 
                 CPC
 CPC
                     H01L21/02455
 H01L21/02455
                     Taiwan Semiconductor Manufacturing Company, Ltd
                                    Taiwan Semiconductor Manufacturing Company, Ltd
                                 I-Sheng  Chen
                                    I-Sheng  Chen
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Korea Polytechnic University Industry Academic Cooperation Foundation
                                    Korea Polytechnic University Industry Academic Cooperation Foundation
                                 Ok Hyun Nam
                                    Ok Hyun Nam
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Vanguard International Semiconductor Corporation
                                    Vanguard International Semiconductor Corporation
                                 Chih-Yen  Chen
                                    Chih-Yen  Chen
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Norwegian University of Science and Technology (NTNU)
                                    Norwegian University of Science and Technology (NTNU)
                                 Bjørn-Ove  Fimland
                                    Bjørn-Ove  Fimland
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Kangguo  Cheng
                                    Kangguo  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Co., Ltd.
                                    Taiwan Semiconductor Manufacturing Co., Ltd.
                                 Kuanhsiung  Chen
                                    Kuanhsiung  Chen
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 The Johns Hopkins University
                                    The Johns Hopkins University
                                 Jarod C. Gagnon
                                    Jarod C. Gagnon
                                 C30 - CRYSTAL GROWTH
                                    C30 - CRYSTAL GROWTH
                                 Exagan
                                    Exagan
                                 David  Schenk
                                    David  Schenk
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Xiamen Changelight Co., Ltd.
                                    Xiamen Changelight Co., Ltd.
                                 Kaixuan  Chen
                                    Kaixuan  Chen
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Massachusetts Institute of Technology
                                    Massachusetts Institute of Technology
                                 Jeehwan  Kim
                                    Jeehwan  Kim
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Alexander  Reznicek
                                    Alexander  Reznicek
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Kangguo  Cheng
                                    Kangguo  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Intel Corporation
                                    Intel Corporation
                                 Chandra S. Mohapatra
                                    Chandra S. Mohapatra
                                 B82 - NANO-TECHNOLOGY
                                    B82 - NANO-TECHNOLOGY
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Daniele  Caimi
                                    Daniele  Caimi
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Norwegian University of Science and Technology (NTNU)
                                    Norwegian University of Science and Technology (NTNU)
                                 Bjørn-Ove  Fimland
                                    Bjørn-Ove  Fimland
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Cheng-Wei  Cheng
                                    Cheng-Wei  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Intel Corporation
                                    Intel Corporation
                                 Chandra S. Mohapatra
                                    Chandra S. Mohapatra
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Applied Materials, Inc.
                                    Applied Materials, Inc.
                                 Chun  Yan
                                    Chun  Yan
                                 B08 - CLEANING
                                    B08 - CLEANING
                                 Arizona Board of Regents on behalf of Arizona State University
                                    Arizona Board of Regents on behalf of Arizona State University
                                 Alan  Chin
                                    Alan  Chin
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Intel Corporation
                                    Intel Corporation
                                 Chandra S. Mohapatra
                                    Chandra S. Mohapatra
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Co., Ltd.
                                    Taiwan Semiconductor Manufacturing Co., Ltd.
                                 Kuanhsiung  Chen
                                    Kuanhsiung  Chen
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Daniele  Caimi
                                    Daniele  Caimi
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Xiamen Changelight Co., Ltd.
                                    Xiamen Changelight Co., Ltd.
                                 Kaixuan  Chen
                                    Kaixuan  Chen
                                 C30 - CRYSTAL GROWTH
                                    C30 - CRYSTAL GROWTH
                                 STC.UNM
                                    STC.UNM
                                 Seung-Chang  Lee
                                    Seung-Chang  Lee
                                 C30 - CRYSTAL GROWTH
                                    C30 - CRYSTAL GROWTH
                                 Imec VZW
                                    Imec VZW
                                 Bernardette  Kunert
                                    Bernardette  Kunert
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Applied Materials, Inc.
                                    Applied Materials, Inc.
                                 Swaminathan T. Srinivasan
                                    Swaminathan T. Srinivasan
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Applied Materials, Inc.
                                    Applied Materials, Inc.
                                 Xinyu  Bao
                                    Xinyu  Bao
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Intel Corporation
                                    Intel Corporation
                                 Niloy  Mukherjee
                                    Niloy  Mukherjee
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 STC.UNM
                                    STC.UNM
                                 Seung-Chang  Lee
                                    Seung-Chang  Lee
                                 C30 - CRYSTAL GROWTH
                                    C30 - CRYSTAL GROWTH
                                 Intel Corporation
                                    Intel Corporation
                                 Annalisa  Cappellani
                                    Annalisa  Cappellani
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 I-Sheng  CHEN
                                    I-Sheng  CHEN
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 KOREA POLYTECHNIC UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION
                                    KOREA POLYTECHNIC UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION
                                 Ok Hyun NAM
                                    Ok Hyun NAM
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Vanguard International Semiconductor Corporation
                                    Vanguard International Semiconductor Corporation
                                 Chih-Yen  CHEN
                                    Chih-Yen  CHEN
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Exagan
                                    Exagan
                                 David  Schenk
                                    David  Schenk
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Kangguo  Cheng
                                    Kangguo  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU)
                                    NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU)
                                 Bjørn-Ove  Fimland
                                    Bjørn-Ove  Fimland
                                 C30 - CRYSTAL GROWTH
                                    C30 - CRYSTAL GROWTH
                                 The Johns Hopkins University
                                    The Johns Hopkins University
                                 Jarod C. Gagnon
                                    Jarod C. Gagnon
                                 C30 - CRYSTAL GROWTH
                                    C30 - CRYSTAL GROWTH
                                 Taiwan Semiconductor Manufacturing Co., Ltd.
                                    Taiwan Semiconductor Manufacturing Co., Ltd.
                                 Kuanhsiung  Chen
                                    Kuanhsiung  Chen
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Daniele  Caimi
                                    Daniele  Caimi
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Kangguo  Cheng
                                    Kangguo  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 XIAMEN CHANGELIGHT CO., LTD.
                                    XIAMEN CHANGELIGHT CO., LTD.
                                 Kaixuan  Chen
                                    Kaixuan  Chen
                                 C30 - CRYSTAL GROWTH
                                    C30 - CRYSTAL GROWTH
                                 Intel Corporation
                                    Intel Corporation
                                 Chandra S. Mohapatra
                                    Chandra S. Mohapatra
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Intel Corporation
                                    Intel Corporation
                                 Chandra S. Mohapatra
                                    Chandra S. Mohapatra
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 STC.UNM
                                    STC.UNM
                                 Seung-Chang  Lee
                                    Seung-Chang  Lee
                                 C30 - CRYSTAL GROWTH
                                    C30 - CRYSTAL GROWTH
                                 Intel Corporation
                                    Intel Corporation
                                 ANNALISA  CAPPELLANI
                                    ANNALISA  CAPPELLANI
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 IMEC vzw
                                    IMEC vzw
                                 Bernardette  Kunert
                                    Bernardette  Kunert
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Szu-Lin  Cheng
                                    Szu-Lin  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU)
                                    NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU)
                                 Bjøm-Ove  Fimland
                                    Bjøm-Ove  Fimland
                                 C30 - CRYSTAL GROWTH
                                    C30 - CRYSTAL GROWTH
                                 Applied Materials, Inc.
                                    Applied Materials, Inc.
                                 Swaminathan T. SRINIVASAN
                                    Swaminathan T. SRINIVASAN
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Kangguo  Cheng
                                    Kangguo  Cheng
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Samsung Electronics Co., Ltd.
                                    Samsung Electronics Co., Ltd.
                                 Ryan M. Hatcher
                                    Ryan M. Hatcher
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 TOKYO ELECTRON LIMITED
                                    TOKYO ELECTRON LIMITED
                                 Kandabara N. Tapily
                                    Kandabara N. Tapily
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Josephine B. Chang
                                    Josephine B. Chang
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Taiwan Semiconductor Manufacturing Company, Ltd.
                                    Taiwan Semiconductor Manufacturing Company, Ltd.
                                 Krishna Kumar Bhuwalka
                                    Krishna Kumar Bhuwalka
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Business Machines Corporation
                                    International Business Machines Corporation
                                 Anirban  Basu
                                    Anirban  Basu
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 SEUNG-CHANG  LEE
                                    SEUNG-CHANG  LEE
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Sumitomo Chemical Company, Limited
                                    Sumitomo Chemical Company, Limited
                                 Takenori  OSADA
                                    Takenori  OSADA
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Wisconsin Alumni Research Foundation
                                    Wisconsin Alumni Research Foundation
                                 Thomas F. Kuech
                                    Thomas F. Kuech
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 International Rectifier Corporation
                                    International Rectifier Corporation
                                 Michael A. Briere
                                    Michael A. Briere
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS
                                 Michael A. Briere
                                    Michael A. Briere
                                 H01 - BASIC ELECTRIC ELEMENTS
                                    H01 - BASIC ELECTRIC ELEMENTS