Gas field ion sources [GFIS]

Industry

CPC
H01J2237/0807

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0807Gas field ion sources [GFIS]

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Automated operational control of micro-tooling devices
- Patent number 12,176,182
- Issue date Dec 24, 2024
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method, device and system for the treatment of biological cryogenic...
- Patent number 11,735,404
- Issue date Aug 22, 2023
- FEI Company
- Alex De Marco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen generator for an ion implanter
- Patent number 11,276,543
- Issue date Mar 15, 2022
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing emitter, emitter, and focused ion beam appa...
- Patent number 11,081,312
- Issue date Aug 3, 2021
- Hitachi High-Tech Science Corporation
- Tomokazu Kozakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field ionization source, ion beam apparatus, and beam irradiation m...
- Patent number 10,971,329
- Issue date Apr 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen generator for an ion implanter
- Patent number 10,847,339
- Issue date Nov 24, 2020
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device and cleaning method for gas field ion source
- Patent number 10,840,070
- Issue date Nov 17, 2020
- HITACHI HIGH-TECH CORPORATION
- Yoshimi Kawanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus
- Patent number 10,790,112
- Issue date Sep 29, 2020
- Hitachi High-Tech Science Corporation
- Yoshimi Kawanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam apparatus
- Patent number 10,651,006
- Issue date May 12, 2020
- Hitachi High-Tech Science Corporation
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device
- Patent number 10,636,623
- Issue date Apr 28, 2020
- Hitachi High-Technologies Corporation
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and electron source having single-atom termination struc...
- Patent number 10,529,531
- Issue date Jan 7, 2020
- Hitachi High-Tech Science Corporation
- Chuhei Oshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device
- Patent number 10,366,858
- Issue date Jul 30, 2019
- Hitachi High-Technologies Corporation
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device and sample observation method
- Patent number 10,340,117
- Issue date Jul 2, 2019
- Hitachi, Ltd.
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device
- Patent number 10,304,656
- Issue date May 28, 2019
- Hitachi High-Technologies Corporation
- Hiroyuki Muto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam system
- Patent number 10,163,602
- Issue date Dec 25, 2018
- Hitachi High-Tech Science Corporation
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus
- Patent number 9,793,085
- Issue date Oct 17, 2017
- Hitachi High-Tech Science Corporation
- Anto Yasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device and emitter tip adjustment method
- Patent number 9,761,407
- Issue date Sep 12, 2017
- Hitachi High-Technologies Corporation
- Hiroyuki Muto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating a charged part...
- Patent number 9,640,364
- Issue date May 2, 2017
- Carl Zeiss Microscopy, LLC
- John A. Notte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and ion beam device using same
- Patent number 9,640,360
- Issue date May 2, 2017
- Hitachi High-Technologies Corporation
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating a charged part...
- Patent number 9,627,172
- Issue date Apr 18, 2017
- Carl Zeiss Microscopy, LLC
- John A. Notte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating a charged part...
- Patent number 9,536,699
- Issue date Jan 3, 2017
- Carl Zeiss Microscopy, LLC
- John A. Notte
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged particle beam system and method of operating a charged part...
- Patent number 9,530,612
- Issue date Dec 27, 2016
- Carl Zeiss Microscopy, LLC
- John A. Notte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method of operating a charged part...
- Patent number 9,530,611
- Issue date Dec 27, 2016
- Carl Zeiss Microscopy, LLC
- John A. Notte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device
- Patent number 9,508,521
- Issue date Nov 29, 2016
- Hitachi High-Technologies Corporation
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus and control method thereof
- Patent number 9,418,817
- Issue date Aug 16, 2016
- Hitachi High-Tech Science Corporation
- Fumio Aramaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Repair apparatus
- Patent number 9,378,858
- Issue date Jun 28, 2016
- Hitachi High-Tech Science Corporation
- Fumio Aramaki
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Focused ion beam apparatus with precious metal emitter surface
- Patent number 9,336,979
- Issue date May 10, 2016
- Hitachi High-Tech Science Corporation
- Anto Yasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam system
- Patent number 9,245,712
- Issue date Jan 26, 2016
- Hitachi High-Tech Science Corporation
- Yasuhiko Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,236,225
- Issue date Jan 12, 2016
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam system and method of operating a charged part...
- Patent number 9,218,935
- Issue date Dec 22, 2015
- Carl Zeiss Microscopy, LLC
- John A. Notte
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM DEVICE AND EMITTER TIP MILLING METHOD
- Publication number 20240203682
- Publication date Jun 20, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A GAS ION GUN
- Publication number 20230307204
- Publication date Sep 28, 2023
- CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Evelyne Salançon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED OPERATIONAL CONTROL OF MICRO-TOOLING DEVICES
- Publication number 20220148850
- Publication date May 12, 2022
- Carl Zeiss SMT GMBH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HYDROGEN GENERATOR FOR AN ION IMPLANTER
- Publication number 20210090841
- Publication date Mar 25, 2021
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, DEVICE AND SYSTEM FOR THE TREATMENT OF BIOLOGICAL CRYOGENIC...
- Publication number 20210066056
- Publication date Mar 4, 2021
- FEI Company
- Alex DE MARCO
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MANUFACTURING EMITTER, EMITTER, AND FOCUSED ION BEAM APPA...
- Publication number 20200312603
- Publication date Oct 1, 2020
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Tomokazu KOZAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DEVICE AND CLEANING METHOD FOR GAS FIELD ION SOURCE
- Publication number 20200294776
- Publication date Sep 17, 2020
- Hitachi High-Technologies Corporation
- Yoshimi KAWANAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20190378690
- Publication date Dec 12, 2019
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Moon Youn JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Device
- Publication number 20190295802
- Publication date Sep 26, 2019
- Hitachi High-Technologies Corporation
- Hiroyasu SHICHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIELD IONIZATION SOURCE, ION BEAM APPARATUS, AND BEAM IRRADIATION M...
- Publication number 20190051491
- Publication date Feb 14, 2019
- Hitachi High-Technologies Corporation
- Shinichi MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Apparatus
- Publication number 20180308658
- Publication date Oct 25, 2018
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Shinichi MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM APPARATUS
- Publication number 20180233319
- Publication date Aug 16, 2018
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Yoshimi KAWANAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM SYSTEM
- Publication number 20180012726
- Publication date Jan 11, 2018
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Hiroyasu SHICHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Repair Apparatus
- Publication number 20160322123
- Publication date Nov 3, 2016
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Fumio Aramaki
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
FOCUSED ION BEAM APPARATUS
- Publication number 20160225574
- Publication date Aug 4, 2016
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Anto YASAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Device and Emitter Tip Adjustment Method
- Publication number 20160225575
- Publication date Aug 4, 2016
- Hiroyuki MUTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System and Method of Operating a Charged Part...
- Publication number 20160111243
- Publication date Apr 21, 2016
- Carl Zeiss Microscopy, LLC
- John A. Notte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System and Method of Operating a Charged Part...
- Publication number 20160104598
- Publication date Apr 14, 2016
- Carl Zeiss Microscopy, LLC
- John A. Notte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE MICROSCOPE
- Publication number 20150083930
- Publication date Mar 26, 2015
- Hitachi High-Technologies Corporation
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Repair Apparatus
- Publication number 20150053866
- Publication date Feb 26, 2015
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Fumio Aramaki
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SCANNING ION MICROSCOPE AND SECONDARY PARTICLE CONTROL METHOD
- Publication number 20150048247
- Publication date Feb 19, 2015
- Hitachi High-Technologies Corporation
- Yoshimi Kawanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Field Ionization Ion Source and Ion Beam Apparatus
- Publication number 20150041650
- Publication date Feb 12, 2015
- Hitachi High-Technologies Corporation
- Yoshimi Kawanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PART...
- Publication number 20150008332
- Publication date Jan 8, 2015
- Carl Zeiss Microscopy, LLC
- John A. Notte
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS FIELD IONIZATION ION SOURCE AND ION BEAM DEVICE
- Publication number 20140326897
- Publication date Nov 6, 2014
- Yoshimi KAWANAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DEVICE
- Publication number 20140319370
- Publication date Oct 30, 2014
- Hiroyasu SHICHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20140306121
- Publication date Oct 16, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
ION SOURCE AND ION BEAM DEVICE USING SAME
- Publication number 20140299768
- Publication date Oct 9, 2014
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20140292189
- Publication date Oct 2, 2014
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Fumio ARAMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM SYSTEM
- Publication number 20140284474
- Publication date Sep 25, 2014
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Yasuhiko SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FABRICATING MICROELECTRONIC SUBSTRATE INSPECTION EQUIPMENT
- Publication number 20140224987
- Publication date Aug 14, 2014
- Samsung Electronics Co., Ltd.
- Min-Kook Kim
- H01 - BASIC ELECTRIC ELEMENTS

Gas field ion sources [GFIS]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Automated operational control of micro-tooling devices

Method, device and system for the treatment of biological cryogenic...

Hydrogen generator for an ion implanter

Method of manufacturing emitter, emitter, and focused ion beam appa...

Field ionization source, ion beam apparatus, and beam irradiation m...

Hydrogen generator for an ion implanter

Ion beam device and cleaning method for gas field ion source

Focused ion beam apparatus

Ion beam apparatus

Ion beam device

Ion source and electron source having single-atom termination struc...

Ion beam device

Ion beam device and sample observation method

Ion beam device

Ion beam system

Focused ion beam apparatus

Ion beam device and emitter tip adjustment method

Charged particle beam system and method of operating a charged part...

Ion source and ion beam device using same

Charged particle beam system and method of operating a charged part...

Charged particle beam system and method of operating a charged part...

Charged particle beam system and method of operating a charged part...

Charged particle beam system and method of operating a charged part...

Ion beam device

Focused ion beam apparatus and control method thereof

Repair apparatus

Focused ion beam apparatus with precious metal emitter surface

Focused ion beam system

Ion sources, systems and methods

Charged particle beam system and method of operating a charged part...

Patents Applicationslast 30 patents

ION BEAM DEVICE AND EMITTER TIP MILLING METHOD

A GAS ION GUN

AUTOMATED OPERATIONAL CONTROL OF MICRO-TOOLING DEVICES

HYDROGEN GENERATOR FOR AN ION IMPLANTER

METHOD, DEVICE AND SYSTEM FOR THE TREATMENT OF BIOLOGICAL CRYOGENIC...

METHOD OF MANUFACTURING EMITTER, EMITTER, AND FOCUSED ION BEAM APPA...

ION BEAM DEVICE AND CLEANING METHOD FOR GAS FIELD ION SOURCE

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

Ion Beam Device

FIELD IONIZATION SOURCE, ION BEAM APPARATUS, AND BEAM IRRADIATION M...

Ion Beam Apparatus

FOCUSED ION BEAM APPARATUS

ION BEAM SYSTEM

Repair Apparatus

FOCUSED ION BEAM APPARATUS

Ion Beam Device and Emitter Tip Adjustment Method

Charged Particle Beam System and Method of Operating a Charged Part...

Charged Particle Beam System and Method of Operating a Charged Part...

CHARGED PARTICLE MICROSCOPE

Repair Apparatus

SCANNING ION MICROSCOPE AND SECONDARY PARTICLE CONTROL METHOD

Gas Field Ionization Ion Source and Ion Beam Apparatus

CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PART...

GAS FIELD IONIZATION ION SOURCE AND ION BEAM DEVICE

ION BEAM DEVICE

ION SOURCES, SYSTEMS AND METHODS

ION SOURCE AND ION BEAM DEVICE USING SAME

FOCUSED ION BEAM APPARATUS AND CONTROL METHOD THEREOF

FOCUSED ION BEAM SYSTEM

METHODS OF FABRICATING MICROELECTRONIC SUBSTRATE INSPECTION EQUIPMENT