from CVD treatment or semi-conductor manufacturing

Industry

CPC
B01D2258/0216

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B01Physical, chemical processing B01DSEPARATION B01D2258/00Sources of waste gases

Current Industry

B01D2258/0216from CVD treatment or semi-conductor manufacturing

Industries

Patents Grantslast 30 patents

Information Patent Grant
Carbon dioxide and nitrogen oxides removal system for point of use...
- Patent number 11,931,694
- Issue date Mar 19, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin Weinstein
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods for extracting and recycling ammonia from MOCVD process exh...
- Patent number 11,772,037
- Issue date Oct 3, 2023
- Zhejiang Tiancaiyunji Technology Co., Ltd.
- Lanhai Wang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Gas recovering apparatus, semiconductor manufacturing system, and g...
- Patent number 11,766,635
- Issue date Sep 26, 2023
- Kioxia Corporation
- Yuya Matsubara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Arsine adsorbents
- Patent number 11,745,161
- Issue date Sep 5, 2023
- BASF Corporation
- Artem D. Vityuk
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exhaust gas processing system including adsorbent for suppressing p...
- Patent number 11,738,299
- Issue date Aug 29, 2023
- Samsung Electronics Co., Ltd.
- Suji Gim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exhaust system with u-shaped pipes
- Patent number 11,681,232
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Materials, methods, and devices for siloxane contaminant removal
- Patent number 11,648,501
- Issue date May 16, 2023
- Donaldson Company, Inc.
- Brian N. Hoang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for trapping of reaction by-product having self regenerat...
- Patent number 11,623,175
- Issue date Apr 11, 2023
- MILAEBO CO., LTD.
- Che Hoo Cho
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for treating waste gas of electronics industry
- Patent number 11,590,445
- Issue date Feb 28, 2023
- Dong Soo Kim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for collecting by-product in semiconductor manufacturing...
- Patent number 11,562,943
- Issue date Jan 24, 2023
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt-carbon gas collection apparatus
- Patent number 11,517,847
- Issue date Dec 6, 2022
- J-SOLUTION CO., LTD.
- Seungyong Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Abatement system for pyrophoric chemicals and method of use
- Patent number 11,517,831
- Issue date Dec 6, 2022
- George Andrew Rabroker
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus and method for wet cleaning a gas stream
- Patent number 11,504,670
- Issue date Nov 22, 2022
- DAS Environmental Expert GmbH
- Hermann Mauch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for exhaust gas abatement under reduced pressure and apparat...
- Patent number 11,504,669
- Issue date Nov 22, 2022
- Kanken Techno Co., Ltd.
- Michihiko Yanagisawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods and systems for removing ammonia from a gas mixture
- Patent number 11,491,435
- Issue date Nov 8, 2022
- Entegris, Inc.
- Charles H. Applegarth
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus having cooling line for collecting by-product in semicond...
- Patent number 11,462,422
- Issue date Oct 4, 2022
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and system for decomposing and oxidizing gaseous pollutant
- Patent number 11,406,934
- Issue date Aug 9, 2022
- SIW Engineering Pte. Ltd.
- Chee-Wei Chan
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
- Patent number 11,371,142
- Issue date Jun 28, 2022
- JUSUNG ENGINEERING CO., LTD.
- Dong Won Seo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus to thermally destruct volatile organic compounds
- Patent number 11,338,243
- Issue date May 24, 2022
- Illinois Tool Works Inc.
- Ronald Seger
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Ultramicro to mesopore frameworks for selective separation and stor...
- Patent number 11,318,409
- Issue date May 3, 2022
- Battelle Memorial Institute
- Praveen K. Thallapally
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Detoxifying device, method of replacing piping section of detoxifyi...
- Patent number 11,198,160
- Issue date Dec 14, 2021
- Ebara Corporation
- Takanori Inada
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Plasma abatement of compounds containing heavy atoms
- Patent number 11,185,815
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas filter
- Patent number 11,154,811
- Issue date Oct 26, 2021
- Entegris, Inc.
- Yuki Nakamura
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for treating exhaust gas in a processing system
- Patent number 11,110,392
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Colin John Dickinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas laser apparatus
- Patent number 11,081,850
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Separated gas stream point of use abatement device
- Patent number 11,077,401
- Issue date Aug 3, 2021
- HIGHVAC CORPORATION
- Philip J. Catalano
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Flow balance control in volatile organic compound (VOC) abatement s...
- Patent number 11,071,940
- Issue date Jul 27, 2021
- Munters Corporation
- Frank Giles
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for collecting by-product in semiconductor manufacturing...
- Patent number 10,987,619
- Issue date Apr 27, 2021
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust system with u-shaped pipes
- Patent number 10,983,447
- Issue date Apr 20, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas laser apparatus
- Patent number 10,971,883
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EXHAUST GAS TREATMENT APPARATUS
- Publication number 20240109026
- Publication date Apr 4, 2024
- EBARA CORPORATION
- Mitsuhiro SHAMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST GAS ABATEMENT SYSTEM
- Publication number 20240109029
- Publication date Apr 4, 2024
- Edwards Vacuum LLC
- Imad Mahawili
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST SYSTEM AND EXHAUST METHOD USING BUFFER
- Publication number 20240109017
- Publication date Apr 4, 2024
- Samsung Electronics Co., Ltd.
- Changseok YOO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
TREATMENT DEVICE FOR SEMICONDUCTOR MANUFACTURING EXHAUST GAS
- Publication number 20240082782
- Publication date Mar 14, 2024
- KANKEN TECHNO CO., LTD.
- Hiroshi IMAMURA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20240066341
- Publication date Feb 29, 2024
- TOKYO ELECTRON LIMITED
- Shinji Kobayashi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESS STOP LOSS REDUCTION SYSTEM THROUGH RAPID REPLACEMENT OF APP...
- Publication number 20240063031
- Publication date Feb 22, 2024
- MILAEBO CO., LTD.
- Che Hoo CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS TREATMENT SYSTEM, SEMICONDUCTOR PROCESS SYSTEM INCLUDING THE SA...
- Publication number 20240042385
- Publication date Feb 8, 2024
- Samsung Electronics Co., Ltd.
- Wonsu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PROCESSING FURNACE AND EXHAUST GAS PROCESSING DEVICE IN WHICH S...
- Publication number 20230417410
- Publication date Dec 28, 2023
- KANKEN TECHNO CO., LTD.
- Hiroshi IMAMURA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS RECOVERY SYSTEMS AND METHODS
- Publication number 20230407470
- Publication date Dec 21, 2023
- RASIRC, Inc.
- Jeffrey J. Spiegelman
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST GAS TREATMENT FACILITY
- Publication number 20230390694
- Publication date Dec 7, 2023
- KURITA WATER INDUSTRIES LTD.
- Shingo Harashima
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
APPARATUS FOR COLLECTING POWDER IN EXHAUST GAS WITH AN INCREASED CO...
- Publication number 20230356126
- Publication date Nov 9, 2023
- CSK INC.
- MyeongHoon Kang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST SYSTEM WITH U-SHAPED PIPES
- Publication number 20230333489
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR CLEANING A GAS STREAM
- Publication number 20230277978
- Publication date Sep 7, 2023
- DAS Environmental Expert GmbH
- Chang-Guo HSU
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEVICE FOR TREATING SEMICONDUCTOR PROCESS EXHAUST GAS
- Publication number 20230271133
- Publication date Aug 31, 2023
- PLASMA SCIENCE SYSTEM CO., LTD.
- Jong Pil YOON
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MATERIALS, METHODS, AND DEVICES FOR SILOXANE CONTAMINANT REMOVAL
- Publication number 20230264135
- Publication date Aug 24, 2023
- Donaldson Company, Inc.
- Brian N. Hoang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS OF MONITORING GAS BYPRODUCTS OF A BONDING SYSTEM, AND RELAT...
- Publication number 20230260953
- Publication date Aug 17, 2023
- KULICKE AND SOFFA INDUSTRIES, INC.
- Matthew B. Wasserman
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS TREATMENT DEVICE AND VACUUM LINE
- Publication number 20230249118
- Publication date Aug 10, 2023
- PFEIFFER VACUUM
- Emmanuel BEAUJON
- G08 - SIGNALLING
Information Patent Application
DRY GAS SCRUBBER
- Publication number 20230219038
- Publication date Jul 13, 2023
- CSK INC.
- JinHong Kim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ABATEMENT APPARATUS FOR EXHAUST GAS
- Publication number 20230201765
- Publication date Jun 29, 2023
- EBARA CORPORATION
- Satoru NAKAMURA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CATALYTIC DECOMPOSITION DEVICE AND INTEGRATED WASTE GAS TREATMENT S...
- Publication number 20230158453
- Publication date May 25, 2023
- Samsung Electronics Co., Ltd.
- Kyeongmin Baek
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LIQUID FILTER APPARATUS WITH THERMAL SHIELD
- Publication number 20230149841
- Publication date May 18, 2023
- Qolibri, Inc.
- Imad Mahawili
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS FOR TREATING GASEOUS POLLUTANTS
- Publication number 20230129169
- Publication date Apr 27, 2023
- ECOSYS PTE. LTD.
- Chee Wei CHAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS FOR TREATING GASEOUS POLLUTANTS
- Publication number 20230124926
- Publication date Apr 20, 2023
- ECOSYS PTE. LTD.
- Chee Wei CHAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS FOR TREATING GASEOUS POLLUTANTS
- Publication number 20230117093
- Publication date Apr 20, 2023
- ECOSYS PTE. LTD.
- Chee Wei CHAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS AND METHOD OF TRAPPING AN EXHAUST MATERIAL FROM A SUBSTRA...
- Publication number 20230068823
- Publication date Mar 2, 2023
- Samsung Electronics Co., Ltd.
- Uihyoung LEE
- B04 - CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL...
Information Patent Application
VACUUM SYSTEM, LOW-PRESSURE VACUUM PROCESS DEVICE, AND CUTOFF MEMBER
- Publication number 20230008620
- Publication date Jan 12, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Tao Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220395776
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Keisuke Tsugao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS FOR TREATING WASTE GAS OF ELECTRONICS INDUSTRY
- Publication number 20220387922
- Publication date Dec 8, 2022
- MAT PLUS Co., Ltd.
- Dong Soo Kim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
OPTIMISING OPERATING CONDITIONS IN AN ABATEMENT APPARATUS
- Publication number 20220362711
- Publication date Nov 17, 2022
- Edwards Limited
- Michael Colin Graham
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS HAVING EXHAUST GAS DECOMPOSER, AND E...
- Publication number 20220220613
- Publication date Jul 14, 2022
- JUSUNG ENGINEERING CO., LTD.
- Dong Won SEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

from CVD treatment or semi-conductor manufacturing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Carbon dioxide and nitrogen oxides removal system for point of use...

Methods for extracting and recycling ammonia from MOCVD process exh...

Gas recovering apparatus, semiconductor manufacturing system, and g...

Arsine adsorbents

Exhaust gas processing system including adsorbent for suppressing p...

Exhaust system with u-shaped pipes

Materials, methods, and devices for siloxane contaminant removal

Apparatus for trapping of reaction by-product having self regenerat...

Apparatus for treating waste gas of electronics industry

Apparatus for collecting by-product in semiconductor manufacturing...

Cobalt-carbon gas collection apparatus

Abatement system for pyrophoric chemicals and method of use

Apparatus and method for wet cleaning a gas stream

Method for exhaust gas abatement under reduced pressure and apparat...

Methods and systems for removing ammonia from a gas mixture

Apparatus having cooling line for collecting by-product in semicond...

Device and system for decomposing and oxidizing gaseous pollutant

Substrate processing apparatus having exhaust gas decomposer, and e...

Methods and apparatus to thermally destruct volatile organic compounds

Ultramicro to mesopore frameworks for selective separation and stor...

Detoxifying device, method of replacing piping section of detoxifyi...

Plasma abatement of compounds containing heavy atoms

Gas filter

Apparatus for treating exhaust gas in a processing system

Gas laser apparatus

Separated gas stream point of use abatement device

Flow balance control in volatile organic compound (VOC) abatement s...

Apparatus for collecting by-product in semiconductor manufacturing...

Exhaust system with u-shaped pipes

Gas laser apparatus

Patents Applicationslast 30 patents

EXHAUST GAS TREATMENT APPARATUS

EXHAUST GAS ABATEMENT SYSTEM

EXHAUST SYSTEM AND EXHAUST METHOD USING BUFFER

TREATMENT DEVICE FOR SEMICONDUCTOR MANUFACTURING EXHAUST GAS

PROCESSING SYSTEM AND PROCESSING METHOD

PROCESS STOP LOSS REDUCTION SYSTEM THROUGH RAPID REPLACEMENT OF APP...

GAS TREATMENT SYSTEM, SEMICONDUCTOR PROCESS SYSTEM INCLUDING THE SA...

GAS PROCESSING FURNACE AND EXHAUST GAS PROCESSING DEVICE IN WHICH S...

GAS RECOVERY SYSTEMS AND METHODS

EXHAUST GAS TREATMENT FACILITY

APPARATUS FOR COLLECTING POWDER IN EXHAUST GAS WITH AN INCREASED CO...

EXHAUST SYSTEM WITH U-SHAPED PIPES

DEVICE AND METHOD FOR CLEANING A GAS STREAM

DEVICE FOR TREATING SEMICONDUCTOR PROCESS EXHAUST GAS

MATERIALS, METHODS, AND DEVICES FOR SILOXANE CONTAMINANT REMOVAL

METHODS OF MONITORING GAS BYPRODUCTS OF A BONDING SYSTEM, AND RELAT...

GAS TREATMENT DEVICE AND VACUUM LINE

DRY GAS SCRUBBER

ABATEMENT APPARATUS FOR EXHAUST GAS

CATALYTIC DECOMPOSITION DEVICE AND INTEGRATED WASTE GAS TREATMENT S...

LIQUID FILTER APPARATUS WITH THERMAL SHIELD

APPARATUS FOR TREATING GASEOUS POLLUTANTS

APPARATUS FOR TREATING GASEOUS POLLUTANTS

APPARATUS FOR TREATING GASEOUS POLLUTANTS

APPARATUS AND METHOD OF TRAPPING AN EXHAUST MATERIAL FROM A SUBSTRA...

VACUUM SYSTEM, LOW-PRESSURE VACUUM PROCESS DEVICE, AND CUTOFF MEMBER

GAS PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR TREATING WASTE GAS OF ELECTRONICS INDUSTRY

OPTIMISING OPERATING CONDITIONS IN AN ABATEMENT APPARATUS

SUBSTRATE PROCESSING APPARATUS HAVING EXHAUST GAS DECOMPOSER, AND E...