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Handling mask or workpiece
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CPC
H01J2237/31727
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/31727
Handling mask or workpiece
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Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLES MANUFACTURING...
Publication number
20150364292
Publication date
Dec 17, 2015
Canon Kabushiki Kaisha
Tomonori Ishikawa
H01 - BASIC ELECTRIC ELEMENTS