treatment method and heat treatment app...

Light-irradiation thermal treatment apparatus

Consolidated filter arrangement for devices in an RF environment

Apparatus and methods for alignment of a susceptor

Semiconductor processing chamber with filament lamps having nonunif...

Reflector plate for substrate processing

Thermal processing system with transmission switch plate

Light irradiation type thermal process apparatus using a gas ring

Substrate treating apparatus

Thermal processing system with temperature non-uniformity control

Substrate support device, thermal processing apparatus, substrate s...

Light irradiation type heat treatment apparatus including oxygen an...

Patents Applicationslast 30 patents

IMPROVED REFLECTOR FOR PROCESS CHAMBER

HEAT TREATMENT APPARATUS AND ACCURATE TEMPERATURE MEASUREMENT METHO...

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD

EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS

HIGH TEMPERATURE ALUMINUM NITRIDE HEATER PEDESTAL WITH MULTI-ZONE C...

Workpiece Processing Apparatus with Thermal Processing Systems

PROCESS CHAMBER CLEAN

Lamp Housing Braze Improvement for Semiconductor Rapid Thermal Proc...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS

APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS

SUBSTRATE SUPPORTS AND TRANSFER APPARATUS FOR SUBSTRATE DEFORMATION

APPARATUS, SYSTEMS, AND METHODS OF MEASURING EDGE RING DISTANCE FOR...

REFLECTOR PLATE FOR SUBSTRATE PROCESSING

LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...

LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS

WAFER HEATING APPARATUS

FLAT SUBSTRATE HEATING APPARAUS USING LASER LIGHT-EMITTING DEVICE

CERAMIC SUSCEPTOR

SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIF...

TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY

ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL

APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR LAMP HOUSING CRACK DETECTION

SEMICONDUCTOR DEVICE AND PROCESSING METHOD THEREFOR, AND METHOD FOR...

METHODS FOR SEMICONDUCTOR WAFER PROCESSING USING A RADIANT HEAT CAP...

LIGHT-EMISSION HEAT TREATMENT APPARATUS

OPTICAL HEATING DEVICE AND METHOD OF HEATING TREATMENT

BATCH THERMAL PROCESS CHAMBER