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C23C16/16

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/16from metal carbonyl compounds

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming ruthenium thin film
- Patent number 12,091,748
- Issue date Sep 17, 2024
- Research Cooperation Foundation of Yeungnam University
- Soo-Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,959,167
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method for gate electrode and thin film transistor an...
- Patent number 11,901,420
- Issue date Feb 13, 2024
- BEIHAI HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- En-Tsung Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stabilized metal monolayer structure
- Patent number 11,814,723
- Issue date Nov 14, 2023
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Myung Mo Sung
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...
- Patent number 11,804,375
- Issue date Oct 31, 2023
- Entegris, Inc.
- Sangbum Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
NiPd nano-alloy film as a electrocatalyst and methods of preparatio...
- Patent number 11,802,335
- Issue date Oct 31, 2023
- King Fahd University of Petroleum & Minerals
- Muhammad Ali Ehsan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt precursors
- Patent number 11,761,086
- Issue date Sep 19, 2023
- Entegris, Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Film forming apparatus, source supply apparatus, and film forming m...
- Patent number 11,753,720
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Yuichi Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contact structure
- Patent number 11,728,170
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hong-Ying Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for thin film deposition through controlled formation of va...
- Patent number 11,634,811
- Issue date Apr 25, 2023
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,384,429
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal fill process for three-dimensional vertical NAND wordline
- Patent number 11,348,795
- Issue date May 31, 2022
- Lam Research Corporation
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for thin film deposition through controlled formation of va...
- Patent number 11,248,291
- Issue date Feb 15, 2022
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ge-containing Co-film forming material, Ge-containing Co film and f...
- Patent number 11,205,573
- Issue date Dec 21, 2021
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Rocio Alejandra Arteaga Muller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultrathin multilayer metal alloy liner for nano Cu interconnects
- Patent number 11,177,167
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Daniel Edelstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical deposition raw material including iridium complex and chem...
- Patent number 11,084,837
- Issue date Aug 10, 2021
- Tanaka Kikinzoku Kogyo K.K.
- Ryosuke Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contact structure
- Patent number 11,062,908
- Issue date Jul 13, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hong-Ying Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of molybdenum thin films using a molybdenum carbonyl pre...
- Patent number 10,995,405
- Issue date May 4, 2021
- Merck Patent GmbH
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for pulsed thin film deposition
- Patent number 10,961,624
- Issue date Mar 30, 2021
- Gelest Technologies, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid precursor-based delivery of fluid utilizing controlled solids...
- Patent number 10,895,010
- Issue date Jan 19, 2021
- Entegris, Inc.
- John M. Cleary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...
- Patent number 10,872,770
- Issue date Dec 22, 2020
- Entegris, Inc.
- Sangbum Han
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Chemical vapor deposition raw material including dinuclear rutheniu...
- Patent number 10,815,260
- Issue date Oct 27, 2020
- Tanaka Kikinzoku Kogyo K.K.
- Ryosuke Harada
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Alloys of Co to reduce stress
- Patent number 10,793,947
- Issue date Oct 6, 2020
- Entegris, Inc.
- Philip S. H. Chen
- B32 - LAYERED PRODUCTS
Information Patent Grant
Contact structure
- Patent number 10,763,116
- Issue date Sep 1, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hong-Ying Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for permanently repairing defects of absent mater...
- Patent number 10,732,501
- Issue date Aug 4, 2020
- Carl Zeiss SMT GmbH
- Jens Oster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for depositing cobalt in a feature
- Patent number 10,714,388
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Jin Hee Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium metal feature fill for interconnects
- Patent number 10,700,009
- Issue date Jun 30, 2020
- Tokyo Electron Limited
- Kai-Hung Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultrathin multilayer metal alloy liner for nano Cu interconnects
- Patent number 10,643,890
- Issue date May 5, 2020
- International Business Machines Corporation
- Daniel Edelstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing ruthenium wiring
- Patent number 10,629,433
- Issue date Apr 21, 2020
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-purity tungsten hexacarbonyl for solid source delivery
- Patent number 10,526,697
- Issue date Jan 7, 2020
- Entegris, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR EMBEDDING RUTHENIUM IN RECESS FORMED ON SU...
- Publication number 20240360547
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MAKING METAL TRIMETHYLENEMETHANE-CARBONYL COMPLEXES
- Publication number 20240352054
- Publication date Oct 24, 2024
- Umicore AG & Co. KG
- Arne GLÜER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED MOLYBDENUM DEPOSITION
- Publication number 20240218502
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- TUERXUN AILIHUMAER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE COBALT DEPOSITION ON COPPER SURFACES
- Publication number 20240218503
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Sang-Ho YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS
- Publication number 20240191357
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Yuta SORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EMBEDDING METHOD AND PROCESSING SYSTEM
- Publication number 20240153818
- Publication date May 9, 2024
- Tokyo Electron Limited
- Masato SAKAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...
- Publication number 20240096631
- Publication date Mar 21, 2024
- Entegris, Inc.
- Sangbum Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSITION METAL DEPOSITION PROCESSES AND A DEPOSITION ASSEMBLY
- Publication number 20240096632
- Publication date Mar 21, 2024
- ASM IP HOLDING B.V.
- Elina Färm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240093362
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...
- Publication number 20240062990
- Publication date Feb 22, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Sean Kashy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20230272523
- Publication date Aug 31, 2023
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING RUTHENIUM SILICIDE FILM ON SURFACE...
- Publication number 20230245893
- Publication date Aug 3, 2023
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN C...
- Publication number 20230227977
- Publication date Jul 20, 2023
- ASM IP HOLDING B.V.
- Tiina McKee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RUTHENIUM FILM FORMING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230227973
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING RUTHENIUM THIN FILM
- Publication number 20230212741
- Publication date Jul 6, 2023
- Research Cooperation Foundation of Yeungnam University
- Soo-Hyun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOURCE GAS SUPPLY METHOD, SOURCE GAS SUPPLY MECHANISM, AND FILM FOR...
- Publication number 20230167555
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Tomoyuki GOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM PRECURSOR COMPOUNDS
- Publication number 20230142966
- Publication date May 11, 2023
- Entegris, Inc.
- Benjamin R. Garrett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230096191
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Takeshi ITATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING SYSTEM
- Publication number 20230090881
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Masato ARAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...
- Publication number 20230023396
- Publication date Jan 26, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRESSURE BATCH COMPENSATION TO STABILIZE CD VARIATION FOR TRIM AND...
- Publication number 20230002901
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Awnish GUPTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE COBALT DEPOSITION ON COPPER SURFACES
- Publication number 20220298625
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Sang-Ho YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTION OF SEED LAYERS DURING ELECTRODEPOSITION OF METALS IN SEM...
- Publication number 20220208604
- Publication date Jun 30, 2022
- LAM RESEARCH CORPORATION
- Huanfeng Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...
- Publication number 20220119940
- Publication date Apr 21, 2022
- Gelest, Inc.
- Barry C. ARKLES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD FOR GATE ELECTRODE AND THIN FILM TRANSISTOR AN...
- Publication number 20220037476
- Publication date Feb 3, 2022
- BEIHAI HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- En-Tsung CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210388493
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Yuta SORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTACT STRUCTURE
- Publication number 20210335616
- Publication date Oct 28, 2021
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Hong-Ying LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...
- Publication number 20210140036
- Publication date May 13, 2021
- Gelest Technologies, Inc.
- Barry C. ARKLES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...
- Publication number 20210082708
- Publication date Mar 18, 2021
- Entegris, Inc.
- Sangbum HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process for Pulsed Thin Film Deposition
- Publication number 20200318236
- Publication date Oct 8, 2020
- Gelest Technologies, Inc.
- Barry C. ARKLES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

from metal carbonyl compounds

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for forming ruthenium thin film

Selective cobalt deposition on copper surfaces

Manufacturing method for gate electrode and thin film transistor an...

Stabilized metal monolayer structure

Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...

NiPd nano-alloy film as a electrocatalyst and methods of preparatio...

Cobalt precursors

Film forming apparatus, source supply apparatus, and film forming m...

Contact structure

Process for thin film deposition through controlled formation of va...

Selective cobalt deposition on copper surfaces

Metal fill process for three-dimensional vertical NAND wordline

Process for thin film deposition through controlled formation of va...

Ge-containing Co-film forming material, Ge-containing Co film and f...

Ultrathin multilayer metal alloy liner for nano Cu interconnects

Chemical deposition raw material including iridium complex and chem...

Contact structure

Deposition of molybdenum thin films using a molybdenum carbonyl pre...

Process for pulsed thin film deposition

Solid precursor-based delivery of fluid utilizing controlled solids...

Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...

Chemical vapor deposition raw material including dinuclear rutheniu...

Alloys of Co to reduce stress

Contact structure

Method and device for permanently repairing defects of absent mater...

Method and apparatus for depositing cobalt in a feature

Ruthenium metal feature fill for interconnects

Ultrathin multilayer metal alloy liner for nano Cu interconnects

Method of manufacturing ruthenium wiring

High-purity tungsten hexacarbonyl for solid source delivery

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR EMBEDDING RUTHENIUM IN RECESS FORMED ON SU...

METHOD FOR MAKING METAL TRIMETHYLENEMETHANE-CARBONYL COMPLEXES

PLASMA-ENHANCED MOLYBDENUM DEPOSITION

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS

EMBEDDING METHOD AND PROCESSING SYSTEM

HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...

TRANSITION METAL DEPOSITION PROCESSES AND A DEPOSITION ASSEMBLY

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...

DEPOSITION METHOD AND DEPOSITION APPARATUS

METHOD AND APPARATUS FOR FORMING RUTHENIUM SILICIDE FILM ON SURFACE...

SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN C...

RUTHENIUM FILM FORMING METHOD AND SUBSTRATE PROCESSING SYSTEM

METHOD FOR FORMING RUTHENIUM THIN FILM

SOURCE GAS SUPPLY METHOD, SOURCE GAS SUPPLY MECHANISM, AND FILM FOR...

MOLYBDENUM PRECURSOR COMPOUNDS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

FILM-FORMING METHOD AND FILM-FORMING SYSTEM

TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...

PRESSURE BATCH COMPENSATION TO STABILIZE CD VARIATION FOR TRIM AND...

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

PROTECTION OF SEED LAYERS DURING ELECTRODEPOSITION OF METALS IN SEM...

PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...

MANUFACTURING METHOD FOR GATE ELECTRODE AND THIN FILM TRANSISTOR AN...

FILM FORMING APPARATUS AND FILM FORMING METHOD

CONTACT STRUCTURE

PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...

HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...

Process for Pulsed Thin Film Deposition