for use with ultraviolet radiation or X-rays

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CPC
G02B5/1838

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Parent Industries

GPHYSICS G02Optics G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS G02B5/00Optical elements other than lenses

Current Industry

G02B5/1838for use with ultraviolet radiation or X-rays

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Aligned and stacked high-aspect ratio metallized structures
- Patent number 12,055,737
- Issue date Aug 6, 2024
- GE Precision Healthcare LLC
- Shubhodeep Goswami
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Optical diffraction component
- Patent number 11,947,265
- Issue date Apr 2, 2024
- Carl Zeiss SMT GmbH
- Heiko Feldmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for fabricating photonic device elements
- Patent number 11,881,408
- Issue date Jan 23, 2024
- Paul Scherrer Institut
- Lucia Romano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wavefront sensor and associated metrology apparatus
- Patent number 11,815,402
- Issue date Nov 14, 2023
- ASML Netherlands B.V.
- Sietse Thijmen Van Der Post
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Diffractive optical element, optical apparatus using the same, and...
- Patent number 11,656,389
- Issue date May 23, 2023
- Canon Kabushiki Kaisha
- Kazuto Kubo
- G02 - OPTICS
Information Patent Grant
Diffractive optical element and method of manufacturing the same
- Patent number 11,204,453
- Issue date Dec 21, 2021
- Canon Kabushiki Kaisha
- Maiko Niwa
- G02 - OPTICS
Information Patent Grant
Structured grating component, imaging system and manufacturing method
- Patent number 11,189,391
- Issue date Nov 30, 2021
- Koninklijke Philips N.V.
- Gereon Vogtmeier
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Beam splitting apparatus
- Patent number 11,112,618
- Issue date Sep 7, 2021
- ASML Netherlands B.V.
- Gosse Charles De Vries
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a microstructure component, microstructure com...
- Patent number 11,039,802
- Issue date Jun 22, 2021
- Siemens Healthcare GmbH
- Andrea Deutinger
- G01 - MEASURING TESTING
Information Patent Grant
X-ray imaging apparatus
- Patent number 10,837,922
- Issue date Nov 17, 2020
- Shimadzu Corporation
- Satoshi Sano
- G02 - OPTICS
Information Patent Grant
Source grating for X-ray imaging
- Patent number 10,835,193
- Issue date Nov 17, 2020
- Koninklijke Philips N.V.
- Thomas Koehler
- G02 - OPTICS
Information Patent Grant
Compact wideband VUV spectrometer
- Patent number 10,753,798
- Issue date Aug 25, 2020
- RnD-ISAN, Ltd
- Dmitriy Borisovich Abramenko
- G01 - MEASURING TESTING
Information Patent Grant
System and method for enhanced treating of matter with engineered a...
- Patent number 10,717,234
- Issue date Jul 21, 2020
- NuSpot Technologies, LLC
- Paolo Batoni
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Membranes for use within a lithographic apparatus and a lithographi...
- Patent number 10,698,312
- Issue date Jun 30, 2020
- ASML Netherlands B.V.
- Pieter-Jan Van Zwol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Grating and radiation imaging device
- Patent number 10,643,759
- Issue date May 5, 2020
- Nuctech Company Limited
- Li Zhang
- G02 - OPTICS
Information Patent Grant
Optical grating and optical assembly for same
- Patent number 10,578,783
- Issue date Mar 3, 2020
- Carl Zeiss SMT GmbH
- Sebastian Brueck
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
EUV collector for use in an EUV projection exposure apparatus
- Patent number 10,578,972
- Issue date Mar 3, 2020
- Carl Zeiss SMT GmbH
- Holger Kierey
- G02 - OPTICS
Information Patent Grant
Diffractive optical element and method of manufacturing the same
- Patent number 10,545,269
- Issue date Jan 28, 2020
- Canon Kabushiki Kaisha
- Maiko Niwa
- G02 - OPTICS
Information Patent Grant
Omnidirectional scattering- and bidirectional phase-sensitivity wit...
- Patent number 10,514,342
- Issue date Dec 24, 2019
- Paul Scherrer Institut
- Matias Kagias
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Dual energy differential phase contrast imaging
- Patent number 10,506,993
- Issue date Dec 17, 2019
- KONINKLIJKE PHILIPS N.V.
- Gerhard Martens
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
EUV Collector
- Patent number 10,503,075
- Issue date Dec 10, 2019
- Carl Zeiss SMT GmbH
- Ingrid Schuster
- G02 - OPTICS
Information Patent Grant
Grating, method for manufacturing grating, and method for recycling...
- Patent number 10,466,414
- Issue date Nov 5, 2019
- Gigaphoton Inc.
- Hirotaka Miyamoto
- G02 - OPTICS
Information Patent Grant
Membranes for use within a lithographic apparatus and a lithographi...
- Patent number 10,228,615
- Issue date Mar 12, 2019
- ASML Netherlands B.V.
- Andrey Alexandrovich Nikipelov
- G02 - OPTICS
Information Patent Grant
Reflector
- Patent number 10,216,101
- Issue date Feb 26, 2019
- ASML Netherlands B.V.
- Han-Kwang Nienhuys
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation beam apparatus
- Patent number 10,168,621
- Issue date Jan 1, 2019
- ASML Netherlands B.V.
- Jeroen Dekkers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask inspection apparatus and mask inspection method
- Patent number 10,156,664
- Issue date Dec 18, 2018
- Lasertec Corporation
- Kiwamu Takehisa
- B08 - CLEANING
Information Patent Grant
Metal grating for X-rays, production method for metal grating for X...
- Patent number 10,153,061
- Issue date Dec 11, 2018
- Konica Minolta, Inc.
- Mitsuru Yokoyama
- G02 - OPTICS
Information Patent Grant
X-ray interferometer
- Patent number 10,074,451
- Issue date Sep 11, 2018
- CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE S.A.—RECHERCHE ET DEVE...
- Christian Kottler
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus, spectral purity filter and device manufactu...
- Patent number 10,001,709
- Issue date Jun 19, 2018
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray computed tomography apparatus, medical image processing appar...
- Patent number 10,001,568
- Issue date Jun 19, 2018
- Toshiba Medical Systems Corporation
- Manabu Teshigawara
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
DIFFRACTION GRATING FOR MEASUREMENTS IN EUV-EXPOSURE APPARATUSES
- Publication number 20240385356
- Publication date Nov 21, 2024
- ASML NETHERLANDS B.V.
- Derick Yun Chek CHONG
- G02 - OPTICS
Information Patent Application
ALIGNED AND STACKED HIGH-ASPECT RATIO METALLIZED STRUCTURES
- Publication number 20230375759
- Publication date Nov 23, 2023
- GE Precision Healthcare LLC
- Shubhodeep Goswami
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
EUV COLLECTOR
- Publication number 20230146235
- Publication date May 11, 2023
- Carl Zeiss SMT GMBH
- Valentin Jonatan Bolsinger
- G02 - OPTICS
Information Patent Application
ULTRAVIOLET-C RADIATION-PROTECTIVE FILMS AND METHODS OF MAKING THE...
- Publication number 20230011730
- Publication date Jan 12, 2023
- 3M Innovative Properties Company
- Timothy J. Hebrink
- G02 - OPTICS
Information Patent Application
CURVED RETICLE BY MECHANICAL AND PHASE BENDING ALONG ORTHOGONAL AXES
- Publication number 20220357666
- Publication date Nov 10, 2022
- Nikon Corporation
- Donis G. Flagello
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING PHOTONIC DEVICE ELEMENTS
- Publication number 20220293427
- Publication date Sep 15, 2022
- PAUL SCHERRER INSTITUT
- Lucia Romano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL ELEMENT ARRAY STRUCTURE FOR BIRD COLLISION PREVENTION AND M...
- Publication number 20220179136
- Publication date Jun 9, 2022
- UIF (UNIVERSITY INDUSTRY FOUNDATION), YONSEI UNIVERSITY
- Jong Souk YEO
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
OPTICAL DIFFRACTION COMPONENT
- Publication number 20220171292
- Publication date Jun 2, 2022
- Carl Zeiss SMT GmbH
- Heiko Feldmann
- G02 - OPTICS
Information Patent Application
WAVEFRONT SENSOR AND ASSOCIATED METROLOGY APPARATUS
- Publication number 20220099498
- Publication date Mar 31, 2022
- ASML NETHERLANDS B.V.
- Sietse Thijmen VAN DER POST
- G02 - OPTICS
Information Patent Application
SWITCHABLE PHASE STEPPING
- Publication number 20220039765
- Publication date Feb 10, 2022
- Koninklijke Philips N.V.
- Roger STEADMAN BOOKER
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
STRUCTURED GRATING COMPONENT, IMAGING SYSTEM AND MANUFACTURING METHOD
- Publication number 20210313086
- Publication date Oct 7, 2021
- Koninklijke Philips N.V.
- GEREON VOGTMEIER
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SYSTEM AND METHOD FOR ENHANCED STEREOLITHOGRAPHY 3D PRINTING
- Publication number 20200209738
- Publication date Jul 2, 2020
- NuSpot Technologies, LLC
- Paolo BATONI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR IMMERSION GRATING LITHOGRAPHY
- Publication number 20200159122
- Publication date May 21, 2020
- Newport Corporation
- Svetlen H. Tonchev
- G02 - OPTICS
Information Patent Application
DIFFRACTIVE OPTICAL ELEMENT AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200103566
- Publication date Apr 2, 2020
- Canon Kabushiki Kaisha
- Maiko Niwa
- G02 - OPTICS
Information Patent Application
DIFFRACTIVE OPTICAL ELEMENT, OPTICAL APPARATUS USING THE SAME, AND...
- Publication number 20200049870
- Publication date Feb 13, 2020
- Canon Kabushiki Kaisha
- Kazuto Kubo
- G02 - OPTICS
Information Patent Application
MOVABLE DIFFRACTION GRATING, EXTERNAL-RESONATOR LASER MODULE, AND M...
- Publication number 20190265396
- Publication date Aug 29, 2019
- HAMAMATSU PHOTONICS K. K.
- Tadataka EDAMURA
- G02 - OPTICS
Information Patent Application
SOURCE GRATING FOR X-RAY IMAGING
- Publication number 20190216416
- Publication date Jul 18, 2019
- Koninklijke Philips N.V.
- Thomas KOEHLER
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR ENHANCED TREATING OF MATTER WITH ENGINEERED A...
- Publication number 20190204482
- Publication date Jul 4, 2019
- NuSpot Technologies, LLC
- Paolo BATONI
- G02 - OPTICS
Information Patent Application
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHI...
- Publication number 20190146332
- Publication date May 16, 2019
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G02 - OPTICS
Information Patent Application
OPTICAL GRATING AND OPTICAL ASSEMBLY FOR SAME
- Publication number 20190137668
- Publication date May 9, 2019
- Carl Zeiss SMT GMBH
- Sebastian BRUECK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
X-RAY IMAGING APPARATUS
- Publication number 20190072503
- Publication date Mar 7, 2019
- Shimadzu Corporation
- Satoshi SANO
- G02 - OPTICS
Information Patent Application
EUV COLLECTOR FOR USE IN AN EUV PROJECTION EXPOSURE APPARATUS
- Publication number 20190033723
- Publication date Jan 31, 2019
- Carl Zeiss SMT GMBH
- Holger Kierey
- G02 - OPTICS
Information Patent Application
RADIATION BEAM APPARATUS
- Publication number 20180314164
- Publication date Nov 1, 2018
- ASML NETHERLANDS B.V.
- Jeroen DEKKERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Beam splitting apparatus
- Publication number 20180252930
- Publication date Sep 6, 2018
- ASML NETHERLANDS B.V.
- Gosse Charles DE VRIES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OMNIDIRECTIONAL SCATTERING- AND BIDIRECTIONAL PHASE-SENSITIVITY WIT...
- Publication number 20180246046
- Publication date Aug 30, 2018
- PAUL SCHERRER INSTITUT
- MATIAS KAGIAS
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
DUAL ENERGY DIFFERENTIAL PHASE CONTRAST IMAGING
- Publication number 20180153486
- Publication date Jun 7, 2018
- Gerhard MARTENS
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
GRATING AND RADIATION IMAGING DEVICE
- Publication number 20180075938
- Publication date Mar 15, 2018
- TSINGHUA UNIVERSITY
- Li ZHANG
- G02 - OPTICS
Information Patent Application
DIFFRACTIVE OPTICAL ELEMENT AND METHOD OF MANUFACTURING THE SAME
- Publication number 20180074239
- Publication date Mar 15, 2018
- Canon Kabushiki Kaisha
- Maiko Niwa
- G02 - OPTICS
Information Patent Application
GRATING, METHOD FOR MANUFACTURING GRATING, AND METHOD FOR RECYCLING...
- Publication number 20170248758
- Publication date Aug 31, 2017
- Gigaphoton Inc.
- Hirotaka MIYAMOTO
- G02 - OPTICS
Information Patent Application
MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD
- Publication number 20170235031
- Publication date Aug 17, 2017
- Lasertec Corporation
- Kiwamu TAKEHISA
- B08 - CLEANING

for use with ultraviolet radiation or X-rays

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Aligned and stacked high-aspect ratio metallized structures

Optical diffraction component

System and method for fabricating photonic device elements

Wavefront sensor and associated metrology apparatus

Diffractive optical element, optical apparatus using the same, and...

Diffractive optical element and method of manufacturing the same

Structured grating component, imaging system and manufacturing method

Beam splitting apparatus

Method for producing a microstructure component, microstructure com...

X-ray imaging apparatus

Source grating for X-ray imaging

Compact wideband VUV spectrometer

System and method for enhanced treating of matter with engineered a...

Membranes for use within a lithographic apparatus and a lithographi...

Grating and radiation imaging device

Optical grating and optical assembly for same

EUV collector for use in an EUV projection exposure apparatus

Diffractive optical element and method of manufacturing the same

Omnidirectional scattering- and bidirectional phase-sensitivity wit...

Dual energy differential phase contrast imaging

EUV Collector

Grating, method for manufacturing grating, and method for recycling...

Membranes for use within a lithographic apparatus and a lithographi...

Reflector

Radiation beam apparatus

Mask inspection apparatus and mask inspection method

Metal grating for X-rays, production method for metal grating for X...

X-ray interferometer

Lithographic apparatus, spectral purity filter and device manufactu...

X-ray computed tomography apparatus, medical image processing appar...

Patents Applicationslast 30 patents

DIFFRACTION GRATING FOR MEASUREMENTS IN EUV-EXPOSURE APPARATUSES

ALIGNED AND STACKED HIGH-ASPECT RATIO METALLIZED STRUCTURES

EUV COLLECTOR

ULTRAVIOLET-C RADIATION-PROTECTIVE FILMS AND METHODS OF MAKING THE...

CURVED RETICLE BY MECHANICAL AND PHASE BENDING ALONG ORTHOGONAL AXES

SYSTEM AND METHOD FOR FABRICATING PHOTONIC DEVICE ELEMENTS

OPTICAL ELEMENT ARRAY STRUCTURE FOR BIRD COLLISION PREVENTION AND M...

OPTICAL DIFFRACTION COMPONENT

WAVEFRONT SENSOR AND ASSOCIATED METROLOGY APPARATUS

SWITCHABLE PHASE STEPPING

STRUCTURED GRATING COMPONENT, IMAGING SYSTEM AND MANUFACTURING METHOD

SYSTEM AND METHOD FOR ENHANCED STEREOLITHOGRAPHY 3D PRINTING

METHOD AND APPARATUS FOR IMMERSION GRATING LITHOGRAPHY

DIFFRACTIVE OPTICAL ELEMENT AND METHOD OF MANUFACTURING THE SAME

DIFFRACTIVE OPTICAL ELEMENT, OPTICAL APPARATUS USING THE SAME, AND...

MOVABLE DIFFRACTION GRATING, EXTERNAL-RESONATOR LASER MODULE, AND M...

SOURCE GRATING FOR X-RAY IMAGING

SYSTEM AND METHOD FOR ENHANCED TREATING OF MATTER WITH ENGINEERED A...

MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHI...

OPTICAL GRATING AND OPTICAL ASSEMBLY FOR SAME

X-RAY IMAGING APPARATUS

EUV COLLECTOR FOR USE IN AN EUV PROJECTION EXPOSURE APPARATUS

RADIATION BEAM APPARATUS

Beam splitting apparatus

OMNIDIRECTIONAL SCATTERING- AND BIDIRECTIONAL PHASE-SENSITIVITY WIT...

DUAL ENERGY DIFFERENTIAL PHASE CONTRAST IMAGING

GRATING AND RADIATION IMAGING DEVICE

DIFFRACTIVE OPTICAL ELEMENT AND METHOD OF MANUFACTURING THE SAME

GRATING, METHOD FOR MANUFACTURING GRATING, AND METHOD FOR RECYCLING...

MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD