from CVD treatment or semi-conductor manufacturing

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CPC
B01D2258/0216

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B01Physical, chemical processing B01DSEPARATION B01D2258/00Sources of waste gases

Current Industry

B01D2258/0216from CVD treatment or semi-conductor manufacturing

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Detoxification device and inlet nozzle
- Patent number 12,303,829
- Issue date May 20, 2025
- Edwards Japan Limited
- Nobuo Mori
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Device and method for cleaning a gas stream
- Patent number 12,303,826
- Issue date May 20, 2025
- DAS Environmental Expert GmbH
- Chang-Guo Hsu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exhaust system with U-shaped pipes
- Patent number 12,276,923
- Issue date Apr 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Vacuum system, low-pressure vacuum process device, and cutoff member
- Patent number 12,191,167
- Issue date Jan 7, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Tao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for treating exhaust fluid from semiconductor man...
- Patent number 12,179,147
- Issue date Dec 31, 2024
- PLAN CO., LTD
- In Cheol Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma abatement system utilizing water vapor and oxygen reagent
- Patent number 12,170,192
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Colin John Dickinson
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Materials, methods, and devices for siloxane contaminant removal
- Patent number 12,151,198
- Issue date Nov 26, 2024
- Donaldson Company, Inc.
- Brian N. Hoang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Piping apparatus having harmful gas treatment device, design method...
- Patent number 12,121,857
- Issue date Oct 22, 2024
- LOT CES CO., LTD.
- Jin Ho Bae
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Catalytic abatement system for semiconductor manufacturing process
- Patent number 12,121,855
- Issue date Oct 22, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin M. Weinstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Waste gas separation and treatment apparatus and control method the...
- Patent number 12,109,530
- Issue date Oct 8, 2024
- DASAN CO., LTD.
- Bong Geum Shin
- B08 - CLEANING
Information Patent Grant
Apparatus for trapping multiple reaction by-products for semiconduc...
- Patent number 12,104,247
- Issue date Oct 1, 2024
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flexible fuel system for combustion abatement
- Patent number 12,076,692
- Issue date Sep 3, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin M. Weinstein
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Retrofittable dry media abatement reactor
- Patent number 12,005,389
- Issue date Jun 11, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin Weinstein
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exhaust system with u-shaped pipes
- Patent number 11,994,809
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
- Patent number 11,970,770
- Issue date Apr 30, 2024
- Jusung Engineering Co., Ltd.
- Dong Won Seo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Carbon dioxide and nitrogen oxides removal system for point of use...
- Patent number 11,931,694
- Issue date Mar 19, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin Weinstein
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods for extracting and recycling ammonia from MOCVD process exh...
- Patent number 11,772,037
- Issue date Oct 3, 2023
- Zhejiang Tiancaiyunji Technology Co., Ltd.
- Lanhai Wang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Gas recovering apparatus, semiconductor manufacturing system, and g...
- Patent number 11,766,635
- Issue date Sep 26, 2023
- Kioxia Corporation
- Yuya Matsubara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Arsine adsorbents
- Patent number 11,745,161
- Issue date Sep 5, 2023
- BASF Corporation
- Artem D. Vityuk
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exhaust gas processing system including adsorbent for suppressing p...
- Patent number 11,738,299
- Issue date Aug 29, 2023
- Samsung Electronics Co., Ltd.
- Suji Gim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exhaust system with u-shaped pipes
- Patent number 11,681,232
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Materials, methods, and devices for siloxane contaminant removal
- Patent number 11,648,501
- Issue date May 16, 2023
- Donaldson Company, Inc.
- Brian N. Hoang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for trapping of reaction by-product having self regenerat...
- Patent number 11,623,175
- Issue date Apr 11, 2023
- MILAEBO CO., LTD.
- Che Hoo Cho
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for treating waste gas of electronics industry
- Patent number 11,590,445
- Issue date Feb 28, 2023
- Dong Soo Kim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for collecting by-product in semiconductor manufacturing...
- Patent number 11,562,943
- Issue date Jan 24, 2023
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt-carbon gas collection apparatus
- Patent number 11,517,847
- Issue date Dec 6, 2022
- J-SOLUTION CO., LTD.
- Seungyong Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Abatement system for pyrophoric chemicals and method of use
- Patent number 11,517,831
- Issue date Dec 6, 2022
- George Andrew Rabroker
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus and method for wet cleaning a gas stream
- Patent number 11,504,670
- Issue date Nov 22, 2022
- DAS Environmental Expert GmbH
- Hermann Mauch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for exhaust gas abatement under reduced pressure and apparat...
- Patent number 11,504,669
- Issue date Nov 22, 2022
- Kanken Techno Co., Ltd.
- Michihiko Yanagisawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods and systems for removing ammonia from a gas mixture
- Patent number 11,491,435
- Issue date Nov 8, 2022
- Entegris, Inc.
- Charles H. Applegarth
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
WET PROCESS AIR ABATEMENT SYSTEM AND METHOD
- Publication number 20250235815
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Chih-Ming Tsao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
WAFER PROCESSING APPARATUS
- Publication number 20250232966
- Publication date Jul 17, 2025
- Hitachi High-Tech Corporation
- Yutaka KADOMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
OPERATING METHOD FOR EXHAUST GAS TREATMENT FACILITY
- Publication number 20250222389
- Publication date Jul 10, 2025
- KURITA WATER INDUSTRIES LTD.
- Shingo Harashima
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT
- Publication number 20250201539
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Colin John DICKINSON
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESS GAS RECYCLING
- Publication number 20250171900
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT
- Publication number 20250166978
- Publication date May 22, 2025
- Applied Materials, Inc.
- Colin John DICKINSON
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS TREATMENT APPARATUS FOR TREATING NITROGEN OXIDE EXHAUST USING O...
- Publication number 20250161872
- Publication date May 22, 2025
- JING YUAN TECHNOLOGY CO., LTD.
- CHING-HUAN SUN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SYSTEM AND METHOD OF ABATING RESIDUAL EFFLUENT GASES
- Publication number 20250121321
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Ryan T. DOWNEY
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COMPACT GAS SEPARATOR DEVICES CO-LOCATED ON SUBSTRATE PROCESSING SY...
- Publication number 20250121320
- Publication date Apr 17, 2025
- LAM RESEARCH CORPORATION
- Aleksey V. ALTECOR
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM
- Publication number 20250114740
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Ryan T. DOWNEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIALS, METHODS, AND DEVICES FOR SILOXANE CONTAMINANT REMOVAL
- Publication number 20250083089
- Publication date Mar 13, 2025
- Donaldson Company, Inc.
- Brian N. Hoang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MECHANISM FOR FILTERING ETCHING BYPRODUCT DURING SEMICONDUCTOR FABR...
- Publication number 20250062105
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- MING-YING PEI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS PROCESSING MODULE, GAS PROCESSING METHOD AND GAS-PHASE ORGANIC...
- Publication number 20250050272
- Publication date Feb 13, 2025
- GREENFILTEC LTD.
- Yi-Hui YU
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST GAS TREATMENTAPPARATUS
- Publication number 20240426524
- Publication date Dec 26, 2024
- CRYO H&I, INC
- Won Kyun YANG
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FULL TEMPERATURE RANGE SIMULATED ROTATED MOVING BED PSA PROCESS FOR...
- Publication number 20240408535
- Publication date Dec 12, 2024
- ZHEJIANG TECHAIRS CLOUD TECHNOLOGIES INC
- YALING ZHONG
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FACILITY FOR TREATING GAS COMPRISING A GAS COOLING APPARATUS
- Publication number 20240382895
- Publication date Nov 21, 2024
- CSK INC.
- Yun Soo Choi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SYSTEM TO COLLECT, RECOVER AND RECYCLE CHEMICAL EXHAUST FROM SEMICO...
- Publication number 20240350962
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
IN LINE WATER SCRUBBER SYSTEM FOR SEMICONDUCTOR PROCESSING
- Publication number 20240347350
- Publication date Oct 17, 2024
- Edwards Vacuum LLC
- Imad Mahawili
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INLET ASSEMBLY
- Publication number 20240337381
- Publication date Oct 10, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INLET NOZZLE ASSEMBLY FOR AN ABATEMENT APPARATUS
- Publication number 20240318816
- Publication date Sep 26, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CATALYST FOR DECOMPOSING PERFLUOROCOMPOUNDS AND METHOD OF PREPARING...
- Publication number 20240316536
- Publication date Sep 26, 2024
- HEESUNG CATALYSTS CORPORATION
- Jong-San Chang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ABATEMENT APPARATUS
- Publication number 20240318817
- Publication date Sep 26, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS FOR COLLECTING BY-PRODUCT FOR SEMICONDUCTOR MANUFACTURING...
- Publication number 20240321595
- Publication date Sep 26, 2024
- MILAEBO CO., LTD.
- Che Hoo CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR ABATEMENT APPARATUS
- Publication number 20240310041
- Publication date Sep 19, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST SYSTEM WITH U-SHAPED PIPES
- Publication number 20240310741
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Fu Lin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INLET NOZZLE ASSEMBLY
- Publication number 20240310040
- Publication date Sep 19, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CARBON BYPRODUCT REMOVAL MODULE, CARBON BYPRODUCT REMOVAL SYSTEM, A...
- Publication number 20240278166
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Song Yi BAEK
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEUTERIUM RECOVERY METHOD AND DEUTERIUM RECOVERY EQUIPMENT
- Publication number 20240239655
- Publication date Jul 18, 2024
- Taiyo Nippon Sanso Corporation
- Naoki KOMURA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SEMICONDUCTOR WASTE GAS TREATMENT SYSTEM AND MOISTURE-GAS SEPARATOR...
- Publication number 20240198272
- Publication date Jun 20, 2024
- HIGHLIGHT TECH CORP.
- TING TSAI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SCRUBBER SYSTEM
- Publication number 20240165559
- Publication date May 23, 2024
- Samsung Electronics Co., Ltd.
- Changseok YOO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

from CVD treatment or semi-conductor manufacturing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Detoxification device and inlet nozzle

Device and method for cleaning a gas stream

Exhaust system with U-shaped pipes

Vacuum system, low-pressure vacuum process device, and cutoff member

System and method for treating exhaust fluid from semiconductor man...

Plasma abatement system utilizing water vapor and oxygen reagent

Materials, methods, and devices for siloxane contaminant removal

Piping apparatus having harmful gas treatment device, design method...

Catalytic abatement system for semiconductor manufacturing process

Waste gas separation and treatment apparatus and control method the...

Apparatus for trapping multiple reaction by-products for semiconduc...

Flexible fuel system for combustion abatement

Retrofittable dry media abatement reactor

Exhaust system with u-shaped pipes

Substrate processing apparatus having exhaust gas decomposer, and e...

Carbon dioxide and nitrogen oxides removal system for point of use...

Methods for extracting and recycling ammonia from MOCVD process exh...

Gas recovering apparatus, semiconductor manufacturing system, and g...

Arsine adsorbents

Exhaust gas processing system including adsorbent for suppressing p...

Exhaust system with u-shaped pipes

Materials, methods, and devices for siloxane contaminant removal

Apparatus for trapping of reaction by-product having self regenerat...

Apparatus for treating waste gas of electronics industry

Apparatus for collecting by-product in semiconductor manufacturing...

Cobalt-carbon gas collection apparatus

Abatement system for pyrophoric chemicals and method of use

Apparatus and method for wet cleaning a gas stream

Method for exhaust gas abatement under reduced pressure and apparat...

Methods and systems for removing ammonia from a gas mixture

Patents Applicationslast 30 patents

WET PROCESS AIR ABATEMENT SYSTEM AND METHOD

WAFER PROCESSING APPARATUS

OPERATING METHOD FOR EXHAUST GAS TREATMENT FACILITY

PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT

PROCESS GAS RECYCLING

PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT

GAS TREATMENT APPARATUS FOR TREATING NITROGEN OXIDE EXHAUST USING O...

SYSTEM AND METHOD OF ABATING RESIDUAL EFFLUENT GASES

COMPACT GAS SEPARATOR DEVICES CO-LOCATED ON SUBSTRATE PROCESSING SY...

COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM

MATERIALS, METHODS, AND DEVICES FOR SILOXANE CONTAMINANT REMOVAL

MECHANISM FOR FILTERING ETCHING BYPRODUCT DURING SEMICONDUCTOR FABR...

GAS PROCESSING MODULE, GAS PROCESSING METHOD AND GAS-PHASE ORGANIC...

EXHAUST GAS TREATMENTAPPARATUS

FULL TEMPERATURE RANGE SIMULATED ROTATED MOVING BED PSA PROCESS FOR...

FACILITY FOR TREATING GAS COMPRISING A GAS COOLING APPARATUS

SYSTEM TO COLLECT, RECOVER AND RECYCLE CHEMICAL EXHAUST FROM SEMICO...

IN LINE WATER SCRUBBER SYSTEM FOR SEMICONDUCTOR PROCESSING

INLET ASSEMBLY

INLET NOZZLE ASSEMBLY FOR AN ABATEMENT APPARATUS

CATALYST FOR DECOMPOSING PERFLUOROCOMPOUNDS AND METHOD OF PREPARING...

ABATEMENT APPARATUS

APPARATUS FOR COLLECTING BY-PRODUCT FOR SEMICONDUCTOR MANUFACTURING...

MODULAR ABATEMENT APPARATUS

EXHAUST SYSTEM WITH U-SHAPED PIPES

INLET NOZZLE ASSEMBLY

CARBON BYPRODUCT REMOVAL MODULE, CARBON BYPRODUCT REMOVAL SYSTEM, A...

DEUTERIUM RECOVERY METHOD AND DEUTERIUM RECOVERY EQUIPMENT

SEMICONDUCTOR WASTE GAS TREATMENT SYSTEM AND MOISTURE-GAS SEPARATOR...

SCRUBBER SYSTEM