Gas nozzles

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CPC
C23C16/45563

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/45563Gas nozzles

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Patents Grantslast 30 patents

Information Patent Grant
Substrate type sensor and method of measuring the impact point and...
- Patent number 12,224,189
- Issue date Feb 11, 2025
- Semes Co., Ltd.
- Young Seop Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-throughput vapor deposition apparatus and vapor deposition method
- Patent number 12,209,311
- Issue date Jan 28, 2025
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy...
- Weimin Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing display apparatus and method of manufac...
- Patent number 12,207,530
- Issue date Jan 21, 2025
- Samsung Display Co., Ltd.
- Choelmin Jang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate cleaning method and substrate cleaning device
- Patent number 12,198,947
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Hiroki Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ribbon beam plasma enhanced chemical vapor deposition system for an...
- Patent number 12,191,156
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and processing method
- Patent number 12,173,405
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,176,216
- Issue date Dec 24, 2024
- Kokusai Electric Corporation
- Motomu Degai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, reaction container, method of manuf...
- Patent number 12,163,226
- Issue date Dec 10, 2024
- Kokusai Electric Corporation
- Kazuki Nonomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,148,614
- Issue date Nov 19, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system and method of delivering a reactant gas
- Patent number 12,139,790
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adjustable fluid inlet assembly for a substrate processing apparatu...
- Patent number 12,110,588
- Issue date Oct 8, 2024
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas feeding cup and a gas manifold assembly
- Patent number 12,104,248
- Issue date Oct 1, 2024
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doped amorphous optical device films and deposition via incorporati...
- Patent number 12,077,860
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Andrew Ceballos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Prevention of contamination of substrates during gas purging
- Patent number 12,074,045
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liner assemblies for substrate processing systems
- Patent number 12,071,686
- Issue date Aug 27, 2024
- GlobalWafers Co., Ltd.
- Arash Abedijaberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,065,741
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Mikio Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device, manufacturing method for semiconductor...
- Patent number 12,062,546
- Issue date Aug 13, 2024
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution system and reactor system including same
- Patent number 12,024,775
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Sonti Sreeram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply apparatus, gas supply method, and substrate processing a...
- Patent number 12,024,776
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Yuji Obata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device using plasma-enhanced...
- Patent number 12,027,362
- Issue date Jul 2, 2024
- Taiwan Carbon Nano Technology Corporation
- Tsung-Fu Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing chamber and process gas flow deflector for use...
- Patent number 12,018,369
- Issue date Jun 25, 2024
- Infineon Technologies AG
- Matthias Kuenle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of using high density plasma chemical vapor deposition chamber
- Patent number 12,020,905
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Ching Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning assemblies for substrate processing chambers
- Patent number 12,012,653
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Yuxing Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply apparatus, gas supply method, and substrate processing a...
- Patent number 11,987,885
- Issue date May 21, 2024
- Tokyo Electron Limited
- Yuji Obata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nozzle installation jig
- Patent number 11,986,847
- Issue date May 21, 2024
- Kokusai Electric Corporation
- Yoshitaka Abe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chemical supply apparatus, method for removing particles from chemi...
- Patent number 11,981,995
- Issue date May 14, 2024
- Semes Co., Ltd.
- Yong Hoon Hong
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Nozzle exit contours for pattern composition
- Patent number 11,981,987
- Issue date May 14, 2024
- Universal Display Corporation
- Edwin van den Tillaart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 11,981,998
- Issue date May 14, 2024
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic vapor jet printing system
- Patent number 11,976,360
- Issue date May 7, 2024
- Universal Display Corporation
- Gregory McGraw
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
- Publication number 20250043424
- Publication date Feb 6, 2025
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20250038024
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250034710
- Publication date Jan 30, 2025
- Jusung Engineering Co., Ltd.
- Jun Young KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC VAPOR JET PRINTING SYSTEM
- Publication number 20250024746
- Publication date Jan 16, 2025
- THE REGENTS OF THE UNIVERSITY OF MICHIGAN, INNOVATION PARTNERSHIPS
- Stephen R. FORREST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022708
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011931
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Shun MATSUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...
- Publication number 20250011933
- Publication date Jan 9, 2025
- TORAY ENGINEERING CO., LTD.
- Naoto SUGANUMA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND
- Publication number 20240410077
- Publication date Dec 12, 2024
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Xuelun WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240404795
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING APPARATUS AND MANUFACTURING METHOD
- Publication number 20240401195
- Publication date Dec 5, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20240368756
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Yuxing ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA FILM FORMING APPARATUS AND PLASMA FILM FORMING METHOD
- Publication number 20240371606
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Atsuki FUKAZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR INHIBITING PRECURSOR INTERACTIONS DURING RA...
- Publication number 20240368760
- Publication date Nov 7, 2024
- Lotus Applied Technology, LLC
- ERIC DICKEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE FILM FORMING DEVICE
- Publication number 20240344200
- Publication date Oct 17, 2024
- MEIDENSHA CORPORATION
- Toshinori MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...
- Publication number 20240344197
- Publication date Oct 17, 2024
- BENEQ OY
- Markus BOSUND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER LID AND COATING
- Publication number 20240344199
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240301555
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC ELECTROLUMINESCENT DEVICES
- Publication number 20240279789
- Publication date Aug 22, 2024
- UNIVERSAL DISPLAY CORPORATION
- Edwin van den Tillaart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING DEVICE
- Publication number 20240263306
- Publication date Aug 8, 2024
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...
- Publication number 20240254627
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Raja Murali DHAMODHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANIC VAPOR JET PRINTING SYSTEM
- Publication number 20240247375
- Publication date Jul 25, 2024
- UNIVERSAL DISPLAY CORPORATION
- Gregory MCGRAW
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20240240319
- Publication date Jul 18, 2024
- CV Research Corporation
- Hiroshi KAWAURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICOND...
- Publication number 20240234138
- Publication date Jul 11, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20240229240
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL PART AND PROCESS CHAMBER HAVING THE SAME
- Publication number 20240186116
- Publication date Jun 6, 2024
- POINT ENGINEERING CO., LTD.
- Bum Mo AHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240175125
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Sung Duk SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STATE DETERMINATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM
- Publication number 20240175131
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Ryo Araki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
REFLECTOR UNIT AND FILM FORMING APPARATUS
- Publication number 20240167194
- Publication date May 23, 2024
- NUFLARE TECHNOLOGY, INC.
- Takuto UMETSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING DISPLAY DEVICE
- Publication number 20240145219
- Publication date May 2, 2024
- SAMSUNG DISPLAY CO., LTD.
- Min Gyu PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICOND...
- Publication number 20240136179
- Publication date Apr 25, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Gas nozzles

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate type sensor and method of measuring the impact point and...

High-throughput vapor deposition apparatus and vapor deposition method

Apparatus for manufacturing display apparatus and method of manufac...

Substrate cleaning method and substrate cleaning device

Ribbon beam plasma enhanced chemical vapor deposition system for an...

Processing apparatus and processing method

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus, reaction container, method of manuf...

Method of manufacturing semiconductor device, substrate processing...

Processing system and method of delivering a reactant gas

Adjustable fluid inlet assembly for a substrate processing apparatu...

Gas feeding cup and a gas manifold assembly

Doped amorphous optical device films and deposition via incorporati...

Prevention of contamination of substrates during gas purging

Liner assemblies for substrate processing systems

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing device, manufacturing method for semiconductor...

Gas distribution system and reactor system including same

Gas supply apparatus, gas supply method, and substrate processing a...

Method for manufacturing semiconductor device using plasma-enhanced...

Substrate processing chamber and process gas flow deflector for use...

Method of using high density plasma chemical vapor deposition chamber

Cleaning assemblies for substrate processing chambers

Gas supply apparatus, gas supply method, and substrate processing a...

Nozzle installation jig

Chemical supply apparatus, method for removing particles from chemi...

Nozzle exit contours for pattern composition

Systems and methods for substrate support temperature control

Organic vapor jet printing system

Vaporizer, substrate processing apparatus and method for manufactur...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

SUBSTRATE PROCESSING APPARATUS

ORGANIC VAPOR JET PRINTING SYSTEM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...

METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

FILM-FORMING APPARATUS AND MANUFACTURING METHOD

CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS

PLASMA FILM FORMING APPARATUS AND PLASMA FILM FORMING METHOD

METHODS AND SYSTEMS FOR INHIBITING PRECURSOR INTERACTIONS DURING RA...

OXIDE FILM FORMING DEVICE

AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...

SEMICONDUCTOR PROCESSING CHAMBER LID AND COATING

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ORGANIC ELECTROLUMINESCENT DEVICES

FILM FORMING METHOD AND FILM FORMING DEVICE

INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...

ORGANIC VAPOR JET PRINTING SYSTEM

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICOND...

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

METAL PART AND PROCESS CHAMBER HAVING THE SAME

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

STATE DETERMINATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM

REFLECTOR UNIT AND FILM FORMING APPARATUS

APPARATUS FOR MANUFACTURING DISPLAY DEVICE

OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICOND...