from CVD treatment or semi-conductor manufacturing

Industry

CPC
B01D2258/0216

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B01Physical, chemical processing B01DSEPARATION B01D2258/00Sources of waste gases

Current Industry

B01D2258/0216from CVD treatment or semi-conductor manufacturing

Industries

Patents Grantslast 30 patents

Information Patent Grant
Plasma abatement system utilizing water vapor and oxygen reagent
- Patent number 12,170,192
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Colin John Dickinson
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Materials, methods, and devices for siloxane contaminant removal
- Patent number 12,151,198
- Issue date Nov 26, 2024
- Donaldson Company, Inc.
- Brian N. Hoang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Piping apparatus having harmful gas treatment device, design method...
- Patent number 12,121,857
- Issue date Oct 22, 2024
- LOT CES CO., LTD.
- Jin Ho Bae
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Catalytic abatement system for semiconductor manufacturing process
- Patent number 12,121,855
- Issue date Oct 22, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin M. Weinstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Waste gas separation and treatment apparatus and control method the...
- Patent number 12,109,530
- Issue date Oct 8, 2024
- DASAN CO., LTD.
- Bong Geum Shin
- B08 - CLEANING
Information Patent Grant
Apparatus for trapping multiple reaction by-products for semiconduc...
- Patent number 12,104,247
- Issue date Oct 1, 2024
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flexible fuel system for combustion abatement
- Patent number 12,076,692
- Issue date Sep 3, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin M. Weinstein
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Retrofittable dry media abatement reactor
- Patent number 12,005,389
- Issue date Jun 11, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin Weinstein
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exhaust system with u-shaped pipes
- Patent number 11,994,809
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
- Patent number 11,970,770
- Issue date Apr 30, 2024
- Jusung Engineering Co., Ltd.
- Dong Won Seo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Carbon dioxide and nitrogen oxides removal system for point of use...
- Patent number 11,931,694
- Issue date Mar 19, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin Weinstein
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods for extracting and recycling ammonia from MOCVD process exh...
- Patent number 11,772,037
- Issue date Oct 3, 2023
- Zhejiang Tiancaiyunji Technology Co., Ltd.
- Lanhai Wang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Gas recovering apparatus, semiconductor manufacturing system, and g...
- Patent number 11,766,635
- Issue date Sep 26, 2023
- Kioxia Corporation
- Yuya Matsubara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Arsine adsorbents
- Patent number 11,745,161
- Issue date Sep 5, 2023
- BASF Corporation
- Artem D. Vityuk
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exhaust gas processing system including adsorbent for suppressing p...
- Patent number 11,738,299
- Issue date Aug 29, 2023
- Samsung Electronics Co., Ltd.
- Suji Gim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exhaust system with u-shaped pipes
- Patent number 11,681,232
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Materials, methods, and devices for siloxane contaminant removal
- Patent number 11,648,501
- Issue date May 16, 2023
- Donaldson Company, Inc.
- Brian N. Hoang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for trapping of reaction by-product having self regenerat...
- Patent number 11,623,175
- Issue date Apr 11, 2023
- MILAEBO CO., LTD.
- Che Hoo Cho
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for treating waste gas of electronics industry
- Patent number 11,590,445
- Issue date Feb 28, 2023
- Dong Soo Kim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for collecting by-product in semiconductor manufacturing...
- Patent number 11,562,943
- Issue date Jan 24, 2023
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt-carbon gas collection apparatus
- Patent number 11,517,847
- Issue date Dec 6, 2022
- J-SOLUTION CO., LTD.
- Seungyong Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Abatement system for pyrophoric chemicals and method of use
- Patent number 11,517,831
- Issue date Dec 6, 2022
- George Andrew Rabroker
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus and method for wet cleaning a gas stream
- Patent number 11,504,670
- Issue date Nov 22, 2022
- DAS Environmental Expert GmbH
- Hermann Mauch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for exhaust gas abatement under reduced pressure and apparat...
- Patent number 11,504,669
- Issue date Nov 22, 2022
- Kanken Techno Co., Ltd.
- Michihiko Yanagisawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods and systems for removing ammonia from a gas mixture
- Patent number 11,491,435
- Issue date Nov 8, 2022
- Entegris, Inc.
- Charles H. Applegarth
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus having cooling line for collecting by-product in semicond...
- Patent number 11,462,422
- Issue date Oct 4, 2022
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and system for decomposing and oxidizing gaseous pollutant
- Patent number 11,406,934
- Issue date Aug 9, 2022
- SIW Engineering Pte. Ltd.
- Chee-Wei Chan
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
- Patent number 11,371,142
- Issue date Jun 28, 2022
- JUSUNG ENGINEERING CO., LTD.
- Dong Won Seo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus to thermally destruct volatile organic compounds
- Patent number 11,338,243
- Issue date May 24, 2022
- Illinois Tool Works Inc.
- Ronald Seger
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Ultramicro to mesopore frameworks for selective separation and stor...
- Patent number 11,318,409
- Issue date May 3, 2022
- Battelle Memorial Institute
- Praveen K. Thallapally
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
FULL TEMPERATURE RANGE SIMULATED ROTATED MOVING BED PSA PROCESS FOR...
- Publication number 20240408535
- Publication date Dec 12, 2024
- ZHEJIANG TECHAIRS CLOUD TECHNOLOGIES INC
- YALING ZHONG
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FACILITY FOR TREATING GAS COMPRISING A GAS COOLING APPARATUS
- Publication number 20240382895
- Publication date Nov 21, 2024
- CSK INC.
- Yun Soo Choi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SYSTEM TO COLLECT, RECOVER AND RECYCLE CHEMICAL EXHAUST FROM SEMICO...
- Publication number 20240350962
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
IN LINE WATER SCRUBBER SYSTEM FOR SEMICONDUCTOR PROCESSING
- Publication number 20240347350
- Publication date Oct 17, 2024
- Edwards Vacuum LLC
- Imad Mahawili
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INLET ASSEMBLY
- Publication number 20240337381
- Publication date Oct 10, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INLET NOZZLE ASSEMBLY FOR AN ABATEMENT APPARATUS
- Publication number 20240318816
- Publication date Sep 26, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CATALYST FOR DECOMPOSING PERFLUOROCOMPOUNDS AND METHOD OF PREPARING...
- Publication number 20240316536
- Publication date Sep 26, 2024
- HEESUNG CATALYSTS CORPORATION
- Jong-San Chang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ABATEMENT APPARATUS
- Publication number 20240318817
- Publication date Sep 26, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS FOR COLLECTING BY-PRODUCT FOR SEMICONDUCTOR MANUFACTURING...
- Publication number 20240321595
- Publication date Sep 26, 2024
- MILAEBO CO., LTD.
- Che Hoo CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR ABATEMENT APPARATUS
- Publication number 20240310041
- Publication date Sep 19, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST SYSTEM WITH U-SHAPED PIPES
- Publication number 20240310741
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Fu Lin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INLET NOZZLE ASSEMBLY
- Publication number 20240310040
- Publication date Sep 19, 2024
- Edwards Limited
- Andrew James Seeley
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CARBON BYPRODUCT REMOVAL MODULE, CARBON BYPRODUCT REMOVAL SYSTEM, A...
- Publication number 20240278166
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Song Yi BAEK
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEUTERIUM RECOVERY METHOD AND DEUTERIUM RECOVERY EQUIPMENT
- Publication number 20240239655
- Publication date Jul 18, 2024
- Taiyo Nippon Sanso Corporation
- Naoki KOMURA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SEMICONDUCTOR WASTE GAS TREATMENT SYSTEM AND MOISTURE-GAS SEPARATOR...
- Publication number 20240198272
- Publication date Jun 20, 2024
- HIGHLIGHT TECH CORP.
- TING TSAI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SCRUBBER SYSTEM
- Publication number 20240165559
- Publication date May 23, 2024
- Samsung Electronics Co., Ltd.
- Changseok YOO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST GAS TREATMENT APPARATUS
- Publication number 20240109026
- Publication date Apr 4, 2024
- EBARA CORPORATION
- Mitsuhiro SHAMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST GAS ABATEMENT SYSTEM
- Publication number 20240109029
- Publication date Apr 4, 2024
- Edwards Vacuum LLC
- Imad Mahawili
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST SYSTEM AND EXHAUST METHOD USING BUFFER
- Publication number 20240109017
- Publication date Apr 4, 2024
- Samsung Electronics Co., Ltd.
- Changseok YOO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
TREATMENT DEVICE FOR SEMICONDUCTOR MANUFACTURING EXHAUST GAS
- Publication number 20240082782
- Publication date Mar 14, 2024
- KANKEN TECHNO CO., LTD.
- Hiroshi IMAMURA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20240066341
- Publication date Feb 29, 2024
- TOKYO ELECTRON LIMITED
- Shinji Kobayashi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESS STOP LOSS REDUCTION SYSTEM THROUGH RAPID REPLACEMENT OF APP...
- Publication number 20240063031
- Publication date Feb 22, 2024
- MILAEBO CO., LTD.
- Che Hoo CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS TREATMENT SYSTEM, SEMICONDUCTOR PROCESS SYSTEM INCLUDING THE SA...
- Publication number 20240042385
- Publication date Feb 8, 2024
- Samsung Electronics Co., Ltd.
- Wonsu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PROCESSING FURNACE AND EXHAUST GAS PROCESSING DEVICE IN WHICH S...
- Publication number 20230417410
- Publication date Dec 28, 2023
- KANKEN TECHNO CO., LTD.
- Hiroshi IMAMURA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS RECOVERY SYSTEMS AND METHODS
- Publication number 20230407470
- Publication date Dec 21, 2023
- RASIRC, Inc.
- Jeffrey J. Spiegelman
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST GAS TREATMENT FACILITY
- Publication number 20230390694
- Publication date Dec 7, 2023
- KURITA WATER INDUSTRIES LTD.
- Shingo Harashima
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
APPARATUS FOR COLLECTING POWDER IN EXHAUST GAS WITH AN INCREASED CO...
- Publication number 20230356126
- Publication date Nov 9, 2023
- CSK INC.
- MyeongHoon Kang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EXHAUST SYSTEM WITH U-SHAPED PIPES
- Publication number 20230333489
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR CLEANING A GAS STREAM
- Publication number 20230277978
- Publication date Sep 7, 2023
- DAS Environmental Expert GmbH
- Chang-Guo HSU
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEVICE FOR TREATING SEMICONDUCTOR PROCESS EXHAUST GAS
- Publication number 20230271133
- Publication date Aug 31, 2023
- PLASMA SCIENCE SYSTEM CO., LTD.
- Jong Pil YOON
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

from CVD treatment or semi-conductor manufacturing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma abatement system utilizing water vapor and oxygen reagent

Materials, methods, and devices for siloxane contaminant removal

Piping apparatus having harmful gas treatment device, design method...

Catalytic abatement system for semiconductor manufacturing process

Waste gas separation and treatment apparatus and control method the...

Apparatus for trapping multiple reaction by-products for semiconduc...

Flexible fuel system for combustion abatement

Retrofittable dry media abatement reactor

Exhaust system with u-shaped pipes

Substrate processing apparatus having exhaust gas decomposer, and e...

Carbon dioxide and nitrogen oxides removal system for point of use...

Methods for extracting and recycling ammonia from MOCVD process exh...

Gas recovering apparatus, semiconductor manufacturing system, and g...

Arsine adsorbents

Exhaust gas processing system including adsorbent for suppressing p...

Exhaust system with u-shaped pipes

Materials, methods, and devices for siloxane contaminant removal

Apparatus for trapping of reaction by-product having self regenerat...

Apparatus for treating waste gas of electronics industry

Apparatus for collecting by-product in semiconductor manufacturing...

Cobalt-carbon gas collection apparatus

Abatement system for pyrophoric chemicals and method of use

Apparatus and method for wet cleaning a gas stream

Method for exhaust gas abatement under reduced pressure and apparat...

Methods and systems for removing ammonia from a gas mixture

Apparatus having cooling line for collecting by-product in semicond...

Device and system for decomposing and oxidizing gaseous pollutant

Substrate processing apparatus having exhaust gas decomposer, and e...

Methods and apparatus to thermally destruct volatile organic compounds

Ultramicro to mesopore frameworks for selective separation and stor...

Patents Applicationslast 30 patents

FULL TEMPERATURE RANGE SIMULATED ROTATED MOVING BED PSA PROCESS FOR...

FACILITY FOR TREATING GAS COMPRISING A GAS COOLING APPARATUS

SYSTEM TO COLLECT, RECOVER AND RECYCLE CHEMICAL EXHAUST FROM SEMICO...

IN LINE WATER SCRUBBER SYSTEM FOR SEMICONDUCTOR PROCESSING

INLET ASSEMBLY

INLET NOZZLE ASSEMBLY FOR AN ABATEMENT APPARATUS

CATALYST FOR DECOMPOSING PERFLUOROCOMPOUNDS AND METHOD OF PREPARING...

ABATEMENT APPARATUS

APPARATUS FOR COLLECTING BY-PRODUCT FOR SEMICONDUCTOR MANUFACTURING...

MODULAR ABATEMENT APPARATUS

EXHAUST SYSTEM WITH U-SHAPED PIPES

INLET NOZZLE ASSEMBLY

CARBON BYPRODUCT REMOVAL MODULE, CARBON BYPRODUCT REMOVAL SYSTEM, A...

DEUTERIUM RECOVERY METHOD AND DEUTERIUM RECOVERY EQUIPMENT

SEMICONDUCTOR WASTE GAS TREATMENT SYSTEM AND MOISTURE-GAS SEPARATOR...

SCRUBBER SYSTEM

EXHAUST GAS TREATMENT APPARATUS

EXHAUST GAS ABATEMENT SYSTEM

EXHAUST SYSTEM AND EXHAUST METHOD USING BUFFER

TREATMENT DEVICE FOR SEMICONDUCTOR MANUFACTURING EXHAUST GAS

PROCESSING SYSTEM AND PROCESSING METHOD

PROCESS STOP LOSS REDUCTION SYSTEM THROUGH RAPID REPLACEMENT OF APP...

GAS TREATMENT SYSTEM, SEMICONDUCTOR PROCESS SYSTEM INCLUDING THE SA...

GAS PROCESSING FURNACE AND EXHAUST GAS PROCESSING DEVICE IN WHICH S...

GAS RECOVERY SYSTEMS AND METHODS

EXHAUST GAS TREATMENT FACILITY

APPARATUS FOR COLLECTING POWDER IN EXHAUST GAS WITH AN INCREASED CO...

EXHAUST SYSTEM WITH U-SHAPED PIPES

DEVICE AND METHOD FOR CLEANING A GAS STREAM

DEVICE FOR TREATING SEMICONDUCTOR PROCESS EXHAUST GAS