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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/18from metallo-organic compounds

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Patents Grantslast 30 patents

Information Patent Grant
Methods of selective deposition
- Patent number 12,157,943
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Wenjing Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition method using an organomanganese compound...
- Patent number 12,152,300
- Issue date Nov 26, 2024
- Tanaka Kikinzoku Kogyo K.K.
- Ryosuke Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arene molybdenum (0) precursors for deposition of molybdenum films
- Patent number 12,116,376
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a metallic film on a substrate by cyclical depo...
- Patent number 12,106,965
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compound, thin-film forming raw material that contains said compoun...
- Patent number 12,104,245
- Issue date Oct 1, 2024
- Adeka Corporation
- Atsushi Sakurai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal complexes for gas-phase thin-film deposition
- Patent number 12,091,427
- Issue date Sep 17, 2024
- Umicore AG & Co. KG
- Joerg Sundermeyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,084,757
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Synthesis of fluoroalkyl tin precursors
- Patent number 12,077,552
- Issue date Sep 3, 2024
- Entegris, Inc.
- David Kuiper
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal-doped boron films
- Patent number 12,077,852
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Aykut Aydin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating of fluid-permeable materials
- Patent number 12,065,730
- Issue date Aug 20, 2024
- Picosun Oy
- Marko Pudas
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Manufacturing method for graphene film, porous silica powder and tr...
- Patent number 12,049,692
- Issue date Jul 30, 2024
- BEIHAI HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Yuming Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,051,586
- Issue date Jul 30, 2024
- Samsung Electronics Co., Ltd.
- Seung-Min Ryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing agents for atomic layer deposition
- Patent number 12,031,209
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for forming a layer comprising a transitional m...
- Patent number 12,031,206
- Issue date Jul 9, 2024
- ASM IP Holding, B.V.
- Maart van Druenen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for selective deposition using self-assembled monolayers
- Patent number 12,024,770
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition processes using ruthenium precursor and r...
- Patent number 11,987,878
- Issue date May 21, 2024
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming RuSi film and substrate processing system
- Patent number 11,981,992
- Issue date May 14, 2024
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 11,975,357
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of vapor deposition of ruthenium using an oxygen-free co-re...
- Patent number 11,976,352
- Issue date May 7, 2024
- Merck Patent GmbH
- Jacob Woodruff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor solution for thin film deposition and thin film forming m...
- Patent number 11,972,941
- Issue date Apr 30, 2024
- SK TRICHEM
- Chang Sung Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,959,167
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,952,658
- Issue date Apr 9, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material for chemical deposition containing organoruthenium com...
- Patent number 11,913,110
- Issue date Feb 27, 2024
- Tanaka Kikinzoku Kogyo K.K.
- Ryosuke Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasmonic metal/graphene heterostructures and related methods
- Patent number 11,908,960
- Issue date Feb 20, 2024
- University of Kansas
- Judy Z. Wu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Molybdenum thin films by oxidation-reduction
- Patent number 11,891,690
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic device having an oxygen free platinum group metal film
- Patent number 11,894,233
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Yixiong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transition metal deposition method
- Patent number 11,885,020
- Issue date Jan 30, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanocomposite comprising two-dimensional nano thin films formed on...
- Patent number 11,867,675
- Issue date Jan 9, 2024
- Kyu Hyoung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homoleptic lanthanide deposition precursors
- Patent number 11,866,824
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heteroalkylcyclopentadienyl indium-containing precursors and proces...
- Patent number 11,859,283
- Issue date Jan 2, 2024
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Antoine Bruneau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PRODUCTION METHOD FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20240411228
- Publication date Dec 12, 2024
- JSR Corporation
- Ken MARUYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE MATERIAL AND METHOD OF PRODUCING THIN-FILM
- Publication number 20240360558
- Publication date Oct 31, 2024
- ADEKA CORPORATION
- Masaki ENZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDE AND ORGANIC PRECURSORS FOR METAL DEPOSITION
- Publication number 20240360557
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS
- Publication number 20240352577
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- CHANG KE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COBALT COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, AND MET...
- Publication number 20240337014
- Publication date Oct 10, 2024
- ADEKA CORPORATION
- Tomoharu YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-DEPOSITION OBJECT
- Publication number 20240337017
- Publication date Oct 10, 2024
- HIGHLIGHT TECH CORP.
- CHIEN-HSUN CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A METAL LINER FOR INTERCONNECT STRUCTURES
- Publication number 20240339358
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Jesus Candelario Mendoza-Gutierrez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECIOUS METAL COMPLEXES WITH DIHYDROAZULENYL LIGANDS AND USE THEREOF
- Publication number 20240317788
- Publication date Sep 26, 2024
- Umicore AG & Co. KG
- Tobias VOLLGRAFF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, AND METHOD OF...
- Publication number 20240318304
- Publication date Sep 26, 2024
- ADEKA CORPORATION
- Chiaki MITSUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM IMIDO ALKYL/ALLYL COMPLEXES FOR DEPOSITION OF MOLYBDENUM...
- Publication number 20240301548
- Publication date Sep 12, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Teruo BEPPU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL ORGANONITRILE PRECURSORS FOR THIN FILM DEPOSITION
- Publication number 20240301549
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Thomas Joseph Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMING RAW MATERIAL, THIN-FILM AND METHOD OF PRODUCING T...
- Publication number 20240301553
- Publication date Sep 12, 2024
- ADEKA CORPORATION
- Masako HATASE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR PRODUCING A METAL STRUCTURE
- Publication number 20240295021
- Publication date Sep 5, 2024
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Thomas KLOTZBÜCHER
- G02 - OPTICS
Information Patent Application
MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
- Publication number 20240279804
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Chandan Kr Barik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVELY FORMING AND UTILIZING A PASSIVATION LAYER O...
- Publication number 20240218500
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Anirudhan Chandrasekaran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED MOLYBDENUM DEPOSITION
- Publication number 20240218502
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- TUERXUN AILIHUMAER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL COMPOUND, PRECURSOR COMPOSITION COMPRISING SAME, AND METHOD F...
- Publication number 20240218005
- Publication date Jul 4, 2024
- HANSOL CHEMICAL CO., LTD
- Min-Sung PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE COBALT DEPOSITION ON COPPER SURFACES
- Publication number 20240218503
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Sang-Ho YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING AND UTILIZING ANTIMONY CONTAINING FILMS, AND RE...
- Publication number 20240218510
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Paul Chatelain
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
- Publication number 20240191344
- Publication date Jun 13, 2024
- Tokyo Electron Limited
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL ORGANIC CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20240175135
- Publication date May 30, 2024
- TES CO., LTD
- Sung-Chul CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUP 6 AMIDINATE PADDLEWHEEL COMPOUNDS FOR DEPOSITION OF METAL CON...
- Publication number 20240166676
- Publication date May 23, 2024
- Merck Patent GmbH
- Jason P. COYLE
- C07 - ORGANIC CHEMISTRY
Information Patent Application
INDIUM PRECURSOR COMPOUND, METHOD OF PREPARING THIN FILM USING THE...
- Publication number 20240167151
- Publication date May 23, 2024
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND USE RELATED TO A FILM AND A FILM
- Publication number 20240158914
- Publication date May 16, 2024
- BENEQ OY
- Ville MALINEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION SYSTEM
- Publication number 20240150895
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSITION METAL DEPOSITION METHOD
- Publication number 20240133032
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF PLATINUM-BASED ALLOY CATALYST USING FLUIDIZ...
- Publication number 20240116044
- Publication date Apr 11, 2024
- Hyundai Motor Company
- Jung Yeon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...
- Publication number 20240096631
- Publication date Mar 21, 2024
- Entegris, Inc.
- Sangbum Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING TRANSITION METALS
- Publication number 20240096633
- Publication date Mar 21, 2024
- ASM IP HOLDING B.V.
- Elina Färm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION METHOD FOR METAL THIN FILMS
- Publication number 20240060180
- Publication date Feb 22, 2024
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Fumikazu MIZUTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

from metallo-organic compounds

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of selective deposition

Chemical vapor deposition method using an organomanganese compound...

Arene molybdenum (0) precursors for deposition of molybdenum films

Methods for forming a metallic film on a substrate by cyclical depo...

Compound, thin-film forming raw material that contains said compoun...

Metal complexes for gas-phase thin-film deposition

Method of manufacturing semiconductor device, substrate processing...

Synthesis of fluoroalkyl tin precursors

Metal-doped boron films

Coating of fluid-permeable materials

Manufacturing method for graphene film, porous silica powder and tr...

Method of manufacturing semiconductor device

Reducing agents for atomic layer deposition

Methods and systems for forming a layer comprising a transitional m...

Methods for selective deposition using self-assembled monolayers

Chemical vapor deposition processes using ruthenium precursor and r...

Method for forming RuSi film and substrate processing system

Selective deposition of metals, metal oxides, and dielectrics

Methods of vapor deposition of ruthenium using an oxygen-free co-re...

Precursor solution for thin film deposition and thin film forming m...

Selective cobalt deposition on copper surfaces

Cyclic deposition methods for forming metal-containing material and...

Raw material for chemical deposition containing organoruthenium com...

Plasmonic metal/graphene heterostructures and related methods

Molybdenum thin films by oxidation-reduction

Electronic device having an oxygen free platinum group metal film

Transition metal deposition method

Nanocomposite comprising two-dimensional nano thin films formed on...

Homoleptic lanthanide deposition precursors

Heteroalkylcyclopentadienyl indium-containing precursors and proces...

Patents Applicationslast 30 patents

PRODUCTION METHOD FOR SEMICONDUCTOR SUBSTRATES

REACTIVE MATERIAL AND METHOD OF PRODUCING THIN-FILM

HALIDE AND ORGANIC PRECURSORS FOR METAL DEPOSITION

METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS

COBALT COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, AND MET...

ANTI-DEPOSITION OBJECT

METHOD OF FORMING A METAL LINER FOR INTERCONNECT STRUCTURES

PRECIOUS METAL COMPLEXES WITH DIHYDROAZULENYL LIGANDS AND USE THEREOF

COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, AND METHOD OF...

MOLYBDENUM IMIDO ALKYL/ALLYL COMPLEXES FOR DEPOSITION OF MOLYBDENUM...

METAL ORGANONITRILE PRECURSORS FOR THIN FILM DEPOSITION

THIN-FILM FORMING RAW MATERIAL, THIN-FILM AND METHOD OF PRODUCING T...

METHOD AND SYSTEM FOR PRODUCING A METAL STRUCTURE

MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS

METHODS FOR SELECTIVELY FORMING AND UTILIZING A PASSIVATION LAYER O...

PLASMA-ENHANCED MOLYBDENUM DEPOSITION

NOVEL COMPOUND, PRECURSOR COMPOSITION COMPRISING SAME, AND METHOD F...

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

METHODS FOR FORMING AND UTILIZING ANTIMONY CONTAINING FILMS, AND RE...

SURFACE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE

METAL ORGANIC CHEMICAL VAPOR DEPOSITION APPARATUS

GROUP 6 AMIDINATE PADDLEWHEEL COMPOUNDS FOR DEPOSITION OF METAL CON...

INDIUM PRECURSOR COMPOUND, METHOD OF PREPARING THIN FILM USING THE...

METHOD AND USE RELATED TO A FILM AND A FILM

FILM FORMATION METHOD AND FILM FORMATION SYSTEM

TRANSITION METAL DEPOSITION METHOD

MANUFACTURING METHOD OF PLATINUM-BASED ALLOY CATALYST USING FLUIDIZ...

HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...

METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING TRANSITION METALS

ATOMIC LAYER DEPOSITION METHOD FOR METAL THIN FILMS