from CVD treatment or semi-conductor manufacturing

Industry

CPC
B01D2258/0216

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B01Physical, chemical processing B01DSEPARATION B01D2258/00Sources of waste gases

Current Industry

B01D2258/0216from CVD treatment or semi-conductor manufacturing

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for collecting by-product in semiconductor manufacturing...
- Patent number 11,562,943
- Issue date Jan 24, 2023
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt-carbon gas collection apparatus
- Patent number 11,517,847
- Issue date Dec 6, 2022
- J-SOLUTION CO., LTD.
- Seungyong Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Abatement system for pyrophoric chemicals and method of use
- Patent number 11,517,831
- Issue date Dec 6, 2022
- George Andrew Rabroker
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus and method for wet cleaning a gas stream
- Patent number 11,504,670
- Issue date Nov 22, 2022
- DAS Environmental Expert GmbH
- Hermann Mauch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for exhaust gas abatement under reduced pressure and apparat...
- Patent number 11,504,669
- Issue date Nov 22, 2022
- Kanken Techno Co., Ltd.
- Michihiko Yanagisawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods and systems for removing ammonia from a gas mixture
- Patent number 11,491,435
- Issue date Nov 8, 2022
- Entegris, Inc.
- Charles H. Applegarth
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus having cooling line for collecting by-product in semicond...
- Patent number 11,462,422
- Issue date Oct 4, 2022
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and system for decomposing and oxidizing gaseous pollutant
- Patent number 11,406,934
- Issue date Aug 9, 2022
- SIW Engineering Pte. Ltd.
- Chee-Wei Chan
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
- Patent number 11,371,142
- Issue date Jun 28, 2022
- JUSUNG ENGINEERING CO., LTD.
- Dong Won Seo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus to thermally destruct volatile organic compounds
- Patent number 11,338,243
- Issue date May 24, 2022
- Illinois Tool Works Inc.
- Ronald Seger
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Ultramicro to mesopore frameworks for selective separation and stor...
- Patent number 11,318,409
- Issue date May 3, 2022
- Battelle Memorial Institute
- Praveen K. Thallapally
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Detoxifying device, method of replacing piping section of detoxifyi...
- Patent number 11,198,160
- Issue date Dec 14, 2021
- Ebara Corporation
- Takanori Inada
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Plasma abatement of compounds containing heavy atoms
- Patent number 11,185,815
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas filter
- Patent number 11,154,811
- Issue date Oct 26, 2021
- Entegris, Inc.
- Yuki Nakamura
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for treating exhaust gas in a processing system
- Patent number 11,110,392
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Colin John Dickinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas laser apparatus
- Patent number 11,081,850
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Separated gas stream point of use abatement device
- Patent number 11,077,401
- Issue date Aug 3, 2021
- HIGHVAC CORPORATION
- Philip J. Catalano
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Flow balance control in volatile organic compound (VOC) abatement s...
- Patent number 11,071,940
- Issue date Jul 27, 2021
- Munters Corporation
- Frank Giles
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for collecting by-product in semiconductor manufacturing...
- Patent number 10,987,619
- Issue date Apr 27, 2021
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust system with u-shaped pipes
- Patent number 10,983,447
- Issue date Apr 20, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas laser apparatus
- Patent number 10,971,883
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and system for decomposing and oxidizing gaseous pollutant
- Patent number 10,946,334
- Issue date Mar 16, 2021
- SIW Engineering Pte. Ltd.
- Chee-Wei Chan
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Device and system for decomposing and oxidizing gaseous pollutant
- Patent number 10,898,853
- Issue date Jan 26, 2021
- SIW Engineering Pte. Ltd.
- Chee-Wei Chan
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Ozone abatement method for semiconductor manufacturing system
- Patent number 10,894,229
- Issue date Jan 19, 2021
- International Business Machines Corporation
- Edward L. Pepe
- F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 10,867,820
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Tsutomu Sakurabayashi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for collection and subsequent reaction of liquid and soli...
- Patent number 10,861,681
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- James L'Heureux
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Device and system for decomposing and oxidizing gaseous pollutant
- Patent number 10,814,271
- Issue date Oct 27, 2020
- SIW Engineering Pte. Ltd.
- Chee-Wei Chan
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
High purity gas purifier
- Patent number 10,786,776
- Issue date Sep 29, 2020
- Entegris, Inc.
- Stenio da Costa Pereira
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods for treating exhaust gas in a processing system
- Patent number 10,722,840
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Colin John Dickinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Abatement system
- Patent number 10,702,824
- Issue date Jul 7, 2020
- Edwards Limited
- Gary Peter Knight
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
VACUUM SYSTEM, LOW-PRESSURE VACUUM PROCESS DEVICE, AND CUTOFF MEMBER
- Publication number 20230008620
- Publication date Jan 12, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Tao Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220395776
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Keisuke Tsugao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS FOR TREATING WASTE GAS OF ELECTRONICS INDUSTRY
- Publication number 20220387922
- Publication date Dec 8, 2022
- MAT PLUS Co., Ltd.
- Dong Soo Kim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
OPTIMISING OPERATING CONDITIONS IN AN ABATEMENT APPARATUS
- Publication number 20220362711
- Publication date Nov 17, 2022
- Edwards Limited
- Michael Colin Graham
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS HAVING EXHAUST GAS DECOMPOSER, AND E...
- Publication number 20220220613
- Publication date Jul 14, 2022
- JUSUNG ENGINEERING CO., LTD.
- Dong Won SEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Waste Gas Separation and Treatment Apparatus and Control Method The...
- Publication number 20220203299
- Publication date Jun 30, 2022
- BONG GEUM SHIN
- B08 - CLEANING
Information Patent Application
COBALT-CARBON GAS COLLECTION APPARATUS
- Publication number 20220203289
- Publication date Jun 30, 2022
- J-SOLUTION CO., LTD.
- Seungyong LEE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
HIGH EFFICIENCY TRAP FOR PARTICLE COLLECTION IN A VACUUM FORELINE
- Publication number 20220199380
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- James L'HEUREUX
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
TRAP FILTER SYSTEM FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20220112598
- Publication date Apr 14, 2022
- Intel Corporation
- Subramani IYER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR TREATING EXHAUST FLUID FROM SEMICONDUCTOR MAN...
- Publication number 20220097000
- Publication date Mar 31, 2022
- PLAN CO., LTD
- In Cheol Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS RECOVERING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM, AND G...
- Publication number 20220072473
- Publication date Mar 10, 2022
- KIOXIA Corporation
- Yuya MATSUBARA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
VACUUM GENERATION PROCESS FOR DEPOSITION OF BIOMEDICAL IMPLANT MATE...
- Publication number 20210402351
- Publication date Dec 30, 2021
- Zimmer, Inc.
- Edward M. Willis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR MOCVD EFFLUENT ABATEMENT
- Publication number 20210260525
- Publication date Aug 26, 2021
- UTICA LEASECO, LLC
- Gang HE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PIPING APPARATUS HAVING HARMFUL GAS TREATMENT DEVICE, DESIGN METHOD...
- Publication number 20210245098
- Publication date Aug 12, 2021
- LOT CES CO., LTD.
- Jin Ho BAE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DETOXIFICATION DEVICE AND INLET NOZZLE
- Publication number 20210245093
- Publication date Aug 12, 2021
- Edwards Japan Limited
- Nobuo Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Exhaust System with U-Shaped Pipes
- Publication number 20210232054
- Publication date Jul 29, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Fu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARSINE ADSORBENTS
- Publication number 20210178358
- Publication date Jun 17, 2021
- BASF Corporation
- Artem D. Vityuk
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS HAVING COOLING LINE FOR COLLECTING BY-PRODUCT IN SEMICOND...
- Publication number 20210134701
- Publication date May 6, 2021
- MILAEBO CO., LTD.
- Che Hoo CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND SYSTEM FOR DECOMPOSING AND OXIDIZING GASEOUS POLLUTANT
- Publication number 20210121823
- Publication date Apr 29, 2021
- SIW ENGINEERING PTE. LTD.
- Chee-Wei CHAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ABATEMENT SYSTEM FOR PYROPHORIC CHEMICALS AND METHOD OF USE
- Publication number 20200406162
- Publication date Dec 31, 2020
- Basis-Solutions, LLC
- George Andrew Rabroker
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS AND SYSTEMS FOR REMOVING AMMONIA FROM A GAS MIXTURE
- Publication number 20200368668
- Publication date Nov 26, 2020
- Entegris, Inc.
- Charles H. APPLEGARTH
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT
- Publication number 20200357615
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Colin John DICKINSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIALS, METHODS, AND DEVICES FOR SILOXANE CONTAMINANT REMOVAL
- Publication number 20200324243
- Publication date Oct 15, 2020
- Donaldson Company, Inc.
- Brian N. Hoang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVED WASTE GAS ABATEMENT
- Publication number 20200309367
- Publication date Oct 1, 2020
- ALZETA CORPORATION
- Michael J. SILBERSTEIN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS LASER APPARATUS
- Publication number 20200244029
- Publication date Jul 30, 2020
- Gigaphoton Inc.
- Natsushi SUZUKI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEVICE AND SYSTEM FOR DECOMPOSING AND OXIDIZING GASEOUS POLLUTANT
- Publication number 20200164309
- Publication date May 28, 2020
- SIW ENGINEERING PTE. LTD.
- Chee-Wei CHAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEVICE AND SYSTEM FOR DECOMPOSING AND OXIDIZING GASEOUS POLLUTANT
- Publication number 20200139300
- Publication date May 7, 2020
- SIW ENGINEERING PTE. LTD.
- Chee-Wei CHAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEVICE AND SYSTEM FOR DECOMPOSING AND OXIDIZING GASEOUS POLLUTANT
- Publication number 20200139297
- Publication date May 7, 2020
- SIW ENGINEERING PTE. LTD.
- Chee-Wei CHAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEPARATED GAS STREAM POINT OF USE ABATEMENT DEVICE
- Publication number 20190351369
- Publication date Nov 21, 2019
- HIGHVAC CORPORATION
- PHILIP J. CATALANO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS AND APPARATUS TO THERMALLY DESTRUCT VOLATILE ORGANIC COMPOUNDS
- Publication number 20190329178
- Publication date Oct 31, 2019
- Illinois Tool Works Inc.
- Ronald Seger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

from CVD treatment or semi-conductor manufacturing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for collecting by-product in semiconductor manufacturing...

Cobalt-carbon gas collection apparatus

Abatement system for pyrophoric chemicals and method of use

Apparatus and method for wet cleaning a gas stream

Method for exhaust gas abatement under reduced pressure and apparat...

Methods and systems for removing ammonia from a gas mixture

Apparatus having cooling line for collecting by-product in semicond...

Device and system for decomposing and oxidizing gaseous pollutant

Substrate processing apparatus having exhaust gas decomposer, and e...

Methods and apparatus to thermally destruct volatile organic compounds

Ultramicro to mesopore frameworks for selective separation and stor...

Detoxifying device, method of replacing piping section of detoxifyi...

Plasma abatement of compounds containing heavy atoms

Gas filter

Apparatus for treating exhaust gas in a processing system

Gas laser apparatus

Separated gas stream point of use abatement device

Flow balance control in volatile organic compound (VOC) abatement s...

Apparatus for collecting by-product in semiconductor manufacturing...

Exhaust system with u-shaped pipes

Gas laser apparatus

Device and system for decomposing and oxidizing gaseous pollutant

Device and system for decomposing and oxidizing gaseous pollutant

Ozone abatement method for semiconductor manufacturing system

Substrate transfer device and substrate transfer method

Apparatus for collection and subsequent reaction of liquid and soli...

Device and system for decomposing and oxidizing gaseous pollutant

High purity gas purifier

Methods for treating exhaust gas in a processing system

Abatement system

Patents Applicationslast 30 patents

VACUUM SYSTEM, LOW-PRESSURE VACUUM PROCESS DEVICE, AND CUTOFF MEMBER

GAS PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR TREATING WASTE GAS OF ELECTRONICS INDUSTRY

OPTIMISING OPERATING CONDITIONS IN AN ABATEMENT APPARATUS

SUBSTRATE PROCESSING APPARATUS HAVING EXHAUST GAS DECOMPOSER, AND E...

Waste Gas Separation and Treatment Apparatus and Control Method The...

COBALT-CARBON GAS COLLECTION APPARATUS

HIGH EFFICIENCY TRAP FOR PARTICLE COLLECTION IN A VACUUM FORELINE

TRAP FILTER SYSTEM FOR SEMICONDUCTOR EQUIPMENT

SYSTEM AND METHOD FOR TREATING EXHAUST FLUID FROM SEMICONDUCTOR MAN...

GAS RECOVERING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM, AND G...

VACUUM GENERATION PROCESS FOR DEPOSITION OF BIOMEDICAL IMPLANT MATE...

METHOD AND SYSTEM FOR MOCVD EFFLUENT ABATEMENT

PIPING APPARATUS HAVING HARMFUL GAS TREATMENT DEVICE, DESIGN METHOD...

DETOXIFICATION DEVICE AND INLET NOZZLE

Exhaust System with U-Shaped Pipes

ARSINE ADSORBENTS

APPARATUS HAVING COOLING LINE FOR COLLECTING BY-PRODUCT IN SEMICOND...

DEVICE AND SYSTEM FOR DECOMPOSING AND OXIDIZING GASEOUS POLLUTANT

ABATEMENT SYSTEM FOR PYROPHORIC CHEMICALS AND METHOD OF USE

METHODS AND SYSTEMS FOR REMOVING AMMONIA FROM A GAS MIXTURE

PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT

MATERIALS, METHODS, AND DEVICES FOR SILOXANE CONTAMINANT REMOVAL

SYSTEMS AND METHODS FOR IMPROVED WASTE GAS ABATEMENT

GAS LASER APPARATUS

DEVICE AND SYSTEM FOR DECOMPOSING AND OXIDIZING GASEOUS POLLUTANT

DEVICE AND SYSTEM FOR DECOMPOSING AND OXIDIZING GASEOUS POLLUTANT

DEVICE AND SYSTEM FOR DECOMPOSING AND OXIDIZING GASEOUS POLLUTANT

SEPARATED GAS STREAM POINT OF USE ABATEMENT DEVICE

METHODS AND APPARATUS TO THERMALLY DESTRUCT VOLATILE ORGANIC COMPOUNDS